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Class 310/324 - Diaphragm


Subclass of Class 310 - Electrical generator or motor structure
Definition: Subject matter in which the resonant structure is a diaphragm
No. of patents: 683
Last issue date: 04/03/2012


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NumberTitleIssue Date
6710681Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same
An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor ...
03/23/2004
6705708Piezoelectric thin-film element, ink-jet head using the same, and method for manufacture thereof
A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm 30 (31, 32) on a substrate 20 (S1); a step of forming a bottom electrode 33 on the diaphragm 30 (S2); a step of fo...
03/16/2004
6662419Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss
A method for forming film bulk acoustic resonator devices includes depositing a first portion of a first electrode, and a piezoelectric layer onto the substrate. The method includes removing a portion of the substrate under the piezoelectric layer and und...
12/16/2003
6657364Piezoelectric/electrostrictive device
A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections made of metal and a fixation section for supporting the thin plate sections. One or more piezoelectric/electrostrictive elements are arranged on at least one ...
12/02/2003
6657363Thin film piezoelectric resonator
The layer of the cover electrode, or an additional layer on the cover electrode is formed with holes, preferably produced lithographically, or similar structures. The structures have a mean spacing from one another which is smaller than the wavelength for...
12/02/2003
6657365Hybrid piezo-film continuous line and discrete element arrays
This present invention provides an array formed by a continous line array of piezoelectric film with discrete points of increased sensitivity to sense and measure acoustic signals. The configuration provided by the present invention simultaneously provide...
12/02/2003
6655001Process for a diaphragm for electroacoustic transducers
A diaphragm for an electroacoustic transducer has a) a core layer containing poly(meth)acrylimide foam and b) at least one cover layer. The diaphragm is produced by laminating the cover layer with the core layer, using a pressure of 0.4 MPa and a temperat...
12/02/2003
6638627Method for electrostatic force bonding and a system thereof
A method for electrostatic bonding includes placing a first region of a first unit at least adjacent to a first region of a second unit. The first region of the first unit has trapped charge. A bond between the first region of the first unit and the first...
10/28/2003
6622559Acceleration sensor
An acceleration sensor comprises a fixed case member and a cover assembly collectively defining a closed space in which the oscillation plate and the piezoelectric element received therein. The oscillation plate and the piezoelectric element are oscillata...
09/23/2003
6617751Film bulk acoustic resonator and method for fabrication thereof
The present invention provides a robust FBAR device and a simplified method of fabricating a FBAR device. FBAR device according to the present invention includes a membrane supporting layer between a substrate and a membrane layer, surrounding an air gap ...
09/09/2003
6617765Underwater broadband acoustic transducer
An underwater acoustic transducer configured to emit a low-frequency broadband acoustic signal. The underwater acoustic transducer includes a cap in the form of a cylinder closed on one side and open on the other side. A piezoelectric plate operating in f...
09/09/2003
6606772Method for manufacturing piezoelectric oscillator
A method is provided for fabricating a piezoelectric vibrator without degrading vibration characteristics. The piezoelectric vibrator has a vibration plate formed with a piezoelectric vibration portion and a frame portion integrally connected with a base ...
08/19/2003
6608427High-sensitivity flexible ceramic sensor
Disclosed is a high-sensitivity flexible ceramic sensor for detecting mechanical shocks and vibrations, which comprises a metal foil of a specified thickness as a substrate, a single-crystalline thin film of a piezoelectric ceramic material such as alumin...
08/19/2003
6593680Ultrasonic wave transmitter/receiver
An ultrasonic wave transmitter/receiver is provided in which the transmission/reception range thereof in at least one direction is relatively narrow, and which has stable reverberation characteristics. When the thickness of a thick-walled portion is t1, t...
07/15/2003
6586861Film bulk acoustic wave device
There is provided a film bulk acoustic wave device comprising: a silicon substrate 1, a dielectric film 21 including a silicon nitride 16 formed on the substrate 1 and a silicon oxide 2 on the silicon nitride 16, a bottom electrode 3 formed on the dielect...
07/01/2003
6584708Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof
The present invention relates to a membraneless piezoelectric/electrostrictive microactuator comprising: a chamber; a chamber plate in which the chamber is formed; a lower electrode formed on the chamber plate and covering the chamber; a bonding layer for...
07/01/2003
6577043Piezoelectric resonator and electronic device incorporating the same
A highly compact piezoelectric resonator having excellent resonant characteristics and very small resonant resistance includes an upper electrode disposed on one of two main surfaces of a piezoelectric film and a lower electrode disposed on the other main...
06/10/2003
6570299Piezoelectric electroacoustic transducer and manufacturing method of the same
A piezoelectric electroacoustic transducer includes a substantially square piezoelectric diaphragm flexually vibrating in a plate-thickness direction in response to application of an alternating signal between electrodes, a substantially rectangular insul...
05/27/2003
6555946Acoustic wave device and process for forming the same
High quality epitaxial layers of piezoelectric material materials can be grown overlying large silicon wafers by first growing an accommodating buffer layer on a silicon wafer. The accommodating buffer layer is a layer of monocrystalline oxide spaced apar...
