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Class 294/64.3 - By positive fluid stream directed against article


Subclass of Class 294 - Handling: hand and hoist-line implements
Definition: Devices wherein a positive pressure fluid stream is caused
No. of patents: 90
Last issue date: 05/08/2012


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NumberTitleIssue Date
8172288Gripper, in particular a Bernoulli gripper
A gripper for holding two-dimensional components with a low degree of loading, has a clamping ring connected to a controllable robot arm with a baffle plate connected to the clamping ring by a funnel-shaped component and has a gripping face which communicates with a...
05/08/2012
7823941Handling device
A Bernoulli Effect pick-up device (1) for the handling of products (20) comprises a surface (4) adapted such that gaseous fluid flow across said surface (4) provides a pick-up force to be generated, by the Bernoulli Effect, in a direction...
11/02/2010
7597370Carrying unit
A carrying unit is capable of changing the holding force of a carried object, suppressing the deformation amount of a carried object held by suction and dropping the carried object quickly at a predetermined place. A carrying unit has a workpiece holding face opposi...
10/06/2009
7516995Method for manipulating objects
A method and an apparatus for the manipulation of objects are provided, comprising steps of creating a low pressure zone between a plate with a gas-flowing surface and an object to be manipulated. This gas is forced to flow between the surface of the plate and the o...
04/14/2009
7510226Non-contact holder device and non-contact holding and conveying device
A non-contact holder includes: a body 2 having an ejection recess 3 having an ejection opening 3b from which a fluid is ejected and a tapered surface 3c gradually diverging toward the ejection opening; discharge ports 10
03/31/2009
7452016Non-contact carrying device
A non-contact carrying device 10 holds and carries a carried object W in front of a carrying head 12 without making the carried object contact with the carrying head 12. A gas supplying surface 18 in which an opening portion of a gas supp...
11/18/2008
7370895Work transfer device and method of transferring work
Provided are a work transfer device and a method of transferring work which are capable of safely transferring work without letting the work to fall even when poor adhesion of a frame occurs due to troubles. By providing an adsorption part which adsorbs a frame, and...
05/13/2008
7360322Non-contacting conveyance equipment
A non-contacting conveyance equipment comprises: a body having an end face that opposes an object to be conveyed, and a concave opening formed in the end face and surrounded by a cylindrical inner side wall; and a fluid passageway having a plurality of pairs of spou...
04/22/2008
7338102Manipulator
This invention provides a manipulator having an arrangement which easily makes it possible to execute fine work such as attitude control while properly grasping even a minute target object. The manipulator of this invention has, at, e.g., the contact portion to a ma...
03/04/2008
7329364Method for manufacturing bonded wafer with ultra-thin single crystal ferroelectric film
A method for manufacturing a bonded wafer with ultra-thin single crystal ferroelectric film is provided, comprising the following steps: providing a single crystal ferroelectric wafer and a carrier wafer while activating the surfaces of the single crystal ferroelect...
02/12/2008
7326300Coating apparatus and method using the same
A coating apparatus (2) includes a work table (20) having a plurality of blowing holes (201) for suspending a substrate (200) thereabove, a coating unit (22) having a photoresist coating nozzle (222) and a supplying device (...
02/05/2008
7275749Substrate supporting apparatus
A substrate supporting apparatus for supporting a substrate or wafer in a non-contact state by Bernoulli theorem is disclosed. The substrate supporting apparatus 1 comprises a housing 2, a rotatable chuck 3 which is disposed in the housing 2
10/02/2007
7260959Glass handling system and method for using same
A glass handling system and method are described herein where an enhanced robot is used to engage and hold a glass sheet in a manner that minimizes the motion of the glass sheet as it is moved from one point to another point in a glass manufacturing facility. The en...
08/28/2007
7192242Work attracting apparatus and work attracting method
A work attracting apparatus and a work attracting method that uses a Bernoulli chuck or the like as a work attraction section and that can ensure the perfect operation of attracting and receiving. The work attraction section (Bernoulli plate 1 and Bernoulli a...
03/20/2007
7168747Device for gripping and holding an object in a contactless manner
A device is proposed for the contactless grasping and holding of an object from a direction directed at least partially in the direction of the force of gravity, using a holding element situated counter to the direction of the force of gravity, at least partially ab...
01/30/2007
7144056Detection and handling of semiconductor wafers and wafers-like objects
An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported waf...
12/05/2006
7134222Transfer apparatus
A transfer apparatus is provided for the transport of transfer objects such as glass substrates or semiconductor devices in which cleanliness and secure transport are of major concern. A plurality of air nozzles inject air through the plurality of air nozzles to hol...
