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Class 257/E21.133 - Epitaxial re-growth of non-monocrystalline semiconductor material, e.g., lateral epitaxy by seeded solidific ation, solid-state crystallization, solid-state graphoepitaxy, explosive crystallization, grain growth in polycrystalline material (EPO)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: This subclass is indented under subclass E21.09. This subclass
No. of patents: 529
Last issue date: 10/07/2008


1                      
NumberTitleIssue Date
7432141Large-grain p-doped polysilicon films for use in thin film transistors
A method is disclosed to form a large-grain, lightly p-doped polysilicon film suitable for use as a channel region in thin film transistors. The film is preferably deposited lightly in situ doped with boron atoms by an LPCVD method at temperatures sufficiently low t...
10/07/2008
7419886Thermal treatment equipment and method for heat-treating
The invention provides a method for activating impurity element added to a semiconductor and performing gettering process in shirt time, and a thermal treatment equipment enabling to perform such the heat-treating. The thermal treatment equipment comprises treatment...
09/02/2008
7413939Method of growing a germanium epitaxial film on insulator for use in fabrication of CMOS integrated circuit
A method of fabricating a silicon-germanium CMOS includes preparing a silicon substrate wafer; depositing an insulating layer on the silicon substrate wafer; patterning and etching the insulating layer; depositing a layer of polycrystalline germanium on the insulati...
08/19/2008
7384860Method of manufacturing a semiconductor device
The present invention relates to a method of manufacturing a semiconductor device having an excellent gettering effect. In this method, when phosphorus is added to a poly-Si film, which has been crystallized by the addition of a metal, to subject the resultant poly-...
06/10/2008
7375011Ex-situ doped semiconductor transport layer
A method of making an ex-situ doped semiconductor transport layer for use in an electronic device includes: growing a first set of semiconductor nanoparticles having surface organic ligands in a colloidal solution; growing a second set of dopant material nanoparticl...
05/20/2008
7364990Epitaxial crystal growth process in the manufacturing of a semiconductor device
First and second preliminary epitaxial layers are grown from single-crystalline seeds in openings in an insulation layer until the first and second epitaxial layers are connected to each other. While the first and second preliminary epitaxial layers are being grown,...
04/29/2008
7358165Semiconductor device and method for manufacturing semiconductor device
A crystallizing method that can control the orientation of crystal grains with the use of a metal element for promoting crystallization. In the method, the metal element for promoting crystallization is added to selectively form a crystalline semiconductor film, and...
04/15/2008
7348222Method for manufacturing a thin film transistor and method for manufacturing a semiconductor device
It is an object of the present invention to provide a method for removing the metal element from the semiconductor film which is different from the conventional gettering step for removing the metal element from the semiconductor film. In the present inventio...
03/25/2008
7335539Method for making thin-film semiconductor device
A method for making a thin-film semiconductor device includes an annealing step of irradiating an amorphous semiconductor thin film with a laser beam so as to crystallize the amorphous semiconductor thin film. In the annealing step, the semiconductor thin film is co...
02/26/2008
7317205Light emitting device and method of manufacturing a semiconductor device
Semiconductor layers for serving as active layers of a plurality of thin film transistors in a pixel are arranged in the same direction and irradiated with laser light with the scanning direction matched to the channel length direction of the semiconductor layers. I...
01/08/2008
7297983Method for fabricating an integrated circuit on a semiconductor substrate
Integrated circuit device comprising a conductive layer and a poly-crystalline silicon layer, wherein the integrated circuit device further comprises an intermediate counter-stress layer. This intermediate counter-stress layer is arranged between the poly-crystallin...
11/20/2007
7294539Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device
A method of manufacturing a semiconductor device, includes: forming an insulating layer on a single crystal semiconductor substrate; forming a non-crystalline semiconductor layer on the insulating layer; forming an insulating film on the non-crystalline semiconducto...
11/13/2007
7294857Polysilicon thin film transistor array panel and manufacturing method thereof
A method of manufacturing a thin film transistor array panel is provided, which includes: depositing an amorphous silicon layer on an insulating substrate; converting the amorphous silicon layer to a polysilicon layer by a plurality of laser shots using a mask; form...
11/13/2007
7273774Method for making thin-film semiconductor device
A method for making a thin-film semiconductor device includes an annealing step of irradiating an amorphous semiconductor thin film with a laser beam so as to crystallize the amorphous semiconductor thin film. In the annealing step, the semiconductor thin film is co...
09/25/2007
7271041Method for manufacturing thin film transistor
Prior to converting a non-single crystal material of a semiconductor film into a single crystal material through the use of a laser beam, at least one dopant is introduced into whole of the semiconductor film. Then, the non-single crystal semiconductor film is irrad...
09/18/2007
7256109Isotropic polycrystalline silicon
A high-quality isotropic polycrystalline silicon (poly-Si) and a method for fabricating high quality isotropic poly-Si film are provided. The method includes forming a film of amorphous silicon (a-Si) and using a MISPC process to form poly-Si film in a first area of...
08/14/2007
7253010Method of deciding focal plane and method of crystallization using thereof
A crystallization method is provided which improves a crystallization process by deciding a best-fit focal plane for a laser beam using a test mask and then applying the decided best-fit focal plane to the crystallization process. The crystallization method includes...
08/07/2007
7247527Method for manufacturing semiconductor device, and laser irradiation apparatus
It is an object of the present invention to provide a method for manufacturing a crystalline semiconductor film comprising the steps of crystallizing with the use of the metal element for promoting the crystallization to control the orientation and irradiating the l...
07/24/2007
7227186Thin film transistor and method of manufacturing the same
An amorphous silicon film is laser irradiated a plural number of times to make the film composed of a plurality of crystal grains while suppressing the formation of protrusions at the boundaries of the adjoining grains to realize a polycrystalline silicon thin film ...
