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Class 29/25.35 - PIEZOELECTRIC DEVICE MAKING


Subclass of Class 29 - Metal working
Definition: Miscellaneous process or apparatus for manufacturing a piezoelectric
No. of patents: 1782
Last issue date: 05/29/2012


1                      
NumberTitleIssue Date
8186029Method for producing piezoelectric actuator and method for producing liquid discharge head
A method for producing a piezoelectric actuator having a diffusion-preventive layer and a piezoelectric layer stacked on a vibration plate includes providing the vibration plate having a surface on which a groove is formed; and blowing an aerosol containing ceramics...
05/29/2012
8186030Method for manufacturing elastic wave device
A method for manufacturing an elastic wave device includes forming a lower resist layer on the piezoelectric substrate; forming an upper resist layer on the lower resist layer; patterning the upper and lower resist layers with a developer with respect to which a sol...
05/29/2012
8186028Method of manufacturing a piezoelectric resonator having improved temperature compensation
A method for manufacturing a piezoelectric resonator, comprising the step of: producing an arrangement comprising a piezoelectric layer having a resonance frequency temperature coefficient of a first sign, a first and a second electrode. The piezoelectric layer is a...
05/29/2012
8186027Method of fabricating a piezoelectric vibrator
Piezoelectric vibrators may be fabricated by forming a piezoelectric body of piezoelectric sheets, of which thickness is controlled, and simultaneously sintering the sheets along with cover layers, on which grooves are formed, and may be fabricated by laminating the...
05/29/2012
8176607Method of fabricating quartz resonators
A method for fabricating VHF and/or UHF quartz resonators (for higher sensitivity) in a cartridges design with the quartz resonators requiring much smaller sample volumes than required by conventional resonators, and also enjoying smaller size and more reliable asse...
05/15/2012
8176606Method of fabricating a piezoelectric vibrating piece
To carry out frequency adjustment easily, accurately and efficiently and achieve low cost formation and promotion of maintenance performance without being influenced by a size of a piezoelectric vibrating piece, there is provided a method of fabricating a piezoelect...
05/15/2012
8166621Method of stabilizing a frequency of a piezoelectric vibration element
A method of stabilizing a frequency of a piezoelectric vibration element includes: disposing the piezoelectric vibration element in an atmosphere of a vapor of a ring-shaped dimethylpolysiloxane molecule, the piezoelectric vibration element having a metal layer on a...
05/01/2012
8161608Method of manufacturing quartz-crystal resonator
To provide a method of manufacturing a quartz-crystal resonator, in which without adding new processes, a desired quartz-crystal piece can be obtained from a quartz-crystal wafer by etching and electrodes can be provided without restraint. When a quartz-crystal piec...
04/24/2012
8156621Methods of producing piezoelectric vibrating devices
The subject processes are for making piezoelectric vibrators, particularly those having a tuning-fork configuration. An exemplary process includes preparing a flat plate of piezoelectric crystal material exhibiting anisotropic etching properties. A corrosion-resista...
04/17/2012
8156620Process of making an ultrasonic probe
A method of producing an ultrasonic probe may include superimposing an ultrasonic wave receiving organic piezoelectric element layer made of an organic material on an ultrasonic wave transmitting inorganic piezoelectric element layer made of an inorganic material, a...
04/17/2012
8141216Method of manufacturing ultrasound probe
An ultrasound probe comprising a transmitting piezoelectric layer, an electrode layer and a receiving piezoelectric layer laminated in that order, the ultrasound probe transmitting and receiving an ultrasound, wherein a polarization treatment on the receiving piezoe...
03/27/2012
8136212Method of fabricating structure having out-of-plane angular segment
A structure fabricating method plastically deforms a target portion of a substrate, to thereby fabricate a structure having an inclined segment that is inclined relative to a principal surface of the substrate. The method includes forming a projection on the target ...
03/20/2012
8132304Method of manufacturing a piezoelectric actuator
A method for producing a piezoelectric actuator has the following steps: providing a plurality of piezoelectric material layers (2) which can be assembled into a stack; applying electrode layers (3) each having a recess (4, 4′) to the pluralit...
03/13/2012
8104154Method of manufacturing a piezoelectric vibrating piece
To efficiently fabricate a high quality piezoelectric vibrating piece regardless of an accuracy of an outer shape of a wafer, there is provided a method of fabricating a plurality of piezoelectric vibrating pieces at a time utilizing a wafer S, the method including ...
01/31/2012
8104155Method of manufacturing a piezoelectric actuator
The method of manufacturing a piezoelectric actuator, includes the steps of: forming a lower electrode film on an insulating substrate; forming a piezoelectric film on the lower electrode film; forming a slit on the piezoelectric film to expose a portion of the lowe...
01/31/2012
8099842Method of manufacturing a piezoelectric transistor
According to the present application, a method of manufacturing a piezoelectric transistor may include forming a cavity over a substrate, such as a semiconductor substrate. The method may include depositing and patterning metal material over a portion of a cavity, a...
01/24/2012
8091190Method of manufacturing an acoustic mirror for a piezoelectric resonator
A mirror for a piezoelectric resonator consisting of alternately arranged layers of high and low acoustic impedance is manufactured by at first producing a first layer on which a second layer is produced, so that the second layer partially covers the first layer. Th...
01/10/2012
8091189Method for manufacturing quartz crystal unit, quartz crystal oscillator and electronic apparatus
A quartz crystal unit has a quartz crystal tuning fork resonator that is capable of vibrating in a flexural mode and that has a quartz crystal tuning fork base, and first and second quartz crystal tuning fork tines. The quartz crystal tuning fork resonator is mounte...
