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| Number | Title | Issue Date |
| 4306149 | Electron microscope (comprising an auxiliary lens) A switchable auxiliary lens is arranged in the vicinity of the objective lens of an electron microscope to enable switching between TEM mode and STEM mode. The auxiliary lens may be formed by an interruption in the magnetic circuit of one of the poles of ... | 12/15/1981 |
| 4287419 | Strong focus space charge Strong focus space charge lens wherein a combination of current-carrying coils and charged electrodes form crossed magnetic and electric fields to focus charged particle beams.... | 09/01/1981 |
| 4251728 | Compensated magnetic deflection coil for electron beam lithography system A toroidal magnetic deflection coil for an electron beam lithography system which is compensated for deflection placement errors that normally result from eddy currents generated within the coil windings by deflection current inputs to the coil. The compe... | 02/17/1981 |
| 4245159 | Quick-acting electron-optical lenses An electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.... | 01/13/1981 |
| 4223200 | Charged particle beam processing with magnetic field compensation A device for compensating for spurious magnetic fields in an energy beam device includes first and second pairs of electromagnetic poles arranged along the particle path and providing magnetic fields to compensate for spurious magnetic fields which might ... | 09/16/1980 |
| 4219732 | Magnetic electron lens In a scanning electron microscope, an objective lens field is generated between a pair of deflecting coils and a specimen by an objective lens having upper and lower magnetic pole pieces. A supplemental magnetic pole piece is installed between said upper ... | 08/26/1980 |
| 4214166 | Magnetic lens system for corpuscular radiation equipment A magnetic lens system for corpuscular radiation equipment operating in a vacuum, in particular, an objective lens system for electron microscopes, comprising a superconducting shield housing, in which are arranged, at one end, a single hollow cylindrical... | 07/22/1980 |
| 4214162 | Corpuscular beam microscope for ring segment focusing A corpuscular beam microscope for ring segment focusing is provided with a ondenser and an objective magnetic lens system which is disposed substantially axially symmetrically about the microscope axis for the purpose of generating two field maxima separat... | 07/22/1980 |
| 4214163 | Method and apparatus for correcting astigmatism in a scanning electron microscope or the like In a scanning electron microscope, a circle of least confusion of the electron beam is formed on a specimen without operation of a stigmator, then the circle of least confusion is minimized by a stigmator, thereby enabling lens astigmatism in said microsc... | 07/22/1980 |
| 4209701 | Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is... | 06/24/1980 |
| 4209702 | Multiple electron lens A multiple electron lens having two axially spaced polepieces defining a space therebetween. The polepieces each have a plurality of axial through openings aligned coaxially defining electron beam paths. A sole anode plate is disposed axially spaced from ... | 06/24/1980 |
| 4201920 | Apparatus for irradiating a target on two opposite faces by means of an accelerated charged particle beam Apparatus for irradiating the two opposite faces of a target by means of a scanning beam and comprising a magnetic deflection system formed by an electromagnet provided with two pole pieces disposed downstream of the target to be irradiated, the length of... | 05/06/1980 |
| 4200794 | Micro lens array and micro deflector assembly for fly's eye electron beam tubes using silicon components and techniques of fabrication and assembly A combined fine focusing micro lens array and micro deflector assembly for use in electron beam tubes of the fly's eye type is provided. The assembly comprises a fine focusing micro lens array sub-assembly formed from a plurality of spaced-apart stacked p... | 04/29/1980 |
| 4198569 | Electron beam exposure system The electron beam exposure system according to this invention has a mask with a pattern cut therein that comprises a plurality of sub-patterns that make up an exposed pattern to be formed on the substrate, a first deflecting means for having electron beam... | 04/15/1980 |
| 4198565 | Charged particle beam scanning apparatus A charged particle beam scanning apparatus includes a deflector for a beam of charged particles which includes a magnetic field generator to supply an incoming electron beam with a magnetic field whose intensity grows higher in the opposite direction to t... | 04/15/1980 |
| 4191887 | Magnetic beam deflection system free of chromatic and geometric aberrations of second order In a magnetic deflection system for deflecting a beam of charged particles, through a given beam bending angle at least four beam deflecting stations are serially arranged along the beam path for bending the beam through the beam bending angle .PSI.. Each... | 03/04/1980 |
| 4189640 | Quadrupole mass spectrometer The quadrupole mass spectrometer has four conventional rod-shaped poles symmetrically located about the ion injection axis. Opposite pairs of rods are interconnected and connected to an rf voltage source. A shield having a circular aperture is located at ... | 02/19/1980 |
| 4180738 | Astigmatism in electron beam probe instruments Supplies for the objective lens scanning coils and stigmator coils of a scanning electron microscope are arranged for digital control by a small computer which receives a digitized input from an imaging electron collector. For a specimen of suitable struc... | 12/25/1979 |
