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| Number | Title | Issue Date |
| 8172288 | Gripper, in particular a Bernoulli gripper A gripper for holding two-dimensional components with a low degree of loading, has a clamping ring connected to a controllable robot arm with a baffle plate connected to the clamping ring by a funnel-shaped component and has a gripping face which communicates with a... | 05/08/2012 |
| 7823941 | Handling device A Bernoulli Effect pick-up device (1) for the handling of products (20) comprises a surface (4) adapted such that gaseous fluid flow across said surface (4) provides a pick-up force to be generated, by the Bernoulli Effect, in a direction... | 11/02/2010 |
| 7597370 | Carrying unit A carrying unit is capable of changing the holding force of a carried object, suppressing the deformation amount of a carried object held by suction and dropping the carried object quickly at a predetermined place. A carrying unit has a workpiece holding face opposi... | 10/06/2009 |
| 7516995 | Method for manipulating objects A method and an apparatus for the manipulation of objects are provided, comprising steps of creating a low pressure zone between a plate with a gas-flowing surface and an object to be manipulated. This gas is forced to flow between the surface of the plate and the o... | 04/14/2009 |
| 7510226 | Non-contact holder device and non-contact holding and conveying device A non-contact holder includes: a body 2 having an ejection recess 3 having an ejection opening 3b from which a fluid is ejected and a tapered surface 3c gradually diverging toward the ejection opening; discharge ports 10 | 03/31/2009 |
| 7452016 | Non-contact carrying device A non-contact carrying device 10 holds and carries a carried object W in front of a carrying head 12 without making the carried object contact with the carrying head 12. A gas supplying surface 18 in which an opening portion of a gas supp... | 11/18/2008 |
| 7370895 | Work transfer device and method of transferring work Provided are a work transfer device and a method of transferring work which are capable of safely transferring work without letting the work to fall even when poor adhesion of a frame occurs due to troubles. By providing an adsorption part which adsorbs a frame, and... | 05/13/2008 |
| 7360322 | Non-contacting conveyance equipment A non-contacting conveyance equipment comprises: a body having an end face that opposes an object to be conveyed, and a concave opening formed in the end face and surrounded by a cylindrical inner side wall; and a fluid passageway having a plurality of pairs of spou... | 04/22/2008 |
| 7338102 | Manipulator This invention provides a manipulator having an arrangement which easily makes it possible to execute fine work such as attitude control while properly grasping even a minute target object. The manipulator of this invention has, at, e.g., the contact portion to a ma... | 03/04/2008 |
| 7329364 | Method for manufacturing bonded wafer with ultra-thin single crystal ferroelectric film A method for manufacturing a bonded wafer with ultra-thin single crystal ferroelectric film is provided, comprising the following steps: providing a single crystal ferroelectric wafer and a carrier wafer while activating the surfaces of the single crystal ferroelect... | 02/12/2008 |
| 7326300 | Coating apparatus and method using the same A coating apparatus (2) includes a work table (20) having a plurality of blowing holes (201) for suspending a substrate (200) thereabove, a coating unit (22) having a photoresist coating nozzle (222) and a supplying device (... | 02/05/2008 |
| 7275749 | Substrate supporting apparatus A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2, a rotatable chuck 3 which is disposed in the housing 2 | 10/02/2007 |
| 7260959 | Glass handling system and method for using same A glass handling system and method are described herein where an enhanced robot is used to engage and hold a glass sheet in a manner that minimizes the motion of the glass sheet as it is moved from one point to another point in a glass manufacturing facility. The en... | 08/28/2007 |
| 7192242 | Work attracting apparatus and work attracting method A work attracting apparatus and a work attracting method that uses a Bernoulli chuck or the like as a work attraction section and that can ensure the perfect operation of attracting and receiving. The work attraction section (Bernoulli plate 1 and Bernoulli a... | 03/20/2007 |
| 7168747 | Device for gripping and holding an object in a contactless manner A device is proposed for the contactless grasping and holding of an object from a direction directed at least partially in the direction of the force of gravity, using a holding element situated counter to the direction of the force of gravity, at least partially ab... | 01/30/2007 |
| 7144056 | Detection and handling of semiconductor wafers and wafers-like objects An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported waf... | 12/05/2006 |
| 7134222 | Transfer apparatus A transfer apparatus is provided for the transport of transfer objects such as glass substrates or semiconductor devices in which cleanliness and secure transport are of major concern. A plurality of air nozzles inject air through the plurality of air nozzles to hol... | 11/14/2006 |
| 7104579 | Detection and handling of semiconductor wafers and wafer-like objects An end effector has one or more vortex chucks to support a wafer, and at least two detectors for detecting different portions of the wafer before the wafer is picked up. If one of the detectors detects a wafer and the other one does not, an alarm is generated to ale... | 09/12/2006 |
