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Class 216/42 - Resist material applied in particulate form or spray


Subclass of Class 216 - Etching a substrate: processes
Definition: Process wherein the masking is applied by a coating process
No. of patents: 78
Last issue date: 07/20/2010


1    
NumberTitleIssue Date
7758759Ink jet printing process for etching metal and alloy surfaces
A process for etching a metal or alloy surface which comprises applying an etch-resist ink by ink jet printing to selected areas of the metal or alloy, solidifying the etch-resist ink without the use of actinic light and/or particle beam radiation and then removing ...
07/20/2010
7479234Method for producing cavities having optically transparent wall
A method is proposed which will enable cavities having optically transparent walls to be produced simply and cost-effectively in a component by using standard methods of microsystems technology. For this purpose, a silicon region is first produced, which is surround...
01/20/2009
7407890Patterning sub-lithographic features with variable widths
A method of processing a substrate of a device comprises the as following steps. Form a cap layer over the substrate. Form a dummy layer over the cap layer, the cap layer having a top surface. Etch the dummy layer forming patterned dummy elements of variable widths ...
08/05/2008
7371499Photoresist resin composition, method of forming a photoresist pattern, and method of manufacturing a display substrate using the same
A photoresist resin composition comprises about 10 to about 35% by weight of an acryl-based copolymer, about 5 to about 10% by weight of a quinone diazide compound, about 55 to about 80% by weight of a solvent, and about 0.01 to about 0.5% by weight of a silane-base...
05/13/2008
7361869Method for the production of an electrically conductive resistive layer and heating and/or cooling device
An electrically conductive resistive layer (26) is produced by thermally spraying an electrically conductive material (18) onto the surface of a non-conductive substrate (12). Initially, the material layer (14) arising therefrom has no de...
04/22/2008
7335980Hardmask for reliability of silicon based dielectrics
The present invention provides a hardmask that is located on a surface of a low k dielectric material having at least one conductive feature embedded therein. The hardmask includes a lower region of a hermetic oxide material located adjacent to the low k dielectric ...
02/26/2008
7285226Method for fabricating a fluid ejection device
A method of fabricating a fluid ejection device comprises providing a barrier layer which defines fluidic spaces. The fluidic spaces defined by the barrier layer are filled with filler. A throughway is etched through the substrate. The filler is removed from the flu...
10/23/2007
7273564Method and apparatus for fabricating flat panel display
A method of fabricating a flat panel display device including: coating an etch-resist on a thin film; forming a soft mold having a groove and a protrusion for patterning the thin film; treating an end surface of the protrusion; applying the soft mold to the etch-res...
09/25/2007
7270758Method to improve ability to perform CMP-assisted liftoff for trackwidth definition
A method is presented for fabricating a read head having a read head sensor and a hard bias/lead layer which includes depositing a strip of sensor material in a sensor material region, and depositing strips of fast-milling dielectric material in first and second fas...
09/18/2007
7258966Method for manufacturing a diffuser for a backlight module
A method for manufacturing a diffuser for a backlight module is disclosed. The method includes providing a transparent substrate; forming a first transparent photoresist layer on the transparent substrate; spreading a plurality of masking particles on the first tran...
08/21/2007
7258810In-situ oxidized textured surfaces for prosthetic devices and method of making same
A textured surface and oxidation layer coating on a metallic material is accomplished through the chemical and/or electrochemical etching of the surface to modify the surface texture and an in-situ oxidation procedure. The surface is useful for the fabrication of pr...
08/21/2007
7232917Cyclic fluorine compounds, polymerizable fluoromonomers, fluoropolymers, and resist materials containing the fluoropolymers and method for pattern formation
The present invention provides a fluorine-containing cyclic compound represented by general formula (1): wherein R1 represents a halogen atom, and R2 and R3 each represents hydrog...
