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Class 257/E21.328 - Radiation treatment (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.085. This
No. of patents: 22
Last issue date: 10/28/2008


NumberTitleIssue Date
7442625Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device
An apparatus for annealing a substrate includes a substrate stage having a substrate mounting portion configured to mount the substrate; a heat source having a plurality of heaters disposed under the substrate mounting portion, the heaters individually preheating a ...
10/28/2008
7294590System and method for removing charges with enhanced efficiency
Method and apparatus for removing and neutralizing charges. The method includes loading a structure into a chamber. The structure includes a first surface and a plurality of charges away from the first surface. Additionally, the method includes supplying a first ion...
11/13/2007
7294526Nano optical sensors via molecular self-assembly
An optical sensor is provided, comprising (a) a silicon nanowire of finite length having an electrical contact pad at each end thereof; and (b) a plurality of self-assembled molecules on a surface of the silicon nanowire, the molecules serving to modulate electrical...
11/13/2007
7241708Laser irradiation method that includes moving a center of rotation along a straight line in order to enhance the crystallinity of the semiconductor film
Continuous wave laser apparatus with enhanced processing efficiency is provided as well as a method of manufacturing a semiconductor device using the laser apparatus. The laser apparatus has: a laser oscillator; a unit for rotating a process object; a unit for movin...
07/10/2007
7224008Self-aligned production method for an insulated gate semiconductor device cell and insulated gate semiconductor device cell
The invention relates to a manufacturing method for an insulated gate semiconductor device cell, comprising the steps of forming a cell window (3) in a layered structure that is located on top of a semiconductor substrate (1), forming at least one proc...
05/29/2007
7223670DUV laser annealing and stabilization of SiCOH films
A method of fabricating a dielectric film comprising atoms of Si, C, O and H (hereinafter SiCOH) that has improved insulating properties as compared with prior art dielectric films, including prior art SiCOH dielectric films that are not subjected to the inventive d...
05/29/2007
7084068Annealing furnace, manufacturing apparatus, annealing method and manufacturing method of electronic device
An annealing furnace, includes a processing chamber configured to store a substrate; a susceptor located in the processing chamber so as to load the substrate and having an auxiliary heater for heating the substrate at 650° C. or less, the susceptor having a surfac...
08/01/2006
4784723Method for producing a single-crystalline layer
A method of producing a semiconductor device includes the steps of preparing a base body, forming a non-single-crystalline semiconductor layer on the base body, and irradiating the non-single-crystalline semiconductor layer with an energy beam having a st...
11/15/1988
4731855Pattern defect inspection apparatus
A pattern defect inspection apparatus detects presence or absence of a defect in a pattern formed on a semiconductor wafer by scanning the pattern normally to the surface thereof by a coherent light beam of a predetermined spot size, detecting reflected d...
03/15/1988
4580157Semiconductor device having a soft-error preventing structure
In a semiconductor device, particularly a memory device, radioactive rays emitted from the ceramic material of the package enclosing the LSI chip of the device detrimentally influence the electrical properties of the device. In the memory device, the info...
04/01/1986
4554568Temperature-compensated Zener diode
An irradiation-stable, temperature-compensated Zener diode and a process for producing the Zener diode. The diode includes a first pn junction having metallic impurities diffused into the corresponding type n region, a second pn junction with a type n reg...
11/19/1985
4541003Semiconductor device including an alpha-particle shield
The present invention relates to a semiconductor device having a semiconductor element which is sealed by a ceramic package, wherein a shielding member is provided near it from upper surface of the semiconductor element to shield the alpha-particles radia...
09/10/1985
4295265Method for producing a nonvolatile semiconductor memory
In a nonvolatile semiconductor memory which comprises a source region and a drain region formed on one surface of a semiconductor substrate having one conductivity type, a first insulating film formed on a channel region which is located between the sourc...
10/20/1981
4288911Method for qualifying biased integrated circuits on a wafer level
Integrated circuits in dice on a wafer are qualified by providing two sets of conductors connected to each die by fusible elements, biasing the dice using said conductors during exposure to a qualifying environment, testing the fusible elements, removing ...
09/15/1981
4277882Method of producing a metal-semiconductor field-effect transistor
A metal-semiconductor field-effect transistor is formed by providing a blanket layer of the same conductivity type as the semiconductor body, with field oxide subsequently being grown, and with a region of opposite conductivity type being formed to extend...
07/14/1981
4234355Method for manufacturing a semiconductor element utilizing thermal neutron irradiation and annealing
In a known process for manufacturing a semiconductor element, a single crystal semiconductor body is subjected to at least one high temperature treatment such as diffusion or epitaxy in order to create a pn junction. A metallization is then applied to the...
11/18/1980
4224083Dynamic isolation of conductivity modulation states in integrated circuits
Conductivity modulation states in a first component of a power integrated circuit are dynamically isolated from a second component of the integrated circuit having at least one common active region with the first component by selective irradiation of port...
09/23/1980
4210464Method of simultaneously controlling the lifetimes and leakage currents in semiconductor devices by hot electron irradiation through passivating glass layers
The whole body of a semiconductor device with its pn junction exposed ends covered by insulating glass is subjected to the exposure to radiation having an energy of higher than 0.5 MeV in terms of the reduced energy of electron beams while the semiconduct...
07/01/1980
4193003Method for controlling the migration of a chemical species within a solid substrate
The method for controlling the migration of an electronegative chemical species within a solid substrate which exhibits ionic conduction consists in irradiating the substrate with electrons which have sufficient energy to penetrate into the substrate and ...
03/11/1980
4184896Surface barrier tailoring of semiconductor devices utilizing scanning electron microscope produced ionizing radiation
A method of spatially tailoring the surface barrier of MOS devices by means of a scanning electron microscope using ionizing radiation at the silicon dioxide-silicon interface to control the surface charge distribution. The MOS is subsequently annealed at...
01/22/1980
4170500Process for forming field dielectric regions in semiconductor structures without encroaching on device regions
A process for forming the field dielectric regions in semiconductor structures without encroaching upon device areas includes the steps of forming an insulating layer on a surface of a semiconductor substrate, forming regions of selected material on the s...
10/09/1979
3938178Process for treatment of semiconductor
In the embodiment is specifically described a method for irradiating a transistor device with radiant rays. The top surface of the semiconductor crystal contained in the transistor device is exposed to the radiant rays so that the radiated energy impingin...
02/10/1976
 
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