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Class 250/237G - Gratings (moire fringes)


Subclass of Class 250 - Radiant energy
No. of patents: 1074
Last issue date: 11/03/2009


1                      
NumberTitleIssue Date
7612331Code disk with a plurality of tracks having different patterns
A code disk for a high-resolution encoder that can detect an absolute position and a method for manufacturing a mold to produce the code disk are provided. The code disk is formed by using transparent substrate. The code disk includes a plurality of tracks provided ...
11/03/2009
7608814Optical structure for localising an electromagnetic field and detector or emitter device including such a structure
An optical structure enabling properties of the surface plasmons to be used is defined from a substantially binary, parameterizable unit pattern ME. The parameters a, b, c, d and hg of the pattern are chosen so as to maximize the co...
10/27/2009
7485847Displacement sensor employing discrete light pulse detection
Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source for providing light. A first portion of the light can be reflected from...
02/03/2009
7470892Optical encoder
An optical encoder includes an incoherent light source; a first grating, which is an amplitude grating having a first grating period, for spatial amplitude modulation of the incoherent light from the light source; a second grating, which is a phase grating having a ...
12/30/2008
7443518Measuring instrument, in particular for transmission measurement in vacuum system
A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light receiver element for recording an incident light beam, and a retro-reflecto...
10/28/2008
7440113Littrow interferometer
An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow ang...
10/21/2008
7433048Interferometer systems for measuring displacement and exposure systems using the same
Interferometer systems for measuring displacement include a displacement interferometer. This interferometer includes a displacement converter responsive to a measuring beam of light. The displacement converter is configured to transform movement thereof in a direct...
10/07/2008
7425697Origin detection method for optical encoder
An optical encoder equipped with an origin detection apparatus has a scale provided with an optical grating, a plurality of light receiving elements that is provided in association with the pitch of the optical grating and movable relative to the scale and a light s...
09/16/2008
7417218Triple grating optical encoder with light transmitting area in optical path
An optical encoder is a reflecting triple grating type optical encoder. A light projecting section of the optical encoder which includes a combination of a bare chip LED and a first grating of a first pitch p1, irradiates a predetermined light. A photodetecti...
08/26/2008
7414731Microscope and interferometer thereof
An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser beam from the light source unit and splits the laser beam into a first b...
08/19/2008
7414730High precision interferometer apparatus employing a grating beamsplitter
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to form an optical interferometer responsive to changes in distance betwe...
08/19/2008
7405392Optical rotary encoder
An optical encoder includes: a rotary slit plate having a rotation angle detection track including an optical slit; a light source for applying light to the optical slit; light detecting elements for rotation angle detection and arranged at positions to which light ...
07/29/2008
7405389Dense multi-axis array for motion sensing
The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple photosensitive elements. In one embodiment, the array includes multiple lin...
07/29/2008
7394062Displacement-measuring optical scale and optical encoder using same
When a convex lens 13 comes close to 0-th order transmitted light T0 with rotation of an optical scale 11, the 0-th order transmitted light T0 derived from a light beam L emitted from a light source 15 and transmitted through a dif...
07/01/2008
7394550Displacement detector
The displacement detector includes: a light source 140; a beam splitter 170 for dividing the light, which is sent from the light source 140, into two beams of light; reflection mirrors 181, 182 provided for the two beams of light sent fro...
07/01/2008
7391011Optical encoder capable of detecting absolute position
In two phases signals (A, B) outputted from a scale or a scale having a discontinuous portion provided in its incidental member to a light receiving portion, a region in which amplitudes of the two phases signals (A, B) are small corresponds to outputs when a reflec...
06/24/2008
7388181Apparatus for adjusting applied voltage in display system using diffractive optical modulator
Disclosed herein is an apparatus for adjusting applied voltage in a display system using a diffractive optical modulator. The apparatus for adjusting applied voltage can measure the intensity of diffracted light emitted from the diffractive optical modulator, and ad...
06/17/2008
7385179Optical encoder for measuring displacement
At least one exemplary embodiment is directed to an optical encoder which includes a first diffraction grating having a desired optical effective aperture ratio at an appropriate gap position so as to eliminate and/or reduce high-harmonic components from the light i...
06/10/2008
7369253Systems and methods for measuring sample surface flatness of continuously moving samples
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of conveyance. The relative distance between the sample and the angled grating c...
05/06/2008
7365306Standard member for length measurement, method for producing the same, and electron beam length measuring device using the same
This invention provides an electron beam length measuring technology including a standard component for length measurement that has a finer standard dimension, and its producing method. The standard component for length measurement has a semiconductor member on whic...
