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Class 257/E21.223 - Anisotropic liquid etching (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.219. This subclass
No. of patents: 200
Last issue date: 10/07/2008


1          
NumberTitleIssue Date
7432120Method for realizing a hosting structure of nanometric elements
Method for manufacturing a hosting structure of nanometric elements comprising the steps of depositing on an upper surface of a substrate, of a first material, a block-seed having at least one side wall. Depositing on at least one portion of sad surface and on the b...
10/07/2008
7297568Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same
A three-dimensional structure composed of highly-reliable silicon ultrafine wires, a method for producing the three-dimensional structure, and a device including the same are provided. The three-dimensional structure composed of silicon fine wires includes wires (
11/20/2007
7294566Method for forming wiring pattern, method for manufacturing device, device, electro-optic apparatus, and electronic equipment
A method for forming a wiring pattern according to an aspect of the invention forms a wiring pattern in a certain area on a substrate by using a droplet discharge technique, and includes forming a bank surrounding the certain area on the substrate; discharging a fir...
11/13/2007
7192885Method for texturing surfaces of silicon wafers
A method for texturing surfaces of silicon wafers comprising the steps of dipping the silicon wafers in an etching solution of water, concentrated hydrofluoric acid and concentrated nitric acid and setting a temperature for the etching solution. The etching solution...
03/20/2007
7192882Component for electromagnetic waves and a method for manufacturing the same
The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a l...
03/20/2007
6670257Method for forming horizontal buried channels or cavities in wafers of monocrystalline semiconductor material
A method of forming buried cavities in a wafer of monocrystalline semiconductor material with at least one cavity formed in a substrate of monocrystalline semiconductor material by timed TMAH etching silicon; covering the cavity with a material inhibiting...
12/30/2003
6642154Method and apparatus for fabricating structures using chemically selective endpoint detection
One embodiment of the present invention provides a process for selective etching during semiconductor manufacturing. The process starts by receiving a silicon substrate with a first layer composed of a first material, which is covered by a second layer co...
11/04/2003
6635500Treatment of substrates
A process of reclaiming a semiconductor wafer 10 comprises the steps of a) removing films of foreign matter from the surface of the wafer 10 by etching, b) polishing opposite sides of the wafer 10 between contra-rotating polishing means 26, 28 to remove d...
10/21/2003
6620331Method of etching an opening
The invention relates to a method for etching an opening, and more precisely, to etching in a silicon plate for creating a nozzle opening. According to the invention, one side of the silicon plate (1) is protected by a protective layer (2), and a recess (...
09/16/2003
6599840Material removal method for forming a structure
Methods are disclosed for forming shaped structures from silicon and/or germanium containing material with a material removal process that is selective to low stress portions of the material. In general, the method initially provides a layer of the materi...
07/29/2003
6596642Material removal method for forming a structure
Methods are disclosed for forming shaped structures from silicon and/or germanium containing material with a material removal process that is selective to low stress portions of the material. In general, the method initially provides a layer of the materi...
07/22/2003
6596648Material removal method for forming a structure
Methods are disclosed for forming shaped structures from silicon and/or germanium containing material with a material removal process that is selective to low stress portions of the material. In general, the method initially provides a layer of the materi...
07/22/2003
6545299Structures using chemo-mechanical polishing and chemically-selective endpoint detection
One embodiment of the present invention provides a process that uses selective etching to form a structure on a silicon substrate. The process starts by receiving the silicon substrate with a first layer composed of a first material, which includes voids ...
04/08/2003
6495411Technique to improve deep trench capacitance by increasing surface thereof
A method for fabricating deep-submicron DRAMs containing a deep trench capacitor with enlarged sidewall surface for improved storage capacitance. It includes the main steps of: (a) forming a silicon substrate having a (110) crystalline plane and a (111) c...
12/17/2002
6465357Fabricating structures using chemo-mechanical polishing and chemically-selective endpoint detection
One embodiment of the present invention provides a process that uses selective etching to form a structure on a silicon substrate. The process starts by receiving the silicon substrate with a first layer composed of a first material, which includes voids ...
10/15/2002
6461967Material removal method for forming a structure
Methods are disclosed for forming shaped structures from silicon and/or germanium containing material with a material removal process that is selective to low stress portions of the material. In general, the method initially provides a layer of the materi...
10/08/2002
6451218Method for the wet chemical pyramidal texture etching of silicon surfaces
A new and improved etching solution and etching method provide wet chemical pyramidal texture etching of (100) silicon surfaces. A uniform and completely pyramidal texture etching of silicon surfaces is achieved with an etching solution including water, a...
09/17/2002
6432837Semiconductor wafer processing method and semiconductor wafers produced by the same
A method of processing a semiconductor wafer sliced from a monocrystalline ingot comprises at least the steps of chamfering, lapping, etching, mirror-polishing, and cleaning. In the etching step, alkali etching is first performed and then acid etching, pr...
08/13/2002
6426254Method for expanding trenches by an anisotropic wet etch
In accordance with the present invention, a method for expanding trenches includes the steps of forming a trench in a substrate, preparing surfaces withIn the trench by etching the surfaces with a wet etchant to provide a hydrogen terminated silicon surfa...
07/30/2002
6417107Method for manufacturing a functional device by forming 45-degree-surface on (100) silicon
Conventional methods of forming a (111)-plane into a 45-degree-surface have employed a silicon wafer which requires a high processing cost, and methods utilizing an inexpensive (100) silicon wafer have not been successful in forming a 45-degree-surface ha...
