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Class 216/100 - Substrate contains elemental metal, alloy thereof, or metal compound


Subclass of Class 216 - Etching a substrate: processes
Definition: Process wherein the substrate contains metal in elemental,
No. of patents: 533
Last issue date: 03/27/2012


1                      
NumberTitleIssue Date
8142675Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methods
A composition for chemical-mechanical planarization comprises periodic acid and an abrasive present in a combined amount sufficient to planarize a substrate surface having a feature thereon comprising a noble metal, noble metal alloy, noble metal oxide, or any combi...
03/27/2012
7658860Metal pattern and process for producing the same
A metal pattern of the present invention is a metal pattern (13′) formed on a surface of a substrate by etching, and a monomolecular film containing fluorinated alkyl chains (CF3(CF2)n—, where n represents an integer) is f...
02/09/2010
7510668Low cost antenna array fabrication technology
Methods are provided for producing large volumes of small antenna arrays. In one embodiment, the method comprises the steps of creating an antenna array pattern as a computer file, printing the created pattern onto the surface of a suitable transfer paper, placing t...
03/31/2009
7465408Solutions for controlled, selective etching of copper
Disclosed are methods and systems of etching copper containing materials so that they have smooth and/or planar surface. In this connection, the systems and methods employ two different solutions to accomplish the etching. The first solution oxidizes the surface of ...
12/16/2008
7442323Potassium monopersulfate solutions
A composition comprising a solution of potassium monopersulfate having an active oxygen content of from about 3.4% to about 6.8% and a process for its preparation including neutralization with an alkaline material is disclosed. ...
10/28/2008
7429337Method for removing at least one area of a layer of a component consisting of metal or a metal compound
The invention relates to a method for removing an area of a layer of a component consisting of metal or a metal compound. According to prior art, corrosion products of a component are removed in a first step by applying a molten mass or by heating in a voluminous po...
09/30/2008
7427360Process and ink for making electronic devices
A process for making an electronic device comprising a dielectric substrate laminated with an electrically conductive metal or alloy which comprises applying a non-aqueous etch-resistant ink by ink jet printing to selected areas of the metal or alloy, exposing the e...
09/23/2008
7425278Process of etching a titanium/tungsten surface and etchant used therein
An etchant which includes an aqueous solution of between about 30% and about 38% concentrated hydrogen peroxide, said percentages being by volume, based on the total volume of the solution; between about 3.5 ml and about 20 ml per liter of phosphoric acid; and an am...
09/16/2008
7422696Multicomponent nanorods
Multicomponent nanorods having segments with differing electronic and/or chemical properties are disclosed. The nanorods can be tailored with high precision to create controlled gaps within the nanorods or to produce diodes or resistors, based upon the identities of...
09/09/2008
7387740Method of manufacturing metal cover with blind holes therein
An exemplary method of manufacturing a metal cover (1) with blind holes (3) therein includes: step (60), preparing a metal substrate; step (62), covering the metal substrate with a protective film formed by electrophoretic deposition; ste...
06/17/2008
7378028Method for fabricating patterned magnetic recording media
A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlyin...
05/27/2008
7364667Slurry for CMP and CMP method
A CMP slurry comprising polishing abrasives containing mixture abrasives of silica and alumina is used. In CMP using the slurry comprising mixture abrasives of silica and alumina as polishing abrasives, a down force-dependency of a polishing rate is high and an incr...
04/29/2008
7358196Wet chemical treatment to form a thin oxide for high k gate dielectrics
Described herein are methods of forming a thin silicon dioxide layer having a thickness of less than eight angstroms on a semiconductor substrate to form the bottom layer of a gate dielectric. A silicon dioxide layer having a thickness of less than eight angstroms m...
04/15/2008
7358174Methods of forming solder bumps on exposed metal pads
A method of forming an electronic structure may include providing a substrate having a metal pad thereon. A conductive barrier layer may be formed on a first portion of the metal pad, and a second exposed portion of the metal pad may be free of the conductive barrie...
04/15/2008
7354733Method for sorting and separating living cells
We disclose methods of sorting or separating mixtures of living cells (e.g., eukaryotic, prokaryotic, mammalian, pathogenic, bacterial, viral, etc.). We perform our methods by activating cell-selective photophoric labels, which photosensitize and chemically reduce a...
04/08/2008
7354522Substrate etching method for forming connected features
A method of etching a substrate and an article(s) formed using the method are provided. The method includes providing a substrate; coating a region of the substrate with a temporary material having properties that enable the temporary material to remain substantiall...
04/08/2008
7344998Wafer recovering method, wafer, and fabrication method
In order to use an etching solution of less complicated composition for recovering used wafers, embodiments of the present invention provide a recovering method, and also provide a kind of wafer, which is used as a process control wafer or dummy wafer, and fabricati...
03/18/2008
7338243Thread-cutting screw
A thread-cutting screw (1) serves for being screwed into the bore-hole wall (1a) of a bore-hole (1b). It comprises a substantially cylindrical core (2) of metal which has a central longitudinal axis (4), a thread (...
03/04/2008
7329365Etchant composition for indium oxide layer and etching method using the same
An etchant for removing an indium oxide layer includes sulfuric acid as a main oxidizer, an auxiliary oxidizer such as H3PO4, HNO3, CH3COOH, HClO4, H2O2, and a Compound A that is obtained b...
02/12/2008
7316784Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof
A method of patterning a transparent conductive film adaptive for selectively etching a transparent conductive film without any mask processes, a thin film transistor for a display device using the same and a fabricating method thereof are disclosed. In the method o...
