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Class 257/E21.632 - Complementary field-effect transistors, e.g., CMOS (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.616. This subclass
No. of patents: 363
Last issue date: 10/28/2008


1                    
NumberTitleIssue Date
7442601Stress enhanced CMOS circuits and methods for their fabrication
A stress enhanced CMOS circuit and methods for its fabrication are provided. One fabrication method comprises the steps of forming an NMOS transistor and a PMOS transistor adjacent the NMOS transistor in a channel width direction, the PMOS transistor and the NMOS tr...
10/28/2008
7439124Method of manufacturing a semiconductor device and semiconductor device
Method of manufacturing a semiconductor device includes: forming a substrate protection film to cover an n-type FET forming region having a first gate electrode and a p-type FET forming region having a second gate electrode; opening the p-type FET forming region by ...
10/21/2008
7439105Metal gate with zirconium
A gate electrode (202) for a transistor including a metal gate structure (207) containing zirconium and a polycrystalline silicon cap (209) located there over. The metal gate structure (207) is located over a gate dielectric (205)....
10/21/2008
7435639Dual surface SOI by lateral epitaxial overgrowth
A semiconductor process and apparatus provide a planarized hybrid substrate (18) by exposing a buried oxide layer (80) in a first area (99), selectively etching the buried oxide layer (80) to expose a first semiconductor layer (70)...
10/14/2008
7427542Semiconductor device and method of manufacturing the same
A method of manufacturing a semiconductor device including a complementary metal oxide semiconductor (CMOS) and a bipolar junction transistor (BJT), the method comprising the steps of: forming a gate oxide layer on a substrate having a p-type and an n-type well; rem...
09/23/2008
7419864Semiconductor device and method of manufacturing the same
A semiconductor device includes a first n-type source/drain region 48a and a second p-type source/drain region 48b formed on a semiconductor substrate 20 away from side surfaces of first and second gate electrodes 39a...
09/02/2008
7413946Formation of standard voltage threshold and low voltage threshold MOSFET devices
Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within...
08/19/2008
7413939Method of growing a germanium epitaxial film on insulator for use in fabrication of CMOS integrated circuit
A method of fabricating a silicon-germanium CMOS includes preparing a silicon substrate wafer; depositing an insulating layer on the silicon substrate wafer; patterning and etching the insulating layer; depositing a layer of polycrystalline germanium on the insulati...
08/19/2008
7413944CMOS image sensor and method of manufacturing the same
In a CMOS image sensor manufacturing process, heavily doped p type impurity ions (for example, B) are implanted in a dummy moat region when the heavily doped p type impurity ions is implanted in a PMOS transistor region, so that metal ion contamination is removed. A...
08/19/2008
7405436Stressed field effect transistors on hybrid orientation substrate
A semiconductor structure having improved carrier mobility is provided. The semiconductor structures includes a hybrid oriented semiconductor substrate having at least two planar surfaces of different crystallographic orientation, and at least one CMOS device locate...
07/29/2008
7402477Method of making a multiple crystal orientation semiconductor device
A method of having transistors formed in enhanced performance crystal orientations begins with a wafer having a semiconductor substrate (12,52) of a first surface orientation, a thin etch stop layer (14,54) on the semiconductor substrate, a buried oxid...
07/22/2008
7402476Method for forming an electronic device
An electronic device is formed by forming a first and second layer overlying a plurality of transistor locations. An etch is performed to remove portions of the first and second layers to expose a portion of the plurality of transistor locations, while other portion...
07/22/2008
7396755Process and integration scheme for a high sidewall coverage ultra-thin metal seed layer
The present invention provides a method of forming a metal seed layer 100. The method includes physical vapor deposition of seed metal 200 within an opening 140 located in a dielectric layer 135 of a substrate 110. The method also ...
07/08/2008
7393736Atomic layer deposition of ZrHfSnOfilms as high k gate dielectrics
The use of atomic layer deposition (ALD) to form a nanolaminate dielectric of zirconium oxide (ZrO2), hafnium oxide (HfO2) and tin oxide (SnO2) acting as a single dielectric layer with a formula of ZrXHfYSn...
07/01/2008
7384833Stress liner for integrated circuits
In one embodiment, a self-aligned contact (SAC) trench structure is formed through a dielectric layer to expose an active region of a MOS transistor. The SAC trench structure not only exposes the active region for electrical connection but also removes portions of a...
06/10/2008
7378306Selective silicon deposition for planarized dual surface orientation integration
A semiconductor process and apparatus provide a planarized hybrid substrate (225) having a more uniform polish surface (300) by thickening an SOI semiconductor layer (210) in relation to a previously or subsequently formed epitaxial silicon laye...
05/27/2008
7368339Method and apparatus providing CMOS imager device pixel with transistor having lower threshold voltage than other imager device transistors
A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of about 0.3 V to less than about 0.7 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted region...
05/06/2008
7368796Metal gate engineering for surface P-channel devices
A semiconductor device, such as a CMOS device, having gates with a high work function in PMOS regions and low work functions in NMOS regions and a method of producing the same. Using nitrogen implantation or plasma annealing, a low work function W (or CoSix
05/06/2008
7364959Method for manufacturing a MOS transistor
A method for manufacturing a MOS transistor integrated into a chip of semi-conductive material comprising a first and a second active region which extend from the inside of the chip to a surface of the chip. The method comprises the steps of: a) forming a layer of i...
04/29/2008
7364972Semiconductor device
A semiconductor device comprises a semiconductor substrate, a first circuit formed on the substrate, and a second circuit connected to the first circuit as an input/output portion thereof and powered by a voltage higher than that for the first circuit, the first cir...
