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| Number | Title | Issue Date |
| 8169124 | Physical/biochemical sensor using piezoelectric microcantilever and manufacturing method thereof The present invention discloses a physical/biochemical sensor using a multisized piezoelectric microcantilever resonator array which enables to quantitatively and simultaneously analyze a mass loading effect and a surface stress change effect and a manufacturing met... | 05/01/2012 |
| 7999442 | Piezoelectric actuator and electronics device using the same To provide a piezoelectric actuator that is small in size, large in displacement, high in rigidity, excellent in controllability, and excellent in stability, the present invention provides a piezoelectric actuator, including: a first piezoelectric member that is ben... | 08/16/2011 |
| 7952259 | Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two ele... | 05/31/2011 |
| 7939994 | Micromechanical actuators comprising semiconductors on a group III nitride basis A semiconductor actuator includes a substrate base, a bending structure which is connected to the substrate base and can be deflected at least partially relative to the substrate base. The bending structure has semiconductor compounds on the basis of nitrides of mai... | 05/10/2011 |
| 7923903 | Inorganic film base plate, process for producing the same, piezoelectric device, ink jet type recording head, and ink jet type recording apparatus An inorganic film base plate is produced with a process comprising the steps of: preparing a surface recess-protrusion base plate, which is provided with a recess-protrusion pattern on a surface, and forming an inorganic film along a surface shape of the surface rec... | 04/12/2011 |
| 7919904 | Method for producing piezoelectric actuator, method for producing liquid droplet jetting apparatus, piezoelectric actuator, and liquid droplet jetting apparatus A film-forming nozzle is moved so that a boundary portion of a plurality of areas on which a piezoelectric material layer is formed by a film-forming nozzle moving relative to a vibration plate is positioned outside deformable portions of the vibration plate and ove... | 04/05/2011 |
| 7880367 | MEMS sensor The MEMS sensor includes a substrate, a lower thin film, opposed to a surface of the substrate at an interval, having a plurality of lower through-holes formed to pass through the lower thin film in the thickness direction thereof, an upper thin film, opposed to the... | 02/01/2011 |
| 7830068 | Actuator and electronic hardware using the same An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substra... | 11/09/2010 |
| 7745975 | Piezoelectric thin film resonator, piezoelectric thin film resonator filter and manufacturing method thereof A piezoelectric thin film resonator includes: a piezoelectric thin film; a laminated structure which includes a first metal electrode film and a second metal electrode film that interpose at least a part of the piezoelectric thin film, and which is formed on a subst... | 06/29/2010 |
| 7732990 | Piezoelectric driven MEMS device A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and ... | 06/08/2010 |
| 7732991 | Self-poling piezoelectric MEMs device A self-poling piezoelectric based MEMS device is configured for piezoelectric actuation in response to application of a device operating voltage. The MEMS device comprises a beam, a first electrode disposed on the beam, a layer of piezoelectric material having a sel... | 06/08/2010 |
| 7633213 | Actuator, switch using the actuator, and method of controlling the actuator An actuator includes a base, an arm having an elastic property and supported by the base, electrostatic-driving electrodes provided on the base and the arm, respectively, and a piezoelectric-driving layer. The piezoelectric-driving layer includes a first electrode l... | 12/15/2009 |
| 7605965 | Optical deflector An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supportin... | 10/20/2009 |
| 7518289 | Actuator An actuator, comprising at least one beam capable of generating flexural oscillations, at least one pair of electric supply terminals (23, 24) which supply oscillation-inducing electric power to the beam(s), and a holding mechanism which holds the beam(s), th... | 04/14/2009 |
| 7482734 | Piezoelectric/electrostrictive device and method of driving piezoelectric/electrostrictive device A piezoelectric/electrostrictive device is provided, including a rotor substantially in the form of a rectangular parallelepiped. The rotor has a pair of opposed surfaces, a first movable section fixed to a first end of one of the surfaces, a first piezoelectric/ele... | 01/27/2009 |
| 7449817 | Actuator and method of manufacturing actuator module An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is hi... | 11/11/2008 |
| 7449818 | Actuator and method of manufacturing actuator module An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is hi... | 11/11/2008 |
| 7443076 | Diffractive thin-film piezoelectric light modulator and method of fabricating the same Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when etching, thus increasing the surface smoothness of the lower support an... | 10/28/2008 |
| 7443078 | Piezo action applied This invention expands functions possible with electric equipment using charge contorting Piezo technology. We replace engines and motors with Piezo units. These power electric vehicles using nudging by Piezo strips to turn shafts or axles holding propellers or whee... | 10/28/2008 |
| 7427819 | Film-bulk acoustic wave resonator with motion plate and method An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode... | 09/23/2008 |
| 7425790 | Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive device, and method of piezoelectric/electrostrictive device There is disclosed a piezoelectric/electrostrictive porcelain composition capable of manufacturing, at a comparatively low sintering temperature, a piezoelectric/electrostrictive body which is dense and superior in crystallinity and which has satisfactory piezoelect... | 09/16/2008 |
