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Class 257/621 - With electrical contact in hole in semiconductor (e.g., lead extends through semiconductor body)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: Subject matter wherein the physical configuration is a hole
No. of patents: 431
Last issue date: 05/15/2012


1                      
NumberTitleIssue Date
8178950Multilayered through a via
A method for forming a through substrate via (TSV) comprises forming an opening within a substrate. An adhesion layer of titanium is formed within the via opening, a nucleation layer of titanium nitride is formed over the adhesion layer, and a tungsten layer is depo...
05/15/2012
8174093Multichip semiconductor device, chip therefor and method of formation thereof
A multichip semiconductor device is disclosed in which chips are stacked each of which comprises a semiconductor substrate formed on top with circuit components and an interlayer insulating film formed on the top of the semiconductor substrate. At least one of the c...
05/08/2012
8169054Semiconductor device and method of manufacturing the same
The invention is directed to a semiconductor device having a via hole and a method of manufacturing the same that achieve both the prevention of a barrier layer insufficiently covering the via hole and the control of via resistance at the same time. A semiconductor ...
05/01/2012
8169055Chip guard ring including a through-substrate via
At least one through-substrate via is formed around the periphery of a semiconductor chip or a semiconductor chiplet included in a semiconductor chip. The at least one through-substrate via may be a single through-substrate via that laterally surrounds the semicondu...
05/01/2012
8164165Wafer-to-wafer stack with supporting pedestal
A novel three dimensional wafer stack and the manufacturing method therefor are provided. The three dimensional wafer stack includes a first wafer having a first substrate and a first device layer having thereon at least one chip, a second wafer disposed above the f...
04/24/2012
8159049Semiconductor structure for imaging detectors
There is disclosed a photo-detector array including a plurality of sub-arrays of photo-detectors, the photo-detectors of each sub-array being formed on a substrate with an active area of each photo-detector being formed on a surface of the substrate, there further b...
04/17/2012
8154105Flip chip semiconductor device and process of its manufacture
A semiconductor die and method of making it are provided. The die includes a first via extending through the entire thickness of the die and a first via electrode disposed inside the via electrically connecting an electrode at a top surface of the die with another e...
04/10/2012
8143704Electronic assemblies including mechanically secured protruding bonding conductor joints
An electronic assembly includes an IC die including a semiconductor top surface having active circuitry thereon and a bottom surface, and at least one protruding bonding feature having sidewall surfaces and a leading edge surface extending outward from the IC die. A...
03/27/2012
8143705Tamper-resistant semiconductor device and methods of manufacturing thereof
The invention relates to a tamper-resistant semiconductor device comprising a substrate (5) comprising an electronic circuit arranged on a first side thereof. An electrically-conductive protection layer (50, 50a, 50b) is arranged o...
03/27/2012
8138577Pulse-laser bonding method for through-silicon-via based stacking of electronic components
There is described a method of forming a through-silicon-via to form an interconnect between two stacked semiconductor components using pulsed laser energy. A hole is formed in each component, and each hole is filled with a plug formed of a first metal. One componen...
03/20/2012
8125055Packaging technology
Metallized through silicon vias located in the scribe lanes between die are used to create an electrical connection between the front-side and the rear-side of a silicon die. One of the metallization layers on the front-side of the die comprises portions which exten...
02/28/2012
8110900Manufacturing process of semiconductor device and semiconductor device
After forming a ring-shaped trench penetrating through a semiconductor substrate from a rear surface side thereof and forming an insulating film inside the trench and on the rear surface of the semiconductor substrate, a through hole is formed in the insulating film...
02/07/2012
8110899Method for incorporating existing silicon die into 3D integrated stack
An apparatus including a first die including a plurality of conductive through substrate vias (TSVs); and a plurality of second dice each including a plurality of contact points coupled to the TSVs of the first die, the plurality of second dice arranged to collectiv...
02/07/2012
8106484Silicon substrate for package
In a silicon substrate for a package, a through electrode is provided with which a through hole passing through from a bottom surface of a cavity for accommodating a chip of an electronic device to a back surface of the substrate is filled. An end part of the throug...
01/31/2012
8102029Wafer level buck converter
A buck converter module includes a high side (HS) die having source, drain, and gate bonding pads on a front side of the HS die, a low side (LS) die having a first section thereof with a plurality of through silicon vias (TSVs) extending from a back side to a front ...
01/24/2012
8072046Through-electrode, circuit board having a through-electrode, semiconductor package having a through-electrode, and stacked semiconductor package having the semiconductor chip or package having a through-electrode
A stacked semiconductor package includes a first semiconductor package having a first semiconductor chip having a first pad and a through-hole passing through a the portion corresponding to the pad; a second semiconductor package disposed over the first semiconducto...
12/06/2011
8058707Semiconductor devices having redundant through-die vias and methods of fabricating the same
Semiconductor devices having redundant through-die vias (TDVs) and methods of fabricating the same are described. A substrate is provided having conductive interconnect formed on an active side thereof. Through die vias (TDVs) are formed in the substrate between a b...
11/15/2011
8058708Through hole interconnection structure for semiconductor wafer
A through-hole interconnection structure for a semiconductor wafer, in which: the each wafer includes at least a first wafer and a second wafer electrically connected to the first wafer; an electrical signal connecting section of the second wafer is provided to prot...
11/15/2011
8049310Semiconductor device with an interconnect element and method for manufacture
A semiconductor device is provided configured to be electrically connected to another device by through silicon interconnect technology. The semiconductor device includes a semiconductor substrate with at least one through hole. A through silicon conductor extends i...
