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Class 219/121.68 - Etching or trimming


Subclass of Class 219 - Electric heating
Definition: Subject matter wherein the cut is superficial or partially
No. of patents: 1000
Last issue date: 05/29/2012


                    25  
NumberTitleIssue Date
4292092Laser processing technique for fabricating series-connected and tandem junction series-connected solar cells into a solar battery
A method of fabricating series-connected and tandem junction series-connected solar cells into a solar battery with laser scribing....
09/29/1981
4289952Process for controlling powder size with optical energy
Metal or ceramic powders having a narrow size distribution are produced by passing a gas entrained powder through an intense light beam which couples preferentially with the larger particles to heat and selectively vaporize a portion of the larger particl...
09/15/1981
4288776Passivated thin-film hybrid circuits
Thin-film microcircuit structures passivated with silicon nitride are provided in which included electrical components containing nickel, chromium or other nitride-forming metals are encapsulated in an oxide material, preferably silicon oxide. The metal-c...
09/08/1981
4272775Laser trim protection process and structure
An element of an integrated circuit, such as an ion implanted region or a metal layer, may be laser trimmed without exposing P-N junctions or other circuit elements not to be trimmed to damage by the laser through use of the present protection process and...
06/09/1981
4262186Laser chem-milling method, apparatus and structure resulting therefrom
The materials to be chem-milled are coated with a maskant material, a template having a specific hole pattern is then placed over the masked surface of the material. A laser beam is then directed towards the template and is scanned either manually or by n...
04/14/1981
4240044Pulsed laser electrode assembly
An electrode assembly for a compact high vacuum pulsed gas discharge laser comprises an elongated cathode and a coextensive anode spaced apart in a direction transversely of the flow of gas to define a discharge gap. Each of the electrodes is connected at...
12/16/1980
4240094Laser-configured logic array
An LSI fabrication process employs pulsed laser energy to selectively tailor individual logic elements of which the building blocks of an LSI array may be configured and to selectively interconnect these laser-configured building blocks. On an LSI chip, a...
12/16/1980
4190759Processing of photomask
A laser beam of a pulse width 10 to 20 nanoseconds is irradiated and scanned relatively and two-dimensionally on a metal thin film formed on a transparent substrate from the transparent substrate side and through the transparent substrate with a superposi...
02/26/1980
4182024Automatic control of integrated circuit trimming
In a monolithic integrated circuit having a combination of bipolar and junction field effect transistors, a pulsed laser is employed to trim the transistors to achieve balanced circuit performance. The laser is applied to individual circuits in wafer form...
01/08/1980
4172741Method for laser trimming of bi-FET circuits
Radiant energy, preferably that of a laser, is focused onto the surface of a silicon integrated circuit that contains a thin layer doped to the opposite conductivity type of the underlying silicon. The thin layer can be trimmed so as to tailor its conduct...
10/30/1979
4161808Machine for cutting continuous sheet material
A machine for longitudinally cutting and/or grooving continuous sheet material comprises first and second stations each of which has means for cutting and/or grooving the sheet material, the stations being spaced apart longitudinally in a direction along ...
07/24/1979
4156124Image transfer laser engraving
The invention relates to a non-contact laser engraving apparatus and process. A laser beam is directed onto a work piece by a mask arrangement. The mask can be transparent or reflective. Optical means are used to transfer the laser beam and thus the image...
05/22/1979
4154530Laser beam error correcting process
A laser beam is employed to trim monolithic integrated circuits in wafer form in a step and repeat machine. The step and repeat action is adjusted to bring successive circuits on the wafer into trimming relationship with the laser. The circuit is measured...
05/15/1979
4149062Scavenger hood for laser
Laser beam scribing apparatus having a nozzle assembly in which a partition defines a travel path for the laser beam and separates the travel path from a surrounding suction chamber. The suction chamber terminates in a suction aperture coplanar with and s...
04/10/1979
4148065Method and apparatus for automatically inspecting and correcting masks
A pair of chromium masks of similar pattern are optically read out to generate video signals corresponding to the patterns thereon. Comparison of the pair of masks is carried out in binary signals converted from the video signals using different recogniti...
04/03/1979
4141456Apparatus and method for aligning wafers
The device includes an alignment station at which an operator can align a wafer under a microscope. Once the wafer is properly aligned, a transfer chuck is brought into position above the wafer and aligned with alignment pins located in fixed positions at...
02/27/1979
4128752Laser micromachining apparatus
Laser micromachining apparatus for producing a selectable machining pattern on a workpiece, for example a substrate of paper or rubber or for producing a silicon integrated circuit. A high power laser beam carrying a controllable sequence of light pulses ...
12/05/1978
4096988Method and an apparatus for the dynamic balancing of rotating bodies, particularly for centrifuges
A method and apparatus for the dynamic balancing of a centrifuge during rotation in which vibration, amplitude, frequency and phrase are sensed within at least two planes and vibration signals produced. The vibration signals are then processed and convert...