| 7420320 | Piezoelectric thin film device and method for manufacturing the same A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous me... | 09/02/2008 |
| 7397166 | Electroactive polymer-actuated peristaltic pump and medical lead incorporating such a pump A peristaltic pump for conveying a fluid comprises a flexible tube having an outer surface and a lumen for carrying the fluid such as a therapeutic agent. The tube has a length defined by opposed ends of the tube, the outer surface of the body carrying a plurality o... | 07/08/2008 |
| 7394181 | Hybrid eletromechanical actuator and actuation system A hybrid electromechanical actuator has two different types of electromechanical elements, one that expands in a transverse direction when electric power is applied thereto and one that contracts in a transverse direction when electric power is applied thereto. The ... | 07/01/2008 |
| 7388319 | Forming piezoelectric actuators Microelectromechanical systems with structures having piezoelectric actuators are described. The structures each have a body that supports piezoelectric islands. The piezoelectric islands have a first surface and a second opposite surface. The piezoelectric islands ... | 06/17/2008 |
| 7378778 | Piezoelectric/electrostrictive device and method of producing the same A piezoelectric/electrostrictive device includes a base 11 having a pair of movable parts 11a, 11b opposing each other and a connecting part 11c that connects movable parts 11a, 11b with ea... | 05/27/2008 |
| 7370664 | Flow control device A flow control device having a control member for forming a seal with another part of the flow control device. The control member having a base material and a portion or surface that is a softer or more deformable than the base material or the portion of the control... | 05/13/2008 |
| 7367119 | Method for forming a reinforced tip for a probe storage device Systems and methods in accordance with the present invention can include a tip contactable with a media. In an embodiment, the tip comprises a substantially hollow structure formed of a metal. The tip can be formed by depositing a first metal layer over silicon ther... | 05/06/2008 |
| 7368860 | High performance piezoelectric actuator A high performance piezoelectric actuator. The actuator includes a piezoelectric material exhibiting a selectively tapered width sufficient to enhance actuator fracture load capabilities. A passive material is disposed on or integrated with the piezoelectric materia... | 05/06/2008 |
| 7358647 | Piezoelectric/electrostrictive device A piezoelectric/electrostrictive including a pair of mutually opposing vibration plates, each having a first portion and a second portion, a fixation section joined to the first portion of each of the vibration plates, and at least one piezoelectric/electrostrictive... | 04/15/2008 |
| 7355325 | Wide frequency range electromechanical actuator An electromechanical motor (1), using at least two bimorph, monomorph or multimorph electromechanical actuating elements (6) interconnected by a common actuator backbone (5) is disclosed. The actuating elements (6) are controllable in bot... | 04/08/2008 |
| 7345405 | Piezoelectric/electrostrictive device and method of manufacturing same The present invention provides a piezoelectric/electrostrictive device including a pair of thin plate sections in an opposed relation to each other, a fixing section for supporting the thin plate sections, and at least one pair of piezoelectric/electrostrictive elem... | 03/18/2008 |
| 7336021 | Piezoelectric/electrostrictive device and method of manufacturing same A piezoelectric/electrostrictive (P/E) device includes at least one actuator section secured to thin plate sections with an adhesive. The actuator section includes a multilayered member including at least three actuator films, each of which include a P/E layer and e... | 02/26/2008 |
| 7336524 | Atomic probes and media for high density data storage A device in accordance with embodiments of the present invention comprises a contact probe for high density data storage reading, writing, erasing, or rewriting. In one embodiment, the contact probe can include a silicon core having a conductive coating. Contact pro... | 02/26/2008 |
| 7336022 | Piezoelectrical bending converter Piezoelectrical bending converter with at least one monolithic layered composite, includes a piezoelectric-active ceramic layer with a lateral dimension change which may be generated by application of an electrical field and at least one further piezoelectric-active... | 02/26/2008 |
| 7332850 | Microfabricated ultrasonic transducers with curvature and method for making the same The present invention provides a microfabricated ultrasonic transducers with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, ... | 02/19/2008 |
| 7332849 | Method and transducers for dynamic testing of structures and materials A transducer for dynamic testing of specimen is disclosed. The transducer comprises at least two equally-spaced actuators, and a supporting block for supporting the at least two equally-spaced actuators and for mounting the transducer to the specimen. Each of the at... | 02/19/2008 |
| 7323632 | Percussion transducer A ring-shaped percussion transducer for converting a striking impact into a representative electrical pulse triggering signal is suitable for mounting on the center axis of a percussion instrument. In a preferred embodiment, the transducer is formed of a piezo elect... | 01/29/2008 |
| 7322376 | Piezoelectric valve A piezoelectric valve has a flexural transducer accommodated in a valve housing and having a free ending cantilever operational section able to be deflected by electrical control. The operational section extends over two controlled valve openings lying on the same s... | 01/29/2008 |
| 7313854 | Method of manufacturing a tactile sensor A method of manufacturing a tactile sensor, which is capable of implementing a wide range of senses, including sensing contact pressure (vertical force and horizontal force) with an external object and heat caused by the contact pressure, comprises forming a side bl... | 01/01/2008 |
