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| Number | Title | Issue Date |
| 8148876 | Piezoelectric actuator and electronic apparatus Piezoelectric actuator (51) includes a piezoelectric element (11) that performs expansion/contraction movement in accordance with the state of an electrical field, a base (21) with the piezoelectric element (11) adhered to one surface the... | 04/03/2012 |
| 8110963 | Ultrasonic transducer, ultrasonic transducer array, and ultrasonic device An ultrasonic transducer is configured to transmit or receive ultrasonic waves. The ultrasonic transducer includes a vibrating member and a piezoelectric member coupled to the vibrating member. The piezoelectric member includes a first piezoelectric part configured ... | 02/07/2012 |
| 8089198 | Piezoelectric loudspeaker A full range loudspeaker, comprising a frame with a membrane secured onto said frame and a piezoelectric actuator attached on said membrane and able to be driven over the full audible frequency range. ... | 01/03/2012 |
| 8058774 | Vibrating plate piezoelectric generator A piezoelectric generator that includes a piezoelectric element having first and second surfaces on which a first electrode and a second electrode are disposed. A vibrating plate is bonded to the piezoelectric element such that the first surface is adjacent thereto.... | 11/15/2011 |
| 8053950 | Ultrasonic sensor and method for the manufacture of an ultrasonic sensor An ultrasonic sensor with a cylinder-shaped housing whose base forms a diaphragm of the ultrasonic sensor. The diaphragm is manufactured as an independent component and directly mounted in the cylinder-shaped housing. A method for manufacturing the ultrasonic sensor... | 11/08/2011 |
| 8053951 | Thin film piezoelectric actuators A MEMS device with a thin piezoelectric actuator is described. A substrate with a first surface has a crystalline orientation prompting layer on the first surface. A piezoelectric portion contacts the crystalline orientation prompting layer and has an orientation co... | 11/08/2011 |
| 8040020 | Encapsulated active transducer and method of fabricating the same A micro-electromechanical systems (MEMS) ultrasonic transducer device includes a substrate defining an opening and an active transducer having multiple of active layers stacked over the opening of the substrate. The active transducer is completely encapsulated by mu... | 10/18/2011 |
| 7999440 | Micro-fabricated devices having a suspended membrane or plate structure The invention relates to micro-fabricated devices having a suspended membrane or plate structure and micro-fabrication techniques for making such devices. A substrate defines a cavity passing through the substrate, and the cavity defines a first opening. An intermed... | 08/16/2011 |
| 7990022 | High-performance electroactive polymer transducers Transducers employing electroactive polymer films are disclosed. Such transducers include an open frame and at least two layers extending within the frame, where the layers form a concave shape. ... | 08/02/2011 |
| 7986075 | Film bulk acoustic wave resonator, its fabrication method and film bulk acoustic wave resonator filter using the resonator The film bulk acoustic wave resonator includes a laminate structure composed of a piezoelectric layer, and first and second electrode layers interposing at least part of the piezoelectric layer, in which the first metal electrode is dispersively formed on an electro... | 07/26/2011 |
| 7939991 | Piezoelectric gas ejecting device A piezoelectric gas jet generator includes a piezoelectric vibrator and upper and lower volume-varying chambers formed above and below the piezoelectric vibrator. In order to effectively use the movement of air supplied with the vibration of the piezoelectric vibrat... | 05/10/2011 |
| 7911113 | Piezoelectric/electrostrictive element and method of manufacturing piezoelectric/electrostrictive element A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer el... | 03/22/2011 |
| 7888843 | Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein A micro-electromechanical resonator self-compensates for process-induced dimensional variations by using a resonator body having a plurality of perforations therein. These perforations may be spaced along a longitudinal axis of the resonator body, which extends orth... | 02/15/2011 |
| 7888842 | Ultra-thin film electrodes and protective layer for high temperature device applications An ultra-thin film electrode including at least one electrically conductive layer disposed upon an adhesive layer that is carried by a substrate. ... | 02/15/2011 |
| 7888844 | Temperature control of micromachined transducers A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity. ... | 02/15/2011 |
| 7884529 | Diaphragm membrane and supporting structure responsive to environmental conditions An acoustic transducer is disclosed that is capable of converting mechanical motion into acoustical energy may include a diaphragm and a support on one portion of the diaphragm. An actuator may then be provided that is operatively coupled to a second portion of the ... | 02/08/2011 |
| 7876023 | Piezoelectric/electrostrictive membrane sensor Disclosed is a piezoelectric/electrostrictive membrane sensor wherein the main component of terminal electrodes is contained in the vicinity of the surface of a piezoelectric/electrostrictive body. The membrane sensor is hardly electrostatically charged and thus pre... | 01/25/2011 |
| RE42009 | Piezoelectric resonator having a spurious component control layer, filter using the piezoelectric resonator, and duplexer using the piezoelectric resonator A piezoelectric resonator of the present invention is structured such that on a substrate 5 having a cavity 4 formed therein, a lower electrode 3, a piezoelectric body 1, a spurious component control layer 16, and an upper electrod... | 12/28/2010 |
| 7812506 | Piezoelectric/electrostrictive membrane type measuring device A piezoelectric/electrostrictive membrane type sensor is provided with a ceramic base body and a piezoelectric/electrostrictive element. The ceramic base body includes a thin diaphragm portion, a thick portion and a cavity formed by the portions. The piezoelectric/e... | 10/12/2010 |
