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Class 219/121.73 - Shaping


Subclass of Class 219 - Electric heating
Definition: Subject matter including focusing of a coherent light beam.
No. of patents: 415
Last issue date: 02/14/2012


1                      
NumberTitleIssue Date
8115137Laser annealing method and laser annealing apparatus
In laser annealing using a solid state laser, a focus position of a minor axial direction of a rectangular beam is easily corrected depending on positional variation of a laser irradiated portion of a semiconductor film. By using a minor-axis condenser lens 29
02/14/2012
8022332Laser processing device
A laser condensing optical system of the present invention includes a laser beam source which emits a laser beam, a condensing optical system which is arranged between the laser beam source and a medium and condenses the laser beam in the medium, and a laser diverge...
09/20/2011
8008600Fiber laser apparatus
The fiber laser apparatus comprises an amplifying section for amplifying seed light by cladding-pumping, and has a structure for further using a residual component of pumping light for cladding-pumping in order to heat the object. A guiding optical fiber is provided...
08/30/2011
7947923Encoded optical element of a laser processing head
A device for a laser processing head includes an optical element configured for attachment to the laser processing head, a housing for the laser processing head configured to receive the optical element, and a mechanical encoding disposed on at least one of the opti...
05/24/2011
7943885Laser irradiation method and method of manufacturing semiconductor device
By laser beam being slantly incident to the diffractive optics, an aberration such as astigmatism or the like is occurred, and the shape of the laser beam is made linear on the irradiation surface or in its neighborhood. Since the device has a very simple configurat...
05/17/2011
7923659Laser machining method and laser machining apparatus
A laser machining method and a laser machining apparatus by which holes excelling in form accuracy can be machined efficiently are to be provided. A first cylindrical lens and/or a second cylindrical lens to correct any deformation of reflective face of a first mirr...
04/12/2011
7812283Laser irradiation method, laser irradiation apparatus, and method for fabricating semiconductor device
An object of the present invention is to provide a laser irradiation method and a laser irradiation apparatus for irradiating an irradiation surface with a linear beam having more homogeneous intensity by blocking a low-intensity part of the linear beam without form...
10/12/2010
7718921Active beam delivery system with variable optical path segment through air
A laser energy delivery system includes a relay imaging system. Input optics arranged to receive the laser energy, a transmitting mirror having adjustable angle of incidence relative to the input optics, and a robot mounted optical assembly are configured to direct ...
05/18/2010
7675003Laser irradiation device, patterning method and method of fabricating organic light emitting display (OLED) using the patterning method
In a laser irradiation device, a patterning method and a method of fabricating an Organic Light Emitting Display (OLED) using the same. The laser irradiation device includes a light source, a mask, a projection lens, and a Fresnel lens formed at a predetermined port...
03/09/2010
7663073Optical processing apparatus
An optical processing apparatus includes an emitter for emitting light, a first light path for directing the light to a position to be processed on a workpiece, and a processing head. The processing head includes an optical system provided in the first light path, f...
02/16/2010
7649156Laser annealing apparatus for processing semiconductor devices in inline manner
A laser annealing apparatus is provided, which can simultaneously process a plurality of moving semiconductor devices in an inline manner using one annealing laser. The apparatus may include a laser beam emitting unit, which emits laser beams to target regions of a ...
01/19/2010
7642484Multiple beam micro-machining system and method
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plur...
01/05/2010
7592568Apparatus for the industrial processing of a material by optical radiation
Apparatus for the industrial processing of a material by a fiber laser, which fiber laser emits optical radiation, the apparatus configured such that the optical radiation forms an optical power distribution on a surface of the material, including first and second o...
09/22/2009
7518087Laser processing apparatus and laser processing method
A laser processing apparatus comprises a laser source, a substrate-holding unit, a liquid-supplying unit, a support which has a plurality of mask patterns including a specific mask pattern for imparting a cross-sectional shape to the laser beam, and a support-drivin...
04/14/2009
7495191Laser treatment apparatus
A laser treatment apparatus, configured for treating a workpiece, includes: a first laser generation device, a first optical assembly, a second laser generation device, a second optical assembly, a third laser generation device, and an optical detection device. The ...
02/24/2009
7482554Laser beam processing machine
A laser beam processing machine including a chuck table for holding a workpiece, a laser beam application device for applying a laser beam to the workpiece held on the chuck table, and a processing-feed mechanism for moving the chuck table and the laser beam applica...
01/27/2009
7449659Laser processing machine
A laser processing machine includes a beam splitter for splitting an incoming laser beam into a first laser beam having a first intensity and a second laser beam having a second intensity, a first focusing mirror for focusing the first laser beam onto a first laser ...
11/11/2008
7432471Laser beam hardening tool
A laser beam hardening tool is comprised of an engagement portion for freely engaging with a tool holding portion of a machine tool, a beam guide path which is a passage of supplied laser beam, and a torch portion for radiating laser beam which passed through the be...
10/07/2008
7411151Method and device for processing inside of transparent material
A shape with a substantially perfect circle is obtained as a processed shape such as a modified shape or a worked shape at a light focus point in a cross-section in a direction parallel to an advance direction of a femtosecond laser light beam. A section in a direct...