06/27/1978
4090572Method and apparatus for laser treatment of geological formations
A method and apparatus are disclosed for drilling gas, oil or geothermal wells in geological formations and for "fracing" the pay zones of such wells to increase recovery, using a laser beam projected into the well bore along a beam guide so as to make av...
05/23/1978
4087672Laser removal of material from workpieces
To ascertain the beam intensity threshold at which the intensity of a laser beam will just be sufficient to engrave a workpiece, the value of a beam-intensity control signal is progressively increased or decreased until engraving starts or stops, this bei...
05/02/1978
4084988Method and apparatus for making instantaneous scarfing cuts
An instantaneous scarfing cut on the surface of a metal workpiece can be made by: (a) causing relative motion between the workpiece and a stream of scarfing oxygen gas, and simultaneously therewith (1) impinging at least one laser beam on the work surface so a...
04/18/1978
4081654Methods and apparatus for selectively removing a metallic film from a metallized substrate
A metallized substrate is flexed to conform to the surface of a segment of a right circular cylinder. The metallized substrate is arcuately rotated and a planar apertured mask is simultaneously moved linearly in spaced tangential relationship to the flexe...
03/28/1978
4081653Removal of thin films from substrates by laser induced explosion
Selected portions of a thin film coating of metal are removed from an insulative substrate by directing a coherent beam of light energy from a laser at the coating, to heat the coating and cause the evaporation and entrapment of the substrate material at ...
03/28/1978
4078165Semi-automatic feed laser apparatus
A semi-automatic feed laser apparatus includes a laser beam focused on a workpiece affixed to a pattern template which is urged by the operator against rotatable guide means rotating at a predetermined rate to feed the workpiece smoothly under the laser y...
03/07/1978
4071731Matrix engraving by electron beams
The invention provides an improvement for an apparatus which produces engraved printing forms via an electron beam device which is located in a vacuum chamber having an open side facing a peripheral surface of a printing form cylinder and defining therewi...
01/31/1978
4060707Balancing device and method for a rotating body
A balancing device and method for balancing a rotating body during operation. The device and method detects the phase and amount of unbalance and provides signals in synchronism with the unbalance. Local heating of the rotating body is provided to counter...
11/29/1977
4046985Semiconductor wafer alignment apparatus
An apparatus for treating a wafer of semiconductor material so that individual devices which may be simple devices or complete complex integrated circuits defined on the front surface of the wafer can be easily separated from the wafer. The apparatus alig...
09/06/1977
4038663Method of writing information with a modulated radiation beam onto an information storage medium and information storage medium particularly adapted to the method
A method and apparatus for writing video information with a laser on a recording surface employing a protective foil on the writing surface through which foil the laser write beam is focussed. A stream of filtered gas is passed between the foil and the wr...
07/26/1977
4037076Apparatus for balancing rotating bodies
Apparatus for balancing a rotating body in which the body is mounted for rotation and operatively coupled with a mechanism for rotating the body. Sensor means coupled to the rotating body transmit an unbalance signal in response to unbalance of the body t...
07/19/1977
4032861Laser device for altering surfaces in accordance with given patterns
A high gain optically pumped laser device includes a mask having cut-out portions defining a given pattern disposed in the resonant optical cavity defined between end mirrors at opposite ends of the laser material. Each of the end mirrors is equivalent to...
06/28/1977
4024545Laser-excited marking system
A laser-excited marking system wherein a laser beam is used to mark information on an article. A laser beam from a laser is directed onto a scanner unit which includes positionable mirrors for reflecting the laser beam onto the article. The positionable m...
05/17/1977
4001840Non-photographic, digital laser image recording
A non-photographic, digital laser image recording and reading method and apparatus for recording and reading visual, two-dimensional replicas or representations of objects, pictures, illustrations, computer outputs and the like. A flat-field twin objectiv...
01/04/1977
3992819Apparatus for equalizing the resistance value of an electrically conductive layer
Apparatus for equalizing the electrically effective value of an electrically conductive layer is described wherein the equalization is effected by a tool, such as a sand-blasting device or laser that does not contact the layer, which is caused to traverse...
11/23/1976
3991296Apparatus for forming grooves on a wafer by use of a laser
An apparatus for forming grooves in a semiconductor wafer by the use of a laser beam includes a movable stage on which the wafer is mounted and a transparent member mounted on the stage in a sealed manner and covering the wafer. A liquid is introduced int...
11/09/1976
3953706Laser bent beam controlled dwell wire stripper
A device for enabling the stripping of a selected portion of the insulation from an electrical lead on a rapid basis without damage to the conductor portion of the lead, involving the use of a rotatable optical unit. Our novel optical unit is equipped wit...
04/27/1976
3943529Control of scanning laser beam
In pattern generating apparatus of the type employing a reciprocating laser beam for scanning a substrate surface, three scan lines are formed simultaneously. During reciprocation in one direction, the beam is deflected upwardly at an angle of arccot (1/3...
03/09/1976
3941973Laser material removal apparatus
A laser material removal apparatus and method of removing material from a workpiece wherein a laser forms a beam of radiation having a substantially circular cross-sectional configuration, and optical means is provided for compressing portions of the beam...
03/02/1976
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