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Class 257/E21.375 - Silicon vertical transistor (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.037. This
No. of patents: 531
Last issue date: 10/21/2008


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NumberTitleIssue Date
7439572Stacked gate memory cell with erase to gate, array, and method of manufacturing
A stacked gate nonvolatile memory floating gate device has a control gate. Programming of the cell in the array is accomplished by hot channel electron injecton from the drain to the floating gate. Erasure occurs by Fowler-Nordheim tunneling of electrons from the fl...
10/21/2008
7439137Method for manufacturing semiconductor device
In a MOSFET, after an element region is formed, a wiring layer is formed subsequently to a barrier metal layer, and hydrogen annealing is performed. However, in the case of an n-channel MOSFET, a threshold voltage is lowered due to an occlusion characteristic of the...
10/21/2008
7439558Method and system for controlled oxygen incorporation in compound semiconductor films for device performance enhancement
A method and system for providing a bipolar transistor is described. The method and system include providing a compound base region, providing an emitter region coupled with the compound base region, and providing a collector region coupled with the compound base re...
10/21/2008
7414298Super self-aligned collector device for mono-and hetero bipolar junction transistors, and method of making same
The invention relates to a process of forming a compact bipolar junction transistor (BJT) that includes forming a self-aligned collector tap adjacent the emitter stack and an isolation structure. A base layer is formed from epitaxial silicon that is disposed in the ...
08/19/2008
7410856Methods of forming vertical transistors
A vertical transistor forming method includes forming a first pillar above a first source/drain and between second and third pillars, providing a first recess between the first and second pillars and a wider second recess between the first and third pillars, forming...
08/12/2008
7364997Methods of forming integrated circuitry and methods of forming local interconnects
In one implementation, field oxide is grown within bulk semiconductive material in a first circuitry area and not over immediately adjacent bulk semiconductive material in a second circuitry area. The field oxide is etched from the first circuitry area. After the et...
04/29/2008
7347228Method of making semiconductor devices
A method for fabricating semiconductor device is provided. A high stress layer formed on, under or on both sides of the transistors of the semiconductor device is employed as a cap layer. A specific region is then defined through photo resistor mask, and the stress ...
03/25/2008
7288815Semiconductor device and manufacturing method thereof
A semiconductor device (20, 21, 22), including: a channel region (4) of a first conductivity type formed at a surface layer portion of a semiconductor substrate (1); a source region (25) of a second conductivity type which is different fr...
10/30/2007
7276754Annular gate and technique for fabricating an annular gate
A memory structure having a vertically oriented access transistor with an annular gate region and a method for fabricating the structure. More specifically, a transistor is fabricated such that the channel of the transistor extends outward with respect to the surfac...
10/02/2007
7271048Method for manufacturing trench MOSFET
A method of manufacturing a trench MOSFET with high cell density is disclosed. The method introduces a sidewall oxide spacer for narrowing the opening of the trench structure, thereby decreasing the cell pitch of the memory units. Moreover, the source structure is f...
09/18/2007
7271067Voltage sustaining layer with opposite-doped islands for semiconductor power devices
A semiconductor high-voltage device comprising a voltage sustaining layer between a n+-region and a p+-region is provided, which is a uniformly doped n (or p)-layer containing a plurality of floating p (or n)-islands. The effect of the floating islands is to absorb ...
09/18/2007
7259048Vertical replacement-gate silicon-on-insulator transistor
An architecture for creating a vertical silicon-on-insulator MOSFET. Generally, an integrated circuit structure includes a semiconductor area with a major surface formed along a plane and a first source/drain contact region formed in the surface. A relatively thin s...
08/21/2007
7253070Transistor structure with minimized parasitics and method of fabricating the same
A transistor having minimized parasitics is provided including an emitter having a recessed extrinsic emitter portion atop an intrinsic emitter portion; a base including an intrinsic base portion in electrical contact with the intrinsic emitter portion and an extrin...
