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| Number | Title | Issue Date |
| 8008595 | Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge An arrangement for generating extreme ultraviolet radiation by an electrically operated gas discharge which achieves an improvement in the adjustment of the layer thickness when applying a molten metal to the electrode surfaces and provides better protection against... | 08/30/2011 |
| 7759598 | Substrate treating method and production method for semiconductor device A method for hydrogen sintering a substrate including a semiconductor device formed thereon comprises the steps of exciting a processing gas comprising a noble gas and a hydrogen gas to form a plasma comprising hydrogen radicals and hydrogen ions, and exposing the s... | 07/20/2010 |
| 7356900 | Manipulator needle portion repairing method In a manipulator needle portion defect repairing method, the existence of an abrasion or a fracture in a needle portion for holding a sample at an end of a manipulator disposed in an FIB device is confirmed using a microscope function of the FIB device. The abrasion... | 04/15/2008 |
| 7312461 | Laparoscopic tumor therapy using high energy electron irradiation A laparoscopic tumor therapy method and an articulated electron beam transport system are provided for use with a high power, long focus electron source for tumor therapy. The high power, long focus electron source generates an e-beam. The e-beam is transported thro... | 12/25/2007 |
| 7250727 | High power, long focus electron source for beam processing Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a ... | 07/31/2007 |
| 7242442 | Active matrix substrate, display apparatus, and method for producing the same In an active matrix substrate for allowing a point defect of a defect pixel portion, among a plurality of pixel portions arranged two-dimensionally, to be repaired by radiation of energy, the active matrix substrate includes one of a first protection member for abso... | 07/10/2007 |
| 7204901 | Low cost process for manufacture of hurricane resistant, glass, impact resistant units Liquid laminating resin systems are used to attribute hurricane resistant properties to insulated glass window units. The activated resin system is then deposited on a single piece of float glass with the containment insulating unit or the resin can be injected betw... | 04/17/2007 |
| 7195320 | Thermal rock fragmentation application in narrow vein extraction A free-blast method for extracting ore from an ore vein deposit wherein the vein is extracted by causing the ore comprised between the rock walls bordering the vein to spall into fragments. The ore fragments are recuperated as by aspiration and subsequently processe... | 03/27/2007 |
| 7189655 | Method of correcting amplitude defect in multilayer film of EUVL mask By entering a low acceleration Si ion beam of 500 V or lower or a low acceleration Si ion beam of 500 V-2000 V having been slanted such that an injection depth becomes shallow, which has been mass-separated from a liquid alloy ion source containing Si by a mass sepa... | 03/13/2007 |
| 7049539 | Method for surface treating a die by electron beam irradiation and a die treated thereby Method for surface treating a die made of metal in which a low energy, pulsed electron beam, which does not scatter, performs a treatment over a wide area due to presence of anode plasma in a chamber in which the electron beam is formed to smooth and gloss a surface... | 05/23/2006 |
| 7034384 | Integrated circuit adapted for ECO and FIB debug An integrated circuit adapted for ECO and FIB debug comprises: a substrate, a spare cell, a top-layer output terminal pad and a top-layer output terminal pad. The spare cell is disposed in substrate and comprises at least one input terminal and at least one output t... | 04/25/2006 |
| 7026764 | Plasma producing apparatus and doping apparatus An object of the present invention is to provide an apparatus for producing stable plasma. Another object of the present invention is to provide an apparatus having a long-lasting cathode electrode which is superior in field emission characteristic since the plasma ... | 04/11/2006 |
| 6995336 | Method for forming nanoscale features Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of m... | 02/07/2006 |
| 6774339 | Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tin The interfacial joint area of a target/backing plate assembly is sealed so as to inhibit the migration of air and/or water vapor that may be present or trapped along the interfacial surfaces. A pool or bead of molten solder is placed along the interfacial joint and ... | 08/10/2004 |
