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| Number | Title | Issue Date |
| 7442930 | Method for correcting distortions in electron backscatter diffraction patterns A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the m... | 10/28/2008 |
| 7436503 | Dark field inspection apparatus and methods Accordingly, the present invention provides methods and apparatus for performing a darkfield inspection on a specimen having periodic structures thereon while substantially reducing or eliminating the long range ringing response, which is typically produced by a tra... | 10/14/2008 |
| 7423279 | Systems and methods that detect changes in incident optical radiation Systems, methods and sensors detect changes in incident optical radiation. Current is driven through one or more active areas of a detector while the incident optical radiation illuminates the active areas. Voltage is sensed across one or more of the active areas, a... | 09/09/2008 |
| 7400458 | Imaging optics with wavelength dependent aperture stop An imaging system includes a wavelength dependent aperture stop, which transmits light with different ranges of wavelengths through apertures of different diameters. Thus, different colored light will have different F-stops, which can be selected based on the power ... | 07/15/2008 |
| 7385179 | Optical encoder for measuring displacement At least one exemplary embodiment is directed to an optical encoder which includes a first diffraction grating having a desired optical effective aperture ratio at an appropriate gap position so as to eliminate and/or reduce high-harmonic components from the light i... | 06/10/2008 |
| 7368745 | Pattern recognition system A star pattern recognition system (1) comprises an optical filter arrangement (10) in the form of an array (12) of independently tiltable mirrors (M1), (M2). Light from a distant starfield (2) is incident upon the mirror arr... | 05/06/2008 |
| 7342665 | System and method for control of paint thickness The invention is directed to a system and method for implementing process control for paint thickness using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interfer... | 03/11/2008 |
| 7327512 | Optical waveform monitor apparatus and oscilloscope A measured optical pulse and a sampling optical pulse having different wavelengths are input to a nonlinear optical effect, that is, (i) a nonlinear optical medium generating four optical wave mixing or three optical wave mixing, and the optical intensity of the wav... | 02/05/2008 |
| 7315363 | Inspection method and inspection apparatus The present invention provides an inspection apparatus and inspection method. The inspection apparatus provided by the present invention comprises an illumination optical system which illuminates light to an object under inspection; a detection optical system which ... | 01/01/2008 |
| 7305115 | Method and system for improving ability of a machine vision system to discriminate features of a target A method and system is disclosed to improve the ability of a machine vision system to distinguish desired features of a target by taking images of the target under different one or more lighting conditions and using image analysis to extract information of interest ... | 12/04/2007 |
| 7295356 | Method for improved holographic recording using beam apodization An apodization system for achieving a substantially uniform intensity profile of a modulated reference beam on a holographic recording medium. The substantially uniform intensity profile serves to improve the quality of any and all recorded holograms. In high-densit... | 11/13/2007 |
| 7295358 | High speed, high efficiency optical pattern generator using rotating optical elements An optical pattern generator includes one or more multi-faceted rotating optical elements that introduce an offset that is rotation insensitive. The component that generates the offset is rotationally symmetric around the rotational axis of the optical element. Thus... | 11/13/2007 |
| 7295200 | Computer generated hologram display system A method of displaying a computer generated hologram includes displaying the image as a set of facets that approximated to the true shape of the object to be displayed. Each of these facets is populated with points that together make up the image. The invention prov... | 11/13/2007 |
| 7292327 | Circuit-pattern inspection apparatus The disclosed subject matter is related to a circuit pattern inspection apparatus for detecting a gradual changing of defect expanding over a large area of the semiconductor wafer. In order to detect a gradual changing of a defect related condition expanding over a ... | 11/06/2007 |
| 7286241 | System and method for high-speed laser detection of ultrasound A system and method for laser light amplification provides amplification of a laser light beam emitted from a laser light source as low-amplification seed laser light signal. The low-amplification seed laser light signal is transmitted to an amplification component.... | 10/23/2007 |
| 7248352 | Method for inspecting defect and apparatus for inspecting defect The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern c... | 07/24/2007 |
| 7241995 | Electron microscope equipped with magnetic microprobe There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microsco... | 07/10/2007 |
| 7242789 | Moving-body detecting image sensor Two photodetectors output electric signals based on the detection of light at light receiving sections mutually spaced apart. The output signal of one of the photodetectors is delayed and a first pulse signal is generated, and second pulse signal having no delay is ... | 07/10/2007 |
| 7208749 | System and method for locating and positioning an ultrasonic signal generator for testing purposes The invention is directed to an ultrasonic testing system. The system tests a manufactured part for various physical attributes, including specific flaws, defects, or composition of materials. The part can be housed in a gantry system that holds the part stable. An ... | 04/24/2007 |
| 7147338 | Circuit on a curved, or otherwise irregularly shaped, surface, such as on a helmet to be worn on the head, including a fiber optic conductive path A curved surface, such as a helmet, including a light source and light conductive paths. Light emitting diodes (LEDs) provide the light source and fiber optic conductors provide the light conductive paths. The fiber optic conductors have polished ends to create lens... | 12/12/2006 |
