Famous Patents
British merchant Peter Durand invented the tin can in 1810.
PatentStorm News
Make the Most of Our Site
See this month's Top Inventors and Most Cited Patents.
Stay on top of the latest innovations by subscribing to an RSS feed.
Registered users: Manage your profile.
| Number | Title | Issue Date |
| 8042697 | Low thermal mass semiconductor wafer support A support for a semiconductor wafer includes a plate having a support surface for supporting the wafer and a recessed surface spaced from the support surface and spaced from the wafer. A plurality of holes extends from the recessed surface, and the support surface i... | 10/25/2011 |
| 8033401 | Wafer guide for preventing wafer breakage in semiconductor cleaning apparatus A wafer guide for preventing a wafer breakage in a semiconductor cleaning apparatus includes a lower supporter, side supporters, fixing units and stoppers. The lower supporter is provided with a plurality of slots formed with the same interval in a length direction ... | 10/11/2011 |
| 7971734 | Wafer boat Wafer boat for holding semiconductor wafers in a spaced vertical arrangement during processing, said wafer boat comprising a plurality of vertically spaced holding positions for receiving and supporting said wafers in a substantially horizontal orientation, wherein ... | 07/05/2011 |
| 7874434 | Substrate carrying tray A substrate carrying tray capable of horizontally placing a substrate thereon and enabling a plurality of trays to be stacked on each other, comprising an upper contact part coming into contact with one tray disposed on the upper side of the tray when the plurality ... | 01/25/2011 |
| 7748542 | Batch deposition tool and compressed boat Aspects of the invention include methods and apparatus for processing a batch of substrates. In one embodiment, a compressed substrate boat is configured to reduce pumping volume in a batch processing chamber. The compressed substrate boat comprises a stationary sub... | 07/06/2010 |
| 7661544 | Semiconductor wafer boat for batch processing A boat is provided for stacking semiconductor wafers vertically in processes in which low friction deposits may coat wafer supporting surfaces. In carbon processes, for example, low friction coatings can form that allow the wafers to slip sideways in the boat, leavi... | 02/16/2010 |
| 7458469 | Substrate transfer apparatus and method, and storage medium In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms... | 12/02/2008 |
| 7442038 | Heat treatment jig for semiconductor silicon substrate This invention provides a heat treatment jig for semiconductor silicon substrates, which, in respective heat treatment of hydrogen annealing or argon annealing, can handle enlargement of the diameter of wafers to be treated and can also prevent slipping and dislocat... | 10/28/2008 |
| 7393207 | Wafer support tool for heat treatment and heat treatment apparatus The present invention provides a wafer support tool for heat treatment easy in working and capable of realizing reduction in cost without generating damages or slip dislocations that would be otherwise caused by high temperature heat treatment and a heat treatment a... | 07/01/2008 |
| 7381673 | Composite material, wafer holding member and method for manufacturing the same A composite material according to the present invention, is composed of SiC, SiO2, at least one out of Al and Si, with He leak rate of 1.3×10−10 Pa·m3/sec or below, thereby providing a composite material, which has a higher vacuu... | 06/03/2008 |
| 7367773 | Apparatus for combining or separating disk pairs simultaneously Various methods and apparatus are provided for merging and demerging pairs of disks. In one embodiment, pairs of merged disks are first separated and then transferred to separate cassettes such that all of the disks in the separate cassettes are oriented in the same... | 05/06/2008 |
| 7357258 | Thin-plate supporting container The attaching-and-detaching operation of a lid unit, and the operation of taking in and out semiconductor wafers stored in a container body are facilitated. Thin-plate supporting units for supporting semiconductor wafers are provided in the container body of a thin-... | 04/15/2008 |
| 7337792 | Liquid processing apparatus and liquid processing method A cleaning apparatus 1 includes a foup loading/unloading part 2 for mounting foups F each accommodating a plurality of wafers W at intervals of a constant pitch (normal pitch), a rotor 34 capable of holding the wafers W at half the normal pitch ... | 03/04/2008 |
| 7334691 | Glass substrate cassette A glass substrate cassette includes a bottom structure, a top structure, and a pair of side supports affixed to space the bottom structure and the top structure for forming an accommodation space in between. A plurality of support plates are horizontally affixed bet... | 02/26/2008 |
