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Class 250/237G - Gratings (moire fringes)


Subclass of Class 250 - Radiant energy
No. of patents: 1081
Last issue date: 01/03/2012


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NumberTitleIssue Date
7330326Recordable disk rotational speed error correction circuit
An error correction circuit for determining an error in rotational speed of a recordable disk of a disk drive includes a sinusoidal error calculation portion adapted to generate a true oscillation error signal, and a summation portion adapted to combine the true osc...
02/12/2008
7328889Measuring unit, partition member, mold for molding the partition member, and production method for the partition member
A measuring unit is removably connected to a sample analyzer. The measuring unit includes a first member having a first channel through which a sample is allowed to pass, a second member having a second channel through which the sample is allowed to pass, and a part...
02/12/2008
7329858Optical encoder and electronic equipment having same
An optical encoder includes a mobile object having a plurality of aligned slits, a light-emitting portion for emitting light toward the mobile object, and a light-receiving portion 103 for receiving the light which has passed the mobile object. The light-rece...
02/12/2008
7327661Optical pickup and optical information recording apparatus using the same
An optical pickup includes a diffraction grating partitioned into three areas, in which the phase of periodic grating groove structure in an area is successively shifted from that in the adjacent area by 90°. In the generation of a differential push-pull signal, an...
02/05/2008
7327005Optical semiconductor package with incorporated lens and shielding
An optical semiconductor module including an optical semiconductor component that has a front face including an optical sensor. Encapsulation, defining a cavity in which the optical component is disposed, includes external electrical connections for the optical semi...
02/05/2008
7324212Optical encoder having slanted optical detector elements for harmonic suppression
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated detector elements that sample the interference fringe pattern at spatially s...
01/29/2008
7319509Attenuator for attenuating wavelengths unequal to a used wavelength
There is provided an attenuator for attenuating electromagnetic radiation of wavelengths Unequal to a used wavelength, including a grating element having i) grating grooves that produce a grating period (p), and ii) a grating plane. The grating period (p) is least a...
01/15/2008
7319526Apparatus for detecting displacement
A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device un...
01/15/2008
RE39978Scanning phase measuring method and system for an object at a vision station
A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface of an object to be inspected at a relatively constant linear rate to...
01/01/2008
7312437Displacement sensor, method for detecting the optimal reference position, and method for judging stability of detecting the reference position of displacement sensor
A displacement sensor which detects a positional displacement of a movable member, comprises a position signal generating section configured to generate a periodical signal in accordance with movement of the movable member, a generating section of a signal for detec...
12/25/2007
7312436Optical position measuring system with a detector arrangement and measuring graduation to produce partial filtering of undesired harmonics
An optical position measuring system that includes a measuring graduation and a scanning unit that is movable in relation to the measuring graduation in a measuring direction. The scanning unit includes a light source that generates light towards the measuring gradu...
12/25/2007
7304294Reflective encoder with reduced background noise
An encoder having a code scale and an emitter detector module is disclosed. The code scale includes alternating reflective and opaque stripes. The emitter-detector module includes a light source that generates light and directs a portion of the generated light to th...
12/04/2007
7304663Image test target for visual determination of digital image resolution
Resolution of an image capture system is measured by imaging a test target having a progression of feature sizes and pitch in respective sub-fields thereof. The image captured by the imaging system is then inspected to determine a sub-field image which does not incl...
12/04/2007
7304295Method and system of detecting eccentricity and up/down movement of a code wheel of an optical encoder set
A system and method of measuring a rotational motion of a code wheel measures a rotational movement of the code wheel including an error component due to a non-rotational movement of the code wheel; measures the non-rotational movement of the code wheel; and produce...
12/04/2007
7301348Electrostatic encoder
An electrostatic encoder comprising receiving coupling electrodes formed on a scale, and extending in a predetermined direction, transmitting coupling electrodes provided on a sensor head, and located to face the receiving coupling electrodes, digital electrodes pro...
11/27/2007
7301141Photoelectric encoder and electric device provided with the same
A photoelectric encoder of the invention is furnished with a light-emitting element and a light-receiving element for sending and receiving light that are disposed in opposition to one another, and a support member for accommodating the light-emitting element and th...
11/27/2007
7297971Alignment systems and methods for lithographic systems
An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determi...
11/20/2007
7297935Position-measuring device
A position-measuring device includes: a measuring graduation provided on a measuring standard device arranged around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using electromagnetic radiation; a scanning plate with a scanni...
11/20/2007
7291832Optical encoders for position measurements
Systems and methods are disclosed for providing position measurement information. For example, in accordance with one embodiment of the present invention, a multiple-pitch grating is disclosed which is adapted to receive one or more laser beams and provide an output...
11/06/2007
7289229Optical displacement-measuring instrument
An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second...
10/30/2007
7289212Lithographic apparatus, device manufacturing method and device manufacturing thereby
The X, Y and Rx positions of a mask stage are measured using two optical encoder-reading heads measuring displacements of respective grid gratings mounted on the mask stage. The grid gratings are preferably provided on cut-away portions of the mask table so as to be...
