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| Number | Title | Issue Date |
| 8110962 | MEMS component and method for production A MEMS component includes a chip that has a rear side having a low roughness of less than one tenth of the wavelength at the center frequency of an acoustic wave propagating in the component. Metallic structures for scattering bulk acoustic waves are provided on the... | 02/07/2012 |
| 8084919 | Piezoelectric thin-film resonator, filter using the same, and duplexer using the same A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, the lower electrode and the upper electrode opposing eac... | 12/27/2011 |
| 8030823 | Protected resonator A bulk acoustic wave resonator structure that isolates the core resonator from both environmental effects and aging effects. The structure has a piezoelectric layer at least partially disposed between two electrodes. The structure is protected against contamination,... | 10/04/2011 |
| 7977850 | Bulk acoustic wave device with a semiconductor layer A bulk acoustic wave device includes a first electrode, a second electrode, a piezoelectric layer arranged between the first and second electrodes and a semiconductor layer arranged between the first and second electrodes. The semiconductor layer is electrically iso... | 07/12/2011 |
| 7952257 | Piezoelectric thin-film resonator There is provided a piezoelectric thin-film resonator including a substrate, a lower electrode disposed on the substrate, a piezoelectric film disposed on the lower electrode, an upper electrode disposed on the piezoelectric film in such a manner that a portion of t... | 05/31/2011 |
| 7939990 | Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations Micro-electromechanical acoustic resonators include a resonator body suspended over a substrate. The resonator body may have a single perforation therein, which may extend substantially or completely therethrough. The resonator body may also be configured to have a ... | 05/10/2011 |
| 7902721 | Crystal resonator A crystal resonator comprises an AT-cut crystal vibrating element that is driven by a thickness-shear mode and is in the shape of a rectangular plate. A pair of excitation electrodes is formed, facing front and rear surfaces of the crystal vibrating element. Each of... | 03/08/2011 |
| 7884527 | Piezoelectric thin-film resonator and filter using the same A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an upper electrode that is formed on the piezoelectric film, with the piez... | 02/08/2011 |
| 7868519 | Piezoelectric resonator including an acoustic reflector portion A piezoelectric resonator that achieves stable quality and improved resonance characteristics includes an acoustic reflector portion disposed between a substrate and a vibration portion, which includes a piezoelectric thin film sandwiched between a pair of electrode... | 01/11/2011 |
| 7851970 | Structures for crystal packaging including flexible membranes A crystal oscillator is mounted in a flexible harness rather than at discrete points. The crystal oscillator and associated control circuitry may be formed on a common substrate, decreasing component size and minimizing temperature fluctuations by shortening the the... | 12/14/2010 |
| 7851971 | Low frequency quartz based MEMS resonators and method of fabricating the same A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz w... | 12/14/2010 |
| 7843113 | Ink jet device having piezoelectric actuator with insulating structure and method of producing the piezoelectric actuator A piezoelectric actuator having a bottom electrode attached to a membrane, a piezoelectric layer on the bottom electrode, and a top electrode formed on the piezoelectric layer, wherein the bottom electrode extends substantially over the entire bottom surface of the ... | 11/30/2010 |
| 7795781 | Bulk acoustic wave resonator with reduced energy loss According to an exemplary embodiment, a bulk acoustic wave (BAW) resonator includes a piezoelectric layer having a disrupted texture region, where the disrupted texture region is situated in a controlled thickness region of the BAW resonator. The BAW resonator furth... | 09/14/2010 |
| 7786649 | Filter and duplexer A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric ... | 08/31/2010 |
| 7750535 | Quartz-based nanoresonator A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied t... | 07/06/2010 |
| 7741754 | Polymer bulk acoustic resonator A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film elect... | 06/22/2010 |
| 7728485 | Bulk acoustic wave device and a method of its manufacturing A BAW device includes a semiconductor substrate with a surface region, an insulating layer formed on the surface region and a piezoelectric layer sandwiched by a first and second electrode, wherein the second electrode is formed on the insulating layer. The surface ... | 06/01/2010 |
| 7709999 | Thin film piezoelectric resonator and method of manufacturing the same A thin film piezoelectric resonator includes a substrate having a cavity; a first electrode extending over the cavity; a piezoelectric film placed on the first electrode; and a second electrode placed on the piezoelectric film, the second electrode having a peripher... | 05/04/2010 |
| 7701117 | Acoustic resonator and filter A first supporting section provided between a substrate section and a second supporting section. The first supporting section is structured by, e.g., a film formed from a material having a higher acoustic impedance than a piezoelectric body and the substrate section... | 04/20/2010 |
| 7649304 | Piezoelectric resonator and piezoelectric filter A piezoelectric resonator includes a laminated thin film having a first thin film portion supported by a substrate and a second thin film portion spaced apart from a first main surface of the substrate and acoustically isolated from the substrate. The second thin fi... | 01/19/2010 |
