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Class 257/E21.643 - With particular manufacturing method of vertical transistor structures, i.e., with channel vertical to substrate surface (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.632. This subclass
No. of patents: 50
Last issue date: 10/07/2008


1    
NumberTitleIssue Date
7432134Semiconductor device and method of fabricating the same
A semiconductor device 100 includes an element-forming region having gate electrode 108 formed therein, and a circumferential region formed in the outer circumference of the element-forming region and having an element-isolating region 118 forme...
10/07/2008
7364997Methods of forming integrated circuitry and methods of forming local interconnects
In one implementation, field oxide is grown within bulk semiconductive material in a first circuitry area and not over immediately adjacent bulk semiconductive material in a second circuitry area. The field oxide is etched from the first circuitry area. After the et...
04/29/2008
7329916DRAM cell arrangement with vertical MOS transistors
The invention is related to a DRAM cell arrangement with vertical MOS transistors. Channel regions arranged along one of the columns of a memory cell matrix are parts of a rib which is surrounded by a gate dielectric layer. Gate electrodes of the MOS transistors bel...
02/12/2008
7288815Semiconductor device and manufacturing method thereof
A semiconductor device (20, 21, 22), including: a channel region (4) of a first conductivity type formed at a surface layer portion of a semiconductor substrate (1); a source region (25) of a second conductivity type which is different fr...
10/30/2007
7282402Method of making a dual strained channel semiconductor device
According to the embodiments to the present disclosure, the process of making a dual strained channel semiconductor device includes integrating strained Si and compressed SiGe with trench isolation for achieving a simultaneous NMOS and PMOS performance enhancement. ...
10/16/2007
7271048Method for manufacturing trench MOSFET
A method of manufacturing a trench MOSFET with high cell density is disclosed. The method introduces a sidewall oxide spacer for narrowing the opening of the trench structure, thereby decreasing the cell pitch of the memory units. Moreover, the source structure is f...
09/18/2007
7229872Low voltage power MOSFET device and process for its manufacture
A trench type power MOSFET has a thin vertical gate oxide along its side walls and a thickened oxide with a rounded bottom at the bottom of the trench to provide a low RDSON and increased VDSMAX and VGSMAX and a reduced Miller capaci...
06/12/2007
6674099MISFET
A metal insulator semiconductor field effect transistor (MISFET) is disclosed comprising a source layer being made with a material having a source band-gap (EG2) and a source mid-gap value (EGM2), the source layer having a source Fermi-Level (EF2). A drai...
01/06/2004
6670694Semiconductor device
A surface orientation other than a (100) surface orientation is exposed to the surface portion of a silicon substrate having the (100) surface orientation, for example. A silicon epitaxial growth layer is formed only on a region containing a channel formi...
12/30/2003
6653181CMOS integrated circuit having vertical transistors and a process for fabricating same
A process for fabricating a CMOS integrated circuit with vertical MOSFET devices is disclosed. In the process, at least three layers of material are formed sequentially on a semiconductor substrate. The three layers are arranged such that the second layer...
11/25/2003
6632712Method of fabricating variable length vertical transistors
A process for fabricating vertical CMOS devices, featuring variable channel lengths, has been developed. Channel region openings are defined in composite insulator stacks, with the channel length of specific devices determined by the thickness of the comp...
10/14/2003
6610575Forming dual gate oxide thickness on vertical transistors by ion implantation
A method of structures having dual gate oxide thicknesses, comprising the following steps. A substrate having first and second pillars is provided. The first and second pillars each having an outer side wall and an inner side wall. At least one of the out...
08/26/2003
6580154Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction
Improved methods and structures are provided that are lateral to surfaces with a (110) crystal plane orientation such that an electrical current of such structures is conducted in the direction. Advantageously, improvements in hole carrier mobility ...
06/17/2003
6566202Integrated circuit having at least two vertical MOS transistors and method for manufacturing same
An integrated circuit having at least two vertical MOS transistors, and method for manufacturing same, wherein first source/drain regions of the two vertical MOS transistors are located in an upper region of sidewalls of a trench. A second source/drain re...
05/20/2003
6518112High performance, low power vertical integrated CMOS devices
A vertical Field Effect Transistor (FET) that may be an N-type FET (NFET) or a P-type FET (PFET); a multi-device vertical structure that may be two or more NFETs or two or more PFETs; logic gates including at least one vertical FET or at least one multi-d...
02/11/2003
6503784Double gated transistor
A semiconductor body-having a pair of vertical, double-gated CMOS transistors. An insulating layer extending horizontally beneath the surface of the semiconductor body such insulating layer being disposed beneath the pair of transistors. The transistors, ...
01/07/2003
6496034Programmable logic arrays with ultra thin body transistors
Structures and methods for programmable logic arrays are provided. In one embodiment, the programmable logic array includes a first logic plane and a second logic plane. The first logic plane receives a number of input signals. The first logic plane has a...
12/17/2002
6492232Method of manufacturing vertical semiconductor device
An n-channel device (10) and a p-channel device (11) are formed from a single epitaxial silicon layer (60,61). During the deposition of the single epitaxial silicon layer (60,61), dopants are added to the epitaxial reaction chamber and subsequently change...
12/10/2002
6483171Vertical sub-micron CMOS transistors on (110), (111), (311), (511), and higher order surfaces of bulk, SOI and thin film structures and method of forming same
A method for forming NMOS and PMOS transistors that includes cutting a substrate along a higher order orientation and fabricating deep sub-micron NMOS and PMOS transistors on the vertical surfaces thereof. The complementary NMOS and PMOS transistors form ...