| 6288357 | Ion milling planarization of semiconductor workpieces A method and apparatus is presented for planarizing or polishing workpiece surfaces using an ion beam in the presence of a radio frequency generated plasma. A workpiece is placed in a holder within a vacuum chamber equipped with a radio frequency inductiv... | 09/11/2001 |
| 6232573 | Titanium alloy sheet and production method thereof A titanium alloy sheet having a surface roughness satisfying the relationship Raࣘ2 μm in all directions and a surface waviness satisfying the relationship WCAࣘ10 μm shows excellent workability because of the small anisotropy with respect ... | 05/15/2001 |
| 6198066 | Method and apparatus for radiated beam marking of a golf club part and such part A method for treating the surface of a golf club part having a non-smooth surface such as a part which has been cast. Preferably, in those instances where the part is cast, the part is abraded for example by tumbling or by directing a light sandblast agai... | 03/06/2001 |
| 5986233 | Susceptor heating device for electron beam brazing A brazing device and method are provided which locally apply a controlled amount of heat to a selected area, within a vacuum. The device brazes two components together with a brazing metal. A susceptor plate is placed in thermal contact with one of the co... | 11/16/1999 |
| 5958329 | Method and apparatus for producing nanoparticles at a high rate A method and apparatus for producing nanoparticles at a high rate is provided. The system uses two chambers separated by a narrow duct. Contained within the lower chamber is the source material, preferably heated with an electron gun and fed with a contin... | 09/28/1999 |
| 5897794 | Method and apparatus for ablative bonding using a pulsed electron A method and apparatus for bonding a layer of coating or cladding material onto a substrate with minimal bulk heating of the substrate. A pulsed electron beam generator is used to produce high energy electrons at the beginning of the pulse and a larger nu... | 04/27/1999 |
| 5534677 | Electron beam machining using rotating and shaped beam power distribution An apparatus and method for electron beam (EB) machining (drilling, cutting and welding) that uses conventional EB guns, power supplies, and welding machine technology without the need for fast bias pulsing technology. The invention involves a magnetic le... | 07/09/1996 |
| 5504302 | Method and device for the production of optical lenses or the like A method for the production of optically operating structures, particularly of lenses and lens arrays and prisms, with which in at least one masking step (MS) a base structure (10) that is optically operating in steps is formed on the surface of a substra... | 04/02/1996 |
| 5459296 | Method for the low-maintenance operation of an apparatus for producing a surface structure, and apparatus An apparatus for producing surface structures on a drum with an electron beam, comprising beam equipment having a beam generator that generates the electron beam, a focal length adjustment as well as a focusing adjustment, and a vacuum chamber which accep... | 10/17/1995 |
| 5411604 | Method of producing low iron loss, low-noise grain-oriented silicon steel sheet, and low-noise stacked transformer A grain oriented silicon steel sheet which exhibits reduced iron loss and which contributes excellent noise characteristics when used as a material of a stacked transformer. The sheet is produced by applying electron beam irradiation a finish-annealed gra... | 05/02/1995 |
| 5306447 | Method and apparatus for direct use of low pressure vapor from liquid or solid precursors for selected area laser deposition Methods and apparatus for selectively depositing a layer of material from a gas phase to produce a part comprising a plurality of deposited layers. The apparatus includes a computer controlling a directed energy beam, such as a laser, to direct the laser ... | 04/26/1994 |
| 5296051 | Method of producing low iron loss grain-oriented silicon steel sheet having low-noise and superior shape characteristics A method of producing a low iron loss grain oriented silicon steel sheet which generates improved magnetostrictive characteristics when used as a stacked iron core and low noise when used in a stacked transformer, as well as superior shape characteristics... | 03/22/1994 |
| 5157685 | Method and apparatus for preparing a melt for mineral fibre production A method of preparing a melt for mineral fibre production wherein a mixture of mineral fibre-forming raw materials is introduced into a shaft furnace and is heated to melting temperature by a plasma gas stream formed in a plasma torch and wherein waste ma... | 10/20/1992 |
