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Class 313/231.31 - Plasma


Subclass of Class 313 - Electric lamp and discharge devices
Definition: Subject matter including means for producing a plasma.
No. of patents: 364
Last issue date: 09/20/2011


1                    
NumberTitleIssue Date
8022607Plasma lamp with small power coupling surface
In an example embodiment, an electrodeless plasma lamp is, provided which comprises a dielectric body having an effective dielectric constant greater than two. The dielectric body may have a surface with a first region coated with an electrically conductive material...
09/20/2011
7911120Source for providing an electron beam of settable power
The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure (1) having an inner surface of a first value (S1) and an extraction gate (2) having a surface of a secon...
03/22/2011
7872406Apparatus and process for generating, accelerating and propagating beams of electrons and plasma
An apparatus and a process for generating, accelerating and propagating beams of electrons and plasma at high density, the apparatus comprising: a first dielectric tube, which contains gas; a hollow cathode, which is connected to said first dielectric tube; a second...
01/18/2011
7710007Conversion of ultra-intense infrared laser energy into relativistic particles
Devices and methods for producing relativistic particles are provided. The devices and methods involve collision of a thin collimated plasma layer from opposite sides with two counter-propagating ultra-intense laser (UL) electromagnetic (EM) pulses. The plasma layer...
05/04/2010
7602111Plasma accelerating apparatus and plasma processing system including secondary electron amplification coating layer formed at inner wall of channel
A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a channel comprising an inner wall, an outer wall spaced apart from the inner wall by a distance for encircling the inner wall, and an end wall connec...
10/13/2009
7518300Method and device for the generation of a plasma through electric discharge in a discharge space
The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosio...
04/14/2009
7459838Plasma display device, TCP applied thereto, and method of manufacturing the TCP
A plasma display device includes a plasma display panel, a chassis base coupled to the plasma display panel, a drive circuit coupled to the chassis base, a flexible printed circuit (FPC) couples the drive circuit to electrodes of the plasma display panel. An integra...
12/02/2008
7453191Induction concentration remote atmospheric pressure plasma generating apparatus
The present invention relates, in general, to an induction concentration remote atmospheric pressure plasma generating apparatus, and more particularly, to an induction concentration remote atmospheric pressure plasma generating apparatus in which induction electrod...
11/18/2008
7435925Plasma arc torch
A plasma torch is provided having a movable member carrying an electrode and movable along a tubular member bore having a nozzle at one end. A piston member engaged with the movable member moves the electrode between inoperable and operable positions within the bore...
10/14/2008
7429818Plasma lamp with bulb and lamp chamber
A dielectric waveguide integrated plasma lamp (DWIPL) with a body comprising at least one dielectric material having a dielectric constant greater than approximately 2, and having a shape and dimensions such that the body resonates in at least one resonant mode when...
09/30/2008
7423864Plasma display device
A plasma display device comprises a plasma display panel, a chassis base for supporting the plasma display panel, and a circuit board assembly mounted on the chassis base with circuit elements for applying electrical signals required for driving the plasma display p...
09/09/2008
7423235Electrode and electrode holder with threaded connection
A threaded connection for an electrode holder and an electrode in a plasma arc torch is provided. The threaded connection has relatively low height, and the engaged portion of a male threaded portion of the electrode and a female threaded portion of the electrode ho...
09/09/2008
7420182Combined radio frequency and hall effect ion source and plasma accelerator system
This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces ...
09/02/2008
7405410Method and apparatus for confining, neutralizing, compressing and accelerating an ion field
An apparatus and method of use for injection, confinement, neutralization, acceleration and compression of an ion field using a solenoid having an axis of symmetry and supported within a vacuum space. A pair of magnetizable elements are positioned initially in space...
07/29/2008
7371992Method for non-contact cleaning of a surface
A flame torch can be used to clean the surface of a contact-sensitive object, such as a glass optic, extremely thin workpiece, or semiconductor wafer by providing a reactive precursor gas to the feed gases of the torch. Reactive atom plasma processing can be used to...
05/13/2008
7372059Plasma-based EUV light source
Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can prod...
05/13/2008
7365349EUV light source collector lifetime improvements
An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas...
04/29/2008
7361918High repetition rate laser produced plasma EUV light source
An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interva...
04/22/2008
7315128Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
A capacitive plasma source for iPVD is immersed in a strong local magnetic field, and maybe a drop-in replacement for an inductively coupled plasma (ICP) source for iPVD. The source includes an annular electrode having a magnet pack behind it that includes a surface...
01/01/2008
7315140Cyclotron with beam phase selector
Disclosed here is a cyclotron having a beam phase selector capable of controlling phase widths of beams and improving beam permeability for increasing beam current. The cyclotron contains an acceleration voltage applying section and a beam blocking section, at least...
01/01/2008
7314600Apparatus for generating ozone
An apparatus and method for generating ozone is provided. An ozone generator comprises a substantially transparent element having ozone-generating means mounted on an inner element area and an outer element area. An enclosure is positioned over the element, and an o...
