"To place a man in a multi-stage rocket and project him into the controlling gravitational field of the moon where the passengers can make scientific observations, perhaps land alive, and then return to earth--all that constitutes a wild dream worthy of Jules Verne. I am bold enough to say that such a man-made voyage will never occur regardless of all future advances."
Lee deForest, American radio pioneer ; 1957
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| Number | Title | Issue Date |
| 7884508 | Linear motor A linear motor comprising a stator core and/or a mover. The stator core of said linear motor comprising an inner perimeter, an outer perimeter essentially encircling the inner perimeter, a first and a second tooth being arranged along one of the inner perimeter or t... | 02/08/2011 |
| 7830046 | Damper for a stage assembly A stage assembly (220) that moves a work piece (200) along a first axis includes a stage base (236), a guide bar (238), a device table (240) that retains the work piece (200), a mover assembly (242), and a damper (... | 11/09/2010 |
| 7728462 | Monolithic stage devices providing motion in six degrees of freedom Stage devices for various uses including use as a reticle stage or substrate stage in a microlithography system. An exemplary device includes a carrier and multiple linear EM actuators that couple the carrier monolithically to a base. The linear EM actuators collect... | 06/01/2010 |
| RE41232 | Wafer positioner with planar motor and mag-lev fine stage A positioning stage assembly having a coarse stage which includes a planar motor driveable in at least two degrees of freedom, and a fine stage positioned on the coarse stage which is driveable in at least three degrees of freedom with respect to the coarse stage. M... | 04/20/2010 |
| 7696651 | Linear motor A linear motor comprising a mover part including; an armature module having an I shaped magnetic iron core and an armature winding of one kind wound on the periphery of the I shaped magnetic iron core through an insulating material. A non-magnetic material holder on... | 04/13/2010 |
| 7675201 | Lithographic apparatus with planar motor driven support A lithographic apparatus includes an illumination system that conditions a radiation beam, a patterning support holding a patterning device that patterns the radiation beam, a substrate support to hold a substrate, a projection system to project the patterned radiat... | 03/09/2010 |
| 7663269 | High bandwidth linear actuator for steering mirror applications A printed circuit board (PCB) coil linear actuator is disclosed. The actuator includes a coil assembly and a magnet assembly. The coil assembly includes a plurality of PCB coils electrically connected in series. The PCB coils arranged in a row and adjacent PCB coils... | 02/16/2010 |
| 7642678 | Linear motor and machine tool having the same mounted thereon The present invention provides a linear motor 1 which uses a plurality of cylindrical linear motors 2 to increase power and which can guide forward and backward movements using a simple configuration, the linear motor 1 requiring reduced manufac... | 01/05/2010 |
| 7635929 | Canned linear motor armature and canned linear motor A canned linear motor armature and a canned linear motor. The canned linear motor armature including a winding accommodating frame formed in the shape of a recess which accommodates an armature winding; a flat plate-shaped connection substrate which connects the arm... | 12/22/2009 |
| 7635930 | Stage apparatus At least one exemplary embodiment is directed to a stage apparatus which includes a stage movable in a first direction, a linear motor configured to drive the stage in the first direction, a magnet unit having first magnets disposed on the stage and second magnets d... | 12/22/2009 |
| 7633186 | Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus A magnetic levitation wafer stage is used to align a wafer in an exposure apparatus of photolithographic equipment. The wafer stage includes a base, a table supported on the base and whose entire top surface exhibits magnetism of a single polarity, and motors for mo... | 12/15/2009 |
| 7629713 | Electromagnetic motor An electromagnetic motor includes a permanent magnet connected to a piston component of the motor and defining a linear reciprocating displacement path; and two electromagnets connected to the cylinder housing that periodically and alternately interact with the perm... | 12/08/2009 |
| 7626289 | Linear compressor A linear compressor in which an inner core is integrally mounted with a magnet to linearly reciprocate simultaneously and is also mounted on a core frame that comes into close contact with an outer circumference of a cylinder. With this configuration, the core frame... | 12/01/2009 |