07/09/2002
6395645Anisotropic wet etching
A method for anisotropic wet etching is disclosed. In to this invention, a photo mask for the etching mask suited in the anisotropic wet etching is provided. In the photo mask, a pattern with a series of adjacent corners having a substantially rectangular...
05/28/2002
6346485Semiconductor wafer processing method and semiconductor wafers produced by the same
A method of processing a semiconductor wafer sliced from a monocrystalline ingot comprises at least the steps of chamfering, lapping, etching, mirror-polishing, and cleaning. In the etching step, alkali etching is first performed and then acid etching, pr...
02/12/2002
6329296Metal catalyst technique for texturing silicon solar cells
Textured silicon solar cells and techniques for their manufacture utilizing metal sources to catalyze formation of randomly distributed surface features such as nanoscale pyramidal and columnar structures. These structures include dimensions smaller than ...
12/11/2001
6309975Methods of making implanted structures
Methods are disclosed for forming shaped structures of silicon-containing material with ion implantation and an etching process which is selective to silicon-containing material implanted to a certain concentration of ions or with an etching process which...
10/30/2001
6261964Material removal method for forming a structure
Methods are disclosed for forming shaped structures from silicon and/or germanium containing material with a material removal process that is selective to low stress portions of the material. In general, the method initially provides a layer of the materi...
07/17/2001
6251542Semiconductor wafer etching method
A semiconductor wafer etching method is disclosed that allows etching without use of restricted ozone-destroying solvents such as trichloroethane or fluorocarbons. This method involves forming a protective film of silicon resin or alkali resistant resin o...
06/26/2001
6239039Semiconductor wafers processing method and semiconductor wafers produced by the same
A method of processing a semiconductor wafer sliced from a monocrystalline ingot comprises at least the steps of chamfering, lapping, etching, mirror-polishing, and cleaning. In the etching step, alkali etching is first performed and then acid etching, pr...
05/29/2001
6199563Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method
An ultrasonic bath (30) is arranged below a wafer processing bath (10). Wafers (40) are processed while ultrasonic waves are transmitted from the ultrasonic bath (30) to the wafer processing bath (10). The wafers (40) are processed while being entirely di...
03/13/2001
6197611Method for producing silicon solar cell
The present invention provides a method for producing a solar cell comprising the step of immersing a silicon substrate in an etching solution which includes an aqueous sodium carbonate (Na2 CO3) solution, optionally an aqueous sodiu...
03/06/2001
6078078V-gate transistor
An integrated circuit and a method of making a transistor thereof are provided. The integrated circuit includes a substrate and a plurality of transistors positioned on a plurality of active areas. Each of the transistors has a gate dielectric layer with ...
06/20/2000
6074948Method for manufacturing thin semiconductor device
In a method for manufacturing a semiconductor device, a semiconductor wafer having a front surface with semiconductor elements and a back surface with no semiconductor elements is prepared, and the back surface of the semiconductor wafer is etched to form...
06/13/2000
6066513Process for precise multichip integration and product thereof
Process for making an integrated circuit module and product thereof including a carrier supporting a plurality of precisely aligned semiconductor circuit chips having uniform thicknesses....
05/23/2000
6060773Semiconductor chip and method of manufacturing the same
A semiconductor chip has a nonvolatile memory formed on the upper surface side of a semiconductor substrate. The chip includes at least one recess portion formed in the lower surface of the semiconductor substrate. The recess portion is located in a regio...
05/09/2000
6033489Semiconductor substrate and method of making same
A semiconductor substrate is provided that exhibits very low substrate resistance while also providing structural integrity and robustness to resist breakage during manufacturing. The invention also provides methods of making these semiconductor substrate...
03/07/2000
6015978Resonance tunnel device
The method for forming a semiconductor microstructure of this invention includes the steps of: forming a mask pattern having a first opening and a second opening on a substrate having a semiconductor layer as an upper portion thereof; and selectively etch...
01/18/2000
5980762Method of micromachining a semiconductor
A method of micromachining a silicon wafer that simultaneously forms narrow gaps having a width of 10 μm or less and wider gap portions using an anistropic etching solution. The etching solution contains KOH in a concentration of 35% or less and the pene...
11/09/1999
5913980Method for removing complex oxide film growth on silicon crystal
A method for treating thin silicon web crystals used to produce solar cells in order to remove complex SiOx contaminants from the web after growth. A dendritic silicon web with {111} surface orientation is immersed in a caustic solution of KOH or NaOH at ...
06/22/1999
5888845Method of making high sensitivity micro-machined pressure sensors and acoustic transducers
A method of making a pressure sensor or acoustic transducer having high sensitivity and reduced size. A thin sensing diaphragm is produced by growing a single crystal, highly doped silicon layer on a substrate using a chemical vapor deposition process. Th...
03/30/1999
5888852Method for forming semiconductor microstructure, semiconductor device fabricated using this method, method for fabricating resonance tunneling device, and resonance tunnel device fabricated by this method
The method for forming a semiconductor microstructure of this invention includes the steps of: forming a mask pattern having a first opening and a second opening on a substrate having a semiconductor layer as an upper portion thereof; and selectively etch...
03/30/1999
5880027Process for fabricating semiconductor wafer
The present invention provides a process for fabricating a semiconductor wafer, including surface-grinding both sides of the sliced wafer, and cleaning the surface-ground wafer with an alkaline solution to remove the sharp protruded part. The frictional r...
03/09/1999
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