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| Number | Title | Issue Date |
| 8115168 | Layered scanning charged particle apparatus package having an embedded heater A scanning charge particle apparatus includes a layered charged particle beam column package; a sample holder; and a heater, such as a resistive heater, in one of the layers of the package that conductively heats layers and/or components. ... | 02/14/2012 |
| 8110799 | Confocal secondary electron imaging One embodiment relates to an apparatus using electrons for inspection or metrology of a semiconductor substrate. The apparatus includes an electron source, electron lenses, scan deflectors, an objective electron lens, a collection electron lens, a pin-hole filter, d... | 02/07/2012 |
| 8106356 | Beta-ray soot concentration direct readout monitor and method for determining effective sample A beta-ray soot concentration direct readout monitor and a method for determining effective sample. The monitor includes a fume collection cell and a fume mass detection cell. The fume collection cell includes a fume sampling gun, a filter paper and a mechanical con... | 01/31/2012 |
| 8106355 | Automated inspection using cell-cell subtraction perpendicular to stage motion direction One embodiment relates to an apparatus for automated inspection of a semiconductor substrate. Processor-executable code is configured to control the stage electronics to move the substrate using a continuous motion in a substrate-translation direction and is configu... | 01/31/2012 |
| 8097846 | Metrology and 3D reconstruction of devices in a wafer A method for measuring three-dimensional devices in a wafer comprises the step of obtaining a plurality of cross-sectional images of a corresponding plurality of three-dimensional devices in the wafer. The plurality of three-dimensional devices have essentially iden... | 01/17/2012 |
| 8076640 | Method and device for measuring electron diffraction of a sample The invention relates to a method and a device for measuring electron diffraction of a sample, including the steps of illuminating the sample with an incident electron beam which is deflected from a sample axis to hit the sample at an angle of incidence relative to ... | 12/13/2011 |
| 8063363 | Method and apparatus for charged particle beam inspection A method, apparatus and computer readable medium for charged particle beam inspection of a sample comprising at least one sampling region and at least one skip region is disclosed. The method, apparatus and computer readable medium comprise receiving an imaging reci... | 11/22/2011 |
| 8024816 | Approach method for probe and sample in scanning probe microscope In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction... | 09/20/2011 |
| 8013299 | Review method and review device A defect review method and a defect review device using an electron microscope, reduce the number of user processes necessary to set automatic focal adjustment of an electron beam to provide easier sample observation. The review method comprises the steps of:... | 09/06/2011 |
| 8013300 | Sample decontamination Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposin... | 09/06/2011 |
| 8008621 | Apparatus of measuring the orientation relationship between neighboring grains using a goniometer in a transmission electron microscope and method for revealing the characteristics of grain boundaries An apparatus and method for measuring the crystallographic orientation relationship of neighboring grains and the characteristics of grain boundaries using a goniometer of a transmission electron microscope are disclosed to check the orientation relationship between... | 08/30/2011 |
| 7977631 | Method for obtaining images from slices of specimen The invention relates to a method for obtaining images from slices of a specimen, the method comprising: repeatedly obtaining an image of the surface layer of the specimen (1) and removing the surface layer of the specimen, thereby bringing the n... | 07/12/2011 |
| 7973280 | Composite charged particle beam apparatus, method of processing a sample and method of preparing a sample for a transmission electron microscope using the same An apparatus is provided that precisely conduct ion beam etching to a sample having the properties of which easily change by electron beam irradiation with no loss of ease of operation and throughput. An apparatus includes an ion beam lens barrel and an electron bea... | 07/05/2011 |
| 7947952 | Nanomachining method and apparatus Methods and apparatus are disclosed for nanomachining operations. Excitation energy settings are provided to minimize machine induced scan cutting. Cut operations can be operated in a feedback mode to provide controlled cutting operations. Measurement and sweep tech... | 05/24/2011 |
| 7932495 | Fast wafer inspection system A charged particle beam device is provided including a particle source emitting a primary particle beam, a secondary particle beam generated by the impingement of the primary particle beam on the sample, a detection unit for detecting the secondary particle beam, th... | 04/26/2011 |
| 7928380 | Sample holder, method for observation and inspection, and apparatus for observation and inspection A sample holder used in SEM (scanning electron microscopy) or TEM (transmission electron microscopy) permitting observation and inspection at higher resolution. The holder has a frame-like member provided with an opening that is covered with a film. The film has a f... | 04/19/2011 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; ... | 04/19/2011 |
| 7928379 | Phase plate, imaging method, and electron microscope The invention concerns a phase plate for electron optical imaging, wherein the zero beam (4) is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams (5, 5′). The shading of diffracted... | 04/19/2011 |
| 7915581 | Methods for sample preparation and observation, charged particle apparatus In an SEM observation in a depth direction of a cross section processed by repeated FIB cross-sectioning and SEM observation to correct a deviation in an observation field of view and a deviation in focus, are corrected, the deviations occurring when a processed cro... | 03/29/2011 |
