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Class 250/559.3 - With alignment detection


Subclass of Class 250 - Radiant energy
Definition: Subject matter wherein the position detected is indicative
No. of patents: 371
Last issue date: 10/23/2012


1                    
NumberTitleIssue Date
8294130Methods and systems for optimizing the alignment of optical packages
A method for optimizing the alignment of an optical package includes directing a beam spot of a laser along a folded optical path and onto a waveguide portion of a wavelength conversion. The output intensity of the wavelength conversion device is measured as a posit...
10/23/2012
8203131Limiting plate shifting within a plate pallet
An apparatus for aligning and inserting a plate stack (112) into an automatic plate loader (100) in a predefined position. A plate pallet (116) carries the plate stack. A plate pallet adapter (128) adapted to carry the plate pallet, a cen...
06/19/2012
7888664Plate pallet alignment system
A plate pallet alignment and loading apparatus (10) for originally packed plate pallet (13) into a printing plate imaging device (71) includes plate pallet adaptor (11) wherein the originally packed plate pallet (13) is placed on t...
02/15/2011
7880155Substrate alignment apparatus comprising a controller to measure alignment during transport
A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is furthe...
02/01/2011
7855377Alignment structures for an optical assembly
An optical assembly is provided that includes a substrate. The substrate has one or more optical waveguides. A component is coupled to and spaced apart from the substrate. The component has one or more photodetectors. One or more flexible optical pillars is disposed...
12/21/2010
7777210Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device using the same
The present invention is to provide a laser irradiation method for performing homogeneous laser irradiation to the irradiation object even when the thickness of the irradiation object is not even. In the case of irradiating the irradiation object having uneven thick...
08/17/2010
7777209Product inspection system and a method for implementing same
An inspection system and a method for measuring physical characteristics of a component using the inspection system is provided, wherein the inspection system includes a light source, a sensing device, a reflecting device, and a retention mount, at least one of whic...
08/17/2010
7675051Sheet detector mechanism including sheet detector further including photoreceptors, and image forming apparatus including the same
An image forming apparatus includes an image forming mechanism, a sheet conveyance mechanism, and a sheet detector. The image forming mechanism forms an image and transfers it onto the sheet conveyed by the sheet conveyance mechanism. The sheet detector is arranged ...
03/09/2010
7633075Through hole formation state detecting device and electronic timepiece using the detecting device
When a light emission element emits no light, a detected signal from a photodetection element is captured as an intensity of external light. Then, a threshold value is offset by the intensity of the external light. The offset threshold is then compared to a detected...
12/15/2009
7531821Imprint apparatus and imprint method including dual movable image pick-up device
An imprint apparatus, comprising a first holder for holding a mold having an imprint pattern; a second holder for holding a workpiece to which the imprint pattern is transferred; a first illumination system for irradiating a mark for determining a position of the mo...
05/12/2009
7504647Method and apparatus for inspecting a sample having a controller for determining an estimated height of the detector from the sample
Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sam...
03/17/2009
7485887Passive alignment of photodiode active area in three axes using microscopic focus
A fixturing system and microscope/video camera setup enables an operator to manipulate a photodiode into position optically using known good targets for the X and Y location and using microscope focus/defocus/refocus for locating the active area of the avalanche pho...
02/03/2009
7442951Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attribute
A method and apparatus for determining lens distortion in a projection imaging tool are described. The techniques include exposing at least one alignment attribute onto a substrate having a recording media. A complementary alignment attribute is also exposed onto th...
10/28/2008
7443505Optical alignment method and apparatus
In disclosed optical alignment method and apparatus thereof, external reflection entering laser diode by feedback from transmission line of low cost bidirectional optical transceiver module without optical isolator for subscribers is reduced so as to reduce RIN cons...
10/28/2008
7439531Alignment systems and methods for lithographic systems
An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determi...
10/21/2008
7405388Video centerscope for machine alignment
This invention can be attached to the head of a milling machine and performs the functions of a center scope and an edge finder. Unlike a center scope or an edge finder it does not have to be removed from the machine before the machine is used. The invention perform...
07/29/2008
7388188Apparatus, system and method for detecting a position of a movable element in a compartment
The apparatus, the system and the method measure a distance and/or an intensity of emitted light. The apparatus and the system have a compartment, a movable element and/or a sensor array in an interior of the compartment. The sensor array emits light, detects light ...
06/17/2008
7382914Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects
Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the phot...
06/03/2008
7375361Optical alignment device for machine tool
The orientation of a machine 2 relative to a work-piece 10 is manually controlled by means of an alignment device 4. The device 4 includes a light source 24 rigidly attached to a foot 12 that is resiliently movably attached ...
05/20/2008
7371562Guided mode resonant filter biosensor using a linear grating surface structure
Methods and compositions are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also provides optical devices useful as narrow band filters. ...
