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| Number | Title | Issue Date |
| 8187515 | Large area roll-to-roll imprint lithography Droplets of polymerizable material may be patterned on a film sheet. The droplets of polymerizable material may be dispensed on the film sheet. A pre-determined force may be applied to an imprint lithography template such that localized trapping of the droplets of t... | 05/29/2012 |
| 8168107 | Method of forming a pattern using nano imprinting and method of manufacturing a mold to form such a pattern Example embodiments relate to a method of forming a three-dimensional micro pattern or a multi-step pattern using a nano imprinting process and a method of manufacturing a mold to form such a pattern. A molding polymer may be patterned in a one-step shape on a subst... | 05/01/2012 |
| 8163222 | Machine head for production of a surface relief A machine head for producing a surface relief on a substrate, the machine head comprising a flexible stamping element having a curved profile and an inverse of the surface relief on its convex side; and the flexibility of the element being such that the inverse of t... | 04/24/2012 |
| 8158048 | Mold for fine pattern transfer and method for forming resin pattern using same A mold for forming a resin pattern using nanoimprint lithography according to the present invention comprises a main mold including a fine pattern of a protrusion and a depression intended to be transferred, and a spacer for forming a space between the protrusion of... | 04/17/2012 |
| 8142701 | Method and device for producing a nanopatterned disc The invention relates to a method and a device according to the preambles of claims 1 and 10, and also to the use of a nanopatterned die, a disc with a defined nanopattern and a hard disk drive comprising a disc of this type. In order to propose a more... | 03/27/2012 |
| 8142702 | Solvent-assisted layer formation for imprint lithography A solid layer is formed by applying a multiplicity of discrete portions of a fluid composition onto a surface of an imprint lithography substrate, and allowing the discrete portions of the composition to spontaneously spread on the surface of the substrate to form a... | 03/27/2012 |
| 8142703 | Imprint lithography method A template is treated to provide a surfactant rich region and a surfactant depleted region. A contact angle at the surfactant rich region may be greater than, less than, or substantially similar to a contact angle of the surfactant depleted region. ... | 03/27/2012 |
| 8142704 | Imprint lithography system and method A loading unit, surface scanning module, and an imprint module may be integrated into a single tool. Template may be loaded on loading unit and positioned within imprint module. Substrate may then be loaded on loading unit and scanned defects using surface scanning ... | 03/27/2012 |
| 8119052 | Drop pattern generation for imprint lithography Generating a fluid drop pattern for an imprint lithography process includes selecting an imprinting surface with features and generating a fluid drop pattern including drop locations for placement of a multiplicity of drops of substantially equal volume on an imprin... | 02/21/2012 |
| 8114331 | Amorphous oxide release layers for imprint lithography, and method of use Amorphous inorganic oxides are used as release layers on templates for nanoimprint lithography. Such a layer facilitates the release of a template from a cured, hardened composition into which the template has transferred a pattern, by reducing the adhesion energy b... | 02/14/2012 |
| 8034277 | Method and apparatus for pattern transfer, and annular recording medium An apparatus for transferring a pattern of minute surface structures, using a pair of press members which are located opposingly for movements toward and away from each other. One press member is adapted to support thereon a mold having on a transfer surface a maste... | 10/11/2011 |
| 8029717 | Nanoimprint method and apparatus There is provided a nanoimprint apparatus. The nanoimprint apparatus transfers a pattern formed on a surface of a mold to a transfer layer which is formed partially or entirely on a side surface of a substantially cylindrical or columnar substrate. The nanoimprint a... | 10/04/2011 |
| 8029716 | Amorphous nitride release layers for imprint lithography, and method of use Amorphous inorganic nitrides are used as release layers on templates for nanoimprint lithography. Such a layer facilitates the release of a template from a cured, hardened composition into which the template has transferred a pattern, by reducing the adhesion energy... | 10/04/2011 |
| 8025830 | UV nanoimprint lithography process and apparatus A UV nanoimprint lithography process and its apparatus that are able to repeatedly fabricates nanostructures on a substrate (wafer, UV-transparent plate) by using a stamp that is as large as or smaller than the substrate in size are provided. The apparatus includes ... | 09/27/2011 |
| 8025829 | Die imprint by double side force-balanced press for step-and-repeat imprint lithography In accordance with the invention, step-and-repeat imprint lithography is effected by applying balanced pressing forces from both sides of a substrate. The pressing forces are substantially equal in amplitude and opposite in direction. With the pressing forces thus b... | 09/27/2011 |
| 8012394 | Template pattern density doubling A sub-master template is patterned to provide at least double the density of features of a master template. The sub-master template and master template may employ the use of alignment marks during the patterning process. ... | 09/06/2011 |
| 8012395 | Template having alignment marks formed of contrast material Imprint lithography substrates may include alignment marks formed of high contrast material. Exemplary methods for forming alignment marks having high contrast material are described. ... | 09/06/2011 |
| 7964133 | Method, device and accessories for manufacturing laminate floor panels by using a press A method for manufacturing floor panels, wherein one starts from board-shaped elements that are subjected to a press treatment, wherein during pressing at the decorative side of the board-shaped elements to be pressed, a press element is used having a plurality of s... | 06/21/2011 |
| 7955545 | Nano-imprinting process A nano-imprinting process is described, comprising: providing a substrate including an imprinting material layer covering a surface of the substrate; providing a mold including protruding features set on a surface of the mold covered with an anti-adhesion layer; for... | 06/07/2011 |
| 7935292 | Imprinting of partial fields at the edge of the wafer Edge field patterning of a substrate having full fields and partial fields may include patterning using a template having multiple mesas with each mesa corresponding to a field on the substrate. Polymerizable material may be deposited solely between the template and... | 05/03/2011 |