11/19/2002
6461900Method to form a self-aligned CMOS inverter using vertical device integration
A method to form a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device is achieved. A substrate comprises silicon implanted oxide (SIMOX) wherein an oxide layer is sandwiched between underlying and overlying silicon laye...
10/08/2002
6459123Double gated transistor
A semiconductor body having a pair of vertical, double-gated CMOS transistors. An insulating layer extending horizontally beneath the surface of the semiconductor body such insulating layer being disposed beneath the pair of transistors. The transistors, ...
10/01/2002
6391698Forming complementary metal-oxide semiconductor with gradient doped source/drain
The present invention provides a method for forming a transistor with a gradient doped source/drain. The method comprises the following steps. First, two first N-wells are formed in a substrate and the first N-wells are separated in both sides of the subs...
05/21/2002
6376313Integrated circuit having at least two vertical MOS transistors and method for manufacturing same
An integrated circuit having at least two vertical MOS transistors, and method for manufacturing same, wherein first source/drain regions of the two vertical MOS transistors are located in an upper region of sidewalls of a trench. A second source/drain re...
04/23/2002
6372559Method for self-aligned vertical double-gate MOSFET
A method of forming a self-aligned vertical double-gate metal oxide semiconductor field effect transistor (MOSFET) device is provided that includes processing steps that are CMOS compatible. The method include the steps of growing an oxide layer on a surf...
04/16/2002
6344381Method for forming pillar CMOS
A method of forming a pillar CMOS FET device, especially an inverter, and the device so formed is provided. The method includes forming abutting N wells and P wells in a silicon substrate and then forming N+ and P+ diffusions in the ...
02/05/2002
6297531High performance, low power vertical integrated CMOS devices
A vertical Field Effect Transistor (FET) that may be an N-type FET (NFET) or a P-type FET (PFET); a multi-device vertical structure that may be two or more NFETs or two or more PFETS; logic gates including at least one vertical FET or at least one multi-d...
10/02/2001
6255699Pillar CMOS structure
A method of forming a pillar CMOS FET device, especially an inverter, and the device so formed is provided. The method includes forming abutting N wells and P wells in a silicon substrate and then forming N+ and P+ diffusions in the ...
07/03/2001
6245615Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction
Improved methods and structures are provided that are lateral to surfaces with a (110) crystal plane orientation such that an electrical current of such structures is conducted in the direction. Advantageously, improvements in hole carrier mobility ...
06/12/2001
6207977Vertical MISFET devices
The present invention relates to processes for fabrication of Vertical MISFET devices or a stack of several of such devices. The Vertical MISFET device comprises a highly doped drain region, a non or lowly doped channel region and a source region forming ...
03/27/2001
6127230Vertical semiconductor device and method of manufacturing the same
An n-channel device (10) and a p-channel device (11) are formed from a single epitaxial silicon layer (60,61). During the deposition of the single epitaxial silicon layer (60,61), dopants are added to the epitaxial reaction chamber and subsequently change...
10/03/2000
6107663Circuit and method for gate-body structures in CMOS technology
A circuit and method for an improved inverter is provided. The present invention capitalizes on opposing sidewalls and adjacent conductive sidewall members to conserve available surface space on the semiconductor chips. Additionally, the gate and body of ...
08/22/2000
6100123Pillar CMOS structure
A method of forming a pillar CMOS FET device, especially an inverter, and the device so formed is provided. The method includes forming abutting N wells and P wells in a silicon substrate and then forming N+ and P+ diffusions in th...
08/08/2000
6060911Circuit arrangement with at least four transistors, and method for the manufacture thereof
In the circuit arrangement two of the four vertical transistors are complementary to the remaining two transistors. Two of the transistors are respectively arranged at the same level. For this purpose, layer structures (St1, St2, St3, St4) are structured ...
05/09/2000
6060754Circuit and method for gate-body structures in CMOS technology
A circuit and method for an improved inverter is provided. The present invention capitalizes on opposing sidewalls and adjacent conductive sidewall members to conserve available surface space on the semiconductor chips. Additionally, the gate and body of ...
05/09/2000
6048776Semiconductor device and a method of fabricating the same
A method of fabricating a semiconductor device, comprises the steps of forming a trench in a semiconductor substrate by using a selective etching process; forming an insulating layer at least on the inner surface of the trench; forming a film containing s...
04/11/2000
6013545Method of manufacturing high-voltage metal-oxide-semiconductor device
A method of manufacturing a high-voltage metal-oxide-semiconductor device that uses trenches instead of a field oxide layer as an isolating structure, and employs a vertical layout rather than a horizontal layout so that more area is available for forming...
01/11/2000
5963800CMOS integration process having vertical channel
The present invention relates to processes for fabrictation of Vertical MISFET devices or a stack of several Vertical MISFET devices having high fabrication yield....
10/05/1999
5925909Three-dimensional complementary field effect transistor process and structures
A field effect transistor has a short gate and is fabricated by: doping the bottom surface of a depression to form a relatively lightly doped region in the bottom of the depression; forming the gate of the field effect transistor on the sidewall of the de...
07/20/1999
5920088Vertical MISFET devices
The present invention relates to Silicon Germanium-based Vertical MISFET devices allowing smaller device size and exhibiting significant advantages over prior devices related to the reduction of drain induced barrier lowering and parasitic capacitance and...
07/06/1999
5914504DRAM applications using vertical MISFET devices
The present invention relates to RAM circuits comprising memory cells and logic circuitry wherein each of the memory cells comprise at least one Vertical MISFET device comprising a stack of several layers a source layer, a channel layer, a drain layer and...
06/22/1999
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