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Class 257/E21.371 - Heterojunction transistor (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.37. This subclass
No. of patents: 221
Last issue date: 04/15/2008


1            
NumberTitleIssue Date
7358132Self-aligned bipolar semiconductor device and fabrication method thereof
A self-aligned bipolar semiconductor device and a fabrication method thereof are provided. After a silicon layer and a collector contact are formed on a buried collector layer, an oxide dummy pattern is formed on the silicon layer to define both an extrinsic base an...
04/15/2008
7319061Method for fabricating electronic device
In a method for fabricating an electronic device including a transistor with a drain extension structure, a correspondence between a size of a gate electrode of the transistor and ion implantation conditions or heat treatment conditions for forming the drain extensi...
01/15/2008
7297589Transistor device and method
A method for making a heterojunction bipolar transistor includes the following steps: forming a heterojunction bipolar transistor by depositing, on a substrate, subcollector, collector, base, and emitter regions of semiconductor material; the step of depositing the ...
11/20/2007
7282416Method for fabricating electronic device
In a method for fabricating an electronic device including a transistor with a drain extension structure, a correspondence between a size of a gate electrode of the transistor and ion implantation conditions or heat treatment conditions for forming the drain extensi...
10/16/2007
7242071Semiconductor structure
A structure comprises a deep sub-collector buried in a first epitaxial layer and a near sub-collector buried in a second epitaxial layer. The structure further comprises a deep trench isolation structure isolating a region which is substantially above the deep sub-c...
07/10/2007
7202515Heterojunction bipolar transistor and manufacturing method thereof
In the method for manufacturing a heterojunction bipolar transistor, a collector contact layer, a collector layer, a base layer, a base protection layer, an emitter layer, an emitter contact layer, and a WSi layer are sequentially formed on a substrate. A resist pat...
04/10/2007
7154118Bulk non-planar transistor having strained enhanced mobility and methods of fabrication
A method of a bulk tri-gate transistor having stained enhanced mobility and its method of fabrication. The present invention is a nonplanar transistor having a strained enhanced mobility and its method of fabrication. The transistor has a semiconductor body formed o...
12/26/2006
7132701Contact method for thin silicon carbide epitaxial layer and semiconductor devices formed by those methods
Provided is a process for forming a contact for a compound semiconductor device without electrically shorting the device. In one embodiment, a highly doped compound semiconductor material is electrically connected to a compound semiconductor material of the same con...
11/07/2006
7118981Method of fabricating an integrated silicon-germanium heterobipolar transistor and an integrated silicon-germanium heterobipolar transistor
In a method of fabricating an integrated silicon-germanium heterobipolar transistor a silicon dioxide layer arranged between a silicon-germanium base layer and a silicon emitter layer is formed by means of Rapid Thermal Processing (RTP) to ensure enhanced component ...
10/10/2006
6699765Method of fabricating a bipolar transistor using selective epitaxially grown SiGe base layer
Embodiments of a bipolar transistor are disclosed, along with methods for making the transistor. An exemplary transistor includes a collector region in a semiconductor substrate, a base layer overlying the collector region and bound by a field oxide layer...
03/02/2004
6699741Single poly bipolar transistor and method that uses a selectively epitaxially grown highly-boron-doped silicon layer as a diffusion source for an extrinsic base region
A high frequency bipolar transistor that has a silicon germanium intrinsic base region is formed in a semiconductor fabrication process that forms the extrinsic base regions after the intrinsic base region has been formed. The extrinsic base regions are e...
03/02/2004
6696342Small emitter and base-collector bi-polar transistor
In a high speed BJT device, the method for producing the device includes forming a self-aligned BJT through the use of a single mask by making use of a single layer of polysilicon. The method includes forming a window in the polysilicon to define a base p...
02/24/2004
6686640Varactor having improved Q-factor and method of fabricating the same using SiGe heterojunction bipolar transistor
A varactor includes a semiconductor substrate of a first conductivity type, a high-concentration buried collector region of a second conductivity type formed in an upper portion of the semiconductor substrate, a collector region of the second conductivity...
