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...that the inventor of the electric motor was a blacksmith named Thomas Davenport? Described as "a brilliantly unsuccessful inventor", Davenport invented the first rotary electric motor. In 1836 he headed out -- on foot -- from his Vermont home to file a patent application at the Patent Office in Washington, D.C. By the time he got there, he had squandered away his money and couldn't afford the $30 filing fee so he turned around and went home. When he later mailed in his application with money he'd raised, the Patent office was destroyed in a fire. He did finally get credit for his invention on Feb. 5, 1837.

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Class 257/E21.462 - Using physical deposition, e.g., vacuum deposition, sputtering (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.461. This
No. of patents: 88
Last issue date: 08/19/2008


1      
NumberTitleIssue Date
7413998Biased pulse DC reactive sputtering of oxide films
A biased pulse DC reactor for sputtering of oxide films is presented. The biased pulse DC reactor couples pulsed DC at a particular frequency to the target through a filter which filters out the effects of a bias power applied to the substrate, protecting the pulsed...
08/19/2008
7381657Biased pulse DC reactive sputtering of oxide films
A biased pulse DC reactor for sputtering of oxide films is presented. The biased pulse DC reactor couples pulsed DC at a particular frequency to the target through a filter which filters out the effects of a bias power applied to the substrate, protecting the pulsed...
06/03/2008
7297642Sputter-deposited rare earth element-doped silicon oxide film with silicon nanocrystals for electroluminescence applications
A method is provided for forming a rare earth (RE) element-doped silicon (Si) oxide film with nanocrystalline (nc) Si particles. The method comprises: providing a first target of Si, embedded with a first rare earth element; providing a second target of Si; co-sputt...
11/20/2007
6649434Method of manufacturing semiconductor device having ZnO based oxide semiconductor layer
In the case in which a ZnO based oxide semiconductor layer is to be hetero-epitaxially grown on a substrate formed of a material which is different from that of a ZnO based oxide semiconductor, the ZnO based oxide semiconductor layer is grown at a high te...
11/18/2003
6624441Homoepitaxial layers of p-type zinc oxide and the fabrication thereof
A semiconductor structure for providing an epitaxial zinc oxide layer having p-type conduction for semiconductor device manufacture and methods of depositing the p-type zinc oxide layer. A zinc oxide layer is deposited epitaxially by molecular beam epitax...
09/23/2003
6610141Zinc oxide films containing p-type dopant and process for preparing same
A p-type oxide film and a process for preparing the film and p-n or n-p junctions is disclosed. In a preferred embodiment, a p-type zinc oxide film contains arsenic and is grown on a gallium arsenide substrate. The p-type oxide film has a net acceptor con...
08/26/2003
6368983Multi-layer wafer fabrication
The invention provides a method of fabricating a wafer including growing a single crystal layer comprising a III-V compound in a first chamber at a temperature above 350° C. A temperature of a surface of the single crystal layer is reduced to below about...
04/09/2002
6342313Oxide films and process for preparing same
A p-type oxide film and a process for preparing the film and p-n or n-p junctions is disclosed. In a preferred embodiment, a p-type zinc oxide film contains arsenic and is grown on a gallium arsenide substrate. The p-type oxide film has a net acceptor con...
01/29/2002
6206962Semiconductor light emitting device and method of manufacturing same
An n-type cladding layer, the first guiding layer, an active layer, the second guiding layer, a p-type cladding layer, a backing layer, a contact layer, a superlattice layer and a cap layer are stacked in this order on an n-type substrate. The cap layer c...
03/27/2001
6126740Solution synthesis of mixed-metal chalcogenide nanoparticles and spray deposition of precursor films
A colloidal suspension comprising metal chalcogenide nanoparticles and a volatile capping agent. The colloidal suspension is made by reacting a metal salt with a chalcogenide salt in an organic solvent to precipitate a metal chalcogenide, recovering the m...
10/03/2000
6045614Method for epitaxial growth of twin-free, (111)-oriented II-VI alloy films on silicon substrates
A method is provided for depositing a (111)-oriented heteroepitaxial II-VI alloy film on Si substrates. The (111)-oriented heteroepitaxial II-VI alloy film may comprise II-VI semiconductor and/or II-VI semimetal. As such, the method of the present inventi...
