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Class 29/25.01 - BARRIER LAYER OR SEMICONDUCTOR DEVICE MAKING


Subclass of Class 29 - Metal working
Definition: Process or apparatus not elsewhere classified comprising
No. of patents: 705
Last issue date: 12/22/2009


1                      
NumberTitleIssue Date
7635397Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device
A manufacturing apparatus for a semiconductor device, treating a SiN film formed on a wafer with phosphoric acid solution, including a processing bath to store phosphoric acid solution provided for treatment of the wafer, a control unit for calculating integrated Si...
12/22/2009
7628824Substrate processing apparatus for processing plurality of substrates in succession
An indexer robot includes two transport arms. The indexer robot simultaneously transports two unprocessed substrates from a cassette to a substrate transfer part in such a manner that each of the two transport arms holds a single unprocessed substrate. Also, the ind...
12/08/2009
7621969Mounting system
A mounting system is provided with a substrate loader section, a chip mounting section, and a substrate unloader section for sequentially taking out substrates whereupon chips are mounted. The mounting system is characterized in that the substrate loader section is ...
11/24/2009
7591863Laminating system, IC sheet, roll of IC sheet, and method for manufacturing IC chip
The invention provides a laminating system in which one of second and third substrates for sealing a thin film integrated circuit is supplied to a first substrate having the plurality of thin film integrated circuit while being extruded in a heated and melted state,...
09/22/2009
7585334Manufacturing method for molecular rulers
A multi-layer resist process is used to define a sacrificial host structure used to produce a molecular ruler useful for defining structures via a lift-off type process. By using this process, the removal of the host structure is significantly simplified, and a stru...
09/08/2009
7527658Method of manufacturing displays and apparatus for manufacturing displays
A method of manufacturing displays, includes at least forming a metal pattern on a surface of an insulating substrate, forming an insulating film on the metal pattern, forming a pattern of a photosensitive resin on the insulating film, and forming a contact hole in ...
05/05/2009
7507264Transport apparatus
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a pair of fork positions or a reticle hand. Inert gas is injected and supp...
03/24/2009
7491246Capacitor electrodes produced with atomic layer deposition for use in implantable medical devices
An electrolytic capacitor cell for use in implantable medical devices and associated method for manufacture are provided. The capacitor cell includes an electrode substrate having a dielectric layer formed thereon by atomic layer deposition. In various embodiments, ...
02/17/2009
7443653Chip type solid electrolytic capacitor
A chip type solid electrolytic capacitor, in which a PCB includes anode and cathode connection lands formed on upper parts of an insulation board, and anode and cathode terminals formed on lower parts of the insulation board. The anode and cathode terminals are elec...
10/28/2008
7430108Electrolyte for electrolytic capacitor and electrolytic capacitor containing the same
Electrolyte solution and an electrolytic capacitor using it having a low impedance characteristic, having a high withstand voltage characteristic of 100V class, and a high temperature life characteristic is provided. The electrolyte solution containing an aluminum t...
09/30/2008
7423862Solid electrolytic capacitor element, solid electrolytic capacitor and production method thereof
The invention relates to a process for producing a solid electrolytic capacitor element, comprising forming a semiconductor layer containing a conductive polymer on a conductor having a dielectric layer on its surface. By using the solid electrolytic capacitor eleme...
09/09/2008
7414826Method for selecting electrolytic solution for electric double layer capacitor
When an electrolytic solution of an electric double layer capacitor is prepared, an association is assumed as a model of a solute dissolved in a solvent. The energy of the association and the energies of the reduced association and oxidized association are calculate...
08/19/2008
7411779Electrolytic capacitors with a polymeric outer layer and process for the production thereof
The invention relates to a process for the production of electrolytic capacitors with low equivalent series resistance and low residual current consisting of a solid electrolyte made of conductive polymers and an outer layer containing conductive polymers, to electr...
08/12/2008
7410508Apparatus for crystallizing semiconductor with laser beams
Laser beams emitted by a plurality of laser sources are divided into a plurality of sub-beams, which are irradiated onto selected portions of an amorphous semiconductor on a substrate to crystallize the amorphous semiconductor. A difference in diverging angles betwe...
08/12/2008
7410509Sputtered ruthenium oxide coatings in electrolytic capacitor
A capacitor is described. the capacitor includes a casing; a cathode of an active material of at least an oxide of a first metal provided on a substrate, wherein the active material is characterized as being of a substantially homogeneous coating formed by sputterin...
08/12/2008
7402444Method and apparatus for manufacturing a semiconductor device
A method of manufacturing a semiconductor device using a wafer emissivity calculated from a wafer reflectivity to calculate a wafer temperature and to calculate target values for heat source optical intensities provided to a plurality of heat sources which heat the ...
07/22/2008
7402182High-power LGA socket
A system for providing electrical contacts between a die and an electrical device includes a die and a package. The package includes a first major surface, a second major surface, a first scalloped edge, a second scalloped edge and a solid end adapted for insertion ...
07/22/2008
7400491Aluminum electrolytic capacitor and method of producing the same
Disclosed is an aluminum electrolytic capacitor, which comprises a capacitor element prepared by rolling an anode foil and a cathode foil together with a separator and impregnating them with a driving electrolyte, an anode lead electrically connected to the anode fo...
07/15/2008
7392825Arrangement for tool equipment
An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair. ...
