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Class 250/504R - Ultraviolet or infrared source


Subclass of Class 250 - Radiant energy
Definition: Subject matter wherein the source emits radiation in the
No. of patents: 1276
Last issue date: 05/08/2012


1                      
NumberTitleIssue Date
8173984Extreme ultraviolet light source apparatus
An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV light source apparatus includes: the EUV light generation chamber; a ...
05/08/2012
8173986Laser-heated infrared source
Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. Th...
05/08/2012
8173985Beam transport system for extreme ultraviolet light source
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; an extreme ultraviolet light vacuum chamber defining an interior ...
05/08/2012
8164077Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and ...
04/24/2012
8164076Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light
An extreme ultraviolet light source apparatus, which is to generate an extreme ultraviolet light by irradiating a target with a main pulse laser light after irradiating the target with a prepulse laser light, the extreme ultraviolet light source apparatus comprises:...
04/24/2012
8158961Ophthalmic lens case equipped with an ultraviolet light source
A container (101) for contact lenses is provided which comprises a chamber (105) adapted to store an ophthalmic lens in a fluid medium, a window for viewing a lens disposed in the chamber, and a UV light source adapted to illuminate the lens with UV ra...
04/17/2012
8158960Laser produced plasma EUV light source
A device is disclosed herein which may include a plasma generating system comprising a source of target material droplets and a laser producing a beam irradiating the droplets at an irradiation region, the plasma producing EUV radiation, wherein the droplet source c...
04/17/2012
8158959Extreme ultraviolet light source apparatus
An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light usi...
04/17/2012
8154000Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources
The invention is directed to an arrangement for generating EUV radiation based on a hot plasma using liquid emitter material. The object of the invention is to find a novel possibility for generating EUV radiation which allows a continuous supply of liquid, particul...
04/10/2012
8153999Terahertz wave generating device and apparatus using the same
Provided is a terahertz wave optical device that can be used as a terahertz wave generating device including: an optical switch portion for generating a carrier abruptly by irradiation with excitation light; and a first electrode portion and a second electrode porti...
04/10/2012
8153998Temperature radiator
A temperature radiator, which comprises an emission surface emitting a thermal radiation, is provided with a radiation converter to which a laser beam is irradiated. The radiation converter comprises a micro-structured receiving surface and a micro-structured emissi...
04/10/2012
8143606Extreme ultra violet light source device
An extreme ultra violet light source device of a laser produced plasma type, in which charged particles such as ions emitted from plasma can be efficiently ejected. The extreme ultra violet light source device includes: a target nozzle that supplies a target materia...
03/27/2012
8138487System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to output a plurality of droplets along a target material path and a first c...
03/20/2012
8134136Ex-situ removal of deposition on an optical element
A collector assembly with a radiation collector, a cover plate and a support member connecting the radiation collector to the cover plate are provided. The cover plate is designed to cover an opening in a collector chamber. The collector chamber opening may be large...
03/13/2012
8129700Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light source
Solid tin (Sn) is used as a target, a CO2 laser is used as an excitation source for the target, and after the size of debris emitted from plasma is decreased to a nanometer or smaller size by exciting the solid tin by a laser beam outputted from the CO
03/06/2012
8101930Method of increasing the operation lifetime of a collector optics arranged in an irradiation device
The present invention relates to a method of increasing the operation lifetime of an optical collector unit (33)) arranged in an irradiation device. The irradiation device at least comprises a radiation source (1) emitting optical radiation, in particu...
01/24/2012
8101931RF screen assembly for microwave powered UV lamps
An RF screen for microwave powered UV lamp systems is provided. The RF screen is formed of a single sheet of conductive material in which a mesh pattern has been formed. The screen includes a non-traditional mesh pattern including individual openings with 3 or more ...
01/24/2012
8097867Irradiation device
Radiation apparatus for technical use, with a large number of stretched-out radiation sources emitting in or between the UV and IR ranges and a large number of main reflector segments that are bent and/or folded out of metal sheet in a shape adapted to that of the r...
01/17/2012
8093571Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device
An EUV light source of the present invention is capable of using a saturable absorber stably and continuously in a high heat load state. A saturable absorber (SA) device is disposed on a laser beam line to absorb feeble light, such as self-excited oscillation light,...
01/10/2012
8089057Radiation converter and irradiation arrangement containing said converter
Light therapy in the visible spectral region, for which radiation sources emitting UV radiation are provided, uses fluorescent films that age during operation such that the intensity of the light irradiated by the fluorescent films gradually decreases. In order to s...
01/03/2012
8084757Contamination prevention in extreme ultraviolet lithography
Embodiments of the present invention provide methods and apparatus for removing debris particles using a stream of charged species. One embodiment of the present invention provides an apparatus for removing debris particles from a beam of radiation comprising a char...