| 7626290 | One-wheel and bi-pole magnetic driving apparatus A magnetic driving apparatus includes a bi-pole rotor wheel coupled to a speed adjustment motor and including a ferromagnetic wheel base and a magnetic rotor, the magnetic rotor including first and second magnetic rotor parts which are fixed to a circumferential sur... | 12/01/2009 |
| 7626288 | Electromagnetic linear drive An electromagnetic linear drive contains a stator and an armature. A relative movement between the stator and the armature can be effected. An air gap is formed between a surface of the armature and of the stator at least during a relative movement. The air gap is s... | 12/01/2009 |
| 7622832 | Linear motor and linear moving stage device A linear motor for giving thrust to a movable unit capable of linearly moving freely in one direction with respect to a stator, comprising a plurality of permanent magnets arranged on the base side by lining up a positive pole and a negative pole in the one directio... | 11/24/2009 |
| 7619329 | Permanent magnet member for coil motor and voice coil motor A magnet body 1 including a shorter periphery 11, a longer periphery 12 located at a position separated from the shorter periphery 11 by a predetermined distance, and a pair of side peripheries 13, 14 connecting the shorter periphe... | 11/17/2009 |
| 7619330 | Stage apparatus A stage apparatus includes a movable stage; a magnetic unit including a first permanent magnet that is provided on the stage and magnetized in a direction perpendicular to a moving direction of the stage and at least one pair of second permanent magnets that are mag... | 11/17/2009 |
| 7602087 | Linear motor having dual coil configuration A linear motor is provided that includes a magnetic assembly, a movable element and a coil assembly that is operative to interact with the magnetic assembly to drive the movable element along a direction. The coil assembly further includes a first coil section havin... | 10/13/2009 |
| 7602088 | Linear motor and exposure apparatus having the same A method of driving a linear motor having a multi-phase coil as a stator or a movable element includes the steps of positioning the stator at a position where a driving electric power becomes largest, and driving the movable element relative to the stator. ... | 10/13/2009 |
| 7602086 | Driving device, exposure apparatus using the same, and device manufacturing method A driving device includes an electromagnetic actuator indicating a first coil and a second coil which detects a change in magnetic flux generated by the first coil, and an electromagnetic actuator controller which feedback-controls the electromagnetic actuator. The ... | 10/13/2009 |
| 7595571 | High performance linear motor and magnet assembly therefor A magnet assembly includes a back iron and an array of magnets. The back iron is in the form of a plate having opposed surfaces. The magnets are arranged along one of the surfaces, with the other surface being dimensioned and configured according to the magnetic fie... | 09/29/2009 |
| 7592720 | Sliding door comprising a magnetic drive system provided with a path measuring system A magnetic drive system for a door leaf includes a carrying slide for carrying the door leaf; a row of magnets disposed in the driving direction and having a length L and a longitudinal direction, the magnets being arranged so that magnetizations of the magnets reve... | 09/22/2009 |
| 7586218 | Moving apparatus, exposure apparatus, and device manufacturing method A moving apparatus including a movable portion which is supported so as to move in a first direction, a first actuator having a movable element and a stator, the movable element being connected to the movable portion, a reference structure which has a guide surface ... | 09/08/2009 |
| 7586217 | High performance motor and magnet assembly therefor A magnet assembly includes a back iron and an array of magnets. The back iron is in the form of a plate having opposed surfaces. The magnets are arranged along one of the surfaces, with the other surface being dimensioned and configured according to the magnetic fie... | 09/08/2009 |
| 7586219 | Drive guide apparatus The present invention provides a drive guide apparatus capable of ensuring an increased lifetime by preventing heat generated from a primary side of a linear motor from being transferred to a rail or a moving member of a guide mechanism to which the primary side of ... | 09/08/2009 |
