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...that power steering was invented by independent inventor Francis W. Davis? As chief engineer in the 1920s of the truck division of the Pierce Arrow Motor Car Company, he saw how hard it was to steer heavy vehicles. So that he would be able to keep the profits from his future invention, Davis left his job, rented a small engineering shop in Waltham, Mass., and developed a hydraulic power steering system that led to power steering.

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Class 257/254 - Physical deformation (e.g., strain sensor, acoustic wave detector)


Subclass of Class 257 - Active solid-state devices (e.g., transistors, solid-state diodes)
Definition: Subject matter wherein the input is a physical deformation.
No. of patents: 250
Last issue date: 05/08/2012


1              
NumberTitleIssue Date
8174056Substrate-level interconnection and micro-electro-mechanical system
A micro-electro mechanical system (MEMS) is disclosed, which comprises a substrate; at least one transistor formed on the substrate and electrically connected with a contact plug; at least one MEMS device; and a local interconnection line at the same level of the co...
05/08/2012
8115240CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining
A process for fabricating a monocrystalline silicon micromechanical element integrated with a CMOS circuit element within the CMOS technology, wherein a domain of second conducting property is formed within a substrate of first conducting property; the second conduc...
02/14/2012
8072010Membrane for a MEMS condenser microphone
A membrane (2) for a microphone (1) is disclosed which comprises a first portion (A1), a second portion (A2), and elements (E1 . . . E4, E1′ . . . E4′), which connect said first (A1) and said second ...
12/06/2011
8044442Metal-insulator-metal (MIM) switching devices
A gated nano-electro-mechanical (NEM) switch employing metal-insulator-metal (MIM) technology and related devices and methods which can facilitate implementation of low-power, radiation-hardened, high-temperature electronic devices and circuits. In one example embod...
10/25/2011
8030690Device sensitive to a movement comprising at least one transistor
The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8...
10/04/2011
7888709Capacitive micromachined ultrasonic transducer and manufacturing method
The integrated circuit/transducer device of the preferred embodiment includes a substrate, a complementary-metal-oxide-semiconductor (CMOS) circuit that is fabricated on the substrate, and a capacitive micromachined ultrasonic transducer (cMUT) element that is also ...
02/15/2011
7851829Semiconductor chip module
One aspect includes a sensor chip module including a sensor chip and a module housing accommodating the sensor chip. The module housing defines a mounting plane of the sensor chip module. In one case, an active surface of the sensor chip is inclined with respect to ...
12/14/2010
7687833Component containing a baw filter
A monolithic assembly of electronic components including a semiconductor substrate, at a first level above the substrate, at least one bulk acoustic wave resonator, at a second level above the resonator, a single-crystal semiconductor layer in which are formed semic...
03/30/2010
7642575Integrated electronic microphone having a perforated rigid back plate membrane
The present invention provides an integrated electronic microphone formed as part of a semiconductor device, and a manufacturing method therefor. The microphone is formed with a sensing electrode as part of a sensing membrane, and the sensing electrode is connected ...
01/05/2010
7642576Rotational MEMS device having piezo-resistor sensor
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the t...
01/05/2010
7554136Micro-switch device and method for manufacturing the same
A micro device that is manufactured by semiconductor process and is electrically connected to outside for its operation. The micro device includes a circuit board, an electrode pad being provided on the circuit board, a lead substrate being provided substantially pa...
06/30/2009
7550794Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wh...
06/23/2009
7411261MEMS device and fabrication method thereof
A method for fabricating a MEMS device having a fixing part fixed to a substrate, a connecting part, a driving part, a driving electrode, and contact parts, includes patterning the driving electrode on the substrate; forming an insulation layer on the substrate; pat...
08/12/2008
7385268Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation
A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movab...
06/10/2008
7371601Piezoresistive sensing structure
A technique for manufacturing a piezoresistive sensing structure includes a number of process steps. Initially, a piezoresistive element is implanted into a first side of an assembly that includes a semiconductor material. A passivation layer is then formed on the f...
05/13/2008
7353706Weighted released-beam sensor
A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and suspended above the layer such that a second end forms a cantilever above the...
04/08/2008
7355777Energy storage structures using electromechanically active materials for micro electromechanical systems
System and method for storing energy using electromechanically active materials in micro electromechanical systems. A preferred embodiment comprises a movable element, an intermediate layer formed under the movable element, and electrical addressing circuitry formed...
04/08/2008
7352608Controllable nanomechanical memory element
A memory device includes a mechanical element that exhibits distinct bistable states under amplitude modulation. The states are dynamically bistable or multi-stable with the application of a drive signal of a given frequency. The natural resonance of the element in ...
04/01/2008
7342263Circuit device
A circuit device is provided which can be manufactured at reduced costs and which is highly reliable. The circuit device includes a Sensor area formed on part of a semiconductor substrate, a circuit area formed around the sensor area on the semiconductor substrate t...