04/29/2008
7361932Semiconductor device and method for fabricating the same
A semiconductor device of a dual-gate structure including a P-channel type field-effect transistor formed at a first region of a substrate and an N-channel type field-effect transistor formed at a second region of the substrate, includes a gate electrode including a...
04/22/2008
7361538Transistors and methods of manufacture thereof
Transistors and methods of manufacture thereof are disclosed. A workpiece is provided, a gate dielectric is formed over the workpiece, and a gate is formed over the gate dielectric by exposing the workpiece to a precursor of hafnium (Hf) and a precursor of silicon (...
04/22/2008
7354836Technique for forming a strained transistor by a late amorphization and disposable spacers
By using a disposable spacer approach for forming drain and source regions prior to an amorphization process for re-crystallizing a semiconductor region in the presence of a stressed spacer layer, possibly in combination with enhanced anneal techniques, such as lase...
04/08/2008
7348202CMOS image sensor and method for fabricating the same
An image sensor includes a semiconductor substrate; a pixel array disposed on the semiconductor substrate; and an insulating interlayer, formed on the semiconductor substrate, having a trench coinciding with the disposition of the pixel array, the trench having unif...
03/25/2008
7348231Methods of fabricating semiconductor devices having insulating layers with differing compressive stresses
Methods of fabricating semiconductor devices are provided. An NMOS transistor and a PMOS transistor are provided on a substrate. The NMOS transistor is positioned on an NMOS region of the substrate and the PMOS transistor is positioned on a PMOS region of the substr...
03/25/2008
7344933Method of forming device having a raised extension region
A method is disclosed of forming an extension region for a transistor having a gate structure overlying a compound semiconductor layer. An anneal is used either before or after deep source/drain implantation to diffuse a dopant from a raised region adjacent the gate...
03/18/2008
7344929Method for manufacturing an integrated circuit using a capping layer having a degree of reflectivity
The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit. The method for manufacturing the semiconductor device, among other steps, includes forming a capping layer (210) over a tran...
03/18/2008
7344934CMOS transistor and method of manufacture thereof
A CMOS device with transistors having different gate dielectric materials and a method of manufacture thereof. An aluminum-based material is used as a gate dielectric material of a PMOS device, and a hafnium-based material is used as a gate dielectric material of an...
03/18/2008
7341904Capacitorless 1-transistor DRAM cell and fabrication method
A semiconductor device is fabricated by forming a trench in a semiconductor body. A region of dielectric material is formed within at least a lower portion of the trench. An upper portion of the semiconductor body is doped. A cutout is formed in the semiconductor ma...
03/11/2008
7332433Methods of modulating the work functions of film layers
Methods for fabricating two metal gate stacks with varying work functions for complementary metal oxide semiconductor (CMOS) devices are provided A first metal layer may be deposited onto a gate dielectric, followed by the deposition of a second metal layer, where t...
02/19/2008
7323377Increasing self-aligned contact areas in integrated circuits using a disposable spacer
In one embodiment, a method of fabricating an integrated circuit includes the steps of: (i) forming composite spacers on sidewalls of a transistor gate, each of the composite spacers comprising a first liner having a stepped portion and a disposable spacer material ...
01/29/2008
7314788Standard cell back bias architecture
An apparatus including, in one embodiment, a CMOS device cell including at least first and second CMOS transistors having first and second CMOS transistor doped regions in first and second doped wells, respectively, wherein each of the first and second CMOS transist...
01/01/2008
7309628Method of forming a semiconductor device
A semiconductor device is formed as part of an integrated circuit. The semiconductor device, which is formed in an active semiconductor layer, is surrounded by a guardian that provides a diffusion barrier against contaminants and also provides assistance in avoiding...
12/18/2007
7297585Method of manufacturing semiconductor device having impurity region under isolation region
In formation of a source/drain region of an NMOS transistor, a gate-directional extension region of an N+ block region in an N+ block resist film prevents a well region located under the g...
11/20/2007
7297584Methods of fabricating semiconductor devices having a dual stress liner
In a semiconductor device having a dual stress liner for improving electron mobility, the dual stress liner includes a first liner portion formed on a PMOSFET and a second liner portion formed on an NMOSFET. The first liner portion has a first compressive stress, an...
11/20/2007
7288804Electrically programmable π-shaped fuse structures and methods of fabrication thereof
Electrically programmable fuse structures for an integrated circuit and methods of fabrication thereof are presented, wherein the electrically programmable fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The first te...
10/30/2007
7282402Method of making a dual strained channel semiconductor device
According to the embodiments to the present disclosure, the process of making a dual strained channel semiconductor device includes integrating strained Si and compressed SiGe with trench isolation for achieving a simultaneous NMOS and PMOS performance enhancement. ...
10/16/2007
7274055Method for improving transistor performance through reducing the salicide interface resistance
An embodiment of the invention reduces the external resistance of a transistor by utilizing a silicon germanium alloy for the source and drain regions and a nickel silicon germanium self-aligned silicide (i.e., salicide) layer to form the contact surface of the sour...
09/25/2007
7271045Etch stop and hard mask film property matching to enable improved replacement metal gate process
A method including forming a hard mask and an etch stop layer over a sacrificial material patterned as a gate electrode, wherein a material for the hard mask and a material for the etch stop layer are selected to have a similar stress property; removing the material...
09/18/2007
7268029Method of fabricating CMOS transistor that prevents gate thinning
Provided is a method of fabricating a CMOS transistor in which, after a polysilicon layer used as a gate is formed on a semiconductor substrate, a photoresist pattern that exposes an n-MOS transistor region is formed on the polysilicon layer. An impurity is implante...
09/11/2007
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