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| Number | Title | Issue Date |
| 8188634 | Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive An electrostatic drive having at least three intermediate frames, each two adjacent intermediate frames being connected to one another via at least one intermediate spring whose longitudinal directions lie on a first axis of rotation, and intermediate electrode fing... | 05/29/2012 |
| 8174163 | Device for assisting relative movements between two parts of a mechanical system, forming a variable capacitance device A device for assisting a relative movement of two parts of a mechanical system, for example a ball bearing or a gear device, configured to form a device with variable capacity, thereby enabling mechanical energy to be recovered and converted into electrical energy. ... | 05/08/2012 |
| 8174164 | System and method for power conversion employing an electrostatic motor driving an electromechanical battery A system for generating electrical power supply signals includes at least one heat engine having a chamber that undergoes heating/cooling cycle and corresponding pressure variations. At least one piezoelectric transducer is deformed in response to the pressure varia... | 05/08/2012 |
| 8164232 | Mechanical meta-materials The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material i... | 04/24/2012 |
| 8164231 | Electret device comprising electret film formed on main surface of substrate and electrostatic operating apparatus An electret device includes a substrate formed with a plurality of recess portions on a main surface thereof and an electret film so formed on the main surface of the substrate as to cover at least inner surfaces of the recess portions. ... | 04/24/2012 |
| 8159109 | Microresonator A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation elec... | 04/17/2012 |
| 8138655 | Electrostatic actuator with electrodes having varying distances at different portions An electrostatic actuator includes first and second lower electrodes formed apart from each other above a substrate, an electrode portion formed above the first and second lower electrodes and first and second upper electrodes, a distance between the first upper ele... | 03/20/2012 |
| 8134277 | Electrostatic comb actuator An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis... | 03/13/2012 |
| 8120229 | Middle spring supported micro-electro-mechanical transducers A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a substrate, a top plate, and a middle spring layer therebetween. The substrate and the middle spring layer define cavities therebetween sidewalled by standing features. The midd... | 02/21/2012 |
| 8102097 | Electrostatic acting device including an electret film An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section (20) having a movable electrode (22), a fixed electrode section (10) having an e... | 01/24/2012 |
| 8093780 | Micro-oscillation element with adjustable resonance frequency of oscillating portion A micro-oscillation element facilitates adjusting the natural frequency relevant to the oscillating motion of the oscillating portion. The micro-oscillation element includes, for example, an oscillating portion, a frame, and a link portion that connects the oscillat... | 01/10/2012 |
| 8089194 | Electrostatic acting device including an electret film and an electrostatic power generator including an electret film An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section (20) having a movable electrode (22) and a fixed electrode section (10) having a... | 01/03/2012 |
| 8076821 | Multiple element electrode cMUT devices and fabrication methods Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. Some embodiments can include a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receivi... | 12/13/2011 |
| 8053948 | Electrostatic induction conversion device There is provided an electrostatic induction conversion device which is small, has high conversion efficiency between electric energy and kinetic energy, and can prevent degradation of an electret. The electret is formed by injecting an electric charge into the vici... | 11/08/2011 |
| 8049394 | Micro oscillating comb tooth element with two interesecting oscillation axes A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends fr... | 11/01/2011 |
| 8044552 | Actuator driving system in which a drive voltage and number of electrodes parts driven changes in accordance with temperature An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to cont... | 10/25/2011 |
| 8018119 | Electrostatic induction power generator An electrostatic induction power generator includes first and second substrates arranged to be opposed to each other, a third substrate arranged between the first and second substrates, first and second electrodes provided on both surfaces of the third substrate res... | 09/13/2011 |
| 8018118 | Micro-oscillation element provided with weight portion, and array utilizing the same A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the mo... | 09/13/2011 |
| 8013492 | Actuator with relative gaps for driving electrodes and repulsion generation section According to the present invention, a stable operation of an actuator is realized. An actuator 1 according to the present invention includes: a movable section 5; a stationary section 10 for supporting the movable section 5; driving elect... | 09/06/2011 |
| 8013493 | MEMS resonators A MEMS piezoresistive resonator (8, 78) is driven at a higher order eigenmode (32) than the fundamental eigenmode (31). The route of flow of a sense current (22) is arranged in relation to a characteristic of the higher order eigenmode ( | 09/06/2011 |