11/14/2006
7104579Detection and handling of semiconductor wafers and wafer-like objects
An end effector has one or more vortex chucks to support a wafer, and at least two detectors for detecting different portions of the wafer before the wafer is picked up. If one of the detectors detects a wafer and the other one does not, an alarm is generated to ale...
09/12/2006
7105056Pneumatic handling and recoating apparatus and method of use
A pneumatic handling and recoating apparatus for handling workpieces, such as glass, is provided. The apparatus utilizes a holding device operatively connected to a vacuum assembly. The holding device engages workpieces by vacuum and subsequently releases them by a ...
09/12/2006
7100954Ultra-thin wafer handling system
An improved Bernoulli end effector for holding, handling, and transporting ultra-thin substrates includes edge guides to aid in the positioning of the substrate and may include friction pads that impede motion of the substrate lifted by the end effector. The Bernoul...
09/05/2006
7083209Hydraulic overshot tool without a nozzle, and method of retrieving a cylinder
The present invention provides an improved hydraulic overshot tool. The overshot tool mechanically engages a cylindrical body downhole attempting to be retrieved. In the event retrieval is unsuccessful, the overshot tool may be hydraulically released from the cylind...
08/01/2006
7073834Multiple section end effector assembly
Embodiments of an end effector assembly for a substrate robot are provided herein. In one embodiment, the end effector assembly includes a wrist and a first and a second end effector coupled to the wrist in a spaced apart relationship. The first end effector include...
07/11/2006
7063499Conveyor system
A conveyor system able to safety convey a workpiece having a thickness of less than 100 μm and easily position the workpiece, provided with a plate-shaped member provided movably and swivelably and a moving and swiveling means moving and swiveling the plate-shaped ...
06/20/2006
7052229Alignment of semiconductor wafers and other articles
A wafer or some other article is aligned while being held by an end-effector. ...
05/30/2006
7044521Chuck and suction board for plates
An apparatus for transferring a plate member such as a wafer by supporting the plate member with a plurality of support pins, and vacuum-sucking the plate member with a suction disk without allowing the suction disk to make contact with the plate member. Vacuum gene...
05/16/2006
7022627Method for the heat treatment of substrates
A substrate undergoes a semiconductor fabrication process at different temperatures in a reactor without changing the temperature of the reactor. The substrate is held suspended by flowing gas between two heated surfaces of the reactor. Moving the two heated surface...
04/04/2006
7007702Device and process for liquid treatment of wafer-shaped articles
A device for liquid treatment of a defined area of a wafer-shaped article, especially of a wafer, near the edge, in which the liquid is applied to a first surface, flows essentially radially to the outside to the peripheral-side edge of the wafer-shaped article and ...
03/07/2006
6968938Convey device for a plate-like workpiece
A conveying device for a plate-like workpiece, comprising a suction-holding device for suction-holding the plate-like workpiece and a moving device for moving the suction-holding device between a first predetermined position and a second predetermined position, wher...
11/29/2005
6948898Alignment of semiconductor wafers and other articles
A wafer or some other article is aligned while being held by an end-effector. ...
09/27/2005
6935830Alignment of semiconductor wafers and other articles
A wafer or some other article is aligned while being held by an end-effector. ...
08/30/2005
6929299Bonded structures for use in semiconductor processing environments
A structure for use in a semiconductor processing environment is provided, including a first plate a second plate bonded to the first plate. A distal end of the second plate extends beyond a distal end of the first plate. The distal end of the first plate is tapered...
08/16/2005
6924462Pedestal for flat panel display applications
An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon. ...
08/02/2005
6917755Substrate support
An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus for supporting a substrate includes ball disposed on an inclined ball s...
07/12/2005
6810297System and methods for imaging employing a levitating conveyor
A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substra...
10/26/2004
6688662Detection and handling of semiconductor wafers and wafer-like objects
An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a su...
02/10/2004
6644703Self-adaptive vacuum gripping system
A self-adaptive vacuum grip apparatus includes a vacuum source (51), a vacuum reservoir (54) fluidically connected to the vacuum source; a contact surface (56), and a plurality of conduits (55); where a conduit has an inlet (2) positioned on the contact s...
11/11/2003
6638004Article holders and article positioning methods
An article holder has protrusions that contact the article. The friction between the protrusions and the article impedes the article movement relative to the holder yet allows the article to slide when the article is pushed against some object. The articl...
10/28/2003
6631935Detection and handling of semiconductor wafer and wafer-like objects
An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a su...
10/14/2003
6609874Handler for the transporting of flat substrates for application in the semi-conductor industry
A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving a substrate and means for defining the location of the sub...
08/26/2003
6601888Contactless handling of objects
The present invention provides a method for the quiet, contactless handling of objects using pickup devices of the Bernoulli type. The method is particularly suitable for the contactless handling of items much larger than an individual pickup, for example...
08/05/2003
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