04/29/2003
6556103Piezoelectric resonator with electrode radius related to resonator thickness and vibration mode, and filter using the same
A piezoelectric resonator using an nth -order mode of a thickness longitudinal vibration or a thickness-shear vibration includes a vibrating section having a piezoelectric layer, a pair of electrodes and a support member for holding the vibrati...
04/29/2003
6548937Array of membrane ultrasound transducers
The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ens...
04/15/2003
6541895Piezoelectric/electrostrictive film element
A lower electrode on a substrate is continuously formed from one thick portion at the periphery to a thin diaphragm portion. An auxiliary electrode is continuously formed from a position of the thin diaphragm portion independent of the lower electrode to ...
04/01/2003
6538362Piezoelectric/electrostrictive device and method of manufacturing same
A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arrang...
03/25/2003
6515402Array of ultrasound transducers
The invention relates to an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) whi...
02/04/2003
6509813Bulk acoustic wave resonator with a conductive mirror
A method of fabricating a bulk acoustic wave (BAW) resonator and a BAW resonator so fabricated, the method including the steps of: providing a substrate; providing a first isolation structure; and providing a resonator section including a piezolayer; wher...
01/21/2003
6504289Piezeoelectric transducer having protuberances for transmitting acoustic energy and method of making the same
A method of forming an ultrasound transducer having thermoformed protuberances comprises providing a substrate having a plurality of perforations of a given dimension. The perforations or apertures are formed in the substrate and operate to determine the ...
01/07/2003
6504286Piezoelectric transducer
A miniature piezoelectric transducer element is provided, comprising: (a) a cell element having a cavity; (b) a flexible piezoelectric layer attached to the cell member, the piezoelectric layer having an external surface and an internal surface, the piezo...
01/07/2003
6495945Piezoelectric/electrostrictive element
A ceramic substrate 1 comprises a thin diaphragm portion 3 and a thick portion 2. A lower electrode 4 is formed on the ceramic substrate and is spaced apart from an auxiliary electrode 8, also formed on the ceramic substrate. A bonding layer 7C comprises ...
12/17/2002
6492761Digital piezoelectric transducers and methods
A digitally driven piezoelectric transducer uses a flat piezoelectric element having a plurality of electrically isolated conductive sections coupled to one side of said piezoelectric element and a conductive ground plate coupled to another side of said p...
12/10/2002
6490911Sensor device with fluid introduction holes
A sensor device includes a base body 12 having a vibrating portion 14, a piezoelectric element 20 fixed onto one surface of the vibrating portion 14 and having a piezoelectric film 22 and a pair of electrodes 24a, 24b which are in contact with the piezoel...
12/10/2002
6486751Increased bandwidth thin film resonator having a columnar structure
Improved bandwidths and oscillation uniformity is obtained through a rod type BAW TFR structure formed over a semiconductor support. The resonator includes a first and a second electrode and a plurality of distinct elemental piezoelectric structures betwe...
11/26/2002
6476336Current controlling element
An actuator having a fixed portion, a vibrating portion supported on the fixed portion so as to undergo vibrations, and an actuating portion including a first and a second electrodes formed on both sides or one side of a deformable layer is provided. The ...
11/05/2002
6476540Ceramic element, method for producing ceramic element, display device, relay device, and capacitor
A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the ...
11/05/2002
6472797Piezoelectric electro-acoustic transducer
A piezoelectric electro-acoustic transducer is constructed such that adherence of a piezoelectric diaphragm to a casing is easily performed, a sufficient supporting strength is achieved, and the piezoelectric diaphragm is supported while hindrance of vibr...
10/29/2002
6472798Piezoelectric acoustic components
A piezoelectric acoustic component having excellent efficiencies of productivity and of acoustic conversion, a greatly miniaturized size, and excellent impact resistance properties, includes a unimorph type diaphragm. The unimorph type diaphragm is define...
10/29/2002
6465935Ultrasonic transducer
An ultrasonic transducer having a pot-like casing has an outer bottom face which is designed in part as a vibrating diaphragm. A stabilizing ring is arranged on the outside of the wall of the pot-like casing, imparting a greater rigidity to the casing and...
10/15/2002
6463157Bone conduction speaker and microphone
A bone conduction microphone and speaker mountable in contact with a user's head or head area, each utilize a strategically mounted audio transducer that is preferably a piezoelectric ceramic bender. In the case of the speaker, the bender is coupled to an...
10/08/2002
6455980Resonator with preferred oscillation mode
A resonator with mechanical node reinforcement includes a substrate, an intermediate portion adjacent to the substrate, and a resonant portion adjacent to the intermediate portion. The intermediate portion may include multiple layers, such as an insulatin...
09/24/2002
6455981Piezoelectric/electrostrictive device and method of manufacturing same
The present invention provides a piezo-electric/electrostrictive device including a pair of thin plate sections 12a and 12b in an opposed relation to each other, a fixing section 14 for supporting the thin plate sections 12a and 12b, and piezo-electric/el...
09/24/2002
6448691Piezoelectric/electrostrictive device and method of manufacturing same
A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements...
09/10/2002
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