08/07/2007
7208370Method for fabricating a vertical transistor in a trench, and vertical transistor
To fabricate a vertical transistor, a trench is provided, the side wall of which is formed by a semiconductor substrate in single crystal form and the base of which is formed by a polycrystalline semiconductor substrate. A transition region is arranged between the s...
04/24/2007
6703686Semiconductor device
An n-type low impurity concentration semiconductor layer is provided, by epitaxial growth or the like, on a p-type semiconductor substrate. In order to vertically form a semiconductor device in the low impurity concentration semiconductor layer, at least ...
03/09/2004
6703685Super self-aligned collector device for mono-and hetero bipolar junction transistors
The invention relates to a process of forming a compact bipolar junction transistor (BJT) that includes forming a self-aligned collector tap adjacent the emitter stack and an isolation structure. A base layer is formed from epitaxial silicon that is dispo...
03/09/2004
6703283Discontinuous dielectric interface for bipolar transistors
A process for forming at least one interface region between two regions of semiconductor material. At least one region of dielectric material comprising nitrogen is formed in the vicinity of at least a portion of a boundary between the two regions of semi...
03/09/2004
6692982Optical semiconductor integrated circuit device and manufacturing method for the same
In an optical semiconductor integrated circuit device in which a vertical pnp transistor and a photodiode are formed, the preferred embodiments of the present invention eliminates difficulty in performance improvement of the two elements. In an illustrati...
02/17/2004
6686251Method for fabricating a bipolar transistor having self-aligned emitter and base
A method for forming a self-aligned bipolar transistor includes the steps of combination etching a silicon substrate in an opening to form a concave surface on the silicon substrate, and forming an intrinsic base and an associated emitter on the concave s...
02/03/2004
6673703Method of fabricating an integrated circuit
A method of fabricating an integrated circuit including a monocrystalline silicon substrate, a layer of polycrystalline silicon on the top surface of the substrate and doped with at least two dopants with different rates of diffusion, in which method anne...
01/06/2004
6660570Method of fabricating a high voltage semiconductor device using SIPOS
A high voltage semiconductor device including a semiconductor substrate on which a semi-insulating polycrystalline silicon layer is formed to alleviate electric field concentration in a field region, is disclosed. A thermal oxide layer is formed on the se...
12/09/2003
6657242Trench-isolated bipolar devices
In order to produce an electrical connection to an inner layer such as a bottom diffusion (103), which has a good electrical conductivity and is located inside a bipolar semiconductor device isolated by trenches (119) and which for example forms a subcoll...
12/02/2003
6657281Bipolar transistor with a low K material in emitter base spacer regions
The present invention provides a bipolar transistor located on a semiconductor wafer substrate. The bipolar transistor may comprise a collector located in the semiconductor wafer substrate, a base located in the collector, and an emitter located on the ba...
12/02/2003
6656811Carbide emitter mask etch stop
Bipolar transistors and methods for fabricating bipolar transistors are disclosed wherein an emitter-base dielectric stack is formed between emitter and base structures, comprising a carbide layer situated between first and second oxide layers. The carbid...
12/02/2003
6649983Vertical bipolar transistor formed using CMOS processes
A vertical bipolar transistor is described which utilizes ion implantation steps which are used to form an nMOS field effect device and a pMOS field effect device. The implantation steps form an n-well, a p-well region, a pocket base region and an emitter...
11/18/2003
6646320Method of forming contact to poly-filled trench isolation region
Existing polysilicon emitter technology is used to contact poly fill in a trench isolation structure. A standard single poly emitter window process is followed. An "emitter window" is masked directly over the polysilicon trench fill. Heavily doped single ...
11/11/2003
6642121Control of amount and uniformity of oxidation at the interface of an emitter region of a monocrystalline silicon wafer and a polysilicon layer formed by chemical vapor deposition
A method of controlling the quantity and uniformity of distribution of bonded oxygen atoms at the interface between the polysilicon and the monocrystalline silicon includes carrying out, after having loaded the wafer inside the heated chamber of the react...