05/13/2008
7369253Systems and methods for measuring sample surface flatness of continuously moving samples
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of conveyance. The relative distance between the sample and the angled grating c...
05/06/2008
7355561Systems and methods for providing images
Systems and methods for providing images are disclosed. An exemplary embodiment of the system for providing images includes a first image display device for displaying a first image at a first image plane and a second image display device for displaying a second ima...
04/08/2008
7345748Survey system capable of remotely controlling a surveying instrument
In a survey system in which guide light is emitted from the side of a target, and, on the side of a surveying instrument, a telescope is directed roughly toward the target by receiving the guide light so as to shorten the time required for automatic collimation, the...
03/18/2008
7337037Controlled wall saw and method for controlling the wall saw
A control wall saw includes a guide rail (2) securable on a to-be-cut wall (7), a saw head (3) displaceable along the guide rail (2), a rotary drive, a pivotally adjustable saw arm (4) on a radially end of which a rotatably driven,...
02/26/2008
7332734Lithography apparatus and pattern forming method using the same having an liquid crystal panel for a photo mask function
A lithography apparatus is provided. The apparatus includes: a stage, a first light source unit, an optical system, an image obtaining means, an image edit means, an LC panel, and a second light source unit. The LC panel is coupled with the optical system and receiv...
02/19/2008
7330574Best-focus estimation by lateral scanning
The sample stage of an array microscope is tilted in the scanning direction such that the best-focus plane of the array microscope intersects the surface of the sample during the scan. As a result of the tilt, the distance from the sample surface of each miniaturize...
02/12/2008
7329889Electron beam apparatus and method with surface height calculator and a dual projection optical unit
An electron beam apparatus including a table which mounts a specimen and is movable in three dimensional directions, an electron beam optical system irradiating an electron beam onto a specimen and for detecting a secondary electron emanated from the specimen by the...
02/12/2008
7327454Method and apparatus for detecting biomolecular interactions
Method and apparatus for detecting biomolecular interactions. The use of labels is not required and the methods may be performed in a high-throughput manner. An apparatus for detecting biochemical interactions occurring on the surface of a biosensor includes a light...
02/05/2008
7319521Measuring device
A device for measuring the thickness of a sheet or web product including at least one moveable measuring sensor which can be pressed against the product while forming an air pad between measuring sensor and product. At least one measuring sensor is respectively prov...
01/15/2008
7317531Apparatus and methods for detecting overlay errors using scatterometry
Disclosed are techniques, apparatus, and targets for determining overlay error between two layers of a sample. In one embodiment, a method for determining overlay between a plurality of first structures in a first layer of a sample and a plurality of second structur...
01/08/2008
7315038Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target
A method and system position a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. The method generates a ...
01/01/2008
7312861Method and apparatus for measuring the angular orientation between two surfaces
A device and method are disclosed that measure the relative angular orientation between two surfaces. Two frames are mounted on the two surfaces to be measured. One frame has a collimated light source and a measuring scale. The other frame has a mirror. The collimat...
12/25/2007
7312090Label-free methods for performing assays using a colorimetric resonant reflectance optical biosensor
Methods are provided for detecting biomolecular interactions. The use of labels is not required and the methods can be performed in a high-throughput manner. The invention also relates to optical devices. ...
12/25/2007
7304721Method for dynamically monitoring a reticle
The method of dynamically monitoring a reticle includes preventively macro monitoring and defect inspecting with regard to mechanical loading, including particle deposits or electrostatically induced damage, and energy load, including the associated changes to the r...
12/04/2007
7305112Method of converting rare cell scanner image coordinates to microscope coordinates using reticle marks on a sample media
Provided is a method for obtaining a position of an object. A slide which carries at least one object and has reticle marks arranged at positions which form substantially a right angle, is positioned in a slide holder of a first imaging system. A first coordinate sp...
12/04/2007
7301616Method and apparatus for object alignment
The present invention relates to a method and apparatus for alignment of two mechanical parts. An inventive measuring device has a housing comprising a light source and a detector for detection of light beams. The light source is capable of transmitting a light beam...
11/27/2007
7301163Lateral shift measurement using an optical technique
Alignment of layers during manufacture of a multi-layer sample is controlled by applying optical measurements to a measurement site in the sample. The measurement site includes two diffractive structures located one above the other in two different layers, respectiv...
11/27/2007
7301628Method and apparatus for detecting biomolecular interactions
Method and apparatus for detecting biomolecular interactions. The use of labels is not required and the methods may be performed in a high-throughput manner. An apparatus for detecting biochemical interactions occurring on the surface of a biosensor includes a light...
11/27/2007
7301634Apparatus and methods for detecting overlay errors using scatterometry
Disclosed is a method of determining an overlay error between two layers of a multiple layer sample. For a plurality of periodic targets that each have a first structure formed from a first layer and a second structure formed from a second layer of the sample, an in...
11/27/2007
7297971Alignment systems and methods for lithographic systems
An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determi...
11/20/2007
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