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Class 216/76 - Etching of substrate containing at least one compound having at least one oxygen atom and at least one metal atom


Subclass of Class 216 - Etching a substrate: processes
Definition: Process wherein the material etched contains a compound
No. of patents: 156
Last issue date: 09/16/2008


1        
NumberTitleIssue Date
7425510Methods of cleaning processing chamber in semiconductor device fabrication equipment
Methods of cleaning a processing chamber of semiconductor device fabrication equipment are highly effective in removing polymers produced as a by-product of a fabrication process from surfaces in a processing chamber. The cleaning process uses a plasma etchant produ...
09/16/2008
7371588Method of manufacturing a semiconductor device
A method of manufacturing a semiconductor device includes: forming a circuit element on a semiconductor substrate; forming a first insulation film on top to cover the circuit element; forming a first electrode on top; forming a ferroelectric film on the first electr...
05/13/2008
7368394Etch methods to form anisotropic features for high aspect ratio applications
Methods for forming anisotropic features for high aspect ratio application in etch process are provided in the present invention. The methods described herein advantageously facilitates profile and dimension control of features with high aspect ratios through a side...
05/06/2008
7361285Method for fabricating cliche and method for forming pattern using the same
A method for fabricating a cliché including: providing a transparent glass substrate; depositing a metal layer on the substrate; patterning the metal layer and thereby forming a first metal pattern; etching the glass substrate by using the first metal pattern as a ...
04/22/2008
7357138Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
A process for the removal of a substance from a substrate for etching and/or cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a substance having a dielectric constant greater than silicon dioxide from a substrate...
04/15/2008
7354526Processing method for glass substrate, processed glass product and stress applying apparatus
A processing method for glass substrate of the present invention includes: applying heat and external force to a glass substrate and then cooling it down to thereby form a compression stressed part having a different etching rate from that of other parts with respec...
04/08/2008
7335600Method for removing photoresist
A method for removing photoresist is described. A substrate having a photoresist to be removed thereon is provided, and then an ashing process is performed to remove most of the photoresist. The substrate is then subjected to a surface treatment that provides suffic...
02/26/2008
7264677Process for treating solid surface and substrate surface
Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any damages to...
09/04/2007
7217665Method of plasma etching high-K dielectric materials with high selectivity to underlying layers
A method of plasma etching a layer of dielectric material having a dielectric constant that is greater than four (4). The method includes exposing the dielectric material layer to a plasma comprising a hydrocarbon gas and a halogen containing gas. ...
05/15/2007
7187523Method of marking sintered body and method for manufacturing magnetic head wafer
A method of marking a sintered body includes the step of preparing the sintered body by sintering a mixture of first and second types of powder particles. The first type of powder particles is made of a first material and the second type of powder particles is made ...
03/06/2007
7147794Coating for forming a high definition aperture
An optical thin film stack for a dark aperture is deposited using thermal ion-assisted deposition (“IAD”). The IAD provides an energetic deposition of chromium and chromium oxide that results in a dark mirror optical thin film stack with superior etch properties...
12/12/2006
7128846Process for producing group III nitride compound semiconductor
A method including the steps of: modifying at least one part of a sapphire substrate by dry etching to thereby form any one of a dot shape, a stripe shape, a lattice shape, etc. as an island shape on the sapphire substrate; forming an AlN buffer layer on the sapphir...
10/31/2006
7111629Method for cleaning substrate surface
There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2
09/26/2006
7107998Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus
Carbon monoxide gas is provided in a ruthenium-deposition apparatus to clean undesired ruthenium-containing deposits from apparatus surfaces. Carbon monoxide gas is mixed with reactant gases in apparatus tubing and in a ruthenium-deposition reaction chamber to inhib...
09/19/2006
RE39273Hard masking method for forming patterned oxygen containing plasma etchable layer
A method for forming a patterned microelectronics layer within a microelectronics fabrication. There is first provided a substrate employed within a microelectronics fabrication. There is then formed over the substrate an oxygen containing plasma etchable microelect...
09/12/2006
7096873Method for manufacturing a group III nitride compound semiconductor device
A method for manufacturing a group III nitride compound semiconductor device includes irradiating a surface of a wafer with ultraviolet rays to thereby clean a resist residue from the surface of the wafer, the surface including a group III nitride compound semicondu...
08/29/2006
7037848Methods of etching insulative materials, of forming electrical devices, and of forming capacitors
In one aspect, the invention encompasses a method of etching insulative materials which comprise complexes of metal and oxygen. The insulative materials are exposed to physical etching conditions within a reaction chamber and in the presence of at least one oxygen-c...
05/02/2006
7033952Apparatus and method using a remote RF energized plasma for processing semiconductor wafers
Chemical generator and method for generating a chemical species at a point of use such as the chamber of a reactor in which a workpiece such as a semiconductor wafer is to be processed. The species is generated by creating free radicals, and combining the free radic...
04/25/2006
7025896Process for treating solid surface and substrate surface
Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any damages to...
04/11/2006
6939472Etching method in fabrications of microstructures
The present invention teaches a method and apparatus for removing sacrificial materials in fabrications of microstructures using one or more selected spontaneous vapor phase etchants. The selected etchant is fed into an etch chamber containing the microstructure dur...