04/04/2000
6043141Method for in situ growth of p-type doped group II-VI semiconductor films
A method of growing a p-type doped Group II-VI semiconductor film includes the steps of forming a lattice comprising a Group II material and a Group VI material wherein a cation-rich condition is established at a surface of the lattice. The method further...
03/28/2000
6036772Method for making semiconductor device
A method for making a semiconductor device comprises: depositing at least one Group II-VI compound semiconductor layer comprising at least one Group II element selected from the group consisting of zinc, magnesium, manganese, beryllium, cadmium and mercur...
03/14/2000
6001669Method for producing II-VI compound semiconductor epitaxial layers having low defects
Epitaxial layers of II-VI semiconductor compounds having low incidence of lattice defects such as stacking faults are produced by first depositing a fraction of a monolayer of the cation species of the compound, followed by depositing a thin layer of the ...
12/14/1999
5994642Method for preparing CdTe film and solar cell using the same
A method for forming a CdTe film of good quality by an improved close-spaced sublimation process is disclosed. This method comprises: a step of applying a paste which contains material for CdTe semiconductor on a supporting member, thereby to form a coati...
11/30/1999
5989339MBE system and semiconductor device fabricated, using same
A molecular beam epitaxy system having a plurality of chambers which contain at least a first chamber and a second chamber. The first chamber is used to form II-VI column compound semiconductor layers not containing Te. The second chamber is used to form ...
11/23/1999
5976958Method for growth of in situ p-type semiconductor films using a group V flux
A method of growing a p-type doped Group II-VI semiconductor film includes the steps of forming a lattice comprising a Group II material and a Group VI material and generating a first Group V flux by evaporating a solid Group V source material. The first ...
11/02/1999
5879962III-V/II-VI Semiconductor interface fabrication method
A method for repeatably fabricating GaAs/ZnSe and other III-V/II-VI semiconductor interfaces with relatively low stacking fault densities in II-VI semiconductor devices such as laser diodes. The method includes providing a molecular beam epitaxy (MBE) sys...
03/09/1999
5874349Multi-layer structure for II-VI group compound semiconductor and method for forming the same
In a method of forming a II-VI compound semiconductor thin film on an InP substrate, a layer of III-V compound semiconductor mixed crystal is first formed on the InP substrate. The desorption rate of a group V element constituting the III-V compound semic...
02/23/1999
5871630Preparation of copper-indium-gallium-diselenide precursor films by electrodeposition for fabricating high efficiency solar cells
A photovoltaic cell exhibiting an overall conversion efficiency of 13.6% is prepared from a copper-indium-gallium-diselenide precursor thin film. The film is fabricated by first simultaneously electrodepositing copper, indium, gallium, and selenium onto a...
02/16/1999
5865897Method of producing film of nitrogen-doped II-VI group compound semiconductor
A film of a II-VI group compound semiconductor of at least one of elements belonging to the II group of the periodic table and at least one of elements belonging to the VI group of the periodic table is deposited on a substrate. When the film is deposited...
02/02/1999
5834361Multi-layer structure for II-VI group compound semiconductor on an InP substrate and method for forming the same
In a method of forming a II-VI compound semiconductor thin film on an InP substrate, a layer of III-V compound semiconductor mixed crystal is first formed on the InP substrate. The desorption rate of a group V element constituting the III-V compound semic...
11/10/1998
5780322Method for growing a II-VI compound semiconductor layer containing cadmium and method for fabricating a semiconductor laser
A method for growing a II-VI compound semiconductor layer containing Cd, such as Zn1-x Cdx Se, by a molecular beam epitaxy method is disclosed. During the growth, the ratio of the intensity of molecular beams of a group VI element to...
07/14/1998
5773085Method of manufacturing ternary compound thin films
One kind of element belonging to I group or II group and one kind of binary compound including one kind of element belonging to III group and one kind of element selected from the group consisting of S, Se, Te and O are evaporated respectively by means of...
06/30/1998
5766345Epitaxial growth method of semiconductor
An epitaxial growth method of semiconductor can reliably avoid irregularities from being produced when a II-VI compound semiconductor is grown epitaxially. When this method is applied to a method of manufacturing a semiconductor light-emitting device, it ...
06/16/1998
5711803Preparation of a semiconductor thin film
A process for the preparation of a semiconductor film. The process comprises depositing nanoparticles of a semiconductor material onto a substrate whose surface temperature during nanoparticle deposition thereon is sufficient to cause substantially simult...