06/19/2007
7223700Method for fabricating fine features by jet-printing and surface treatment
A method and system for masking a surface to be etched is described. The method includes the operation of heating a phase-change masking material and using a droplet source to eject droplets of a masking material for deposit on a thin-film or other substrate surface...
05/29/2007
7204735Production apparatus and method of producing a light-emitting device by using the same apparatus
The present invention relates to a method for manufacturing a light-emitting device. At least one of a light-emitting film forming step, a conductive film forming step and an insulating film forming step is carried out while holding a substrate in a manner that an a...
04/17/2007
7202596Electron emitter and process of fabrication
An electron emitter is formed by in situ growth from the vapor on catalyst clusters that are adhered by an adhesion layer to a conductive electrode. The emitter comprises hemispheroidal nanofiber clusters that emit electrons at low field strengths and high current d...
04/10/2007
7173339Semiconductor device having a substrate an undoped silicon oxide structure and an overlaying doped silicon oxide structure with a sidewall terminating at the undoped silicon oxide structure
An etchant including C2HxFy, where x is an integer from two to five, inclusive, where y is an integer from one to four, inclusive, and where x plus y equals six, etches doped silicon dioxide with selectivity over both undoped silicon...
02/06/2007
7157848Field emission backlight for liquid crystal television
A field emission device for use as a backlight of a liquid crystal display comprises a conductive anode having a light-emitting layer and a cathode separated from the anode by a spacer. The cathode comprises nanofiber electron emitters. For example, the nanofiber el...
01/02/2007
7128842Polyimide as a mask in vapor hydrogen fluoride etching
A layer of polyimide or polysilicon is used as a mask in vapor hydrogen fluoride etching. Both non-photosensitive and photosensitive type polyimide may be used. A non-photosensitive polyimide mask requires the use of photoresist for patterning with a lithographic ma...
10/31/2006
7108819Process for fabricating high aspect ratio embossing tool and microstructures
A tool for embossing high aspect ratio microstructures is provided, wherein the microstructures provide decreased surface reflection and increased transmission through an optical component even at high incident angles. The tool is fabricated by a process that compri...
09/19/2006
7041229Patterned product and its manufacturing method
To provide a manufacturing method for simultaneously forming machined patterns different in dept in a small number of steps and a machined pattern having a U-shaped sectional form in which depths and widths are smoothly changed. Mask patterns 62 respectively ...
05/09/2006
7033516Inexpensive fabrication of large-area pixel arrays for displays and sensors
A method and system for fabricating an array of electronic devices, typically a display or sensor is described. In the method, a droplet source ejects droplets of a masking material for deposit on a thin film or substrate surface to mask an element of the array of e...
04/25/2006
7029592Coated beads and process utilizing such beads for forming an etch mask having a discontinuous regular pattern
A process for forming an etch mask having a discontinuous regular pattern utilizes beads, each of which has a substantially unetchable core covered by a removable spacer coating. Beads are dispensed as a hexagonally packed monolayer onto a thermo-adhesive layer. Fol...
04/18/2006
7020959Method of making conductive stud for magnetic recording devices
Methods of making a magnetic recording device with an “anchored” conductive stud which is securely attached within its surrounding insulator materials. The conductive stud is formed over a conductive layer which is coupled to or part of a read or a write head el...
04/04/2006
7022535Thin film forming device, method of forming a thin film, and self-light-emitting device
Measure of forming an EL layer by selectively depositing through evaporation a material for forming the EL layer at a desired location is provided. When a material for forming an EL layer is deposited, a mask (113) is provided between a sample boat (111
04/04/2006
7005079Manufacturing method of light-guiding apparatus for using in backlight of liquid crystal display
Due to lights with different wavelengths having different indexes of refraction in a liquid crystal, a retardation between lights with different wavelengths occurs and causes the problem of viewing angle of the liquid crystal display. The present invention provides ...
02/28/2006
6984335Redundantly constrained laminar structure as weak-link mechanisms
Redundantly constrained laminar structures as weak-link mechanisms and a novel method for manufacturing the redundantly constrained laminar structures as weak-link mechanisms are provided. The method for producing the redundantly constrained laminar structures as we...
