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| Number | Title | Issue Date |
| 7984891 | Manufacture of an integrated fluid delivery system for semiconductor processing apparatus A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The fluid delivery system includes an integrated fluid flow network architecture, which may include, in addition to a layered... | 07/26/2011 |
| 7802771 | Fluid control device A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to mo... | 09/28/2010 |
| 7731152 | Reversed actuator with minimal leak potential An apparatus is provided for a valve actuator assembly comprising an actuator housing, a piston, and a spring. The piston is disposed within the actuator housing. The piston is configured to couple to a valve element, and includes an inner cylindrical section and an... | 06/08/2010 |
| 7651066 | Device for pneumatic control A device used for pneumatic control, includes a control piston carried in a cylinder. The control piston is mounted so as to be movable in the direction of a longitudinal piston axis, and a primary flow path that can be closed by the control pressure passes through ... | 01/26/2010 |
| 7559527 | Diffusion bonded fluid flow manifold with partially integrated inter-active component A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The fluid delivery system includes an integrated fluid flow network architecture, which may include, in addition to a layered... | 07/14/2009 |
| 7500649 | Vacuum valve drive A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tigh... | 03/10/2009 |
| 7494107 | Gate valve for plus-atmospheric pressure semiconductor process vessels An isolation valve is preferably applied to the semiconductor industry for sealing a process vessel and also operates effectively at plus-atmospheric pressures. A double containment gate valve assembly includes a housing and a movable head assembly within the housin... | 02/24/2009 |
| 7467778 | Slurry tolerant pilot operated relief valve Cartridge-style fluid control devices are provided that are static pressure independent and capable of repeatable, reliable, particulate insensitive performance in service conditions typical of downhole intervention environments. ... | 12/23/2008 |
| 7389969 | Chemical liquid valve A chemical liquid valve is arranged such that a diaphragm coupled to a piston rod is brought into/out of contact with a valve seat provided between an inlet port and an outlet port. To achieve a chemical liquid valve providing stable sealing strength, the diaphragm ... | 06/24/2008 |
| 7357152 | Releasable non-return valve The invention relates to a releasable non-return valve, in which a connection between a working chamber and a connector chamber may be closed by a non-return piston and opened by the opening movement of a release piston which may be pressurized with a release pressu... | 04/15/2008 |
| 7357373 | Pilot-type two-port valve A two-port valve includes a valve part configured to open and close a valve seat in a liquid flow path connecting a first port and a second port by a valve member and a pilot-type valve driving mechanism to open and close the valve member through a rod. The rod pass... | 04/15/2008 |
| 7328593 | Refrigerant valve arrangement A refrigerant valve arrangement is described, having a housing which has a first functional space, in which there is arranged at least one functional element, which co-operates with a first annular contact surface formed in an internal boundary wall. It is desirable... | 02/12/2008 |
| 7328881 | Evacuating valve An evacuating valve includes a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump; a valve casing defining a passage connecting the chamber port... | 02/12/2008 |
| 7322557 | Chemical liquid control valve A chemical liquid control valve is provided with a barrier on an outer circumferential end portion of a protruding part (an outer circumferential bottom portion of a valve seat). The barrier is placed so that an angle between the center line of an outlet passage and... | 01/29/2008 |
| 7311292 | Sanitary diaphragm valve The invention relates to a valve intended in particular for sanitary applications, comprising a body in which there are a first and a second perpendicular duct for the flow of a fluid to be shut off; a closure member acts in the valve body to close and open the firs... | 12/25/2007 |
| 7300336 | Media control valve The present invention is related to valves for the controlling the flow of media. For example, the valves of the present invention may control the flow of solid media into a fluid stream. More, specifically, the valves of the present invention may be used to control... | 11/27/2007 |
| 7300035 | Valve, actuator and control system therefor A valve actuator comprising a lower housing comprising a mounting spool that is operable to couple to a valve body. A rotating sleeve is disposed within the lower housing and coupled to a stem connector. A fixed sleeve in disposed within the lower housing and includ... | 11/27/2007 |
| 7278441 | Fluid controller A fluid control device 1 has an upper space S1 formed between and defined by the upper surface of a piston 10 and the lower surface of top wall 8a of an upper casing 8, and a lower space S2 formed between and defined ... | 10/09/2007 |
| 7255321 | Pinch valve A pinch valve is provided with a main body (10) accommodating a tube body (11), a cylinder body (2) having an upper cylinder portion (17) and a lower handle support portion (3), a piston accommodated in the cylinder portion, a pres... | 08/14/2007 |
| 7255126 | Sanitary liquid pressure regulator A liquid pressure reducing regulator having a pressure receiving means in liquid communication with the liquid inlet passage, upon which a liquid in the liquid inlet passage can exert a balancing force, and a means for communicating the balancing force to the diaphr... | 08/14/2007 |
| 7204150 | Turbo sump for use with capacitive pressure sensor The disclosed pressure sensor includes a body, a diaphragm, and a flow defining structure. The body defines an interior volume. The diaphragm divides the interior volume into a first portion and a second portion. At least a first part of the diaphragm moves in a fir... | 04/17/2007 |