01/08/2008
7316783Method of wiring formation and method for manufacturing electronic components
A method of wiring formation includes forming a feeder film partially on a substrate, forming on the substrate a plating base film via a physical film making method so that the plate base film partially overlaps the feeder film, forming a plated wiring on the platin...
01/08/2008
7311857Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device
An exemplary etching composition includes about 0.1 to 8% by weight of hydrogen fluoride, about 10 to 25% by weight of ammonium fluoride, about 0.0001 to 3% by weight of a non-ionic polymer surfactant, and water. Using the composition in a wet etching process, an ox...
12/25/2007
7309447Method for making a microelectronic package using pre-patterned, reusable mold and method for making the mold
A method for making a reusable mold for forming a microelectronic element package. The method including the steps of removing material from portions of a base to form recesses in the base and then depositing a mask material on at least some portions of the base....
12/18/2007
7306637Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
The invention provides chemical-mechanical polishing systems, and methods of polishing a substrate using the polishing systems, comprising (a) an abrasive, (b) a liquid carrier, and (c) a positively charged polyelectrolyte with a molecular weight of about 15,000 or ...
12/11/2007
7291283Combined wet etching method for stacked films and wet etching system used for same
A combined wet etching method for stacked films which is capable of performing etching processes in a collective manner while controlling an amount of side-etching on each of stacked films and of making uniform side edges. In the wet etching method, two or more type...
11/06/2007
7285229Etchant and replenishment solution therefor, and etching method and method for producing wiring board using the same
An etchant of the present invention includes an aqueous solution containing hydrochloric acid, nitric acid, and a cupric ion source. An etching method of the present invention includes bringing the etchant into contact with at least one metal selected from nickel, c...
10/23/2007
7284462Flexible die and method for its manufacture
To obtain a push-cutting blade 2, a flexible base 1 and a projection (trapezoid-section projection 21) protruding from this base are formed by etching. Then, a lateral surface or surfaces of the projection 21 is cut into a vertical projec...
10/23/2007
7276175Semiconductor device fabrication method
A semiconductor device fabrication method comprises (1) forming a patterned mask layer on an oxide layer of a Mn-containing perovskite type oxide; (2) heat-treating the oxide layer; and (3) patterning the oxide layer with an etching solution containing at least one ...
10/02/2007
7270762Polishing compositions for noble metals
The polishing composition of this invention is useful for chemical-mechanical polishing of substrates containing noble metals such as platinum and comprises up to about 50% by weight of a adjuvant wherein said adjuvant is s elected from a group consisting of a metal...
09/18/2007
7264742Method of planarizing a surface
A method for removing at least a portion of a structure, such as a layer, film, or deposit, including ruthenium metal and/or ruthenium dioxide includes contacting the structure with a material including ceric ammonium nitrate. A material for removing ruthenium metal...
09/04/2007
7264740Process for increasing strength, flexibility and fatigue life of metals
A method is described for the surface treatment of metals to improve the strength, flexibility and fatigue life of the metal, which in a preferred embodiment includes the steps of thoroughly cleaning and drying the metal surface, etching the surface of the metal to ...
09/04/2007
7261828Bumping process
A method of forming a plurality of bumps over a wafer mainly comprises providing the wafer having a plurality of bonding pads formed thereon, forming an under bump metallurgy (UBM) layer over the bonding pads wherein the UBM layer includes an adhesive layer, for exa...
08/28/2007
7258808High-power ball grid array package, heat spreader used in the BGA package and method for manufacturing the same
A high-power BGA includes a printed circuit board with a through hole, connection pads formed on the bottom of the printed circuit board, matrix solder balls surrounding the through hole and adjacent to the connection pads, a heat spreader on the top surface of the ...
08/21/2007
7253519Chip packaging structure having redistribution layer with recess
A chip structure comprising a chip, a redistribution layer, a second passivation layer and at least a bump is provided. The chip has a first passivation layer and at least a bonding pad. The first passivation layer exposes the bonding pad and has at least a recess. ...
08/07/2007
7244367Metal alloy elements in micromachined devices
A micromechanical device is provided, which includes at least one flexible member formed from an alloy, where the alloy is made up of one or more noble metals and one or more alloying elements, wherein each of the alloying elements has an equilibrium solid solubilit...
07/17/2007
7241394Process of fabricating polymer sustained microelectrodes
A process for fabricating a microelectrode is described that includes: a) providing a substrate comprising at least one polymer micro-ridge, where the polymer micro-ridge comprises an upper surface and two walls, and the two walls form an angle with a lower surface;...
07/10/2007
7238291Method for removing oxides from a Ge semiconductor substrate surface
This invention relates to a method for removing oxides from the surface of a Ge semiconductor substrate comprising the step of subjecting the surface to a Ge oxide etching solution characterized in that the Ge oxide etching solution removes Ge oxides and Ge sub-oxid...
07/03/2007
7232478Adhesion promotion in printed circuit boards
An adhesion promotion process and composition for enhancing adhesion between a copper conducting layer and a dielectric material during manufacture of a printed circuit board. The composition contains a corrosion inhibitor, an inorganic acid, and an alcohol which is...
06/19/2007
7232528Surface treatment agent for copper and copper alloy
The surface treatment agent for copper and copper alloys contains hydrogen peroxide, a mineral acid, an azole compound, silver ion and a halide ion. The surface treatment agent for copper and copper alloys is useful in the production of printed wiring boards in elec...
06/19/2007
7229569Etching reagent, and method for manufacturing electronic device substrate and electronic device
The present invention provides an etching agent that is able to etch a Cu film by a simple chemical etching method such as an immersion method when the low resistance Cu film is used for a wiring material, while allowing time-dependent changes of the etching rate to...
06/12/2007
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