| 5146063 | Low iron loss grain oriented silicon steel sheets and method of producing the same In grain oriented silicon steel sheets provided with surface layer after finish annealing, microareas of the surface layer are locally pushed into at least an inside of base metal through electron beam irradiation in a direction substantially perpendicula... | 09/08/1992 |
| 5106455 | Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography Apparatus for non-planar treatment of a workpiece utilizing exposure beam lithography includes a vacuum chamber, an exposure beam generator such as an electron beam generator disposed in the chamber for directing a beam towards a work location, a chuck di... | 04/21/1992 |
| 5103766 | Vacuum arc vapor deposition device having electrode switching means A vacuum arc deposition device having electrode switching means comprising two or more electrodes consisting of vacuum arc vapor evaporation source materials and a substrate to which films are formed by means of vacuum arc vapor deposition, each of the el... | 04/14/1992 |
| 5100463 | Method of operating an electron beam furnace In the representative embodiment described in the specification, an electron beam furnace has an evacuation system which maintains the interior of the furnace at a pressure in the range from about 50 microns Hg to 300 microns Hg. The relatively high press... | 03/31/1992 |
| 5041712 | Method for the control of an evaporation process A method and apparatus for controlling, regulating and measuirng the particle mass which is evaporated per unit time from a target by a charged particle beam, in particular an electron beam, comprises the varying of an impingement area of the beam on the ... | 08/20/1991 |
| 5014420 | Fusing together metal particles using a high-frequency electromagnetic field Micro-miniature particles of low resistivity material are fused by applying a highly concentrated high-frequency electromagnetic field to the particles. An electrially conductive printed circuit is formed by laying out a pattern of contiguous micr-miniatu... | 05/14/1991 |
| 5003151 | Method and control arrangement for the evaporation rate of an electron beam The average evaporation rate over a predetermined area to be evaporated is controlled by moving an electron beam over said area wherein one characteristic of the electron beam is controlled in order to influence the evaporation rate. The electron beam is ... | 03/26/1991 |
| 4919733 | Method for refining magnetic domains of electrical steels to reduce core loss A method is provided for domain refinement of electrical sheet products, such as grain-oriented silicon steel and amorphous magnetic materials, by subjecting at least one surface of the steel to an electron beam treatment to produce narrow substantially p... | 04/24/1990 |
| 4915750 | Method for providing heat resistant domain refinement of electrical steels to reduce core loss A method is provided for heat resistant domain refinement of texture annealed and insulation coated grain-oriented silicon steel strip and amorphous magnetic materials by subjecting at least one surface of the steel to an electron beam treatment to produc... | 04/10/1990 |
| 4909864 | Method of producing extra-low iron loss grain oriented silicon steel sheets An extra-low iron loss grain oriented silicon steel sheet is produced by irradiating electron beam to an insulation coating formed on a grain oriented silicon steel sheet after finish annealing in a direction crossing the rolling direction of the sheet, w... | 03/20/1990 |
| 4908226 | Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams A method for depositing metallic lines on an IC chip or mask is described using a focused ion beam (FIB) with a much lower ion dosage than previously required, on the order of 1014 -1015 ions/cm2. A substrate is scanned wi... | 03/13/1990 |
| 4906326 | Mask repair system A method and apparatus for inspecting and repairing a mask usable in the manufacture of semiconductor microcircuits, by using an electron beam is disclosed. The inspection and repair of a mask pattern are made in a single apparatus, by using a controlled ... | 03/06/1990 |
| 4821386 | Method of producing a rolling bearing race A method of producing a rolling bearing race provided with a continuous rupture seam along at least one area of its periphery and having a seating surface and a race for rolling elements, the rolling bearing race surface being exposed before rupture along... | 04/18/1989 |