| 7642695 | Piezoelectric thin-film resonator A piezoelectric thin-film resonator and a method of manufacturing thereof eliminate and prevent breaking of a piezoelectric thin film, disconnection of electrodes, and other known problems. The piezoelectric thin-film resonator includes a substrate and a suspended p... | 01/05/2010 |
| 7602101 | Piezoelectric thin-film resonator and filter using the same A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and the substrate; and an upper electrode provided on the piezoelectric fi... | 10/13/2009 |
| 7602102 | Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling According to an exemplary embodiment, a bulk acoustic wave (BAW) resonator includes a piezoelectric layer situated between upper and lower electrodes, where each of the upper and lower electrodes are a high density metal. The BAW resonator further includes a control... | 10/13/2009 |
| 7583007 | Piezoelectric vibrator An energy-trapping strip piezoelectric vibrator utilizing a third harmonic overtone of a thickness shear mode is provided. A piezoelectric vibrator 1 has a strip piezoelectric ceramic substrate 2 polarized in a longitudinal direction, and first and sec... | 09/01/2009 |
| 7567014 | Energy trap piezoelectric resonator An energy trap piezoelectric resonator makes use of a harmonic wave in a thickness longitudinal vibration mode and can effectively suppress a spurious fundamental wave in a thickness longitudinal vibration mode without significantly suppressing the harmonic wave tha... | 07/28/2009 |
| 7564167 | System and method of assembling a trapped acoustic wave system Embodiments of the present invention provide a trapped acoustic wave system and a method of assembling such a system. The system may include a substrate having an acoustic wave cavity and a transducer mounted on the substrate. The transducer is configured to resonat... | 07/21/2009 |
| 7554244 | Agile tunable piezoelectric solidly-mounted resonator Though the initial concept of the face-mounted resonator was ahead of fabrication technology, the solidly-mounted resonator (SMR) is now a practical resonator design yielding high Qs in a space-efficient and robust mounting configuration. An agile tunable piezoelect... | 06/30/2009 |
| 7550898 | Boundary acoustic wave device and process for producing same In a method for producing a boundary acoustic wave device that includes a first medium, a second medium, and a third medium laminated in that order, and electrodes disposed at the interface between the first medium and the second medium, the method includes the step... | 06/23/2009 |
| 7545077 | Filter having multiple piezoelectric thin-film resonators A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrod... | 06/09/2009 |
| 7541717 | Bulk acoustic wave resonator A bulk acoustic wave resonator includes a resonator region having electrodes and a piezoelectric layer among the electrodes. The piezoelectric layer has a groove that bounds at least part of an electroacoustically active region of the piezoelectric layer. A depth of... | 06/02/2009 |
| 7541716 | Resonator There is provided a resonator having a piezoelectric ceramic resonator which has excellent free-fall resistance. The resonator comprises a piezoelectric ceramic resonator 2 with a vibrating electrode formed, and a substrate 3 which supports the piezoel... | 06/02/2009 |
| 7535154 | Piezoelectric thin-film resonator In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film... | 05/19/2009 |
| 7501739 | Thin film piezoelectric resonator and manufacturing process thereof A thin film piezoelectric resonator includes a substrate having a cavity, and a resonance portion located on the substrate and right above the cavity. The resonance portion includes a lower electrode layer located at a side of the cavity, an upper electrode layer op... | 03/10/2009 |
| 7498717 | Resonator, filter and fabrication of resonator A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a freque... | 03/03/2009 |
| 7486003 | Polymer bulk acoustic resonator A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film elect... | 02/03/2009 |
| 7477001 | Piezoelectric resonator element and method of manufacturing same A piezoelectric resonator element and method of manufacturing same are provided. The piezoelectric resonator element having a lower electrode, a piezoelectric substance layer, and an upper electrode disposed in this order on a substrate with an air layer between the... | 01/13/2009 |
| 7446454 | Thickness extensional piezoelectric resonator An energy-trapping-type thickness extensional piezoelectric resonator using a thickness extensional vibration mode having first and second resonance electrodes formed on portions of the top surface and the bottom surface of a piezoelectric substrate that is polarize... | 11/04/2008 |
| 7443270 | Film bulk acoustic resonator, filter circuit and method for manufacturing a film bulk acoustic resonator A film bulk acoustic resonator includes a substrate having a cavity at a surface of the substrate; a bottom electrode provided on the surface of the substrate so as to extend over the cavity; a piezoelectric film disposed on the bottom electrode; a top electrode dis... | 10/28/2008 |
| 7436102 | Piezoelectric thin-film resonator and method for producing the same A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm o... | 10/14/2008 |
| 7432631 | Piezoelectric thin-film resonator and filter and fabricating method A piezoelectric thin-film resonator includes a device substrate and a laminated body provided on the device substrate and composed of a lower electrode, an upper electrode and a piezoelectric film sandwiched between the lower and upper electrodes. The laminated body... | 10/07/2008 |
