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Class 257/E21.635 - With particular manufacturing method of gate conductor, e.g., particular materials, shapes (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.632. This subclass
No. of patents: 64
Last issue date: 09/09/2008


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NumberTitleIssue Date
6111298Etch stop layer formed within a multi-layered gate conductor to provide for reduction of channel length
A process is provided for forming a transistor gate conductor having an etch stop arranged at a depth below its upper surface such that the lateral width of the gate conductor above the etch stop may be exclusively narrowed to provide for reduction of tra...
08/29/2000
6110767Reversed MOS
A new method for fabricating a reversed MOS structure in order to provide latchup immunity in the manufacture of integrated circuits is described. An active area is provided in a semiconductor substrate separated from other active areas by isolation regio...
08/29/2000
6103559Method of making disposable channel masking for both source/drain and LDD implant and subsequent gate fabrication
A method is provided for fabricating a semiconductor device, the method including forming a first dielectric layer above a structure and forming an island of a sacrificial layer above the first dielectric layer. The method also includes introducing a firs...
08/15/2000
6096641Method of manufacturing semiconductor device
A tungsten nitride (6b) is provided also on side surface of a tungsten (6c), to increase an area where the tungsten (6c) and the tungsten nitride (6b) are in contact with each other. On a gate insulating film (2), a polysilicon side wall (5) having high a...
08/01/2000
6087211Method for forming a semiconductor device having non-volatile memory cells, High-voltage transistors, and low-voltage, deep sub-micron transistors
A semiconductor device having memory cells, high-voltage CMOS transistors, and low-voltage, deep sub-micron CMOS transistors is formed in a process that allows the same low-voltage device parameters to be used regardless of whether the low-voltage transis...
07/11/2000
6017784Manufacture method of semiconductor device with suppressed impurity diffusion from gate electrode
A method of manufacturing a semiconductor device having fine MOS transistors includes a step of forming a MOS transistor structure on a semiconductor substrate, the MOS transistor structure having an insulated gate electrode, and a step of depositing an i...
01/25/2000
5959333Reduction of dopant diffusion by the co-implantation of impurities into the transistor gate conductor
Diffusion of dopants within the gate of the transistor and/or the source/drain regions can be inhibited by the ion co-implantation of impurities in addition to the ion implantation of the n-type or p-type dopants. Implanting a combination of nitrogen and ...
09/28/1999
5933721Method for fabricating differential threshold voltage transistor pair
A method of establishing a differential threshold voltage during the fabrication of first and second IGFETs having like conductivity type is disclosed. A dopant is introduced into the gate electrode of each transistor of the pair. The dopant is differenti...
08/03/1999
5897349Method for fabricating a capped gate conductor
A gate structure in a CMOS is fabricated wherein the encapsulation material is self-aligned with the gate conductor and the gate channel. The gate conductor is formed subsequent to the device doping and heat cycles for formulation of the source and drain ...
04/27/1999
5885861Reduction of dopant diffusion by the co-implantation of impurities into the transistor gate conductor
Diffusion of dopants within the gate of the transistor and/or the source/drain regions can be inhibited by the ion co-implantation of impurities in addition to the ion implantation of the n-type or p-type dopants. Implanting a combination of nitrogen and ...
03/23/1999
5854115Formation of an etch stop layer within a transistor gate conductor to provide for reduction of channel length
A process is provided for forming a transistor gate conductor having an etch stop arranged at a depth below its upper surface such that the lateral width of the gate conductor above the etch stop may be exclusively narrowed to provide for reduction of tra...
12/29/1998
5843835Damage free gate dielectric process during gate electrode plasma etching
In a CMOS device uses a thin oxide film as a gate dielectric film, gate electrode plasma etching frequently induces gate dielectric damage. This invention discloses a process which can form a damage free gate dielectric even though there is plasma nonunif...
12/01/1998
5783469Method for making nitrogenated gate structure for improved transistor performance
A method of fabricating an integrated circuit in which nitrogen is incorporated into the gate dielectric and transistor gate. The method comprises the providing of a semiconductor substrate that has a p-well and a laterally displaced n-well, each includin...
07/21/1998
5654570CMOS gate stack
A gate structure in a CMOS is fabricated wherein the encapsulation material is self-aligned with the gate conductor and the gate channel. The gate conductor is formed subsequent to the device doping and heat cycles for formulation of the source and drain ...
08/05/1997
5612244Insulated gate semiconductor device having a cavity under a portion of a gate structure and method of manufacture
An insulated gate field effect transistor (10) having an reduced gate to drain capacitance and a method of manufacturing the field effect transistor (10). A dopant well (13) is formed in a semiconductor substrate (11). A gate oxide layer (26) is formed on...
03/18/1997
5563093Method of manufacturing fet semiconductor devices with polysilicon gate having large grain sizes
The present invention provides the method of manufacturing a dual-gate CMOS device which has high transconductance and improved breakdown voltage, in which depletion in the interface between a gate oxide and a gate electrode is prevented without the incre...
10/08/1996
5541132Insulated gate semiconductor device and method of manufacture
An insulated gate field effect transistor (10) having an reduced gate to drain capacitance and a method of manufacturing the field effect transistor (10). A dopant well (13) is formed in a semiconductor material (11). A gate oxide layer (26) is formed on ...
07/30/1996
5273914Method of fabricating a CMOS semiconductor devices
An ion implantation stopper is formed on a gate electrode extending on a substrate. When ions are implanted into the substrate to form an LDD layer or source and drain regions in the substrate, the stopper functions to prevent the gate electrode from bein...
12/28/1993
5036019Method of producing a complementary-type semiconductor device
A method of producing a MIS transistor such as a MOS transistor has a P type and an N type channel transistors. P type and N type well regions are provided with the N type and the P type channel transistors, respectively. Both the P type and the N type we...
07/30/1991
5030582Method of fabricating a CMOS semiconductor device
An ion implantation stopper is formed on a gate electrode extending on a substrate. When ions are implanted into the substrate to form an LDD layer or source and drain regions in the substrate, the stopper functions to prevent the gate electrode from bein...
07/09/1991
4978626LDD transistor process having doping sensitive endpoint etching
An LDD transistor is formed by using a process which insures that a layer of gate oxide is not inadvertently etched into and is not ruptured by static electrical charges. At least two thicknesses of gate electrode material of varying doping levels are for...
12/18/1990
4637836Profile control of boron implant
The ion implantation of a silicon structure isolated from a semiconductor substrate by a layer of silicon dioxide with boron ions to render it p type conductive is improved by initially doping the silicon with phosphorus ions. The presence of the phosphor...
01/20/1987
4462151Method of making high density complementary transistors
A simple process is provided which forms a bulk CMOS structure by depositing a layer of material which resists oxidation, e.g., a barrier layer of silicon nitride on an N- semiconductor substrate, forming a P well in the substrate through a given segment ...
07/31/1984
4420872Method of manufacturing a semiconductor device
A method of manufacturing an integrated circuit having at least an insulated gate field effect transistor (IGFET). Provided on the silicon surface are successively a gate oxide layer and a doped silicon layer which are patterned by etching by means of a s...
12/20/1983
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