12/27/2011
8076659Foil trap and extreme ultraviolet light source device using the foil trap
An extreme ultraviolet (EUV) light source device and foil trap, the device including a vessel; an EUV radiating species supply means that feeds an extreme ultraviolet radiating species into the vessel; a discharge part with discharge electrodes that heat and excite ...
12/13/2011
8071965Projection optical system and projection-type image display apparatus
There is a need for providing a projection optical system that is appropriate for maintaining high resolution with low distortion, miniaturizing a reflector, decreasing the number of reflectors, and decreasing the depth and the bottom (or top) of a display used for ...
12/06/2011
8067756Extreme ultraviolet light source apparatus
In an extreme ultraviolet light source apparatus generating an extreme ultraviolet light from a plasma generated by irradiating a target, which is a droplet D of molten Sn, with a laser light, and controlling the flow direction of ion generated at the generation of ...
11/29/2011
8067757Extreme ultraviolet light source apparatus and method of adjusting the same
An extreme ultraviolet light source apparatus includes a main body including a supply section to which an extreme ultraviolet radiation seed is supplied, and an emission part configured to emit extreme ultraviolet, an excitation unit provided in the main body and co...
11/29/2011
8067755Production device and production method for an optical device component having a grating structure
A production device and a production method for a grating-type optical component enabling formation of a variety types of FBGs using a single phase mask and an optical component made by the production method or production device for a grating-type optical component ...
11/29/2011
8035092Laser produced plasma EUV light source
A device is disclosed which may comprise a system generating a plasma at a plasma site, the plasma producing EUV radiation and ions exiting the plasma. The device may also include an optic, e.g., a multi-layer mirror, distanced from the site by a distance, d, and a ...
10/11/2011
8035091Passive outdoor millimeter wave illuminator
A passive outdoor millimeter wave illuminator for use with a concealed object detection system is disclosed. In a particular embodiment, the illuminator includes a panel having a plurality of horizontal louvers each having reflective properties for reflecting millim...
10/11/2011
8030628Pulse modifier, lithographic apparatus and device manufacturing method
A pulse modifier, and associated lithographic apparatus and a method for manufacturing a device, is disclosed. The pulse modifier is configured to receive an input pulse of radiation and further configured to emit a plurality of corresponding output pulse portions o...
10/04/2011
8026497Methods and apparatus for generating ultraviolet light
A housing for an elongate electrodeless bulb which is energiseable by an rf field such as a microwave field, preferably at or around 2.45 GHz. The housing is constructed of electrically conductive material and is arranged to have a substantially unobstructed opening...
09/27/2011
8022377Method and apparatus for excimer curing
An apparatus for An apparatus for generating excimer radiation is provided. The apparatus includes a housing having a housing wall. An electrode is configured within the housing. A tubular body is around the electrode. The tubular body includes an outer wall and an ...
09/20/2011
8017925Polymerization device
A device to polymerize plastics that are to be hardened by means of UV irradiation comprises two different irradiation sources for UV irradiation and IR irradiation, respectively, whose irradiation is projected onto the plastic to be hardened. The irradiation source...
09/13/2011
8017923Infrared source and method of manufacturing the same
There is provided an infrared light source that has a simple structure and radiates infrared rays polarized in a specific direction and having a specific wavelength. The infrared light source (100) comprises a heat generator (107) and a latticework (
09/13/2011
8017924Drive laser delivery systems for EUV light source
An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may be configured to expose the optic to a gaseous etchant pressure for o...
09/13/2011
8003962Extreme ultraviolet light source apparatus and nozzle protection device
A nozzle protection device capable of protecting a target nozzle from heat of plasma without disturbing formation of a stable flow of a target material in an LPP type EUV light source apparatus. This nozzle protection device includes a cooling unit which is formed w...
08/23/2011
8003963Extreme ultraviolet light source apparatus
An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecti...
08/23/2011
8003961Electromagnetic wave generating device, electromagnetic wave integrated device, and electromagnetic wave detector
A transmission line for propagating a terahertz wave generated based on a carrier generated in a carrier generation layer includes a first region in which the terahertz wave propagates in a first direction and a second region having a different impedance compared to...
08/23/2011
7999241Extreme ultraviolet light source apparatus
An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles includi...
08/16/2011
7994489Skin tanning and light therapy incorporating light emitting diodes
The invention relates to a skin tanning chamber, the improvement comprising at least one light emitting diode emitting a UVA light, such as a UVA LED that emits essentially only UVA. Additionally, multiple LEDs of varying types with various characteristic wavelength...
08/09/2011
7982199Medical imaging apparatus
The invention concerns a medical imaging apparatus comprising a frame (2) whereon is mounted at least one medical imaging data processing unit (4) connected at least to imaging sensor forming means (5,7,8,9), and to image display forming means (...
07/19/2011
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