| 7906760 | Inspection method and reagent solution An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via ... | 03/15/2011 |
| 7888638 | Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope In the dimension measurement of a circuit pattern using a scanning electron microscope (SEM), in order to make it possible to automatically image desired evaluation points (EPs) on a sample, and automatically measure the circuit pattern formed at the evaluation poin... | 02/15/2011 |
| 7884323 | Atom probes, atom probe specimens, and associated methods The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of ... | 02/08/2011 |
| 7880141 | Resin film evaluation method and method for manufacturing a semiconductor device In the resin film evaluation method and method for manufacturing a semiconductor device applying the resin film evaluation method of the present invention, first, a substrate having a resin film formed on an insulating film with an opening in which the surface of th... | 02/01/2011 |
| 7880142 | Extended electron tomography A method for improving image resolution of a three dimensional structure of at least one molecule conformation includes: determining a three dimensional structure of at least one conformation of a molecule in a sample from a first data set obtained from a series of ... | 02/01/2011 |
| 7858936 | Slice and view with decoration Imprecisely located defects are imaged by milling a series of slices and performing a light, preferential etch to provide a topographical interface between materials having similar secondary electron emission characteristics. The slices are sufficiently small to cap... | 12/28/2010 |
| 7838829 | Charged particle beam device There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the bas... | 11/23/2010 |
| 7834315 | Method for STEM sample inspection in a charged particle beam instrument A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where ... | 11/16/2010 |
| 7834316 | Method for adjusting imaging magnification and charged particle beam apparatus There is provided a method for setting a suitable imaging magnification for each of a plurality of measurement places in a charged particle beam apparatus which images a semiconductor pattern. For a given measuring point coordinate, a line segment or a vertex... | 11/16/2010 |
| 7829853 | Sample surface observation method A surface of a sample is observed by acquiring an image of the surface of the sample. An electron beam I irradiated onto the surface of the sample in which wiring including an insulation material and an electrically conductive material is formed. Electrons that acqu... | 11/09/2010 |
| 7804067 | Method of observing and method of working diamond stylus for working of atomic force microscope When a characterization of a tip of a diamond stylus for working is needed, the tip of the diamond stylus for working used is observed by a high resolution scanning electron microscope of a high acceleration voltage under a steam atmosphere. When the tip of the diam... | 09/28/2010 |
| 7800060 | Pattern measurement method and pattern measurement system Easily and correctly measuring a dimension of a pattern of a photomask or of an OPC pattern of the photomask. A pattern measurement method of the present invention includes steps of obtaining both a standard pattern corresponding to a predetermined pattern an... | 09/21/2010 |
| 7791021 | Microstructured pattern inspection method The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the photoresist are detected. The microstructured patterns are evaluated by ... | 09/07/2010 |
| 7777184 | Method for photoresist characterization and analysis A method for photoresist characterization includes forming a photoresist on a supportive structure; and characterizing the photoresist using a metrology tool selected from the group consisting of a transmission electron microscope (TEM), a scanning electron microsco... | 08/17/2010 |
| 7767961 | Method for determining material interfacial and metrology information of a sample using atomic force microscopy A method for determining interfacial information and critical dimensions of a sample using atomic force microscopy. Tip-specimen deconvolution is performed on the scan lines before the critical dimension information processing. Local maxima and minima or local slope... | 08/03/2010 |
| 7755043 | Bright-field/dark-field detector with integrated electron energy spectrometer One embodiment relates to an electron beam apparatus including an electron beam column, an immersion objective lens, a Wien filter, a bright-field/dark-field detector, and an electron energy spectrometer. The bright-field/dark-field detector comprising an opening co... | 07/13/2010 |
| 7755044 | Apparatus for working and observing samples and method of working and observing cross sections The apparatus for working and observing samples comprises a sample plate on which a sample is to be placed; a first ion beam lens barrel capable of irradiating a first ion beam over a whole predetermined irradiation range at one time; a mask that can be arranged bet... | 07/13/2010 |
| 7750293 | High-density FIB-SEM tomography via real-time imaging A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordi... | 07/06/2010 |
| 7732761 | Method for measuring a pattern dimension using a scanning electron microscope To provide a consistent, high-speed, high-precision measurement method based on an electron beam simulation by reflecting the apparatus characteristics of a CD-SEM in an electron beam simulation, the present invention discloses a method for measuring a measurement t... | 06/08/2010 |
| 7728292 | Method and apparatus for detecting positively charged and negatively charged ionized particles An ion detector includes collision surfaces for converting both positively and negatively charged ions into emitted secondary electrons. Secondary electrons may be detected using an electron detector, than may, for example include an electron multiplier. Convenientl... | 06/01/2010 |
| 7705299 | Scanning ion probe systems and methods of use thereof Briefly described, embodiments of this disclosure, among others, include scanning ion probe systems, methods of use thereof, scanning ion source systems, methods of use thereof, scanning ion probe mass spectrometry systems, methods of use thereof, methods of simulta... | 04/27/2010 |