03/11/2008
7325781Automatic bathroom flushers with modular design
A bathroom flusher includes a flusher body, a valve assembly, an electronic control system, and a flusher cover. The flusher body includes an inlet and an outlet, and is designed to accommodate the valve assembly that controls water flow between the inlet and the ou...
02/05/2008
7324096Touch panel device
A plurality of excitation elements, each including an IDT and a piezoelectric film, for exciting, respectively, surface acoustic waves, each having a unique center frequency, are formed on one end of a non-piezoelectric substrate, a plurality of receiving elements, ...
01/29/2008
7322241Acceleration sensor with redundant contact holes
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member. A dielectric f...
01/29/2008
7321156Device for capacitive pressure measurement and method for manufacturing a capacitive pressure measuring device
A device for manufacturing a capacitive pressure measurement includes an insulated base electrode, a mechanically deflectable counterelectrode composed of a layer made of at least one of a monocrystalline and polycrystalline semiconductor material, a contact arrange...
01/22/2008
7317233Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device having mechanical structures and anchors to secure the mechanical structures to...
01/08/2008
7312485CMOS fabrication process utilizing special transistor orientation
Complementary metal oxide semiconductor transistors are formed on a silicon substrate. The substrate has a {100} crystallographic orientation. The transistors are formed on the substrate so that current flows in the channels of the transistors are parallel to the
12/25/2007
7302856Strain sensors based on nanowire piezoresistor wires and arrays
A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transdu...
12/04/2007
7304358MOS transistor with a deformable gate
A MOS transistor with a deformable gate formed in a semiconductor substrate, including source and drain areas separated by a channel area extending in a first direction from the source to the drain and in a second direction perpendicular to the first one, a conducti...
12/04/2007
7294895Capacitive dynamic quantity sensor and semiconductor device
A capacitive dynamic quantity sensor whose size is small and whose reliability and mass productivity are high is provided. In order to realize signal transmission from a lower electrode to an upper electrode, silicon columns which are electrically isolated from one ...
11/13/2007
7292696Electret capacitor microphone
The present invention is an electret condenser microphone that includes an electro-acoustic transducer (M) having an electret portion (E) including a diaphragm (6) acting as an electrode and a stationary electrode (2, 25) disposed in opposition to the ...
11/06/2007
7289357Isolation structure for deflectable nanotube elements
Nanotube-based switching elements and logic circuits. Under one embodiment of the invention, a switching element includes an input node, an output node, a nanotube channel element having at least one electrically conductive nanotube, and a control electrode. The con...
10/30/2007
7280394Field effect devices having a drain controlled via a nanotube switching element
Field effect devices having a drain controlled via a nanotube switching element. Under one embodiment, a field effect device includes a source region and a drain region of a first semiconductor type and a channel region disposed therebetween of a second semiconducto...
10/09/2007
7275434Micromechanical component
In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic mass, it is proposed that the spring device be designed for an intrins...
10/02/2007
7274079Sensor design and process
An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes...
09/25/2007
7271459Physical quantity sensor
A physical quantity sensor includes: a semiconductor substrate; a cavity disposed in the substrate and extending in a horizontal direction of the substrate; a groove disposed on the substrate and reaching the cavity; a movable portion separated by the cavity and the...
09/18/2007
7268646Temperature controlled MEMS resonator and method for controlling resonator frequency
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and/or controlling microelectromechanical reso...
09/11/2007
7268653Microelectromechanical system able to switch between two stable positions
A microelectromechanical system includes separate conducting elements. An electromechanically deformable element can be switched between a first stable position and a second stable position. Contact elements allow for electrical continuity to be established between ...
09/11/2007
7265554Electric potential measuring device and image forming apparatus
An electric potential measuring device includes a detection electrode of a conductive material disposed in opposition to an object and a movable structure includes a first solid material portion of another dielectric and a second solid material portion of another di...
09/04/2007
7264986Microelectronic assembly and method for forming the same
According to one aspect of the present invention, a method is provided for forming a microelectronic assembly. The method comprises forming first and second trenches on a semiconductor substrate, filling the first and second trenches with an etch stop material, form...
09/04/2007
7244922Semiconductor device and electronic apparatus
The semiconductor device has a lead frame, a photo-detection chip and a control IC chip mounted on the lead frame, a first sealing portion that seals the photo-detection chip and the control IC chip, and a second sealing portion that covers the first sealing portion...
07/17/2007
7240428Method for making probes for atomic force microscopy
A method for producing probes for atomic force microscopy comprises producing, on a surface of one side of a semiconductor substrate, one or more moulds for the production of one or more probe tips. One or more probe configurations and at least one set of a probe ti...
07/10/2007
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