04/29/2008
7362452Method of adjusting the operating region of a tool component to a pre-determined element
The invention describes a method of positioning an image field of, for example, an electron microscope at a specific structure in a regular grid of nominally identical structures. Such structures can, for example, be memory cells on a chip. Such memory cells nowaday...
04/22/2008
7358865Optical encoder and apparatus using optical encoder
An optical encoder includes a cylindrical reflective scale, a point light source for irradiating the reflective scale, and light-receiving elements for receiving the light beams reflected by the reflective scale. The pitch of the reflective scale is set to an approp...
04/15/2008
7359826Method and device for detection of oscillations by a position measuring system
A method for detecting the angular change of a scanning device with respect to at least one scale of a position measuring system by detecting several angular positions of the scanning device in relation to the at least one scale by detecting position measurements of...
04/15/2008
7355720Optical displacement sensor
An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sen...
04/08/2008
7355953Optical pickup for cutting off optical noise and optical recording and/or reproducing apparatus using the same
An optical pickup includes a light source which emits light, a grating which separates a portion of the light emitted from the light source, a reflecting member which reflects another portion of the light emitted from the light source, a monitoring photodetector dis...
04/08/2008
7352475Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being rotatable around an optical axis of the target optical system, and an ill...
04/01/2008
7348529Optical device and optical pickup device
An optical device diffracts incident light with a hologram element 19 and receives the diffracted light with light receiving regions 20A to 29 on a light receiving element 12. The light receiving element 12 separately receives refl...
03/25/2008
7348544Optical encoder with discontinuous optical grating
An optical encoder includes a light-emitting unit, a scale with a discontinuous part, and a plurality of light-receiving elements arranged in relationship to a pitch of the scale. In the optical encoder, a light beam from the light-emitting unit reflects off the sca...
03/25/2008
7349101Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby
A device according to one embodiment of the invention may be applied to measure the overlay (e.g. as a machine performance number) quickly and over an expanded range of locations (possibly everywhere) on a wafer. One method using such a device includes measuring the...
03/25/2008
7345273Integrated optical encoder
A rotary switch including a control element, a light-emitting device arranged on a printed circuit board and configured to emit light, and at least two receivers arranged on the printed circuit board in correspondence with the light-emitting device and configured to...
03/18/2008
7338613System and process for automated microcontact printing
An automated process for microcontact printing is provided, comprising the steps of providing a substrate and a stamp; automatically aligning the substrate and stamp so that the stamp is aligned relative to the substrate to impart a pattern to the substrate at a des...
03/04/2008
7332711Photoelectric encoder, scale therefor and method for manufacturing the same
A main scale 10 has protrusive grating 12 of a thin film of e.g. Cr formed on a base member 11. The base member 11 and the Cr thin film constitute a reflecting face which is set to provide the sufficient quantity of received light on a li...
02/19/2008
7332709Photoelectric encoder
A photoelectric encoder includes a light source of an illumination light beam. The encoder also includes a movable grating which has grating lines and which is displaceable in a direction intersecting the grating lines. An index grating serves as a reference for dis...
02/19/2008
7328889Measuring unit, partition member, mold for molding the partition member, and production method for the partition member
A measuring unit is removably connected to a sample analyzer. The measuring unit includes a first member having a first channel through which a sample is allowed to pass, a second member having a second channel through which the sample is allowed to pass, and a part...
02/12/2008
7330326Recordable disk rotational speed error correction circuit
An error correction circuit for determining an error in rotational speed of a recordable disk of a disk drive includes a sinusoidal error calculation portion adapted to generate a true oscillation error signal, and a summation portion adapted to combine the true osc...
02/12/2008
7329858Optical encoder and electronic equipment having same
An optical encoder includes a mobile object having a plurality of aligned slits, a light-emitting portion for emitting light toward the mobile object, and a light-receiving portion 103 for receiving the light which has passed the mobile object. The light-rece...
02/12/2008
7327005Optical semiconductor package with incorporated lens and shielding
An optical semiconductor module including an optical semiconductor component that has a front face including an optical sensor. Encapsulation, defining a cavity in which the optical component is disposed, includes external electrical connections for the optical semi...
02/05/2008
7327661Optical pickup and optical information recording apparatus using the same
An optical pickup includes a diffraction grating partitioned into three areas, in which the phase of periodic grating groove structure in an area is successively shifted from that in the adjacent area by 90°. In the generation of a differential push-pull signal, an...
02/05/2008
7324212Optical encoder having slanted optical detector elements for harmonic suppression
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated detector elements that sample the interference fringe pattern at spatially s...
01/29/2008
7319526Apparatus for detecting displacement
A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device un...
01/15/2008
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