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| Number | Title | Issue Date |
| 8143790 | Method for inductively-driven plasma light source A method for producing light includes introducing an ionizable medium for generating a plasma into a chamber. The method also includes applying at least one pulse of energy to a magnetic core that surrounds a portion of a plasma discharge region within the chamber s... | 03/27/2012 |
| 7701145 | Solid expellant plasma generator An improved solid expellant plasma generator has been developed. The plasma generator includes a support housing, an electrode rod located in the central portion of the housing, and a mass of solid expellant material that surrounds the electrode rod within the suppo... | 04/20/2010 |
| 7368876 | Plasma processing apparatus A low-cost plasma processing apparatus which permits reduction of the cost, as well as reduction of the loss of transmitted power. The plasma processing apparatus 1 has an apparatus main body 2 and auxiliary equipment 3. The auxiliary equipment ... | 05/06/2008 |
| 7211708 | Exhaust processing method, plasma processing method and plasma processing apparatus A chemical-reaction inducing means is provided in an exhaust line connecting a processing space for subjecting a substrate or a film to plasma processing to an exhaust means, and at least either an unreacted gas or byproduct exhausted from the processing space are c... | 05/01/2007 |
| 7199384 | Inductively-driven light source for lithography An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse pow... | 04/03/2007 |
| 7193369 | Method for generating gas plasma A method for generating a plasma. A gas flows along a flow path having the displacement identical to the lines of magnetic force of the main magnetic field, and high frequency alternating current is applied to the gas, thereby generating a gas plasma. For example, a... | 03/20/2007 |
| 7182879 | Plasma processing method A plasma processing method, in which a process gas is introduced into an evacuated process chamber for subjecting the target object to a plasma processing. The plasma processing method is featured in that at least a part of the process gas exhausted from the process... | 02/27/2007 |
| 7183717 | Inductively-driven light source for microscopy An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse pow... | 02/27/2007 |
| 7161455 | Method and arrangement for securing sensors in an electricity meter A current transformer assembly includes a current transformer and an insulation cup. The current transformer has a core and a first coil in a flux inducing relationship with the core. The core includes an opening defining a void configured to receive at least a seco... | 01/09/2007 |
| 7109660 | Plasma processing device and baffle plate thereof A plasma processing device is able to positively enhance a process-gas exhaust efficiency in a processing region and restrict plasma leaking. A processing container of a magnetron type parallel plate plasma processing device has a separator for separating the inside... | 09/19/2006 |
| 7030336 | Method of fixing anodic arc attachments of a multiple arc plasma gun and nozzle device for same An improved anode element for a plasma generator is comprised of an anode body having a central bore therein. A plurality of arc attachment regions are formed along a surface of the central bore. Each attachment is configured to provide a substantially radially pred... | 04/18/2006 |
| 6930441 | Spark checker-spark arc gage An arc gage (30) includes a non-electrically conductive housing (42) and a first electrically conductive pin (44) that is disposed therein. The first pin (44) has a first end (44A) disposed within the housing (42) and a seco... | 08/16/2005 |
| 6919672 | Closed drift ion source A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed ... | 07/19/2005 |
| 6608316 | Ion implantation beam monitor An ion implanter, the total return current between the substrate holder and flight tube is measured. Measuring the total current returned to the flight tube provides a useful indication of the total ion current in the ion beam leaving the flight tube as w... | 08/19/2003 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system A method of removing metal-containing polymeric material and ion implanted or plasma damaged photoresist from a surface using a plasma jet system, by generating radicals having high energy and high density from atmospheric plasma by introducing a reactant... | 03/18/2003 |
| 6420699 | Method and apparatus for altering the velocity of molecules Apparatus for altering translational velocity of molecules in a gas. A source of gas is in fluid communication with a supersonic nozzle. The nozzle is disposed on an arm at a selected distance from an axis for rotation about the axis. The nozzle has an ex... | 07/16/2002 |
| 6087992 | Acoustically driven plasma antenna A plasma antenna with an acoustic modulator is provided. An ionizer produ a plasma in a horizontal tube to form a bounded plasma column extending along a longitudinal axis. An amplitude-, phase- or frequency-modulated signal is applied to an acoustic tra... | 07/11/2000 |
| 4975648 | Discharge ionization detector A discharge ionization detector which comprises with a cylindrical housing wherein is formed a discharge chamber at one end, and wherein is formed an ionization chamber at the other end an aperture connecting the chambers, arc electrodes being located in ... | 12/04/1990 |
| 4968918 | Apparatus for plasma treatment An apparatus for plasma treatment of long continuous materials, typically sheet materials, which comprises a plasma treatment chamber, an electric power introducing member positioned in the central portion of the chamber, a plurality of antenna electrodes... | 11/06/1990 |
| 4886966 | Apparatus for introducing samples into an inductively coupled, plasma source mass spectrometer A sample introducing apparatus for an inductively coupled plasma mass spectrometer comprises a means supplying the inert gas for carrying the vaporized sample, a heater for defining the path through which the inert gas is passed as well as having the inne... | 12/12/1989 |
| 4803405 | Plasma processing apparatus and method The present invention relates to a plasma processing apparatus capable of obtaining a satisfactory plasma arc and a processing method used by this plasma processing apparatus. The plasma processing apparatus is constructed to vary an electric current or a... | 02/07/1989 |
| 4517495 | Multi-electrode plasma source A multi-electrode plasma source for maintaining a plasma loop for heating a stream of sample material traveling along a predetermined path through the loop. Included is at least one set of at least three spaced-apart electrodes having tips circumferential... | 05/14/1985 |
| 4479075 | Capacitatively coupled plasma device A capacitatively coupled plasma device has a plasma tube, an electrode positioned near the tube and means to supply a high voltage, high frequency potential such as a radio frequency to the tube to energize a flow of argon or like gas to form a plasma. A ... | 10/23/1984 |
| 4426597 | Ionized gas generator at very high temperature and very high pressure The present invention relates to an ionized gas generator with supersonic homogeneous flow. This generator comprises unitary modules comprising: two coaxial electrodes of cylindrical form, the downstream electrode being open and having the flow passing thereth... | 01/17/1984 |
| 4355262 | Electric arc apparatus Apparatus for treating a flow of material by an electric arc generates free radicals and/or atoms, and charged species, in ground or excited states. A cathode (13) and an anode (14) are arranged for striking an arc across a preferably annular gap and prov... | 10/19/1982 |
| 4309187 | Metastable energy transfer for analytical luminescence A method and apparatus for analysis of atomic species which comprises directly forming metastable energy level nitrogen by processing a stream of nitrogen containing gas through a dielectric field wherein essentially no excited species above the 6th vibra... | 01/05/1982 |
| 4207499 | Device and method of starting a long radiation source The present invention relates to a method and apparatus for starting and maintaining a long electrical arc in an arc chamber containing a few atmospheres of pressure of an ionizable gas. An electrical potential difference is maintained between two fixed p... | 06/10/1980 |
| 3995189 | Low-disturbance transparent electrode for supersonic flow channel An electrode for a supersonic flow channel comprising a series of spaced bars that define spaced closed grooves with depths equal to the bar depth located transverse to the flow direction is disclosed. The length (in the direction of flow) to depth ratio ... | 11/30/1976 |