02/03/2004
6686250Method of forming self-aligned bipolar transistor
A self-aligned bipolar transistor and a method of formation thereof are provided. The bipolar transistor has an emitter region characterized by a y-shaped structure formed from bilayer polysilicon. The bilayer polysilicon includes a first polysilicon emit...
02/03/2004
6683366Bipolar transistor and related structure
According to one exemplary embodiment, a bipolar transistor, such as a heterojunction bipolar transistor ("HBT"), comprises a base having a top surface. The HBT further comprises a first inner spacer and a second inner spacer situated on the top surface o...
01/27/2004
6680522Semiconductor device with reduced electrical variation
An object of the invention is to minimize variation in characteristics of a vertical bipolar transistor. An insulating side wall spacer composed of a silicon nitride film 10 and a silicon oxide film 9 is formed on the side surface of an opening 101 formed...
01/20/2004
6680235Method for fabricating a selective eptaxial HBT emitter
According to one exemplary embodiment, a heterojunction bipolar transistor comprises a base having a top surface. The heterojunction bipolar transistor further comprises an epitaxial emitter selectively situated on the top surface of the base. For example...
01/20/2004
6674149Bipolar transistor device having phosphorous
A Si1-x Gex layer 111b functioning as the base composed of an i-Si1-x Gex layer and a p+ Si1-x Gex layer is formed on a collector layer 102, and a Si cap layer 111a as the emitter is ...
01/06/2004
6674150Heterojunction bipolar transistor and method for fabricating the same
A heterojunction bipolar transistor is fabricated by stacking a Si collector layer, a SiGeC base layer and a Si emitter layer in this order. By making the amount of a lattice strain in the SiGeC base layer on the Si collector layer 1.0% or less, the band ...
01/06/2004
6674144Process for forming damascene-type isolation structure for integrated circuit
Isolation of a heterojunction bipolar transistor device in an integrated circuit is accomplished by forming the device within a trench in dielectric material overlying single crystal silicon. Precise control over the thickness of the initially-formed diel...
01/06/2004
6674102Sti pull-down to control SiGe facet growth
A SiGe bipolar transistor including a semiconductor substrate having a collector and sub-collector region formed therein, wherein the collector and sub-collector are formed between isolation regions that are also present in the substrate is provided. Each...
01/06/2004
6673688Method for eliminating collector-base band gap in an HBT
According to one exemplary embodiment, a heterojunction bipolar transistor comprises a base having a concentration of germanium, where the concentration of germanium decreases between a first depth and a second depth in the base. According to this exempla...
01/06/2004
6670654Silicon germanium heterojunction bipolar transistor with carbon incorporation
A silicon germanium heterojunction bipolar transistor device having a semiconductor region, and a diffusion region in the semiconductor region, wherein the diffusion region is boron-doped, wherein the semiconductor region comprises a carbon dopant therein...
12/30/2003
6667489Heterojunction bipolar transistor and method for production thereof
A high-speed heterojunction bipolar transistor in a large injection of electrons from the emitter and a method for production thereof. In a typical example of the SiGeC heterojunction bipolar transistor, the collector has a layer of n-type single-crystal ...
12/23/2003
6664574Heterojunction semiconductor device and method of manufacturing
A semiconductor component (100) includes a semiconductor substrate (16) that is formed with trench (27). A semiconductor layer (20) is formed in the trench for coupling a control signal (VB) through a sidewall (25) of the trench to route a curr...
12/16/2003
6660607Method for fabricating heterojunction bipolar transistors
A method for fabricating a heterojunction bipolar transistor having collector, base and emitter regions is disclosed. In an exemplary embodiment of the invention, the method includes forming a silicon epitaxial layer upon a substrate, the silicon epitaxia...