| 7105056 | Pneumatic handling and recoating apparatus and method of use A pneumatic handling and recoating apparatus for handling workpieces, such as glass, is provided. The apparatus utilizes a holding device operatively connected to a vacuum assembly. The holding device engages workpieces by vacuum and subsequently releases them by a ... | 09/12/2006 |
| 7100954 | Ultra-thin wafer handling system An improved Bernoulli end effector for holding, handling, and transporting ultra-thin substrates includes edge guides to aid in the positioning of the substrate and may include friction pads that impede motion of the substrate lifted by the end effector. The Bernoul... | 09/05/2006 |
| 7083209 | Hydraulic overshot tool without a nozzle, and method of retrieving a cylinder The present invention provides an improved hydraulic overshot tool. The overshot tool mechanically engages a cylindrical body downhole attempting to be retrieved. In the event retrieval is unsuccessful, the overshot tool may be hydraulically released from the cylind... | 08/01/2006 |
| 7073834 | Multiple section end effector assembly Embodiments of an end effector assembly for a substrate robot are provided herein. In one embodiment, the end effector assembly includes a wrist and a first and a second end effector coupled to the wrist in a spaced apart relationship. The first end effector include... | 07/11/2006 |
| 7063499 | Conveyor system A conveyor system able to safety convey a workpiece having a thickness of less than 100 μm and easily position the workpiece, provided with a plate-shaped member provided movably and swivelably and a moving and swiveling means moving and swiveling the plate-shaped ... | 06/20/2006 |
| 7052229 | Alignment of semiconductor wafers and other articles A wafer or some other article is aligned while being held by an end-effector. ... | 05/30/2006 |
| 7044521 | Chuck and suction board for plates An apparatus for transferring a plate member such as a wafer by supporting the plate member with a plurality of support pins, and vacuum-sucking the plate member with a suction disk without allowing the suction disk to make contact with the plate member. Vacuum gene... | 05/16/2006 |
| 7022627 | Method for the heat treatment of substrates A substrate undergoes a semiconductor fabrication process at different temperatures in a reactor without changing the temperature of the reactor. The substrate is held suspended by flowing gas between two heated surfaces of the reactor. Moving the two heated surface... | 04/04/2006 |
| 7007702 | Device and process for liquid treatment of wafer-shaped articles A device for liquid treatment of a defined area of a wafer-shaped article, especially of a wafer, near the edge, in which the liquid is applied to a first surface, flows essentially radially to the outside to the peripheral-side edge of the wafer-shaped article and ... | 03/07/2006 |
| 6968938 | Convey device for a plate-like workpiece A conveying device for a plate-like workpiece, comprising a suction-holding device for suction-holding the plate-like workpiece and a moving device for moving the suction-holding device between a first predetermined position and a second predetermined position, wher... | 11/29/2005 |
| 6948898 | Alignment of semiconductor wafers and other articles A wafer or some other article is aligned while being held by an end-effector. ... | 09/27/2005 |
| 6935830 | Alignment of semiconductor wafers and other articles A wafer or some other article is aligned while being held by an end-effector. ... | 08/30/2005 |
| 6929299 | Bonded structures for use in semiconductor processing environments A structure for use in a semiconductor processing environment is provided, including a first plate a second plate bonded to the first plate. A distal end of the second plate extends beyond a distal end of the first plate. The distal end of the first plate is tapered... | 08/16/2005 |
| 6924462 | Pedestal for flat panel display applications An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon. ... | 08/02/2005 |
| 6917755 | Substrate support An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus for supporting a substrate includes ball disposed on an inclined ball s... | 07/12/2005 |
| 6810297 | System and methods for imaging employing a levitating conveyor A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substra... | 10/26/2004 |
| 6688662 | Detection and handling of semiconductor wafers and wafer-like objects An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a su... | 02/10/2004 |
| 6644703 | Self-adaptive vacuum gripping system A self-adaptive vacuum grip apparatus includes a vacuum source (51), a vacuum reservoir (54) fluidically connected to the vacuum source; a contact surface (56), and a plurality of conduits (55); where a conduit has an inlet (2) positioned on the contact s... | 11/11/2003 |
| 6638004 | Article holders and article positioning methods An article holder has protrusions that contact the article. The friction between the protrusions and the article impedes the article movement relative to the holder yet allows the article to slide when the article is pushed against some object. The articl... | 10/28/2003 |
| 6631935 | Detection and handling of semiconductor wafer and wafer-like objects An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a su... | 10/14/2003 |
| 6609874 | Handler for the transporting of flat substrates for application in the semi-conductor industry A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving a substrate and means for defining the location of the sub... | 08/26/2003 |
| 6601888 | Contactless handling of objects The present invention provides a method for the quiet, contactless handling of objects using pickup devices of the Bernoulli type. The method is particularly suitable for the contactless handling of items much larger than an individual pickup, for example... | 08/05/2003 |