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| Number | Title | Issue Date |
| 7442929 | Scanning electron microscope A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of conv... | 10/28/2008 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc. One of the characterizing features of the electron beam apparatus of the present invention is that it has a plurality of optical systems, e... | 10/21/2008 |
| 7439506 | Method and an apparatus of an inspection system using an electron beam Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method whic... | 10/21/2008 |
| 7439500 | Analyzing system and charged particle beam device The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according... | 10/21/2008 |
| 7439505 | Scanning electron microscope An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present inventi... | 10/21/2008 |
| 7439501 | Direct write nanolithography using heated tip A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively h... | 10/21/2008 |
| 7435954 | Electron microscope, methods to determine the contact point and the contact of the probe An electron microscope suitable for observing at least one sample is provided. The sample has at least one testing area, and a material of the sample on the testing area is semiconductive or conductive. The electron microscope includes a stage, an electron gun, and ... | 10/14/2008 |
| 7435955 | Scanning probe microscope control system A system for controlling the operation of a scanning probe microscope that greatly simplifies the microscope's operation is disclosed. The software design incorporates several advanced features such as a sample designator file, video tutorials, automation algorithms... | 10/14/2008 |
| 7435957 | Charged particle beam equipment and charged particle microscopy On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermin... | 10/14/2008 |
| 7435959 | Microstructured pattern inspection method The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by ... | 10/14/2008 |
| 7432503 | Scanning electron microscope and method for detecting an image using the same In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is... | 10/07/2008 |
| 7432502 | Information acquisition method and apparatus for information acquisition The invention is to provide a method and an apparatus for observing a substance having a stable morphology in a liquid medium such as water. The method comprises the steps of obtaining a composition in which the substance is maintained in a liquid medium, bringing t... | 10/07/2008 |
| 7432511 | Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a housing, putting the housing in the vacuum or low-pressure environmen... | 10/07/2008 |
| 7429733 | Method and sample for radiation microscopy including a particle beam channel formed in the sample source A method and sample for radiation microscopy include a sample source that includes an area of interest, an outer side of a sample formed in the sample source adjacent to the area of interest, an inner side of the sample formed inside the sample source wherein at lea... | 09/30/2008 |
| 7427755 | Integrated electron beam tip and sample heating device for a scanning tunneling microscope An electron beam heating device with the temperature up to 2200 K is provided for heating a sample and a tip for a scanning tunneling microscope (STM). The electron beam heating device includes a base stage for mating respectively with an electron beam sample heatin... | 09/23/2008 |
| 7427754 | Telegraph signal microscopy device and method A microscope device includes a probe having a dielectric material with a first side and a second side. First and second electrodes are disposed on the first side of the dielectric material. A nanotube connects the first and second electrodes. A gate electrode is dis... | 09/23/2008 |
| 7427756 | Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope A novel method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope, which is improvement of the existing methods and which realizes the new strategy of the measurements... | 09/23/2008 |
| 7427757 | Large collection angle x-ray monochromators for electron probe microanalysis X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted ... | 09/23/2008 |
| 7427753 | Method of cross-section milling with focused ion beam (FIB) device A method of milling a cross section of a wafer and a milling device. The method includes a coarse scanning of at least two milling frames and a fine scanning of at least one milling frame. The milling device is adapted to cross-section milling of a wafer, said milli... | 09/23/2008 |
| 7425702 | Charged particle beam apparatus When conditions for an electron gun mainly represented by extraction voltage V1 and accelerating voltage V0 are changed, a charged particle beam is once focused on a fixed position by means of a condenser lens and a virtual cathode position is calculat... | 09/16/2008 |
| 7425704 | Inspection method and apparatus using an electron beam An inspection method and apparatus irradiates a sample on which a pattern is formed with an electron beam, so that an inspection image and a reference image can be generated on the basis of a secondary electron or a reflected electron emitted by the sample. An abnor... | 09/16/2008 |
| 7425701 | Electron-beam device and detector system An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detecto... | 09/16/2008 |
| 7425712 | Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a housing, putting the housing in the vacuum or low-pressure environmen... | 09/16/2008 |
| 7423269 | Automated feature analysis with off-axis tilting One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and compu... | 09/09/2008 |
| 7423266 | Sample height regulating method, sample observing method, sample processing method and charged particle beam apparatus In a sample height regulating method, an area including the observation point on the sample is scan-irradiated with a first charged particle beam to obtain a first secondary electron image including the observation point. An area including the observation point on t... | 09/09/2008 |
| 7423263 | Planar view sample preparation A method and apparatus is described for orienting samples for charged particle beam operations. A sample is attached to a probe with a major surface of the sample at a non-normal angle to the probe shaft, and the probe shaft is rotated to reorient the sample. The in... | 09/09/2008 |
| 7423264 | Atomic force microscope In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a charac... | 09/09/2008 |
| 7420163 | Determining layer thickness using photoelectron spectroscopy According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron s... | 09/02/2008 |
| 7420164 | Objective lens, electron beam system and method of inspecting defect An electron beam system or a method for manufacturing a device using the electron beam system in which an electron beam can be irradiated at a high current density and a ratio of transmittance of a secondary electron beam of an image projecting optical system can be... | 09/02/2008 |
| 7420167 | Apparatus and method for electron beam inspection with projection electron microscopy An apparatus and method for electron beam inspection with projection electron microscopy, is constructed so as to allow correction of changes in focus offsets due to changes in the electrically charged state particularly during inspection. The apparatus includes: a ... | 09/02/2008 |
| 7421370 | Method and apparatus for measuring a characteristic of a sample feature A scanning probe microscope (SPM) based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the surface feature. If two curves are fit on opposed edges of the feature o... | 09/02/2008 |
| 7420165 | Method of determining the power transfer of nuclear component with a layer of material placed upon a heating surface of the component A method to characterize the power transfer of a nuclear component is provided including the steps of obtaining a sample of a deposit layer on a side of a nuclear component, obtaining a scanning electron microscope image of an outside surface of the sample, obtainin... | 09/02/2008 |
| 7420668 | Wafer surface inspection apparatus and wafer surface inspection method A wafer surface inspection method and apparatus of high sensitivity, and free from performance degradation in terms of cleanliness, coordinate repeatability of foreign particles and the like. Gas for cooling is sprayed onto a laser irradiation position on the wafer ... | 09/02/2008 |
| 7420106 | Scanning probe characterization of surfaces Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator mo... | 09/02/2008 |
| 7415868 | Deconvolving tip artifacts using multiple scanning probes The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orient... | 08/26/2008 |
| 7416462 | Glass substrate processing method and material removal process using x-ray fluorescence To reuse glass used in a flat panel display, processing suitable for global environment such as processing of separating a lead component must be realized. A disassembly processing method for a flat panel display having a structure in which a face plate and rear pla... | 08/26/2008 |
| 7414252 | Method and apparatus for the automated process of in-situ lift-out An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion con... | 08/19/2008 |
| 7414250 | Cryogenic variable temperature vacuum scanning tunneling microscope A cryogenic variable temperature scanning tunneling microscope of novel design and component configuration, for use in conjunction with a variety of low temperature methodologies. ... | 08/19/2008 |
| 7411191 | Inspection system by charged particle beam and method of manufacturing devices using the system An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron im... | 08/12/2008 |
| 7411192 | Focused ion beam apparatus and focused ion beam irradiation method A focused ion beam apparatus and a focused ion beam irradiation method are disclosed. Even in the case where a magnetic field exists on the optical axis of an ion beam and the particular magnetic field undergoes a change, the ion beam is focused without separating t... | 08/12/2008 |