| RE41813 | Piezoelectric thin-film resonator and filter using the same A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps wit... | 10/12/2010 |
| 7812505 | Piezoelectric microspeaker using microelectromechanical systems and method of manufacturing the same A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on on... | 10/12/2010 |
| 7804225 | Droplet discharging head, image forming apparatus, and film forming apparatus A droplet discharging head, includes a diaphragm, a fixing plate, and a piezoelectric element. The piezoelectric element includes a first electrode, a second electrode, a piezoelectric body layer interposed between the first and second electrodes, a first internal e... | 09/28/2010 |
| 7755253 | Piezoelectric element and shape of an elecrode thereof A piezoelectric/electrostrictive film element includes a substrate, a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. The substrate has a thin-walled diaphragm portion, and a thick portion formed around the thin-walled diaphragm porti... | 07/13/2010 |
| 7732984 | Piezoelectric actuator, method of manufacturing piezoelectric actuator, and liquid ejection head The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering... | 06/08/2010 |
| 7714480 | Piezoelectric/electrostrictive membrane sensor A piezoelectric/electrostrictive membrane sensor is provided, wherein a piezoelectric/electrostrictive body contains an alkali metal or an alkaline earth metal, and a sulfide and the main component of terminal electrodes are contained near the surface of the piezoel... | 05/11/2010 |
| 7679267 | High-performance electroactive polymer transducers A transducer employing at least two electroactive polymer layers stretched to join each central portion of the electroactive polymer layers to each form a concave shape wherein the central portions of the electroactive polymer layers actuate in at least two componen... | 03/16/2010 |
| 7656071 | Piezoelectric actuator for tunable electronic components An actuating assembly for tuning a circuit and a process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The actuating assembly comprises a membrane overlying a circuit to be tuned, a conductive e... | 02/02/2010 |
| 7622846 | Bulk acoustic wave resonator, filter and duplexer and methods of making same A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one embodiment, the cavity walls are substantially perpendicular to the ... | 11/24/2009 |
| 7612485 | Ultrasonic sensor An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor includes: an acoustic matching layer having a first surface and a second surface, the first surface w... | 11/03/2009 |
| 7608983 | Piezoelectric actuator, liquid transporting apparatus, and liquid-droplet jetting apparatus A piezoelectric actuator includes a piezoelectric layer, a vibration plate, a supporting member which has an relief portion. A thin wall portion is provided in a first area, of one of the piezoelectric layer and vibration plate, facing one end portion in a longitudi... | 10/27/2009 |
| 7602105 | Piezoelectrically actuated ultrananocrystalline diamond tip array integrated with ferroelectric or phase change media for high-density memory A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure that features an integrated large density array of nanotips made... | 10/13/2009 |
| 7595580 | Electroactive polymer actuated devices Devices employing electroactive polymer actuators are disclosed. The devices include pumps, valves, cameras (where electroactive polymer actuators control either one or both of zoom and focus), vibrators (for inclusion in cell phones, game console controls, etc.) an... | 09/29/2009 |
| 7579753 | Transducers with annular contacts An electronic device and transducer structures are described. ... | 08/25/2009 |
| 7560853 | Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same A thin film piezoelectric resonator includes: a substrate having a cavity; a first dielectric layer provided on the substrate to cover the cavity; a second dielectric layer provided on the substrate and disposed in a peripheral region of the cavity, and having a thi... | 07/14/2009 |
| 7550899 | Piezoelectric electroacoustic transducing device In order to improve the sound pressure level and the sound quality of a piezoelectric electroacoustic transducing device without impairing the size, the productivity, the cost, and the like of the device, the piezoelectric electroacoustic transducing device 1... | 06/23/2009 |
| 7531943 | Acoustic resonator and filter The area of an opening C of a cavity is equal to or greater than the area of a horizontal cross section D of a vibrating section. The vibrating section is placed on a support section at a position such that a vertical projection of the vibrating section onto a subst... | 05/12/2009 |
| 7498718 | Stacked piezoelectric diaphragm members A diaphragm assembly (20) comprises at least two piezoelectric diaphragm members (22) arranged in a stacking direction (23). An interface layer (24) is situated between adjacent piezoelectric diaphragm members (22). The interface l... | 03/03/2009 |
| 7482733 | Piezoactuator The invention relates to a piezoactuator for miniaturized pumps, atomizers, valves or the like. The piezoactuator comprises a piezoceramic disk (1) and a pressure disk (2) coupled to the piezoceramic disk. Said pressure disk is linked on its rim (18... | 01/27/2009 |
| 7466064 | Ultrasonic element An ultrasonic element has a membrane formed as a thin walled portion of a substrate, on which a piezoelectric vibrator is formed. The piezoelectric vibrator comprises a piezoelectric thin film and metal electrode films, which are formed into a sandwiched structure. ... | 12/16/2008 |
| 7456548 | Piezoelectric element, piezoelectric actuator, and ink jet recording head A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with the piezoelectric film on a substrate, wherein the piezoelectric film has a structure in which a lead-containing piezoelectric film and a lead-free piezoelectric fil... | 11/25/2008 |