11/04/2003
6642096Bipolar transistor manufacturing
A method of manufacturing a bipolar transistor in a single-crystal silicon substrate of a first conductivity type, including a step of carbon implantation at the substrate surface followed by an anneal step, before forming, by epitaxy, the transistor base...
11/04/2003
6630377Method for making high-gain vertical bipolar junction transistor structures compatible with CMOS process
An improved NPN bipolar transistor integratable with CMOS FET processing is achieved. The transistor is formed on a substrate using a CMOS process and one additional masking and implant step. The CMOS N wells are used to form the collector contacts (reach...
10/07/2003
6624497Semiconductor device with a reduced mask count buried layer
An N type buried layer is formed, in one embodiment, by a non selective implant on the surface of a wafer and later diffusion. Subsequently, the wafer is masked and a selective P type buried layer is formed by implant and diffusion. The coefficient of dif...
09/23/2003
6607961Method of definition of two self-aligned areas at the upper surface of a substrate
A method for defining, on the upper surface of a substrate, two self-aligned areas, including the steps of depositing a protective layer; depositing a covering layer; opening the protective and covering layers at a location substantially corresponding to ...
08/19/2003
6602755Method for manufacturing a compact bipolar transistor structure
A bipolar transistor structure that includes a semiconductor material substrate that has a bottom substrate and base region of a first conductivity type and a buried layer, collector region and sink region of a second conductivity type. The substrate has ...
08/05/2003
6600211Bipolar transistor constructions
The invention includes a bipolar transistor construction having a collector region, emitter region, and base region extending within a semiconductive material substrate. The construction further comprises separate access regions associated with the base r...
07/29/2003
6590273Semiconductor integrated circuit device and manufacturing method thereof
In the semiconductor integrated circuit device, a first P+ type buried layer formed as an anode region and an N+ type diffused region formed in a cathode region are spaced from each other in the direction of the depth. This makes it ...
07/08/2003
6569744Method of converting a metal oxide semiconductor transistor into a bipolar transistor
The present invention provides a method of manufacturing a bipolar transistor. The method includes producing an opening in a dielectric layer located over a substrate and forming a collector in the substrate by implanting a first dopant through the openin...
05/27/2003
6569730High voltage transistor using P+ buried layer
A new design for a high voltage bipolar transistor is disclosed. Instead of a buried subcollector (which would be N+ in an NPN device), a buried P+ layer is used. The presence of this P+ layer results in pinch-off between itself and the bipolar base. This...
05/27/2003
6551890Method of manufacturing a semiconductor device comprising a bipolar transistor and a capacitor
A method of manufacturing a semiconductor device comprising a poly-emitter transistor (1) and a capacitor (2). A base electrode (14), a first electrode (16, 37) and an emitter window (18) are formed at the same time in a first polysilicon layer (13) cover...
04/22/2003
6551891Process for fabricating a self-aligned vertical bipolar transistor
The fabrication process comprises a phase of producing a base region having an extrinsic base and an intrinsic base, and a phase of producing an emitter region comprising an emitter block having a narrower lower part located in an emitter window provided ...
04/22/2003
6548337Method of manufacturing a high gain bipolar junction transistor with counterdoped base in CMOS technology
A method is described for forming a high gain bipolar junction transistor in a optimized CMOS integrated circuit. The bipolar junction transistor comprises a compensated base region (130) which is formed by forming the p-well region (20) and the n-well re...
04/15/2003
6538294Trenched semiconductor device with high breakdown voltage
An arrangement in a semiconductor component includes a highly doped layer on a substrate layer and is delimited by at least one trench extending from the surface of the component through the highly doped layer. A sub-layer between the substrate layer and ...
03/25/2003
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