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Class 250/307 - Methods


Subclass of Class 250 - Radiant energy
Definition: Subject matter which includes processes for inspecting an
No. of patents: 1549
Last issue date: 05/08/2012


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NumberTitleIssue Date
4392054Method and apparatus for compensating for astigmatism in electron beam devices
In a scanning electron microscope, astigmatism in an electron lens system is compensated for by an XY type stigmator equipped with two quadrupole lenses and their manually controlled direct current supplies. During the operation of astigmatism compensatio...
07/05/1983
4382182Method of displaying an image of phase contrast in a scanning transmission electron microscope
A method of and apparatus for displaying an image of phase contrast in a scanning transmission electron microscope, in which an electron beam flux transmitted through a specimen is deflected with a high frequency and repeatedly moved on an aperture provid...
05/03/1983
4379230Automatic beam correction in a scanning transmission electron microscope
In a scanning electron microscope, a periodic structure in the object plane is used for the detection of the focus condition of a spot-focussed electron beam scanning an object in order to correct defocusing and astigmatism in the scanning electron beam s...
04/05/1983
4376891Method and apparatus for producing electron beam diffraction patterns
A method is disclosed of producing electron beam diffraction patterns, in which the object to be examined is one which is liable to be altered substantially by an electron beam when that beam is accelerated by a predetermined voltage to the energy density...
03/15/1983
4366380Method and apparatus for structural analysis
Apparatus for the non-destructive structural analysis of a solid object, the apparatus comprising: a laser pulse generating device to generate a laser beam pulse at a selected frequency for application to an input surface of an object to be analyzed to ge...
12/28/1982
4340815Preparation of material for examination by transmission electron microscopy techniques
Method and apparatus for preparing a specimen for observation under the electron microscope by ion erosion. A saddle-field ion source is employed to irradiate the specimen with the specimen held in close proximity spacing with respect to the cathode apert...
07/20/1982
4331872Method for measurement of distribution of inclusions in a slab by electron beam irradiation
In a method for the measurement of the distribution of the inclusions in a slab by electron beam irradiation, an electron beam of relatively large diameter is irradiated onto a relatively large specimen of the slab and a spectrum analysis of the character...
05/25/1982
4321468Method and apparatus for correcting astigmatism in scanning electron microscopes and similar equipment
This invention relates to a method of correcting astigmatism in scanning electron microscopes and similar equipment which insures accurate correction of astigmatism simply by matching an astigmatism-correcting image, appearing on part of a Braun tube scre...
03/23/1982
4316087Method of photographing electron microscope images on a single photographic plate and apparatus therefor
This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photogr...
02/16/1982
4287417Method of determining the deterioration of heat-resistant ferritic steel parts
A method of determining the degree of deterioration of a heat-resistant ferritic steel part, such as that of Cr-Mo-V steel practically applied in a region of high temperature from at least one of the crystallization factors such as the particle size, inte...
09/01/1981
4286154Method of detecting a mark by an electron beam and an apparatus therefor
This invention relates to a method of detecting a mark by an electron beam, the mark being provided on a sample, which includes the steps of scanning the electron beam over an area of the mark in such a manner that the electron beam is subjected to choppi...
08/25/1981
4232221Method and apparatus for trimming IR/CCD mosaic sensors
A method and apparatus for trimming IR/CCD mosaic sensors by establishing a threshold level for the input gates of the CCD unit and then setting all the input gates of the device to the same threshold level....
11/04/1980
4194115Method and means for helium/hydrogen ratio measurement by alpha scattering
Apparatus and method for determining helium to hydrogen ratios in a gaseous sample by measurement of forward scattering products due to alpha particle collisions with helium and hydrogen contained within the gaseous sample. More specifically, an apparatus...
03/18/1980
4184079Radiation toughening of diamonds
A diamond is toughened by bombarding it at elevated temperature with ions such as protons which form a dislocation network in it, inhibiting microcleavage....
01/15/1980
4144488Investigation of near-surface electronic properties in semiconductors by electron beam scanning
An electron-beam scanning system for investigating the nonuniformity of (1) he work function, (2) the position of the conduction-band edge with respect to the Fermi level, and (3) the electron affinity at the surface of a single-crystal semiconductor. A sm...
03/13/1979
4142145Method for determining conduction-band edge and electron affinity in semiconductors
A method which utilizes low-energy electron reflections to determine the ctron affinity and to simultaneously locate the position of the conduction-band edge with respect to the Fermi level at the surface of a single-crystal semiconductor. A beam of very...
02/27/1979
4135088Charged-particle analyzer
A charged-particle beam correction arrangement for a charged-particle analyzer having deflecting electrodes which focus charged particles emitted from a sample onto a center axis, an extension thereof, or onto an identical circumference with its center on...
01/16/1979
4058724Ion Scattering spectrometer with two analyzers preferably in tandem
Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at the surface. The apparatus includes two analyzers, preferably an energy analyzer and mass analyzer positioned in tandem. The mass analyzer...
11/15/1977
4038543Scanning transmission electron microscope including an improved image detector
A scanning transmission electron microscope including an evacuated housing and a phase contrast device in which the imaging ray cone of the microscope generates a hologram having zones of positive or negative interference. The microscope includes means fo...
07/26/1977
4037101Method and apparatus for analyzing fine grained substances
A rock specimen is step scanned in an electron probe x-ray microanalyzer. A plurality of x-ray spectrometers (for example three) forming a part of said electron probe x-ray microanalyzer simultaneously detect characteristic x-rays corresponding to three e...
07/19/1977
4034220Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
A process of elementary and chemical analysis of samples by spectrum analysis of secondary electrons emitted by the sample when it is subjected to a beam of monoenergetic primary electrons concentrated on its surface is characterized in that the intensity...
07/05/1977
4031390Method of operating a particle-beam apparatus
A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation o...
06/21/1977
4002912Electrostatic lens to focus an ion beam to uniform density
A focusing lens for an ion beam having a gaussian or similar density profile is provided. The lens is constructed to provide an inner zero electrostatic field, and an outer electrostatic field such that ions entering this outer field are deflected by an a...
01/11/1977
3999097Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system
In an ion implantation apparatus, means for forming multiple, separate parallel ion beams, each having a predetermined spot diameter, and means for focusing each of said ion beams upon a predetermined chip area of a target wafer whereby multiple chip area...
12/21/1976
3984683Apparatus and method for analyzing biological cells for malignancy
A specimen containing biological cells is exposed to an electron beam. The secondary electrons emitted from the specimen are measured. Specimens with and without malignancy exhibit differences in magnitude of charging under an electron beam and difference...
10/05/1976
3980885Diagnosis by proton bombardment
Beams of monoenergetic protons or other charged ions are passed through the living human body to detect abnormalities and obstructions in body tissue, which abnormalities and obstructions are visualized as density variations in the particle image emerging...
09/14/1976
3965351Differential auger spectrometry
Differential Auger spectroscopy method for increasing the sensitivity of micro-Auger spectroanalysis of the surfaces of dilute alloys, by alternately periodically switching an electron beam back and forth between an impurity free reference sample and a te...
06/22/1976
3937958Charged particle beam apparatus
A charged particle beam (e.g., ions or electrons) apparatus including two electrostatic focusing lenses and an electrode having a diameter limiting aperture positioned between the lenses is further provided with two electrode assemblies which interact wit...
02/10/1976
3932749Electron gun
Electron gun having a source of electrons, means for forming the electrons into a beam directed along an axis, and an output electrode comprising a plurality of semi-cylindrical plates disposed coaxially of the axis of the beam. This electrode is part of ...
01/13/1976
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