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| Number | Title | Issue Date |
| 5883718 | Optical sensing system for detecting displacements of a slidable frame along an elongated plate This invention provides an optical sensing system for detecting displacements of a slidable frame along an elongated plate of the system and generating corresponding position or displacement signals. The optical sensing system comprises a housing, an elon... | 03/16/1999 |
| 5880882 | Scale and method for making a scale A scale for opto-electrical linear or angular measuring systems. A gradation in the form of a phase grating is embodied on the scale and has alternating raised and stepped areas. A continuous compensating layer of chrome and on it a continuous highly refl... | 03/09/1999 |
| 5880838 | System and method for optically measuring a structure A system and method for measuring the dimensions of a small (e.g., microelectronic) structure. The present invention is an optical system and method that uses a polarized light beam, reflected off or transmitted through, a structure, to measure the struct... | 03/09/1999 |
| 5880839 | Optical displacement measuring apparatus including a light-emitting element and an adjacent ball lens An optical displacement detecting apparatus is provided for detecting information on a relative displacement with respect to an object having a diffraction grating. The apparatus includes a light-emitting element for emitting a diverging light beam, a bal... | 03/09/1999 |
| 5874729 | Device for filtering odd-numbered harmonic signal components A device that is suitable for filtering odd-numbered harmonic signal components out of a periodic signal which is generated from the scanning of a periodic scale graduation using the scanning plate. The scanning plate includes a periodic sequence of indiv... | 02/23/1999 |
| 5861953 | Opto-electronic scale reading apparatus with differing optical path lengths A readhead (18) measures movement in the direction of arrow (20) with respect to a scale (10). The readhead (18) comprises an index grating (12), which interacts with light from the scale (10) to produce fringes in the vicinity of an analyzer grating (14)... | 01/19/1999 |
| 5859439 | Apparatus for aligning semiconductor wafer using mixed light with different wavelengths An alignment system of a lithography apparatus which is capable of obtaining an alignment mark without being influenced the height of the alignment mark and the thickness of the photoresist, includes a plurality of light sources emitting a light having ea... | 01/12/1999 |
| 5859424 | Apodizing filter system useful for reducing spot size in optical measurements and other applications Because of diffraction effects caused by slits or apertures in optical measurement systems, the radiation energy which is directed towards a particular region on a sample will be spread over a larger area than desirable. By employing an apodizing filter i... | 01/12/1999 |
| 5856669 | Laser beam scanning optical apparatus having means for generating moire fringes A laser beam scanning optical apparatus which has Moire fringes generating elements which is located near a position optically equivalent to a scanning surface and modulates a laser beam emitted from a laser source to generate Moire fringes. The Moire fri... | 01/05/1999 |
| 5856668 | Photoelectric position measuring encoder having scale formed of electrically non-conductive material A photoelectric position measuring encoder including a scale formed of an electrically non-conductive material and having a graduation, a scanner for photoelectrically scanning the graduation and displaceable relative to the scale in a measuring direction... | 01/05/1999 |
| 5841134 | Photo-electric distance- and angle-measurement system for measuring the displacement of two objects with respect to each other A photoelectric path- and angle-measurement system for measuring the displacement of two objects relative to one another comprises a quantity N=n.multidot.4 of photoreceivers which are arranged in a photoreceiver matrix in such a way that the diagonals of... | 11/24/1998 |
| 5841133 | Optical displacement detecting apparatus having gratings and a light receiving chip An optical encoder is disclosed, that comprises a main scale 1, a light radiating means 2, and a second member 3. The main scale 1 is a first member having an optical grating 12. The light radiating means 2 radiates collimated light to the main scale 1. T... | 11/24/1998 |
| 5835223 | System for measuring surface flatness using shadow moire technology A system for measuring surface characteristics of an electronic interconnection component, such as a printed circuit board, by analyzing shadow moire patterns. Printed circuit boards are carried on a continuous conveyor under a grating. For each printed c... | 11/10/1998 |
| 5835218 | Moire interferometry system and method with extended imaging depth A moire interferometry system and method are provided for achieving full field surface contouring with an extended depth of view of image. The moire interferometry system includes a projection system generally made up of a light source, imaging lens and a... | 11/10/1998 |
| 5834767 | Surface position detecting system and projection exposure apparatus using the same A detecting system for detecting a surface position of an object, includes a light source, a first grating having a light collecting function, wherein the first grating is illuminated with light from the light source, a second grating having a light colle... | 11/10/1998 |
| 5828061 | Apparatus for detecting a rotation angle of a diffraction grating In order to improve the accuracy of the absolute value of a wavelength of diffraction light in a diffraction grating, a gas absorption line resulting from an absorption cell 8 is used as a wavelength reference 8. When reference light is exited from a ligh... | 10/27/1998 |
| 5825023 | Auto focus laser encoder having three light beams and a reflective grating An auto-focus laser incremental encoder for measuring linear or rotary motion or position of an object is described. An optical read head focuses three laser beams on the surface of a scaling grating. The grating is a reflection type grating where the hei... | 10/20/1998 |
| 5816079 | Needle position detecting system for a circular knitting machine A needle position detecting system for a circular knitting machine inputs the needle position to a computer which controls the needles to perform jacquard knitting. The knitting machine includes a needle cylinder carrying a plurality of needles, a driven ... | 10/06/1998 |
| 5812320 | Optical encoder having high resolution An optical encoder is provided which is not affected by fluctuation of wavelength of a light beam due to temperature change, without sacrificing resolution of measurement. The optical encoder comprises a light source emitting a light beam, a first grating... | 09/22/1998 |