09/06/2005
6906895Method of marking sintered body and method for manufacturing magnetic head wafer
A method of marking a sintered body includes the step of preparing the sintered body by sintering a mixture of first and second types of powder particles. The first type of powder particles is made of a first material and the second type of powder particles is made ...
06/14/2005
6838012Methods for etching dielectric materials
Methods of etching dielectric materials in a semiconductor processing apparatus use a thick silicon upper electrode that can be operated at high power levels for an extended service life. ...
01/04/2005
6824699Method of treating an insulting layer
This invention relates to a method of heating an insulating layer, such as is found in semiconductor devices, in which a formation has been etched through a layer of resist comprising reactive etching the resist, inhibiting absorption of or removing water vapour and...
11/30/2004
6806035Wafer serialization manufacturing process for read/write heads using photolithography and selective reactive ion etching
A serialization process presents an efficient method of creating serial numbers on a ceramic-like semiconductor wafer by forming a non-rigid photomask that incorporates character specifications for the serial numbers. The non-rigid photomask is retained in a rigid, ...
10/19/2004
6706334Processing method and apparatus for removing oxide film
Disclosed are a processing method and apparatus for removing a native oxide film from the surface of a subject to be treated. In this method and apparatus, gas generated from N2, H2 and NF3 gases is reacted with the surface of the su...
03/16/2004
6685848METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HALF-TONE PHASE-SHIFT PHOTOMASKS AND METHOD FOR THE PREPARATION THEREOF AND SEMICONDUCTOR CIRCUITS AND METHOD FOR THE FABRICATION THEREOF
A dry-etching method comprises the step of dry-etching a metal thin film as a chromium-containing half-tone phase-shift film, wherein the method is characterized by using, as an etching gas, a mixed gas including (a) a reactive ion etching gas, which cont...
02/03/2004
6679996Metal oxide pattern forming method
In a pattern forming method for selectively forming an oxide layer on a substrate surface, the substrate surface is selectively coated with a coating layer. On the coating layer and an exposed part of the substrate surface, an oxide layer is formed by the...
01/20/2004
6674562Interferometric modulation of radiation
Improvements in an interferometric modulator that has a cavity defined by two walls....
01/06/2004
6666983Patterned coated articles and methods for producing the same
The present invention is directed to an article with a patterned appearance provided by a visually observable contrast between one or more genereally transparent thin film coatings deposited over a substrate. At least one of the deposited coatings exhibit...
12/23/2003
6623653System and method for etching adjoining layers of silicon and indium tin oxide
A method has been provided for etching adjoining layers of indium tin oxide (ITO) and silicon in a single, continuous dry etching process. A conventional dry etching gas, such as HI, is used to etch ITO using RF or plasma energy. When the silicon layer un...
09/23/2003
6613242Process for treating solid surface and substrate surface
Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their reactors and application of the c...
09/02/2003
6592770Method of treating an isulating layer
This invention relates to a method of heating an insulating layer, such as is found in semiconductor devices, in which a formation has been etched through a layer of resist comprising reactive etching the resist, inhibiting absorption of or removing water...
07/15/2003
6537461Process for treating solid surface and substrate surface
Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any...
03/25/2003
6528429Methods of etching insulative materials, of forming electrical devices, and of forming capacitors
In one aspect, the invention encompasses a method of etching insulative materials which comprise complexes of metal and oxygen. The insulative materials are exposed to physical etching conditions within a reaction chamber and in the presence of at least o...
03/04/2003
6511918Method of structuring a metal-containing layer
The processes allow structuring of a metal-containing layer. The metal-containing layer is etched, using an etching mask, in a plasma-assisted etching gas atmosphere at a temperature of over 130° C. and in the presence of at least one halogen compound an...
01/28/2003
6436304Plasma processing method
A plasma processing method using helicon wave excited plasma which makes it possible to control a degree of dissociation for a process gas by controlling the source power. In the plasma processing method using helicon wave excited plasma, the source power...
08/20/2002
6428714Protective layer for continuous GMR design
An improved process for manufacturing a spin valve structure that has buried leads is disclosed. A key feature is the inclusion in the process of a temporary protective layer over the seed layer on which the spin valve structure will be grown. This protec...
08/06/2002
6423240Process to tune the slider trailing edge profile
A method of altering the topography of a trailing edge of a slider is disclosed, the slider having a substrate surface, at least one magnetic recording head imbedded in an alumina undercoat, and a vertical axis relative to the substrate surface. The steps...
07/23/2002
6419845Method of etching magnetic layer, of forming magnetic pole of thin film magnetic head and of manufacturing thin film magnetic head
It is an object to provide a method of etching which enables measurement control of the micro width of a magnetic layer while shortening the time required for the etching procedure. An inorganic insulating film made of alumina which is the same material a...
07/16/2002
6340435Integrated low K dielectrics and etch stops
A method of depositing and etching dielectric layers having low dielectric constants and etch rates that vary by at least 3:1 for formation of horizontal interconnects. The amount of carbon or hydrogen in the dielectric layer is varied by changes in depos...
01/22/2002
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