01/27/1998
5712187Variable temperature semiconductor film deposition
A method of depositing a semiconductor material on a substrate. The method sequentially comprises (a) providing the semiconductor material in a depositable state such as a vapor for deposition on the substrate; (b) depositing the semiconductor material on...
01/27/1998
5707900Method of heat-treating semiconductor crystal of a group II-group VI compound
Known MBE methods of heat-treating semiconductor crystal of a group II-group VI compound for crystal growth are accompanied by a problem of releasing the component elements during the heat-treatment to produce a coarse crystal surface that adversely affec...
01/13/1998
5637530II-VI compound semiconductor epitaxial layers having low defects, method for producing and devices utilizing same
Epitaxial layers of II-VI semiconductor compounds having low incidence of lattice defects such as stacking faults are produced by first depositing a fraction of a monolayer of the cation species of the compound, followed by depositing a thin layer of the ...
06/10/1997
5574296Doping of IIB-VIA semiconductors during molecular beam epitaxy electromagnetic radiation transducer having p-type ZnSe layer
An electromagnetic radiation transducer is provided having a p-type ZnSe layer and an n-type layer. The p-type ZnSe layer has a net donor to net acceptor ratio (ND /NA) of less than or equal to about 0.8. The net acceptor concentrati...
11/12/1996
5511509Apparatus for p-type doping of semiconductor structures formed of group II and group VI elements
A method and apparatus (10) for forming a p-doped layer (68, 80, 92) of Group II and Group VI elements by molecular beam epitaxial process in which a nitrogen dopant is introduced as the layer (68, 80, 92) is being grown. In one embodiment, molecular nitr...
04/30/1996
5508522Method for producing a group II-VI compound semiconductor thin film and a group II-VI compound semiconductor device
A method for fabricating a semiconductor thin film is disclosed. The method includes the step of epitaxially growing a semiconductor layer made of a group II-VI compound semiconductor to have a thickness of at least one atomic layer or more, on a main pla...
04/16/1996
5399503Method for growing a HgCdTe epitaxial layer on a semiconductor substrate
A method for growing an epitaxial layer of a group II-VI tenary or quaternary compound on a substrate. In particular a HgCdTe semiconductor layer is grown on a substrate such as sapphire which does not interdiffuse with the materials in the semiconductor ...
03/21/1995
5398641Method for p-type doping of semiconductor structures formed of group II and group VI elements
A method and apparatus (10) for forming a p-doped layer (68, 80, 92) of Group II and Group VI elements by molecular beam epitaxial process in which a nitrogen dopant is introduced as the layer (68, 80, 92) is being grown. In one embodiment, molecular nitr...
03/21/1995
5396862Method of manufacturing a compound semiconductor
A compound semiconductor thin film is grown on a compound semiconductor surface, which is cleaned by irradiating the surface with gas containing at least hydrogen molecules and by efficiently removing contaminant on the surface at low temperature. A beam ...
03/14/1995
5395791Growth of II VI laser diodes with quantum wells by atomic layer epitaxy and migration enhanced epitaxy
A method for using atomic layer epitaxy (ALE) and/or migration enhanced epitaxy (MEE) to grow high efficiency quantum wells in II-VI laser diodes. The substrate and previously grown layers of the laser diode are heated to a temperature less than or equal ...
03/07/1995
5372970Method for epitaxially growing a II-VI compound semiconductor
A method for epitaxially growing a II-VI compound semiconductor according to this invention comprises the steps of epitaxially growing a GaAsx Se1-x layer on a GaAs substrate and epitaxially growing a ZnSe layer or a compound semicon...
12/13/1994
5248631Doping of IIB-VIA semiconductors during molecular beam epitaxy using neutral free radicals
A method and apparatus for enhanced doping of IIB-VIA semiconductors through the use of a free-radical source is described. The process involves the simultaneous production of beams of free-radicals together with group IIB molecules or atoms and group VIA...
09/28/1993
5204283Method of growth II-VI semiconducting compounds
A high-purity II-VI semiconducting compound can be produced by initially preparing a substrate of a II-VI semiconducting compound by a chemical transport method with a halogen as transport medium and then epitaxially growing a layer of a II-VI compound on...
04/20/1993
5100832Process for preparing epitaxial compound semiconductor
A process for preparing a doped epitaxial compound semiconductor on a substrate by molecular beam epitaxy, the molecular beam epitaxy being effected under the irradiation of the substrate surface with a specific electromagnetic radiation....
03/31/1992
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