01/01/2008
7297893Plasma arc collimator design and construction
An improved collimator for a plasma arc torch consists of an annular holder member and an insert member. The insert member includes a tubular stem portion ending in an integrally formed, radially extending face plate. When the stem portion is fitted into the central...
11/20/2007
7294969Two-stage hall effect plasma accelerator including plasma source driven by high-frequency discharge
Disclosed is a high-frequency discharge plasma generation-based two-stage Hall-effect plasma accelerator, which comprises an annular acceleration channel having a gas inlet port, a high-frequency wave supply section, an anode, a cathode, a neutralizing electron gene...
11/13/2007
7291377Plasma display panel
A novel design for dummy ribs in a plasma display panel. The plasma display panel includes upper and lower substrates which are installed to be spaced apart from each other by a predetermined distance and which contain therebetween a plurality of barrier ribs and di...
11/06/2007
7288880High-luminance gas discharge tube with diaphragm elements within discharge path
In a gas discharge tube, a first discharge path-induction portion is arranged between a first discharge path-limit portion and a second discharge path-limit portion. A voltage is applied to the first discharge path-induction portion from the outside. As a result, an...
10/30/2007
7276140Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same
A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a circular channel comprising an inner wall, an outer wall, and an end wall connected to an end of the inner wall and the outer wall to form an outlet...
10/02/2007
7276847Cathode assembly for indirectly heated cathode ion source
A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the ...
10/02/2007
7262555Method and system for discretely controllable plasma processing
A method and system for plasma generation and processing includes a plurality of beam generators each locally controllable and configured for operation upon a single substrate. A control circuit couples to each of the plurality of beam generators with the control ci...
08/28/2007
7259378Closed drift ion source
A closed drift ion source which includes a channel having an open end, a closed end, and an input port for an ionizable gas. A first magnetic pole is disposed on the open end of the channel and extends therefrom in a first direction. A second magnetic pole disposed ...
08/21/2007
7247992Ion accelerator arrangement
For an ion accelerator system having a special magnetic field structure with an alternating predominantly longitudinal and crosswise progression of the magnetic field, a geometry of the ionization chamber having a non-cylindrical shape of the chamber wall that is ad...
07/24/2007
7232552Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus
The apparatus for decomposing PFCs includes an external electrode unit which is coupled to a reference voltage and which defines a flow space for the flow of the PFCs, and an internal electrode unit which is located within the flow space of the external electrode un...
06/19/2007
7233100Lighting apparatus using microwave
A lighting apparatus using microwave comprises: a waveguide for transmitting microwave generated in a magnetron; a mesh screen installed on an outlet portion of the waveguide for blocking a leakage of the microwave and passing light; a bulb located in the mesh scree...
06/19/2007
7220670Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same
A method for depositing a rough polysilicon film on a substrate is disclosed. The method includes introducing the reactant gases argon and silane into a deposition chamber and enabling and disabling a plasma at various times during the deposition process. ...
05/22/2007
7199328Apparatus and method for plasma processing
A plasma processing system including a process chamber, a substrate holder provided within the process chamber, and a gas injection system configured to supply a first gas and a second gas to the process chamber. The system includes a controller that controls the ga...
04/03/2007
7193174Method and apparatus for alignment of components of a plasma arc torch
A coolant tube and electrode are adapted to mate with each other to align the tube relative to the electrode during operation of the torch. Improved alignment ensures an adequate flow of coolant along an interior surface of the electrode. In one aspect, an elongated...
03/20/2007
7183564Channel spark source for generating a stable focused electron beam
In a channel spark source triggered by gas discharge for generating a stable focused electron beam, a gas supply for a hollow cathode thereof is provided which generates in the hollow cathode a pressure differential so that the multiplication of charge carriers in a...
02/27/2007
7166233Pulsed plasma processing method and apparatus
In a method for performing a plasma-assisted treatment on a substrate in a reactor chamber by: introducing at least one process gas into the reactor chamber; and creating a plasma within the reactor chamber by establishing an RF electromagnetic field within the cham...
01/23/2007
7164227Hall effect thruster with anode having magnetic field barrier
An efficiency enhancing anode-magnetic structure of a Hall effect thruster produces a radially directed magnetic field between inner and outer poles at the exit portion of a gas distribution channel. The field-shaping structure includes magnetic material extending a...
01/16/2007
7159536Device and method for generating a local by micro-structure electrode dis-charges with microwaves
Device for producing a plasma, in particular for treating surfaces, for chemically reacting gases, or for producing light, by way of microstructure electrode discharges, using a device for producing plasma having at least one guide structure. A microwave generator w...
01/09/2007
7156046Plasma CVD apparatus
A plasma CVD apparatus in which microwave power is supplied into a reaction chamber provided inside an annular waveguide through an antenna provided on the inner peripheral part of the waveguide to produce a plasma inside the reaction chamber and to form a film by a...
01/02/2007
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