06/05/2007
7223627Memory element and its method of formation
A method for controlling silver doping of a chalcogenide glass in a resistance variable memory element is disclosed herein. The method includes forming a thin metal containing layer having a thickness of less than about 250 Angstroms over a second chalcogenide glass...
05/29/2007
7220660Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
Systems and methods for reducing a surface roughness of a polycrystalline or single crystal thin film produced by the sequential lateral solidification process are disclosed. In one arrangement, the system includes an excimer laser (110) for generating a plur...
05/22/2007
7217642Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask
A mask for forming polysilicon has a first slit region where a plurality of horizontal slit patterns are arranged in the vertical direction while bearing the same width, a second slit region where a plurality of horizontal slit patterns are arranged in the vertical ...
05/15/2007
7214592Method and apparatus for forming a semiconductor substrate with a layer structure of activated dopants
Methods of forming semiconductor devices with a layered structure of thin and well defined layer of activated dopants, are disclosed. In a preferred method, a region in a semiconductor substrate is amorphized, after which the region is implanted with a first dopant ...
05/08/2007
7186597Method of manufacturing transistors
A mask is formed selectively on a crystalline silicon film containing a catalyst element, and an amorphous silicon film is formed so as to cover the mask. Phosphorus is implanted into the amorphous silicon film and the portion of the crystalline silicon film which i...
03/06/2007
7176049Method of increasing a free carrier concentration in a semiconductor substrate
A method of selectively heating a predetermined region of a semiconductor substrate includes providing a semiconductor substrate, selectively focusing a free carrier generation light on only a predetermined region of the semiconductor substrate, irradiating the free...
02/13/2007
7141491Method for fabricating a semiconductor device
Concentration of metal element which promotes crystallization of silicon and which exists within a crystalline silicon film obtained by utilizing the metal element is reduced. A first heat treatment for crystallization is performed after introducing nickel to an amo...
11/28/2006
7142297Method for simulating the movement of particles
A method for determining the movement of particles, particularly impurities, in a medium, under the influence of a changing interface between two neighboring phases. In a first step, the temporal and/or local evolution of said interface is determined. In a second st...
11/28/2006
7129522Semiconductor device and its manufacturing method
Protrusions called ridges are formed on the surface of a crystalline semiconductor film formed by a laser crystallization method or the like. A heat absorbing layer are formed below a semiconductor film. When the semiconductor film is crystallized by laser, a temper...
10/31/2006
7112516Fabrication of abrupt ultra-shallow junctions
One aspect of the invention relates to a method of forming P-N junctions within a semiconductor substrate. The method involves providing a temporary impurity species, such as fluorine, within the semiconductor crystal matrix prior to solid source in-diffusion of the...
09/26/2006
7084081Display device and method of manufacturing the same
A display device includes a display area composed of pixels in a matrix. Each pixel has a light-emitting element and a driving element to supply a driving current to the light-emitting element. The driving element includes a thin film transistor with a semiconductor...
08/01/2006
6703293Implantation at elevated temperatures for amorphization re-crystallization of Si1-xGex films on silicon substrates
A method of fabricating a Si1-X GeX film on a silicon substrate includes preparing a silicon substrate; epitaxially depositing a Si1-X GeX layer on the silicon substrate forming a Si1-X GeX...
03/09/2004
6703289Method for forming crystalline silicon layer and crystalline silicon semiconductor device
A plurality of linear catalytic metal element portions are arranged at predetermined intervals just on or just beneath an amorphous silicon layer, and, in this state, the amorphous silicon layer is heat treated to crystallize the amorphous silicon layer a...
03/09/2004
6703268Method to fabricate an intrinsic polycrystalline silicon film
A process to fabricate a thin film transistor using an intrinsic polycrystalline silicon film, by a method of: preparing a semiconductor assembly; forming an insulation layer on a substrate; forming a first amorphous silicon layer on said insulation layer...
03/09/2004
6699771Process for optimizing junctions formed by solid phase epitaxy
A method of forming a semiconductor device includes forming at least one amorphous region within an at least partially formed semiconductor device. The method also includes implanting a halogen species in the amorphous region of the at least partially for...
03/02/2004
6699764Method for amorphization re-crystallization of Si1-xGex films on silicon substrates
A method of fabricating a Si1-X GeX film on a silicon substrate includes preparing a silicon substrate; epitaxially depositing a Si1-X GeX layer on the silicon substrate forming a Si1-X GeX...
03/02/2004
6696306Methods of fabricating layered structure and semiconductor device
A method of fabricating a layered structure including a substrate, a first semiconductor layer with a first thermal expansion coefficient 댚, and a second semiconductor layer with a second thermal expansion coefficient 댛...
02/24/2004
6692996Method for crystallizing silicon layer
The present invention relates to a method for crystallizing the active layer of a thin film transistor utilizing crystal filtering technique. According to the conventional metal induced lateral crystallization (MILC) method, amorphous silicon layer can be...
02/17/2004
6693044Semiconductor device and method of manufacturing the same
A semiconductor device, which uses a crystalline silicon film having high crystallinity and a flat surface with few ridges and has high characteristics, and a method of manufacturing the semiconductor device are provided. According to the manufacturing me...
02/17/2004
6686262Process for producing a photoelectric conversion device
A catalyst element remaining in a first semiconductor film subjected to a first heat treatment (crystallization) is moved and concentrated/collected by subjecting a second semiconductor film which is formed on the first semiconductor film and contains a r...
02/03/2004
6682992Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structures
A method of modulating grain size in a polysilicon layer and devices fabricated with the method. The method comprises forming the layer of polysilicon on a substrate; and performing an ion implantation of a polysilicon grain size modulating species into t...
01/27/2004
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