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Class 219/634 - Susceptor


Subclass of Class 219 - Electric heating
Definition: Subject matter wherein the intermediate member has highly
No. of patents: 261
Last issue date: 04/10/2012


            7  
NumberTitleIssue Date
4284867Chemical vapor deposition reactor with infrared reflector
The reactor includes an R.F. induction coil, connected to a power supply, and located in proximity to the deposition enclosure. The coil radiates energy, a portion of which is converted by a susceptor situated in the enclosure into heat which is applied t...
08/18/1981
4275282Centering support for a rotatable wafer support susceptor
A support mechanism for a rotatable wafer-support susceptor adapted for rotation by a shaft in a vertical orientation. The support mechanism comprises a quartz pedestal tube resting with frictional engagement on a metallic table fixed to the shaft. The pe...
06/23/1981
4263336Reduced pressure induction heated reactor and method
A reduced pressure induction heated reactor and method for the deposition, especially epitaxial deposition, onto workpieces placed in the reactor. The workpieces are positioned within a hollow susceptor which is, in turn, positioned within a reactor tube....
04/21/1981
4224494Brazing press for brazing claddings to pressings including a flat bottom surrounded by curved portions
A brazing press for securing exterior claddings to bottoms of metallic receptacles, which includes a support structure and a reciprocable mandrel for exerting pressure against the former. The support structure holds a massive inductor block having a flat ...
09/23/1980
4202400Directional solidification furnace
A directional solidification furnace is provided in which the susceptor is characterized by at least one substantially longitudinal slot to provide interference with eddy current motion and lower the furnace temperature in the slotted region and cause the...
05/13/1980
4174462Induction furnaces for high temperature continuous melting applications
An induction furnace for high temperature continuous melting applications utilizes low frequency induction heating of novel graphite susceptor systems and includes means for varying both the amount of power and the distribution of power over the susceptor...
11/13/1979
4157373Apparatus for the production of ribbon shaped crystals
Apparatus for pulling a ribbon shaped crystal from a melt of the same downwardly through a shaping guide having a "V" shaped longitudinal trough for containing the melt. The inner wall of the trough is a die set having a longitudinal slit at the apex of t...
06/05/1979
4154998Solar array fabrication method and apparatus utilizing induction heating
A solar array having solar cells mounted on a substrate and electrically joined by rear connector elements on the substrate and front connector elements secured between the cells to the substrate is fabricated by placing the array components in assembled ...
05/15/1979
4115681Method and apparatus for cutting cloth
A method and apparatus for cutting out cloth, in the manufacture of clothing for example, is described in which metal strips bent to outline the shapes of the cloth pieces are pressed against the cloth and the edges of the strips in contact with the cloth...
09/19/1978
4115163Method of growing epitaxial semiconductor films utilizing radiant heating
A method of growing epitaxial semiconductor films on substrates is proposed which consists in that a substrate is cleaned from damage layers and heated to a critical epitaxy temperature simultaneously by irradiating a substrate surface with an intensive l...
09/19/1978
4113547Formation of epitaxial layers on substrate wafers utilizing an inert heat radiation ring to promote uniform heating
A method is described for growing epitaxial layers of material on monocrystalline substrates, chiefly silicon, which are substantially free of slip dislocations. The method involves placing an encircling ring of inert, heat resistant material around the r...
09/12/1978
4099041Susceptor for heating semiconductor substrates
An integral graphite susceptor of the type comprising a hollow polyhedron, adapted to support a semiconductor substrate on an outer planar surface of a wall thereof, has a recessed cavity adjacent the inner surface of the wall and shaped so that the floor...
07/04/1978
4055391Crucible
A crucible, especially for containing melts, has a multichamber construction wherein there is an outer chamber for containing a heat distribution medium and an inner chamber which acts as a receptacle for the melt....
10/25/1977
4052153Heat resistant crucible
A crucible, for use in heating and/or retaining melts at elevated temperatures, includes a hollow holding member composed of a heat resistant material, and a thin-walled insert composed of a substance chemically resistant to oxygen and oxidizing substance...
10/04/1977
4049384Cold crucible system
A cold crucible system is provided which is suitable for carrying out the process of "skull" melting wherein highly refractory materials are melted by inductive heating in a manner to maintain the molten material in a shell of the material cool enough to ...
09/20/1977
4016389High rate ion plating source
A high rate material vaporizing and ion generating source for controled environment high rate ion plating in providing high particulate energy level deposited film build ups. An externally shielded work coil surrounding the ion material source and fed by ...
04/05/1977
3991294Apparatus for making longitudinally partitioned tubular bodies and container assemblies
An apparatus for making a longitudinally partitioned tubular body and sealingly securing a longitudinally divided head fitment to one end of the body to form a collapsible, longitudinally partitioned tubular dispensing container assembly. A single sheet o...
11/09/1976
3980854Graphite susceptor structure for inductively heating semiconductor wafers
A susceptor for heating a plurality of semiconductor wafers, as by rf induction, comprises a hollow truncated pyramid of conventional graphite. The walls of the pyramid are planar except for ledges extending from the outer surfaces of the walls for suppor...
09/14/1976
3972704Apparatus for making vitreous silica receptacles
Apparatus is disclosed for automated mass production of precision transparent silica glass products in accordance with a unique process in which slip-cast fused silica articles are rapidly heated and sintered in a vacuum or in a helium or hydrogen atmosph...
08/03/1976
3964430Semi-conductor manufacturing reactor instrument with improved reactor tube cooling
A quartz reactor tube is provided with an electrically conductive hollow tube shaped into a coil surrounding but not contacting the outside surface of the quartz tube. The coil serves a double purpose of indirectly heating semi-conductor wafers within the...
06/22/1976
3941966RF Power transmission line
Transmission line for RF power utilizing generally flat supply and return lines each comprising a plurality of flexible, insulated conductors connected together at their ends. The two lines are enclosed in a flexible sheath which holds the lines in close ...
03/02/1976
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