07/01/2008
7391604Solid electrolytic capacitor
A solid electrolytic capacitor having a capacitor element which includes an anode foil and a cathode foil rolled with a separator interposed therebetween, and a solid electrolyte layer or an electrically conductive polymer layer provided therein. The anode foil is c...
06/24/2008
7388740Foil for negative electrode of capacitor and process for producing the same
Provided are a foil for a cathode of a capacitor, which can secure both a high capacitance and a high strength, and a manufacturing method thereof. The foil for a cathode of a capacitor includes an aluminum foil and a carbon-containing layer formed on a surface of t...
06/17/2008
7379289Conductive separator and electrolytic capacitor including the same
The present invention provides a highly conductive separator of which surface is coated with conductive polymer molecules, and provides an electrolytic capacitor having a low ESR characteristic using the separator. The conductive separator is formed by sticking the ...
05/27/2008
7379290Electrically conductive polymer composition and solid electrolytic capacitor using the same
An electrically conductive polymer composition contains an electrically conductive polymer obtained by using a polymer in the form of cations composed of repeating structural units of 3,4-ethylene dioxythiophene and polystyrene sulfonic acid as anions and further co...
05/27/2008
7374584Interconnects forming method and interconnects forming apparatus
The present invention provides an interconnects-forming method and an interconnects-forming apparatus which can minimize the lowering of processing accuracy in etching, minimize light exposure processing for the formation of interconnect recesses in the production o...
05/20/2008
7371313On-site generation, purification, and distribution of ultra-pure anhydrous ammonia
A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurit...
05/13/2008
7372149High frequency semiconductor apparatus, transmitting apparatus and receiving apparatus
A high frequency semiconductor apparatus is provided which prevents characteristics of a high frequency semiconductor element from being deteriorated so that the high frequency semiconductor element can be made to operate stably. The high frequency semiconductor app...
05/13/2008
7365369Nitride semiconductor device
A nitride semiconductor device used chiefly as an LD and an LED element. In order to improve the output and to decrease Vf, the device is given either a three-layer structure in which a nitride semiconductor layer doped with n-type impurities serving as an n-type co...
04/29/2008
7365961Solid-electrolyte capacitor, manufacturing method thereof, and digital signal processing substrate using the solid-electrolyte capacitor
A solid electrolytic capacitor includes a planar solid electrolytic capacitor element having anode and cathode portions; anode and cathode terminals; and insulating coating resin. The anode terminal is electrically connected at the top surface thereof to the anode p...
04/29/2008
7362090Automated tray transfer device for prevention of mixing post and pre-test dies, and method of using same
A method of sorting automated tray transfer trays includes detecting if a die remains in the tray. The method includes the ability to interrupt the automated tray transfer process to prevent mixing processed and unprocessed dice. An apparatus includes a sensor for d...
04/22/2008
7362778Plesiochronous demultiplexer
A desynchronizer for extracting and desynchronizing a tributary signal from a multiplex signal at its original data rate has a buffer memory for temporarily storing tributary data bits extracted from the multiplex signal, an adjustable oscillator for generating a re...
04/22/2008
7363107Substrate transfer system
A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ...
04/22/2008
7359180Solid-state electrolytic capacitor and manufacturing method thereof
A solid electrolytic capacitor includes a flat-shaped anode terminal having a first surface connected to an anode portion of a capacitor element and having a second surface opposite to the first surface, a flat-shaped cathode terminal having a first surface connecte...
04/15/2008
7357115Wafer clamping apparatus and method for operating the same
A wafer clamping apparatus is provided to secure a wafer within a chamber during wafer processing. The wafer clamping apparatus creates a pressure differential between a top surface and a bottom surface of the wafer. The pressure differential serves to pull the wafe...
04/15/2008
7359031Lithographic projection assembly, load lock and method for transferring objects
Lithographic projection assembly, including at least one load lock for transferring objects, in particular substrates, between a first environment and a second environment, the second environment preferably having a lower pressure than the first environment; an obje...
04/15/2008
7358666System and method for sealing high intensity discharge lamps
In accordance with certain embodiments, the present technique includes a system for sealing a lamp including a thermal shield and a thermally susceptible enclosure disposed adjacent the thermal shield. The thermal shield has a first receptacle adapted to receive a f...
04/15/2008
7357842Cluster tool architecture for processing a substrate
A cluster tool for processing a substrate includes a cassette and a processing module including a first processing chamber that is configured to perform a chill process on a substrate, a second processing chamber that is configured to perform a bake process on the s...
04/15/2008
7354778Method for determining the end point for a cleaning etching process
A method is provided for determining the end point during cleaning etching of processing chambers by means of plasma etching, which is used for carrying out coating or etching processes during the manufacture of semiconductor components. The invention provides a met...
04/08/2008
7355672Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
A method for the removal of a deposition on an optical element of an apparatus including the optical element includes providing an H2 containing gas in at least part of the apparatus includes producing hydrogen radicals from H2 from the H2...
04/08/2008
7352561Surface-mount solid electrolytic capacitor and process for manufacturing the same
A solid electrolytic capacitor includes a capacitor element, an anode lead terminal, a cathode lead terminal and a resin package. The capacitor element includes an anode chip body, an anode bar projecting from the anode chip body, and a cathode film provided on a pe...
04/01/2008
7348097Insulative feed through assembly for electrochemical devices
An insulative feedthrough receives an electrical lead therethrough and includes a ferrule having fist and second open ends and an interior surface. At least one polymeric guide member is positioned substantially within the first end of the ferrule and has an apertur...
03/25/2008
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