| 7201362 | High temperature resistant seal structure, valve comprising the same and aerospace craft side thruster A thruster valve for controlling a flow of high temperature fluid, comprising a valve casing, a graphite liner, a drive rod, and at least one relief hole. The graphite liner is disposed in a through hole within the valve casing. The drive rod being slidably received... | 04/10/2007 |
| 7192270 | Tight pitch nozzle with individual valve gate control An injection molding system is disclosed. The system includes a multiple valve gated nozzle. The flow through each valve gate is determined by individually operated valve pins. Each valve pin is independently controlled by a separate actuation unit. In order to achi... | 03/20/2007 |
| 7156267 | Valve unit for filling machines The present invention relates to a valve unit for container filling machines, particularly for bottle fillers. More particularly, the present invention relates to a valve unit (1), particularly for machines for filling containers (8), comprising a holl... | 01/02/2007 |
| 7150443 | Control valve for nitrous oxide injection system A nitrous oxide or fuel control valve has flow control of nitrous oxide from a fluid-delivery aperture (7) or flow control of fuel from a fluid-delivery aperture (8) into a injection nozzle (22) of an intake manifold of an engine by actuation of... | 12/19/2006 |
| 7150299 | Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor A fluid control and gas delivery assembly and method for containing, receiving and storing hazardous fluids and for dispensing gas comprising a container, a fluid fill path, a gas dispensing path, a first shut-off valve, a pressure reducer, a fluid flow restrictor, ... | 12/19/2006 |
| 7143956 | Suck back valve A suck back valve includes an ON/OFF valve mechanism which opens/closes a fluid passage by displacing a valve member together with a first piston under an action of a pressure fluid supplied into a first cylinder chamber, and a suck back mechanism which has a suctio... | 12/05/2006 |
| 7131629 | Composite valve for gas supply system An automatic-and-manual operation composite valve includes a valve main body into which an air is supplied and from which the air is discharged, a piston provided within the valve main body to be vertically movable by means of the air supplied or discharged and a sn... | 11/07/2006 |
| 7117886 | Vacuum regulating valve A vacuum regulating valve has high controllability, wherein the opening of a valving member can be quickly and accurately controlled by using a small and inexpensive electric motor. In accordance with a signal indicative of a pressure set value and a pressure signal... | 10/10/2006 |
| 7108006 | Subsea actuator assemblies and methods for extending the water depth capabilities of subsea actuator assemblies A hydraulic pressure compensation system for valve actuator assemblies is described having particular application for subsea wellhead installations. The compensation system includes at least one valve actuator assembly having a housing that retains a reciprocable pi... | 09/19/2006 |
| 7104282 | Two stage solenoid control valve A two stage solenoid control valve is described. The control valve opens and closes using a single source of pressurized fluid. This source of pressurized fluid may be transmitted through the solenoid control valve and on to a downstream valve such as a bleed valve ... | 09/12/2006 |
| 7105061 | Method and apparatus for sealing substrate load port in a high pressure reactor Methods and an apparatus for providing an intrinsically safe chamber door for a processing chamber capable of operating at high pressures are provided. One exemplary apparatus includes a processing chamber for a substrate where the chamber is configured to operate a... | 09/12/2006 |
| 7094135 | Abrasivejet cutting head with back-flow prevention valve An abrasivejet cutting head is disclosed that includes a valve assembly for preventing back-flow to the abrasive hopper of abrasive-laden fluid from the cutting head when the discharge path for the abrasivejet becomes clogged or otherwise blocked. The valve assembly... | 08/22/2006 |
| 7090190 | Flow control valve There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts... | 08/15/2006 |
| 7070160 | Diaphragm valves A diaphragm valve capable of increasing durability of a diaphragm comprises a valve body internally formed with a valve chamber having an open upper end and a suck-back chamber having an open lower end, between an inlet passage and an outlet passage, and a through h... | 07/04/2006 |
| 7070159 | Vacuum regulating valve A vacuum regulating valve includes a valve casing provided with two main ports, a passage connecting the two main ports, a valve seat formed in the passage, a valve element capable of being seated on the valve seat, a valve stem extending from the valve element, and... | 07/04/2006 |
| 7066202 | Indicator-equipped flow regulating valve An indicator-equipped flow regulating valve includes a valve body through which a fluid flows, a connecting body connected to an upper portion of the valve body, a housing connected to an upper portion of the connecting body, a piston arranged in the connecting body... | 06/27/2006 |
| 7059579 | Latching valve for a torque-transmitting mechanism in a transmission A torque-transmitting mechanism control valve disposed between a hydrostatic source of pressure and a torque-transmitting mechanism is effective to direct fluid pressure to engage the torque-transmitting mechanism when a control pressure is present, effective to ret... | 06/13/2006 |
| 7044433 | Valve spring mechanism A valve spring mechanism is provided which is suitable for use with the inlet or exhaust valves of an internal combustion engine, and includes a valve head and a valve stem. The mechanism includes a piston/cylinder arrangement in which the cylinder surrounds a porti... | 05/16/2006 |
| 7013916 | Sub-atmospheric gas delivery method and apparatus An apparatus for containing and delivering hazardous gases at sub-atmospheric pressure from a pressurized container is provided which includes a valve body in sealed communication with an outlet orifice of the pressurized container. The outlet orifice of the pressur... | 03/21/2006 |