01/10/2006
6972261Method for fabricating fine features by jet-printing and surface treatment
A method and system for masking a surface to be etched is described. The method includes the operation of heating a phase-change masking material and using a droplet source to eject droplets of a masking material for deposit on a thin-film or other substrate surface...
12/06/2005
6951623Radiation curable maskant and line sealer for protecting metal substrates
The invention provides a coated metal substrate comprising a metal substrate having an outer surface, a maskant film adhered to at least a portion of the outer surface of the metal substrate, the maskant film having a pattern of scribed lines therein, and a line sea...
10/04/2005
6872321Direct positive image photo-resist transfer of substrate design
A method of forming a photo-resist image on a substrate, such as a conductive film. The method provides that a photo-resist image is printed directly onto the conductive film, such as by using an ink jet printer. Specifically, a CAD image may be sent from a computer...
03/29/2005
6872320Method for printing etch masks using phase-change materials
A method and system for masking a surface to be etched is described. A droplet source ejects droplets of a masking material for deposit on a thin-film or other substrate surface to be etched. The temperature of the thin-film or substrate surface is controlled such t...
03/29/2005
6808645Susceptor and surface processing method
A susceptor provided as a base of a liquid crystal substrate in a vacuum chamber of a thin film deposition apparatus is provided. The susceptor includes a susceptor main body and a stepped portion provided on the susceptor main body to support the substrate from the...
10/26/2004
6780491Microstructures including hydrophilic particles
A substrate is placed on a charging surface, to which a first voltage is applied. Etch-resistant dry particles are placed in a cup in a nozzle to which a second voltage, less than the first voltage, is applied. A carrier gas is directed through the nozzle, which pro...
08/24/2004
6679998Method for patterning high density field emitter tips
A method of forming a pattern in a layer of material on a substrate, comprising providing a plurality of spheres, covering the layer on the substrate with the plurality of spheres to form a mask, reducing the diameter of at least one sphere of the plurali...
01/20/2004
6676845Coated beads and process utilizing such beads for forming an etch mask having a discontinuous regular pattern
A process for forming an etch mask having a discontinuous regular pattern utilizes beads, each of which has a substantially unetchable core covered by a removable spacer coating. Beads which have a core and a spacer coating are dispensed as a hexagonally-...
01/13/2004
6678453High aspect ratio patterning of glass film
A relatively facile, inexpensive method for patterning a layer of glass or a substrate involves patterning a seed material containing a nucleating agent adjacent a layer of thermally crystallizable glass and heat treating the seed material and the layer o...
01/13/2004
6627095Magnetic recording disk and method of manufacturing same
A magnetic recording disk having on its surface a texture structure of fine surface irregularities with reduced variations, which is suitable for high-density magnetic recording, and a method of manufacturing such a magnetic recording disk are provided. A...
09/30/2003
6565761Process and device for producing a printing tool
A process and a device for producing a printing tool in which a mask for sectional chemical passivation is applied to the surface of a workpiece that is to be subjected to a chemical surface working. In accordance with one embodiment, the process for prod...
05/20/2003
6473966Method of manufacturing ink-jet printer head
A printer head substrate having a silicon substrate on which heat generating elements and partitions are formed and an orifice plate which adhered to the partitions is placed on a stage of a helicon-wave dry etching system. Helicon-wave dry etching is per...
11/05/2002
6471882Process for producing head slider
A process for producing a head slider wherein a floating surface is formed on a slider substrate by photolithography. The process for the production of a head slider has a step of forming, on a slider substrate by photolithography, a patterned floating su...
10/29/2002
6464890Method for patterning high density field emitter tips
A method of forming a pattern in a layer of material on a substrate, comprising providing a plurality of spheres, covering the layer on the substrate with the plurality of spheres to form a mask, reducing the diameter of at least one sphere of the plurali...
10/15/2002
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