| 8008835 | Multiple element electrode cMUT devices and fabrication methods Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. A cMUT device generally comprises a top electrode disposed within a membrane, a bottom electrode disposed on a substrate, and a cavit... | 08/30/2011 |
| 7999434 | Electrostatic actuator and power generator This electrostatic actuator includes an electret film and a conductor layer formed on the electret film, and the conductor layer is so formed as to have a sectional shape reduced in width upward from the side closer to the electret film. ... | 08/16/2011 |
| 7986073 | Micro-electro mechanical system using snapping tabs, comb and parallel plate actuation The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and p... | 07/26/2011 |
| 7982361 | Actuator using comb-tooth An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotata... | 07/19/2011 |
| 7982362 | Ultrasound transducer manufactured by using micromachining process, its device, endoscopic ultrasound diagnosis system thereof, and method for controlling the same An ultrasound transducer manufactured by using a micromachining process comprises: a first electrode into which a control signal for transmitting ultrasound is input; a substrate on which the first electrode is formed; a second electrode that is a ground electrode f... | 07/19/2011 |
| 7956510 | Modulation in micromachined ultrasonic transducers A capacitive micromachined ultrasonic transducer (cMUT) system uses a modulation technique to increase cMUT sensitivity. An AC carrier signal is applied to the cMUT through a modulation signal port to modulate the signal. The higher frequency of the AC carrier signa... | 06/07/2011 |
| 7952256 | Ultrasonic transducer, ultrasonic transducer fabrication method, and ultrasonic endoscope An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insula... | 05/31/2011 |
| 7944114 | Ultrasonic transducer device and ultrasonic wave probe using same The present invention provides an ultrasonic transducer device to send and receive ultrasonic waves, comprising a semiconductor substrate, a lower electrode disposed on the semiconductor substrate, a gap disposed on the lower electrode, a third insulation film dispo... | 05/17/2011 |
| 7928632 | Method and structure for an out-of-plane compliant micro actuator This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and hori... | 04/19/2011 |
| 7928631 | Stable electro-mechanical comb drive actuators An electro-mechanical actuator includes a comb drive and a deformable connector. The comb drive has a first capacitor plate and a second capacitor plate. The capacitor plates have teeth capable of inter-digitating. The deformable connector is configured to apply a m... | 04/19/2011 |
| 7923893 | 3-1 mode capacitive membrane ultrasound transducer A capacitive membrane ultrasound transducer is provided. Membranes or other microelectromechanical devices are provided in a 3-1 geometry, allowing application of an electric field substantially perpendicular to a range dimension. The membranes are on a plurality of... | 04/12/2011 |
| 7923894 | Actuator, image projection apparatus and production method for actuator The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applyin... | 04/12/2011 |
| 7898144 | Multi-step microactuator providing multi-step displacement to a controlled object A multi-step microactuator is provided with the multiple supports in a stepper plate to give multi-step displacement to a controlled object. The microactuator has advantages such that multiple motion can be applied to the controlled object and that the object can be... | 03/01/2011 |
| 7893595 | Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator The invention concerns a method for adjusting the operating gap of two mechanical elements of a substantially planar mechanical structure obtained by micro-etching. The method consists in attributing (A) to one of the elements (E) a fixed reference position (RF) in ... | 02/22/2011 |
| 7893596 | Micro movable element and micro movable element array A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion in... | 02/22/2011 |
| 7888840 | Microphone and a method of manufacturing a microphone A microphone that identifies the direction along which acoustic waves propagate with one diaphragm, and has superior durability is provided. The microphone includes a circular diaphragm supported at a center portion thereof. When the diaphragm receives acoustic wave... | 02/15/2011 |
| 7884525 | Carbon nanotube based compliant mechanism A nano-scale compliant mechanism includes a coupler and a plurality of nanotubes disposed for nano-scale motion relative to a grounded component. The nanotubes are fastened at one end to the coupler and at the other end to ground, to guide motion of the coupler rela... | 02/08/2011 |
| 7884526 | Driving apparatus A driving apparatus (100j) is provided with: a base portion (110); a stage portion (130) on which a driven object (12) is mounted and which can be displaced; an elastic portion (120) which connects the base portion and the s... | 02/08/2011 |
| 7880364 | Parametric resonator and filter using the same A resonator includes a vibrator that performs mechanical vibration, an exciting unit that applies an exciting force to the vibrator, and a modulating unit that modulates a spring property of the vibrator. The vibrator vibrates when the exciting force is applied to t... | 02/01/2011 |
| 7880365 | Actuator capable of driving with large rotational angle or large deflection angle An actuator 100 includes: a pair of driving portions 1, 11 spaced apart from each other; a movable portion 2 provided between the pair of driving portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of driving... | 02/01/2011 |