12/09/2003
6660623Semiconductor device and method of manufacturing the same
A semiconductor device comprises an n-conductive type Si substrate, a n-conductive type Si film formed on the n-conductive type Si substrate, a p-conductive type SiGe film formed on the n-conductive type Si film, a p-conductive type Si film formed on the ...
12/09/2003
6656809Method to fabricate SiGe HBTs with controlled current gain and improved breakdown voltage characteristics
A method of fabricating a SiGe heterojunction bipolar transistor (HBT) is provided which results in a SiGe HBT that has a controllable current gain and improved breakdown voltage. The SiGe HBT having these characteristics is fabricated by forming an in-si...
12/02/2003
6656811Carbide emitter mask etch stop
Bipolar transistors and methods for fabricating bipolar transistors are disclosed wherein an emitter-base dielectric stack is formed between emitter and base structures, comprising a carbide layer situated between first and second oxide layers. The carbid...
12/02/2003
6653714Lateral bipolar transistor
A lateral bipolar transistor includes: a substrate; a first insulative region formed on the substrate; a first semiconductor region of a first conductivity type selectively formed on the first insulative region; a second insulative region formed so as to ...
11/25/2003
6649482Bipolar transistor with a silicon germanium base and an ultra small self-aligned polysilicon emitter and method of forming the transistor
A low-power bipolar transistor is formed to have a silicon germanium base region, an intrinsic emitter region with a sub-lithographic width, and an oxide layer that is self aligned to an overlying extrinsic emitter. The silicon germanium base region incre...
11/18/2003
6645819Self-aligned fabrication method for a semiconductor device
One embodiment of the present invention provides a method of fabricating a semiconductor device including the steps of forming a first semiconductor layer; forming a second semiconductor layer over the first semiconductor layer; forming a mask over a firs...
11/11/2003
6642096Bipolar transistor manufacturing
A method of manufacturing a bipolar transistor in a single-crystal silicon substrate of a first conductivity type, including a step of carbon implantation at the substrate surface followed by an anneal step, before forming, by epitaxy, the transistor base...
11/04/2003
6642553Bipolar transistor and method for producing same
The invention relates to a bipolar transistor and a method for producing same. The aim of the invention is to provide a bipolar transistor and a method for producing same, which during the use of a single-process poly-silicon technology with differential ...
11/04/2003
6639256Structure for eliminating collector-base band gap discontinuity in an HBT
According to one exemplary embodiment, a heterojunction bipolar transistor comprises a base having a concentration of germanium, where the concentration of germanium decreases between a first depth and a second depth in the base. According to this exempla...
10/28/2003
6638819Method for fabricating interfacial oxide in a transistor and related structure
A gas is supplied at a certain partial pressure for a chemical reaction with a top surface of a base in a transistor. The top surface of the base is heated to a certain temperature to promote the chemical reaction. For example, the gas can be oxygen, the ...
10/28/2003
6635545Method for fabricating a bipolar transistor and method for fabricating an integrated circuit configuration having such a bipolar transistor
The bipolar transistor is produced such that a connection region of its base is provided with a silicide layer, so that a base resistance of the bipolar transistor is small. No silicide layer is produced between an emitter and an emitter contact and betwe...
10/21/2003
6633075Heterojunction bipolar transistor and method for fabricating the same
A heterojunction bipolar transistor includes an emitter layer, a base layer and a collector layer laminated on a top surface of a semiconductor substrate, and a heat sink layer made of a metal and provided on a rear surface of the substrate. A via hole is...
10/14/2003
6627972Vertical bipolar transistor
The invention relates to a vertical bipolar transistor and a method for the production thereof. The aim of the invention is to produce a vertical bipolar transistor and to disclose a method for the production thereof, whereby excellent high frequency prop...
09/30/2003
6624017Manufacturing process of a germanium implanted HBT bipolar transistor
A process fabricates a vertical structure high carrier mobility transistor on a substrate of crystalline silicon doped with impurities of the N type, the transistor having a collector region located at a lower portion of the substrate. The process include...
09/23/2003
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