| 7931844 | Imprint lithography An imprint lithography apparatus is disclosed which has a needle, and a substrate table arranged to hold a substrate to be imprinted, wherein the needle is moveable between a first position and a second position, the first position being such that in use the needle ... | 04/26/2011 |
| 7858014 | Apparatus for fabricating flat panel display device method of fabricating the same and method of fabricating flat panel display device using the same An apparatus for fabricating a flat panel display device includes a device that applies a flowable material on a substrate; a soft mold having a base surface, a groove part recessed in relation to the base surface, and a protruding part protruding from the base surf... | 12/28/2010 |
| 7837921 | Method of providing desirable wetting and release characteristics between a mold and a polymerizable composition The present invention provides a method that features improved wetting characteristics while allowing preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The method includes coati... | 11/23/2010 |
| 7833458 | Imprinting method and stamper According to one embodiment, an imprinting method includes applying a resist to a substrate, imprinting a stamper on which protruded patterns are formed against the resist applied to the substrate, forcing a distal end of a peeling wedge into a part between the subs... | 11/16/2010 |
| 7820093 | Method for processing stamp material A method for processing a stamp material generally includes: heating one of a pressing member and a surface layer of the stamp material; pressing the surface layer of the stamp material using the pressing member; and cooling the stamp material to normal temperature.... | 10/26/2010 |
| 7811499 | Method for high density data storage and read-back An approach is presented for designing a polymeric layer for nanometer scale thermo-mechanical storage devices. Cross-linked polyaryletherketone polymers are used as the recording layers in atomic force data storage devices, giving significantly improved performance... | 10/12/2010 |
| 7780892 | Tampon applicator with improved fingergrip and method of making same The present invention provides a tampon applicator barrel having a fingergrip with one or more gripping structures that have an acute edge for improved gripping. Preferably, the one or more gripping structures are one or more embossed ring-like structures. The prese... | 08/24/2010 |
| 7780893 | Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks A method of patterning a substrate comprising first and second fields with a template, the template having a mold and a plurality of alignment forming areas and a plurality of template alignment marks, the method comprising: positioning a material on the first field... | 08/24/2010 |
| 7767129 | Imprint templates for imprint lithography, and methods of patterning a plurality of substrates The invention comprises methods of patterning a plurality of substrates, and imprint templates used in imprint lithography. In one implementation, a method of patterning a plurality of substrates includes providing an imprint template having a plurality of spaced fe... | 08/03/2010 |
| 7758791 | Find mold and method for regenerating fine mold A fine mold comprises a regeneration target film forming a convex part of a formation surface, and a light shielding unit that is configured deeper than a bottom of the formation surface and that regenerates the regeneration target film. A manufacturing cost of a pr... | 07/20/2010 |
| 7754131 | Device for transferring a pattern to an object A device (4) for transferring a pattern to an object (2). The invention relates especially to production of micro and nanostructures. The device comprises an alignment means (10) arranged in connection with a first contacting means (7) fo... | 07/13/2010 |
| 7736570 | Tool for generating microstructured surfaces A tool is described for generating a microstructured surface, comprising: a flexible matrix with a negative of the microstructure to be generated a pressure roller driveable over a surface, for pressing the matrix ... | 06/15/2010 |
| 7736571 | Polymer shrink tubes and novel uses therefor Novel polymer shrink tubes, such as fluoropolymer shrink tubes and novel uses thereof. The polymer shrink tubes include at least one three-dimensional pattern formed along at least a portion of the inner surface of the tube. The polymer shrink tubes can be used for,... | 06/15/2010 |
| 7708924 | Imprint lithography A lithographic apparatus is disclosed that has a template holder configured to hold an imprint template, a substrate table arranged to receive a substrate, a radiation output arranged to illuminate a part of the imprint template, and a detector configured to detect ... | 05/04/2010 |
| 7682545 | Embossing toughened silicone resin substrates This invention relates to a method of embossing a cured silicone resin thermoset substrate to imprint patterns onto the substrate from a master mold comprising (i) stacking a master mold with a cured silicone resin thermoset substrate such that the surface of the ma... | 03/23/2010 |
| 7682546 | Disk alignment apparatus and method for patterned media production A method for aligning a disk with an imprinting surface is described. In one embodiment, the method includes passively aligning an imprinting surface with the disk and imprinting the disk with the imprinting surface. A first air-bearing mandrel freely guides a first... | 03/23/2010 |
| 7678319 | Mold and molding apparatus using the same A molding apparatus for patterning a workpiece includes a mold having a pattern to be transferred to the workpiece, with the pattern including recesses, a first support member for supporting the mold, and a second support member, arranged opposite to the first suppo... | 03/16/2010 |
| 7670529 | Method and system for double-sided patterning of substrates The present invention is directed towards a method and a system of patterning first and second opposed sides of a substrate. The method and system may employ a mold assembly and obtaining a desired spatial relationship between the first and second opposed sides of t... | 03/02/2010 |
| 7670530 | Patterning substrates employing multiple chucks The present invention is directed towards a method for patterning first and second substrates in a nanoimprint lithography system, the method including, inter alia, positioning the first substrate on a first substrate chuck; positioning a nanoimprint material on the... | 03/02/2010 |
| 7641839 | Method for fabricating a three dimensional emblem A method for fabricating a three dimensional emblem is disclosed. An indentation is formed in the back surface of a piece of transparent material. Multiple colors are printed to form a pattern or emblem in the indentation. After printing, the indentation is filled w... | 01/05/2010 |