| 5801390 | Position-detection method and apparatus with a grating mark Methods and apparatus are disclosed for performing detection of the position of a substrate, such as used in photolithography, with high precision by zero Nth-order detection. Alignment marks (grating marks) on the substrate are illuminated by coherent li... | 09/01/1998 |
| 5801378 | Optical encoder diffraction gratings for eliminating diffracted light components The amount of the light beam passing through two diffraction gratings is output as an electrical signal by a photo detector. The amount of relative displacement of the diffraction gratings is detected according to the electric signal (output signal) that ... | 09/01/1998 |
| 5774219 | Reflection-type optical encoder with light receiving array A reflection-type main scale G1 is disposed on a first member 10. A diffused light source 40, a transmission-type light source index scale G2, and a photodiode array PDA are disposed on a second member 20. The diffused light source 40 irradiates the main ... | 06/30/1998 |
| 5760392 | Scale for use with a displacement sensor A scale, which is provided for use with a displacement sensor, has a high degree of freedom and is capable of being manufactured at a low cost. The scale includes a graduation section and a base board which is formed separately from the graduation section... | 06/02/1998 |
| 5760959 | Interferential position measuring device with three detectors An optical device, such as a position measuring instrument, having a source of light and a diffraction element for receiving the light, creating partial light beams which interfere with one another, and producing from the interfering partial light beams a... | 06/02/1998 |
| 5754341 | Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula |n-n0 |×(p-d'/e)/p×d'=(λ/2)×(1+2m) (where m=0, &#b1;1, &#b1;2, . . .... | 05/19/1998 |
| 5754295 | Non-contacting torque sensor and displacement measuring apparatus and method A displacement measuring apparatus is disclosed, one embodiment of which employs two diffractive code disks, attached to a shaft, and a sensing head which need not contact the shaft. The head includes a light source with beam shaping optics, which creates... | 05/19/1998 |
| 5750984 | Optical encoder used for position detection based upon a plurality of signals An optical encoder comprising a first scale and photo sensitive elements that shift relative to the first scale along the length of the first scale for determining a relative position based on a plurality of signals having a predetermined phase difference... | 05/12/1998 |
| 5748373 | Scale and encoder including differently spaced pattern lines A scale and encoder are capable of stably outputting a displacement signal with less distortion. The scale has grating pattern lines arranged successively, and the widths of the pattern lines of a second scale are not P/2 but are determined to remove high... | 05/05/1998 |
| 5742391 | Optical type sensor for use as an optical measuring head or optical pickup An optical type sensor has a light emitting element, a light receiving element, at least one optical element acting on a light beam emitted from the light emitting element, in an optical path till the light beam enters the light receiving element, and a s... | 04/21/1998 |
| 5739911 | Position measuring system A position measuring system having an illuminating device for generating a beam of light. A graduation support is provided with a graduation and a reference marker with a first set of graduation markings, where the graduation support receives the beam of ... | 04/14/1998 |
| 5726445 | Device for obtaining harmonic-free signals A scanning graduation that scans a scale along a measuring direction to produce a signal representative of a position measurement value. The scanning graduation includes a particular transmission function which generates a filtering function when scanning... | 03/10/1998 |
| 5726442 | Opto-electronic scale reading apparatus having light-transmissive phase-encoding array of elongate spectral encoding elements An opto-electronic scale reading apparatus includes a reflective scale (410) relative to which a readhead is movable. The readhead includes a light source in the form of the emission end of an optical fiber (300), which directs light via collimating lens ... | 03/10/1998 |
| 5719673 | Interferometer arrangement with adjustable optical path length difference for detecting a distance between different layers of an eye An interferometer arrangement has an adjustable optical path length difference in at least one interferometer arm and a photoelectric receiver for detecting the interference signals generated by the interferometer. An incremental grating transmitter is co... | 02/17/1998 |
| 5717488 | Apparatus for measuring displacement using first and second detecting means for measuring linear and rotary motion An apparatus for measuring the displacement of an object includes: a diffraction grating arranged on the object, a light source for irradiating a coherence light beam onto the diffraction grating, a first detector for causing two light beams whose phases ... | 02/10/1998 |
| 5710426 | Dynamic and thermal mechanical analyzer having an optical encoder with diffraction grating and a linear permanent magnet motor A dynamic and thermal mechanical analyzer incorporating a slide driven vertically in an air bearing guidance system with a large displacement capacity, very low friction and low mass. The position of the slide is measured by digitizing and interpolating t... | 01/20/1998 |
| 5701525 | Camera encoder assembly, system and method thereof A camera shutter and focus encoder assembly comprises an encoder mask fixed in a camera housing and having an arcuate window having alternating opaque and transmissive portions, and an encoder sheet mounted in the housing in abutting relationship with the... | 12/23/1997 |
| 5696374 | Optical encoder using doubled diffraction angle based on first and second diffraction gratings An optical encoder includes: a light source; a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source; a second grating plate having a second diffraction grating for further diffracting the light ... | 12/09/1997 |
| 5696373 | Optical encoder with dual diffraction grating An optical encoder including a light source and a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source. The optical encoder further includes a second grating plate having a second diffraction gr... | 12/09/1997 |
| 5696584 | Phase grating having an unprotected relief structure with a grating structure that causes destructive interference of reflections An uncovered unprotected phase grating includes a substrate which has a relief structure. The relief structure includes a high-refraction material so that even if soiled with impeding ambient media an adequate difference in the index of refraction exists ... | 12/09/1997 |
| 5694218 | Optical encoder including a plurality of phase adjusting gratings An optical encoder has a light source and a diffracted light interference device including at least first and second diffraction gratings confronting each other, producing diffracted light beams in specific orders by passing light emitted from the light s... | 12/02/1997 |