01/10/2012
8087135Method of manufacturing a piezoelectric vibrator
A piezoelectric vibrator manufacturing method includes a cavity forming step for forming depressions for a cavities on at least one of two wafers; a bonding electrode film forming step for forming bonding electrode films on bonded surfaces of the both wafers; a moun...
01/03/2012
8082640Method for manufacturing a ferroelectric member element structure
A method for manufacturing a ferroelectric member element structure having a ferroelectric member film, and lower and upper electrodes between which the ferroelectric member film is sandwiched, includes the steps of: forming a buffer layer having pattern-shaped orie...
12/27/2011
8082641Method of manufacturing a ductile polymer-piezoelectric material composite
Provided are free-standing ductile composites and methods of making free-standing ductile composites. The method of making a free-standing ductile composite can include providing a substrate and releasably bonding one or more piezoelectric elements to the substrate....
12/27/2011
8069543Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device, and radio clock
There is provided a piezoelectric vibrator 1 that includes a base substrate 2, a lid substrate 3, a piezoelectric vibrating reed 4, a pair of external electrodes 38 and 39, a pair of through electrodes 32 and 33
12/06/2011
8069542Interleaved interdigitated transducers
The present invention provides an interleaved IDT that is connected to and overlaps adjacent IDTs. In particular, the interleaved IDT may be connected to both an input IDT and an output IDT via corresponding bus bars. The first bus bar of the interleaved IDT is conn...
12/06/2011
8056198Method of manufacturing electronic device
A master substrate 15 having a plurality of substrate areas A arranged in a matrix shape is prepared, and a piezoelectric oscillation element 5 is carried in each of the substrate areas A. A main cover 16 made of a metal having a plurality of co...
11/15/2011
8042239Piezoelectric/electrostrictive element and method of manufacturing the same
A piezoelectric/electrostrictive element with improved moisture resistance while having less degradation in its piezoelectric/electrostrictive properties and a method of manufacturing such a piezoelectric/electrostrictive element are provided. A laminated vibrator o...
10/25/2011
8032997Manufacturing method for a piezoelectric vibrator
A process of manufacturing a piezoelectric vibrator comprises a base substrate; a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate; a piezoelectric vibration member ...
10/11/2011
8028389Method for fabricating a surface acoustic wave device
A novel surface acoustic wave device with a decreased velocity dispersion and a low insertion loss as well as the fabrication method therefore is provided. The surface acoustic wave device includes a substrate, an insulating layer with an indentation on the substrat...
10/04/2011
8020265Method of manufacturing a piezoelectric vibrator
A method for manufacturing a plurality of piezoelectric vibrators includes forming, in the lid substrate wafer, a plurality of cavity recesses forming a plurality of through-electrodes in and through the base substrate wafer; bonding the plural piezoelectric vibrati...
09/20/2011
8020264Method of manufacturing a piezoelectric vibrator
There is provided a method of manufacturing piezoelectric vibrators 1. The method includes a process for through holes 35 and 36, which pass through a base substrate wafer, so that openings of the through holes are opened to the outside of the r...
09/20/2011
8011075Method of manufacturing a piezoelectric actuator
A method of manufacturing a piezoelectric actuator, includes: forming a constraint force buffering layer, the constraint force buffering layer being made of a hardness control material of which hardness changes in accordance with temperature condition; raising the h...
09/06/2011
8011074Method for manufacture of piezoelectric substrate for a saw device
The present invention provides a composite structure having a supporting substrate between a piezoelectric substrate and a compensation layer. The materials used to form the piezoelectric substrate and the compensation layer in isolation, have higher thermal coeffic...
09/06/2011
8006356Method of forming an array of drop generators
A method for making an electromechanical device including forming an electromechanical transducer that includes a deposited metallic diaphragm, and attaching the electromechanical transducer to a fluid channel substructure. ...
08/30/2011
8006358Method for manufacturing a piezoelectric actuator
A method for manufacturing a piezoelectric actuator, the method comprising: co-extruding alternating strips of a high permittivity material and a low permittivity material to form a green tape comprising said alternating strips of said high permittivity material and...
08/30/2011
8006357Process for fabricating piezoelectric element
In a production method of a piezoelectric element, an unneeded electric field is prevented from being applied to a piezoelectric thin film layer during the production process, resulting in a high performance piezoelectric element production method. The production me...
08/30/2011
8001666Method for forming ceramic thick film element arrays with fine feature size, high-precision definition, and/or high aspect ratios
A method is provided that includes providing a mold on a temporary substrate, e.g., a sapphire substrate. Next, a material such as PZT paste is deposited into the mold. Then, the mold is removed to obtain elements formed by the mold. The formed elements will then be...
08/23/2011
7992271Process of manufacturing a piezoelectric actuator for tunable electronic components on a carrier substrate
A processes for manufacturing actuating assembly for tuning a circuit by forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The process includes the steps of: providing a substrate having a bottom protec...
08/09/2011
7984536Method of manufacturing a piezoelectric resonator
To provide a piezoelectric resonator in which a casing houses a tuning-fork piezoelectric resonator element and whose failure occurrence caused when shavings of adjustment films scatter and adhere to excitation electrodes is prevented. In a method of manufacturing a...
07/26/2011
7958608Process for manufacting a piezoelectric device
The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first elec...
06/14/2011
7954215Method for manufacturing acceleration sensing unit
A method for manufacturing an acceleration sensing unit includes: providing an element support substrate in which a plurality of element supporting members is arranged so as to form a plane, each of the element supporting members being coupled to the other element s...
06/07/2011
7950120Method for manufacturing piezoelectric resonator
To provide a method for manufacturing a piezoelectric resonator which can conduct frequency matching with high reliability when performing rough adjustment of the frequency by adjusting the shape of a piezoelectric oscillating piece before forming an electrode film,...
05/31/2011
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