Class 219/638 - Semiconductor

Subclass of Class 219 - Electric heating
Definition: Subject matter wherein the rod material has conductivity
No. of patents: 37
Last issue date: 09/23/2008

Number	Title	Issue Date
7427329	Temperature control for single substrate semiconductor processing reactor A reactor for heat treatment of a substrate having a process chamber within a substrate enclosing structure, and a support structure configured to position a substrate at a predetermined spacing between the upper part and the bottom part within the process chamber d...	09/23/2008
7390367	Housing assembly for an induction heating device including liner or susceptor coating A housing assembly for an induction heating device defines a processing chamber and includes a susceptor and a thermally conductive liner. The susceptor surrounds at least a portion of the processing chamber. The thermally conductive liner is interposed between the ...	06/24/2008
7202450	Induction coil design for portable induction heating tool A portable induction tool is provided for soldering or brazing sections of metal pipe together. A work coil head (with induction coil) is U-shaped, allowing placement of the head around lengths of pipe, heating a susceptor (e.g., the pipe) to form a joint, and then ...	04/10/2007
7049563	Induction cooker with heating coil and electrical conductor An electric conductor provided for decreasing a lifting force exerted on an object being heated has an aperture of a small diameter in the center thereof, which leaves a large surface area to enhance reduction of the lifting force. The electric conductor is also pro...	05/23/2006
7026585	Method for monitoring the performance of a magnetic pulse forming or welding process The performance of a magnetic pulse forming or welding process is monitored by positioning a deformation member relative to an inductor coil of the apparatus, then energizing the inductor coil to exert a force thereon. The deformation member can be a plastically def...	04/11/2006
6896738	Induction heating devices and methods for controllably heating an article A heating device for controllably heating an article defines a processing chamber to hold the article and includes a housing and an EMF generator. The housing includes a susceptor portion surrounding at least a portion of the processing chamber, and a conductor port...	05/24/2005
6887316	Ceramic heater A ceramic heater improving a uniformity of temperature distribution in a work heating face, wherein a resistance heating body formed on a face of a ceramic substrate opposite to the work heating face thereof is such that the scattering of thickness is within ±50% o...	05/03/2005
6577926	Method of detecting and controlling in-situ faults in rapid thermal processing systems Faults occurring in the operation of a rapid thermal process system are detected and dynamically controlled in-situ. A data set is generated which represents the power applied to heating elements which are spatially arranged in a plurality of zones. The d...	06/10/2003
6395648	Wafer processing system A wafer processing system which requires no isolation between the operational areas within the processing system. The system of the present invention includes operational areas, such as a loading area, a transport area, and a reactor or thermal processing...	05/28/2002
6316754	Frequency selected, variable output inductor heater system An induction heating systems using a plurality of zones in a coil provides selective heating control for better uniformity especially for semiconductor and other thin film processing applications. By arranging the zones to have different resonance frequen...	11/13/2001
6288378	Induction heating system with split resonance capacitance Induction heating apparatus has a series inductor between an AC source and a parallel tank circuit. The source has an output transformer which has a leakage inductance, viewed from the secondary, no larger than ##EQU1## where VLmin is a desired...	09/11/2001
6188052	Matrix-inductor soldering apparatus and device A new apparatus and process for soldering surface-mount and through-hole type electronic components into a printed circuit board (PCB) in an automated fashion utilizing localized electromagnetic induction heating. Current manufacture technology for packag...	02/13/2001
5902508	Induction heating coil suitable for floating zone processing An induction heating coil used in a floating zone melting method, characterized in that the path of a high-frequency current is controllable in the body surface of the coil and by the use of the coil a more uniform resistivity profile across a diameter is...	05/11/1999
5550354	High-frequency induction heating coil A high-frequency induction heating coil is provided which enables a semiconductor single crystal in the process of growth to incorporate impurities uniformly therein, permits ready adjustment of the heat distributing property, and precludes the discharge ...	08/27/1996
5514439	Wafer support fixtures for rapid thermal processing A fixture for supporting a semiconductor wafer during rapid thermal processing, comprising a two-piece assembly of parts, one of which is a silicon carbide wafer support section having a wafer contact face shaped by direct contact with a mold, during its ...	05/07/1996
5448041	Process for the assembly of at least two parts made from a composite material incorporating a ceramic or vitroceramic matrix reinforced by ceramic fibres A process for assembling at least two parts made from a composite material incorporating a ceramic or vitroceramic matrix reinforced by ceramic fibers. A continuous connection between these parts is achieved by approaching two of the parts along their res...	09/05/1995
4931945	Method of controlling floating zone A method of controlling a floating zone applied to a crystal manufacturing system based on the FZ method and designed to enable the diameter at the crystallization boundary and the axial length of the floating zone or other similar quantities to desired v...	06/05/1990
4900887	Floating zone drawing circuitry for semiconductor rods For floating zone drawing of semiconductor rods having diameters greater than 100 mm, at the beginning of the zone drawing process, in particular during melting on of the seed crystal to the semiconductor rod to be drawn, a high load change and impedance ...	02/13/1990