08/12/2008
7402774Flexible scan field
An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi...
07/22/2008
7402773Laser beam processing machine
Disclosed herein is a laser beam processing machine having a chuck table for holding a workpiece, a laser beam applicator for applying a laser beam capable of passing through the workpiece to the workpiece held on the chuck table, and a processing-feeder for moving ...
07/22/2008
7367930Automatic tool changer of laser beam machine
The invention provides a rotation-type changer of torches and nozzles for a laser beam machine having a movable table. The automatic tool changer 100 of a laser beam machine is equipped with a plurality of torch holders 160 and a nozzle changer 170
05/06/2008
7362784Laser irradiation method, laser irradiation apparatus, and semiconductor device
An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of th...
04/22/2008
7360893Systems and methods for shaping wavefronts in polychromatic light using phase shifting elements
A system for producing polychromatic light having selectively shaped wavefronts includes a source for generating light beams of at least two wavelengths (λ1, λ2). The beams are made up of a plurality of contiguous sub-beams that establish λ
04/22/2008
7356240Processing method of polymer crystal, processing system of polymer crystal, and observation system of polymer crystal
The ultraviolet short-pulse laser light emitted from the ultraviolet short-pulse laser light source 1 is focused on and caused to irradiate a macromolecular crystal 8 contained in a sample container 6 via a shutter 2, intensity adjusting ...
04/08/2008
7348517Laser cutting apparatus with a high quality laser beam
A laser cutting apparatus capable of properly cutting a workpiece having a large thickness with a laser beam. The laser cutting apparatus includes a gas laser oscillator; and an optical system including a collective lens and transmitting and collecting a laser beam ...
03/25/2008
7348516Methods of and laser systems for link processing using laser pulses with specially tailored power profiles
A laser pulse with a specially tailored temporal power profile, instead of a conventional temporal shape or substantially square shape, severs an IC link. The specially tailored laser pulse preferably has either an overshoot at the beginning of the laser pulse or a ...
03/25/2008
7342947Dark fiber laser array coupler
A multiple-fiber, stretched, fused and cleaved coupler designed to act as an output window to a fiber laser array or fiber-coupled laser array, in which the stretch, length and/or position of the fibers is chosen facilitate the in-phase oscillation of the lasers in ...
03/11/2008
7335611Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer
A method of forming a conductor in a thin film structure on a semiconductor substrate includes forming high aspect ratio openings in a base layer having vertical side walls, depositing a dielectric barrier layer comprising a dielectric compound of a barrier metal on...
02/26/2008
7332689Tacking method and apparatus
An apparatus for tacking a multi-lumen tubular assembly together comprises a laser, an optical member and a placement tray for retaining the tubular assembly. A portion of the optical member defines a window that is substantially transparent to laser energy emitted ...
02/19/2008
7326630Method of fabricating semiconductor device utilizing laser irradiation
Crystallization by irradiation of laser light forms a plurality of convex portions (ridges) on the surface of a crystalline semiconductor film that is obtained, which decreases a film quality. A method of laser irradiation comprises the steps of: overlapping an area...
02/05/2008
7323401Semiconductor substrate process using a low temperature deposited carbon-containing hard mask
A method of processing a thin film structure on a semiconductor substrate using an optically writable mask includes placing the substrate in a reactor chamber, the substrate having on its surface a target layer to be etched in accordance with a predetermined pattern...
01/29/2008
7318718Stereolithographic apparatus and method for manufacturing three-dimensional object
An optical stereolithographic apparatus performs optical stereolithography by preparing a mask on a light-transmissible member (31) on the basis of data for one layer with respect to optical stereolithography, exposing an unhardened resin layer (96) of...
01/15/2008
7317179Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate
Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el...
01/08/2008
7311771Method and apparatus for forming crystalline portions of semiconductor film
A crystallization apparatus according to the present invention includes a first irradiation system which irradiates a predetermined area on a glass substrate having an irradiation target, i.e., an a-Si thin film with light beams having a substantially homogeneous li...
12/25/2007
7312162Low temperature plasma deposition process for carbon layer deposition
A method of depositing a carbon layer on a workpiece includes placing the workpiece in a reactor chamber, introducing a carbon-containing process gas into the chamber, generating a reentrant toroidal RF plasma current in a reentrant path that includes a process zone...
12/25/2007
7312148Copper barrier reflow process employing high speed optical annealing
A method of forming a barrier layer for a thin film structure on a semiconductor substrate includes forming high aspect ratio openings in a base layer having vertical side walls, depositing a dielectric barrier layer comprising a dielectric compound of a barrier met...
12/25/2007
7304005Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device
A second laser light of a continuous wave oscillation is irradiated to a region melted by a first laser light of a pulsed oscillation having a harmonic. Specifically, the first laser light has a wavelength not longer than that of visible light (830 nm, preferably no...
12/04/2007
7304265Method and system for machining fragile material
In a method for processing brittle material, a laser light from a laser light source irradiates the brittle material and transports an irradiating position of the laser light along a predetermined line, wherein the laser light L from a plurality of laser light sourc...
12/04/2007
7301981Methods for synchronized pulse shape tailoring
A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective puls...
11/27/2007
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