| 4168434 | Long focal length magnetic lens for the optical imaging of a specimen having a large surface area An improved magnetic lens having a long focal length for the optical imaging of a specimen having a large surface area by means of a charged-particle beam. The lens includes a cylindrical coil including at least one winding which is surrounded by a field-... | 09/18/1979 |
| 4162403 | Method and means for compensating for charge carrier beam astigmatism In a scanning electron microscope of the type including a manually controllable stigmator coil system for compensating for beam astigmatism, means are included for providing, simultaneously and in a single image, a mapped display of all possible stigmator... | 07/24/1979 |
| 4145615 | Electron beam exposure apparatus An electron beam exposure apparatus includes an electron beam emitting system having a means for varying the width of an electron beam. In this apparatus a plurality of identical pattern portions corresponding to a plurality of minimum width scanning line... | 03/20/1979 |
| 4137459 | Method and apparatus for applying focus correction in E-beam system A method and apparatus for applying focus correction to an E-beam or charged particle system to compensate for wafer warp and mask tilt. In an electron beam system including a registration system which measures the position of four registration marks with... | 01/30/1979 |
| 4128764 | Collective field accelerator A collective field accelerator which operates with a vacuum diode and utilizes a grooved cathode and a dielectric anode that operates with a relativistic electron beam with a .nu./γ of ~ 1, and a plurality of dielectric lenses having an axial magnetic fi... | 12/05/1978 |
| 4125772 | Scanning electron microscope with eddy-current compensation In a scanning charged particle microprobe such as a scanning electron microscope, means for generating an exponentially decaying electrical signal and means for generating a step function signal to be summed and applied to the microprobe to cause it to de... | 11/14/1978 |
| 4122346 | Optical devices for computed transaxial tomography Various optical devices for use with circular-scanning techniques in computed transaxial tomography are disclosed. In essence such devices produce a rotating dipole field so as simultaneously to provide a circular scan and to focus the charged particle be... | 10/24/1978 |
| 4121100 | Electron microscope An electron beam from an electron gun is made to focus on a first position by a focussing lens system. The focussed beam is then magnified and projected on a screen through a magnification lens system having an objective lens, an intermediate lens and a p... | 10/17/1978 |
| 4110622 | Device which makes it possible to effect the programmed tracing of figures which have different shapes A device to effect the programmed tracing of figures which have different shapes comprises two electron-optical systems respectively associated with two diaphragms. The first system forms the image of the first diaphragm at a fixed magnification, on the s... | 08/29/1978 |
| 4090077 | Particle beam device with a deflection system and a stigmator A particle beam device is provided with an arrangement for eliminating deflection errors having a deflection system and a stigmator. The deflection system has at least two pairs of deflection means disposed in a single plane at right angles to each other.... | 05/16/1978 |
| 4075496 | Charged particle irradiation apparatus A charged particle beam generating apparatus irradiates an article on all sides thereof by scanning the beam across the article and magnetically curving the beam, when scanned away from the article, to the back side of the article. The magnetic structure ... | 02/21/1978 |
| 4072356 | Electron beam welding generators An electron beam generator for use in electron beam welding wherein the electron beam passes through at least two electromagnetic beam deflecting systems upstream of the electron lens and which act one after another on the beam to define a fixed nonlinear... | 02/07/1978 |
| 4039810 | Electron projection microfabrication system An electron beam image of a microcircuit pattern is projected from an irradiated photocathode window to a resist-coated silicon wafer through two successive lens systems having field-containing regions which communicate through a small aperture in a commo... | 08/02/1977 |
| 4019989 | Wien filter A Wien filter for selecting particles having a given velocity from a beam of charged particles. Such a Wien filter comprises means to maintain an electric field and a magnetic field, which fields extend at right angles to each other and each at right angl... | 04/26/1977 |
| 3984687 | Shielded magnetic lens and deflection yoke structure for electron beam column A shielded magnetic lens and deflection yoke structure for an electron beam column which minimizes aberrations in the lens system caused by winding asymmetry in the field coil, as well as aberrations due to eddy currents created within the magnetic circui... | 10/05/1976 |
| 3952198 | Electron lens An electron lens system comprising a plurality of quadrupole elements, a plurality of octupole elements for correcting the spherical aberrations of said plurality of quadrupole elements, and an axially symmetric lens, arranged at the inlet or outlet side ... | 04/20/1976 |
| 3949221 | Double-focussing mass spectrometer A double-focussing mass spectrometer having an electrostatic field energy alyser followed by a magnetic field momentum analyser. The entrance diaphragm is essentially annular and thus the entrance aperture of the spectrometer defines a hollow cone with it... | 04/06/1976 |