4833287	Single-turn induction heating coil for floating-zone melting process This invention relates to a single-turn induction heating coil used for floating-zone melting process. According to this invention, both ends of a single-turn coil are crossed each other in a peripheral direction of the coil so as to form an overlap secti...	05/23/1989
4797525	Induction heater for floating zone melting When semiconductor rods during floating zone melting are doped with dopants having a very low distribution coefficient, the non-homogeneous temperature distribution causes a relatively strong non-homogeneous separation of the dopants (striation). The homo...	01/10/1989
4794217	Induction system for rapid heat treatment of semiconductor wafers A semiconductor wafer is transported by a mechanical system into or out of a quartz housing filled with a protection gas. The wafer is placed between and spaced apart from two graphite plates. A RF induction coil surrounding the quartz housing is used to ...	12/27/1988
4749837	Induction heating coil for the floating zone pulling of crystal rods An induction heating coil for a zone pulling of semiconductor rods assures the disturbance-free performance of the pulling process even at the high power densities required for large rod diameters (approximately 10 to 12 cm). According to the invention, t...	06/07/1988
4665913	Method for ophthalmological surgery The invention contemplates use of a scanning laser characterized by ultraviolet radiation to achieve controlled ablative photodecomposition of one or more selected regions of a cornea. Irradiated flux density and exposure time are so controlled as to achi...	05/19/1987
4579719	Apparatus for crucible-free floating-zone melting a semiconductor rod, particularly of silicon Apparatus for crucible-free zone melting an end-supported semiconductor rod, including an RF generator having a resonant circuit for determining the generator frequency, the resonant circuit having connected therein a tank-circuit coil and a tank-circuit ...	04/01/1986
4538279	Induction coil in the form of a pancake coil for crucible-free zone melting A pancake induction heating coil for crucible-free zone melting of semiconductor crystal rods, includes a primary winding surrounding a semiconductor rod to be remelted in the form of a ring through which cooling liquid flows, a secondary winding surround...	08/27/1985
4506132	Induction coil in the form of a flat coil for crucible-free floating zone melting Flat induction heating coil for crucible-free floating zone melting a semiconductor crystalline rod having a turn annularly surrounding the semiconductor rod, the turn being formed with at least one passage therethrough for a cooling liquid, including an ...	03/19/1985
4398974	Temperature gradient zone melting process employing a buffer layer A process is provided for fabricating a semiconductor device by thermal gradient zone melting, whereby metal-rich droplets such as aluminum migrate through a semiconductor wafer such as silicon to create conductive paths. One surface of the wafer in provi...	08/16/1983
4246249	Silicon purification process A method for purifying silicon comprises the steps of providing a body of molten silicon-rich material and extracting heat therefrom to provide a solid phase containing silicon in crystal form and to concentrate impurities in a molten phase. After a desir...	01/20/1981
4220839	Induction heating coil for float zone melting of semiconductor rods An induction heating coil for the float zone melting of semiconductor materials. The distribution of current on the surfaces of the coil is modified by altering the surfaces of the coil. The alteration of the surfaces is in the form of selectively positio...	09/02/1980
4168998	Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder Semiconductor epitaxial wafers consisting of an epitaxial film and its substrate can be removed, in accordance with the present invention, from a substrate supporting component, without breaking the wafers into pieces after completion of vapor growth. The...	09/25/1979
4147432	Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates This invention relates to an apparatus for thermal diffusion by means of high frequency induction heating suitable for mass production of semiconductor substrates of uniform quality; wherein a plurality of heating bases, each made of a material having goo...	04/03/1979
4110586	Manufacture of doped semiconductor rods Process for doping a semiconductor rod which comprises securing a semicontor rod containing a dopant and having a substantially smaller cross section than the rod to be doped against said rod, with the axes of the two rods substantially parallel to one a...	08/29/1978
4109128	Method for the production of semiconductor rods of large diameter and device for making the same Method for the production of dislocation-free, monocrystalline semiconduc rods with large diameters by crucible-free zone melting, which comprises producing the melting zone in a uniform electromagnetic field substantially symmetrical to the rod axis. Th...	08/22/1978
4035600	Apparatus for crucible-free zone processing of a semiconductor rod An apparatus for a floating zone melt processing of a semiconductor rod including a heating circuit comprised of an annular induction heating coil adapted to annularly encompass a zone of the semiconductor rod and upon activation to produce an annular mel...	07/12/1977
4008387	Automatically controlled crystal growth The Czochralski growth of a crystal may be automatically controlled to provide uniform crystal cross-sectional area by weighing the crucible containing the melt from which the crystal is grown and deriving a weight signal which is compared with its expect...	02/15/1977
3985947	Device and method for crucible-free zone melting of crystallizable rods in particular semiconductor rods A device for crucible free zone melting on crystallizable rods, in particular on semiconductor rods, in which the molten zone is produced in the rod which is to be treated, by the electromagnetic field of an induction heating coil which surrounds the rod ...	10/12/1976
3935059	Method of producing single crystals of semiconductor material by floating-zone melting In a floating-zone melting process for producing single crystals of a semi-conductor material from a semi-conductor rod and a seed crystal, the rod is heated by high-frequency induction from an inductance coil which is spaced from a short-circuited annula...	01/27/1976

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Class 219/638 - Semiconductor