| 7582991 | Linear motor A linear motor for which armature core can readily be manufactured is provided. An armature 10 is constituted from an armature core main portion 19 and first magnetic pole constituent components 21A to 21C. The armature main core p... | 09/01/2009 |
| 7579720 | Origin microadjustment mechanism for a linear motor An origin microadjustment mechanism for a linear motor is assembled on a stator of the linear motor and comprises a load bearing member fixed to a sensing member and two positioning seats. The load bearing member is movably passed through the positioning seats, and ... | 08/25/2009 |
| 7579721 | Chain support structure for a planar motor A chain support structure for a planar motor comprises: a fixing base, a support arm and a load-bearing member, the fixing base is fixed to the stator, the support arm has one end connected to the fixing base and has the other end connected to the load-bearing membe... | 08/25/2009 |
| 7576453 | Steel wheel-type linear motor The invention provides a steel wheel-type linear motor in which a protective cover 11 having insulating properties and coming in direct contact with a stator coil 9 is located on the ground side of the stator coil 9 protruding from a stator core... | 08/18/2009 |
| 7576454 | Multiple magnet coil in gap generator The present invention is an improved energy harvester or generator based on a yoked magnet array design based on a plurality of magnets arranged into at least two spaced apart linear or circular magnet arrays. The spaced apart magnet arrays are juxtaposed with each ... | 08/18/2009 |
| 7576452 | Coreless linear motor and canned linear motor A coreless linear motor and a canned linear motor that can significantly reduce an increase in surface temperature of a linear motor armature are provided. In a magnetic field system of a coreless linear motor 1a, two rows of permanent magnets | 08/18/2009 |
| 7576455 | High performance focusing actuator of a voice coil motor A high performance focusing actuator of a voice coil motor comprises a retaining unit having a plastic retaining frame; a center portion of the plastic retaining frame being a receiving space; two opposite corners of the receiving space being chamfered; an inner sid... | 08/18/2009 |
| 7573162 | Linear motor A linear motor having a more preferable braking function is realized with a low cost. A linear motor has a slider and a stator. A driving winding is wound around the slider. A plurality of permanent magnets forming magnetic poles which invert at a predetermined peri... | 08/11/2009 |
| 7573161 | Positioning device The positioning device includes at least one displaceable carriage, liquid slide bearings on which the carriage is displaceable, and a carriage drive. The latter includes a first linear motor including a first primary part and a first secondary part that is opposite... | 08/11/2009 |
| 7573163 | Linear electric generator having an improved magnet and coil structure, and method of manufacture Linear electric generators include stationary windings and armature magnets arranged to reciprocate axially relative to the windings, or stationary magnet structures and movable windings arranged to reciprocate relative to the stationary magnet structures. The armat... | 08/11/2009 |
| 7566997 | Gas bearing system A linear motor device has a gas bearing and comprises a platen and a motor stack with a bottom face positionable above the platen. The motor stack has a bottom face with a recessed gas pocket. The linear motor gas bearing has a gas introduced from the motor stack in... | 07/28/2009 |
| 7564151 | Linear actuator having mechanism for stopping linear movement of output shaft without touching rotor A stopper member is included in a linear actuator comprising a stator assembly, a rotor assembly, an output shaft, and a stopper pin which is fixedly disposed at a frontward portion of the output shaft, and which is adapted to axially control the mode and amount of ... | 07/21/2009 |
| 7560835 | Electrical induction machine and primary part A primary part of an electrical induction machine, especially a synchronous motor or a linear motor, includes a plurality of modules which each have teeth situated in a row having at least partially encircling slots, in the slot of each tooth a coil is wound around ... | 07/14/2009 |
| 7557469 | Positioning system and linear motor A positioning system includes a stage configured to move while carrying an object thereon, an interferometer configured to measure a position of the stage, a driving unit configured to drive the stage, a heater provided between a light path of the interferometer and... | 07/07/2009 |