11/01/2011
8039928Chip stack package
A chip stack package includes a plurality of chips that are stacked by using adhesive layers as intermediary media, and a through via electrode formed through the chips to electrically couple the chips. The through via electrode is classified as a power supply throu...
10/18/2011
8035198Through wafer via and method of making same
A through wafer via structure. The structure includes: a semiconductor substrate having a top surface and an opposite bottom surface; and an array of through wafer vias comprising at least one electrically conductive through wafer via and at least one electrically n...
10/11/2011
8030739Semiconductor package having chip selection through electrodes and stacked semiconductor package having the same
A stacked semiconductor package includes a plurality of stacked semiconductor chips each having a circuit unit, a data pad, and a chip selection pad. The plurality of stacked semiconductor chips also includes a plurality of chip selection through electrodes. The chi...
10/04/2011
8026577Semiconductor apparatus having a triple well structure and manfacturing method thereof
A semiconductor apparatus according to the present invention includes a first well-region and a second well-region in a semiconductor substrate, and a plurality of transistors formed to the second well-region. Further, the semiconductor apparatus includes a through-...
09/27/2011
8018031MOS transistors formed on the front and back surface of a semiconductor substrate
The invention realizes low on-resistance and high current flow in a semiconductor device in which a current flows in a thickness direction of a semiconductor substrate. A first MOS transistor having first gate electrodes and first source layers is formed on a front ...
09/13/2011
7999354Resin composition, filling material, insulating layer and semiconductor device
A resin composition of the present invention is used for forming a filling material which fills at least a through-hole of a semiconductor substrate, the through-hole extending through the semiconductor substrate in a thickness direction thereof and having a conduct...
08/16/2011
7989927Silicon substrate for package
In a silicon substrate for a package, a through electrode is provided with which a through hole passing through from a bottom surface of a cavity for accommodating a chip of an electronic device to a back surface of the substrate is filled. An end part of the throug...
08/02/2011
7968975Metal wiring structure for integration with through substrate vias
An array of through substrate vias (TSVs) is formed through a semiconductor substrate and a contact-via-level dielectric layer thereupon. A metal-wire-level dielectric layer and a line-level metal wiring structure embedded therein are formed directly on the contact-...
06/28/2011
7956443Through-wafer interconnects for photoimager and memory wafers
A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Fu...
06/07/2011
7956442Backside connection to TSVs having redistribution lines
An integrated circuit structure includes a semiconductor substrate including a front side and a backside. A through-silicon via (TSV) penetrates the semiconductor substrate, and has a back end extending to the backside of the semiconductor substrate. A redistributio...
06/07/2011
7952171Die stacking with an annular via having a recessed socket
A die stack including a die having an annular via with a recessed conductive socket and methods of forming the die stack provide a structure for use in a variety of electronic systems. In an embodiment, a die stack includes a conductive pillar on the top of a die in...
05/31/2011
7952170System including semiconductor components having through interconnects and back side redistribution conductors
A system includes a supporting substrate and at least one semiconductor substrate. The semiconductor component includes a semiconductor substrate having a circuit side with integrated circuits and substrate contacts and a back side, a plurality of through interconne...
05/31/2011
7939914Dual wired integrated circuit chips
A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with fir...
05/10/2011
7936048Power transistor and power semiconductor device
In a power semiconductor device, the vertically conducting power transistor has at its front side (11) a source zone (14) and a control input (16). A feedthrough for the control input has an electrode on the front side (11) and an electro...
05/03/2011
7932584Stacked chip-based system and method
A system has multiple discrete functional system subcomponents which, when interconnected form the system, each of the subcomponents being on a discrete substrate and being electrically interconnected to at least one of the other subcomponents by a through-chip via....
04/26/2011
7928534Bond pad connection to redistribution lines having tapered profiles
An integrated circuit structure includes a semiconductor substrate having a front side and a backside. A through-silicon via (TSV) penetrates the semiconductor substrate, wherein the TSV has a back end extending to the backside of the semiconductor substrate. A redi...
04/19/2011
7919834Edge seal for thru-silicon-via technology
One or more multilayer back side metallurgy (BSM) stack structures are formed on thru-silicon-vias (TSV). The multiple layers of metal may include an adhesion layer of chromium on the semiconductor wafer back side, a conductive layer of copper, diffusion barrier lay...
04/05/2011
7919835Semiconductor device and method for manufacturing the same
The present invention provides a semiconductor device having a low-k film including an interconnect layer and a highly-reliable through-substrate contact plug. The semiconductor device includes: a semiconductor substrate having a f...
04/05/2011
7915710Method of fabricating a semiconductor device, and semiconductor device with a conductive member extending through a substrate and connected to a metal pattern bonded to the substrate
A method of fabricating a semiconductor device includes providing a semiconductor substrate having an active surface, thinning the substrate by removing material from a second surface of the substrate opposite the active surface, bonding a metal carrier to the secon...
03/29/2011
7915711Semiconductor assemblies and methods of manufacturing such assemblies including trenches in a molding material between semiconductor die
Semiconductor devices and assemblies including interconnects and methods for forming such interconnects are disclosed herein. One embodiment of a method of manufacturing a semiconductor device includes forming a plurality of first side trenches to an intermediate de...
03/29/2011
7898063Through substrate annular via including plug filler
A through substrate via includes an annular conductor layer at a periphery of a through substrate aperture, and a plug layer surrounded by the annular conductor layer. A method for fabricating the through substrate via includes forming a blind aperture within a subs...
03/01/2011
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