| 7142282 | Device including contacts A device that includes contacts. In one implementation, a device includes a substantially arbitrary arrangement of contacts. The contacts in the device are defined with a definition characteristic of interference lithography. ... | 11/28/2006 |
| 7136104 | Mirror box and electronic still camera A mirror box comprises a quick return mirror and an optical low-pass filter. When observing a subject image, the quick return mirror is set to a reflecting position, in which the quick return to mirror is inclined to the optical axis of a photographing lens group by... | 11/14/2006 |
| 7115849 | Wavefront coding interference contrast imaging systems Contrast Imaging apparatus and methods with Wavefront Coding aspheric optics and post processing increase depth of field and reduce misfocus effects in imaging Phase Objects. The general Interference Contrast imaging system is modified with a special purpose optical... | 10/03/2006 |
| 7109458 | Confocal wafer depth scanning inspection method A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to creat... | 09/19/2006 |
| 7105799 | Apparatus and method for an electronically tuned, wavelength-dependent optical detector An electronically tuned, wavelength-dependent optical detector is provided. The electronically tuned, wavelength-dependent optical detector is a modified metal-semiconductor-metal photodetector including a comb-like metal electrode at a common voltage and metal elec... | 09/12/2006 |
| 7075633 | Method and system for measuring the imaging quality of an optical imaging system An object pattern is imaged by an imaging system onto the image plane of the imaging system at a location where a reference pattern suited to the object pattern is situated in order to measure the imaging fidelity of an optical imaging system, for example, an eyegla... | 07/11/2006 |
| 7053991 | Differential numerical aperture methods Methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination or observation numerical apertures, or both. Metrology applications are provided, and more particularly including scattero... | 05/30/2006 |
| 7038207 | Critical dimension measurement by diffration Diffraction which is used to measure features on a substrate layer is disclosed. A substrate, such as a mask structure for microelectronics or a semiconductor substrate with reflective or transmissive features, is irradiated by a source emitting radiation of known w... | 05/02/2006 |
| 7038790 | Method and apparatus for detecting ultrasonic surface displacements using post-collection optical amplification The present invention detects ultrasonic displacements includes a detection laser to generate a first pulsed laser beam to detect the ultrasonic surface displacements on a surface of the target. Collection optics to collect phase modulated light from the first pulse... | 05/02/2006 |
| 7005235 | Method and systems to print contact hole patterns A method for forming an arbitrary pattern of sub-micron contact holes in a substrate using a combination of interferometric photolithography and optical photolithography with a non-critical mask. The substrate is covered with a photosensitive material and is exposed... | 02/28/2006 |
| 6952256 | Optical compensation in high numerical aperture photomask inspection systems for inspecting photomasks through thick pellicles An objective lens system having reconfigurable optical components that enable the inspection of inspection surfaces in the absence of a pellicle or through a thin membrane pellicle, and using the same system, also enabling the inspection of inspection surfaces throu... | 10/04/2005 |
| 6924891 | Method and apparatus for article inspection including speckle reduction A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is... | 08/02/2005 |
| 6909105 | Method and device for representing an object A process for obtaining an object image of at least one object (40) is described, wherein at least two partial images of the object (40) are taken under differing object conditions which are formed on the object with spatial patterns, wherein a non-lin... | 06/21/2005 |
| 6906839 | System and method for recovering phase information of a wave front A system and method for recovery of phase information from recorded intensity values is disclosed. In one aspect, a phase filter is placed in a plane, which may be the back focal plane (BFP) of a lens used for observing an object. The phase filter changes the phase ... | 06/14/2005 |
| 6903888 | Detection of defects embedded in servo pattern on stamper by using scattered light Defects of a hard disk drive servo pattern stamper are detected by comparing a scattered light beam pattern against the known servo pattern. A magnetic field is applied to stamper and the beam is linearly polarized. Variations in the physical offset of the beam, its... | 06/07/2005 |
| 6900900 | Apparatus and method for enabling high resolution film thickness and thickness-uniformity measurements A high-resolution and high-speed film thickness and thickness uniformity measurement method is disclosed in this invention. The disclosed method includes a step a) of measuring a film thickness at a single point on the top surface of the substrate using an interfero... | 05/31/2005 |
| 6832003 | Method and apparatus for reading and verifying holograms A system and method for reading the information stored in holograms and other diffractive objects. The information is read by analyzing the diffraction pattern produced when a laser beam is focused onto a small spot on the object and scanned across the object. ... | 12/14/2004 |
| 6687036 | Multiplexed optical scanner technology High speed optical scanner systems and methods using optical multiplexing of wavelengths and spatial codes. In one form, a wavelength multiplexed optical scanner (W-MOS) is disclosed, wherein tuning the wavelength or selection of wavelength accomplishes a... | 02/03/2004 |
| 6686994 | UV compatible programmable spatial filter Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with l... | 02/03/2004 |
| 6621947 | Apparatus and method for monitoring a structure using a counter-propagating signal method for locating events A method and apparatus for monitoring a structure and for locating the position of an event including a light source, a waveguide, and a detector means. The waveguide receives light from the light source so that the light is caused to propagate in counter... | 09/16/2003 |