10/30/2007
7289232Dimension measurement method, method of manufacturing semiconductor device, dimension measurement apparatus and measurement mark
A dimension measurement method includes irradiating a measurement mark on a sample on which a pattern to be measured is formed with light from a measurement direction, detecting reflected diffracted light from the measurement mark to measure intensity thereof, and c...
10/30/2007
7286764Reconfigurable modulator-based optical add-and-drop multiplexer
An optical add and drop multiplexer system comprising a first module for providing a first signal; a second module for providing a second signal; and a modulator for receiving a channel of the first signal at a first location, the first location configured to actuat...
10/23/2007
7285769Optical encoder with reduced reflected light error having a light non-transparent portion with inclined surfaces
In an optical encoder comprising an optical scale in which a light transmission portion and a light non-transparent portion are arranged and an output pattern obtained by emitting an incident light functions as an optical code, a light source portion and a light det...
10/23/2007
7286246Method and apparatus for non-contact three-dimensional surface measurement
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze th...
10/23/2007
7282699Optical encoder for improved detection of the absolute position of an origin point
Two detection heads are arranged opposite to each other with respect to a scale. On the scale, there is provided a discontinuous portion formed in a reflecting portion to enable detection of original point position. The original point is determined by detecting the ...
10/16/2007
7281339Encoder system
A structure and associated method to accurately read an encoder tape in an encoder system. The encoder system comprises, a read head, a shoe structure adjacent the read head, and an encoder tape. The encoder tape is adapted to be read by the read head. The shoe stru...
10/16/2007
7274464Position measuring device
A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that me...
09/25/2007
7271920Position-measuring device
A position-measuring device includes: a measuring graduation provided on a material measure going around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using electromagnetic radiation; a scanning plate with a periodic scanning ...
09/18/2007
7266421System for controlling lifting and remote handling units located in a confined enclosure
The control system is used to control manipulation equipment (41) and carrying equipment (43) confined in a containment (40) inaccessible to operators and to perform maintenance operations related to electronic circuits for onboard equipment enc...
09/04/2007
7265850Fortified, compensated and uncompensated process-sensitive scatterometry targets
A scatterometry target is provided in which a plurality of parallel elongated features are placed, each having a length in a lengthwise direction. A plurality of stress-relief features are disposed at a plurality of positions along the length of each elongated featu...
09/04/2007
7265338Photoelectric encoder using an incoherent semiconductor light source
A photoelectric encoder is provided, which emits light from a light source to a main scale and an index scale that can relatively move with respect to each other and obtains a light-receiving signal by interaction between the main scale and the index scale. The phot...
09/04/2007
7247843Long-range gap detection with interferometric sensitivity using spatial phase of interference patterns
An apparatus and method measures the gap between one substantially planar object, such as a mask, and a second planar object, such as a substrate. A gapping mark is used for measuring a gap between the first and second plates. The gapping mark includes a first grati...
07/24/2007
7242466Remote pointing system, device, and methods for identifying absolute position and relative movement on an encoded surface by remote optical method
A pointing system comprises an encoded surface and a pointing device for use with an encoded surface remote from the pointing device. The pointing device comprises a collimated light source for projecting a collimated light beam having a wavelength outside the visib...
07/10/2007
7242484Apparatus and methods for surface contour measurement
Apparatus and methods of measuring three-dimensional position information of a onto a surface of an object including two sources of radiation separated by a distance, each source having a spectral distribution, and being coherent with respect to the other of the sou...
07/10/2007
7238932Optical position sensing device
An optical position sensing device for sensing a two-dimensional displacement, comprising a first photosensor arranged parallel to a first axis; a second photosensor arranged parallel to a second axis; wherein the first and the second axis are at an angle with respe...
07/03/2007
7238931Displacement detection apparatus
The present invention provides a displacement detection apparatus uses short scales and can provide a long measurable range comparable to a single long scale with a short bed length. The displacement detection apparatus includes a scale, a first head and a second he...
07/03/2007
7230726Scanning unit for a position measuring instrument for optical scanning of a object measuring graduation
A scanning unit for a position measuring instrument for optical scanning of a measuring graduation. The scanning unit includes a light source that emits light in a direction towards a measuring graduation that generates modified light from the emitted light. A detec...
06/12/2007
7230230Apparatus for adjusting a signal and prohibiting adjustment of the signal based on a position of a movable member
A signal adjusting apparatus includes a movable member, a setting device, and a prohibiting device. The movable member is movable in a movable range to have the electrical signal adjusted in accordance with a position of the movable member. The setting device sets a...
06/12/2007
7230722Shadow moire using non-zero talbot distance
A method for measuring deformation in specimens is provided. The method includes providing a shadow moiré system, the shadow moiré system including an illumination source, a reference grating and an image capture device and providing a specimen. The method further...
06/12/2007
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