| 7334690 | Substrate supporting rod and substrate cassette using the same A substrate-supporting rod (4) includes a resin body (41) and a metal rod (43). The resin body (41) includes a body portion (411) being cylinder-shaped and having a first through hole (413) in a direction of the axis thereof... | 02/26/2008 |
| 7331780 | Heat treatment jig for semiconductor wafer A heat treatment jig by the invention comprising: the diameter of a disk-type structure being 60% or more of that of loaded semiconductor wafers; the thickness being 1.0 mm or more but 10 mm or less; the surface roughness Ra of 0.1 μm or more but 100 μm or less at... | 02/19/2008 |
| 7329947 | Heat treatment jig for semiconductor substrate When a two-division structure heat treatment jig for semiconductor substrate that includes a silicon first jig that comes into direct contact with a semiconductor substrate that is heat treated and supports the semiconductor substrate, and a second jig (holder) that... | 02/12/2008 |
| 7325692 | Cassette having separation plates for storing a plurality of semiconductor wafers A cassette for storing a plurality of semiconductor wafers with a space in the vertical direction has a plurality of support plates which are provided spaced apart from one another in the vertical direction. A receiving cut-out having a shape corresponding to the sh... | 02/05/2008 |
| 7322098 | Method of simultaneous two-disk processing of single-sided magnetic recording disks Various methods and apparatus for simultaneously processing two single-sided hard memory disks is provided. Disks are positioned in pairs, with one surface of one disk positioned adjacent one surface of the second disk, with the disk surfaces touching or with a slig... | 01/29/2008 |
| 7316315 | Thin plate storage container and lid having at least one thin plate supporting member A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container bod... | 01/08/2008 |
| 7316325 | Substrate container A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparen... | 01/08/2008 |
| 7299927 | Stackable wafer container with raised handle and ribs A wafer container comprising a base and a cover that nest together. The cover includes tabs on a lower portion that engage notches on the frame. The cover can be combined with the base without indexing to a precise opening on the frame. A handle on the cover enables... | 11/27/2007 |
| 7282889 | Maintenance unit for a sensor apparatus Presented are methods, systems, and apparatuses for managing and maintaining an electronic device such as a sensor apparatus. ... | 10/16/2007 |
| 7270240 | Device for accomodating substrates The present invention is directed to a device for retaining substrates (S), such as wafers or silicon substrates for the production of photovoltaic elements. The device includes opposing walls (1) that are interconnected by at least two rod-like carrier eleme... | 09/18/2007 |
| 7270137 | Apparatus and method of securing a workpiece during high-pressure processing An apparatus is disclosed for performing high-pressure processing of a workpiece having a top face and a bottom face. The apparatus comprises a processing chamber and a holder for securing the workpiece within the processing chamber so that a substantial portion of ... | 09/18/2007 |
| 7267841 | Method for manufacturing single-sided sputtered magnetic recording disks An information-storage media is provided that includes: (a) a substrate disk 312 having first and second opposing surfaces; (b) a first interface layer 304 on the first surface, the first interface la... | 09/11/2007 |
| 7252199 | Disk cassette system A cassette system for disks to be manufactured into hard disks for computer memory storage includes a pair of end portions and a pair of side wall portions spanning between the end portions, defining a disk receiving region. The side wall portions together define a ... | 08/07/2007 |
| 7246708 | Adjustable cassette for substrates A cassette (1) for holding and transporting substrates includes a chassis (11), a pair of supporting walls (30) facing each other, a pair of first pivot elements (40), and a pair of second pivot elements (42). The first and second ... | 07/24/2007 |
| 7240680 | Substrate processing apparatus A substrate processing apparatus includes a rotor 45 for rotating a plurality of wafers W paralleled each other at appropriate intervals. While rotating the wafers W by the rotor 45, a chemical liquid is supplied to the wafers W for their processing. T... | 07/10/2007 |
| 7241141 | Low contact SiC boat for silicon nitride stress reduction A vertical wafer boat for supporting at least one semiconductor wafer, formed by a process includes forming a plurality of angled support grooves into a plurality of support members with a groove-making machine. Each support member extends along a longitudinal axis ... | 07/10/2007 |
| 7232037 | LCD glass cassette An LCD glass cassette to store glasses to be mounted on an LCD. The LCD glass cassette has: a side frame and a rear frame, respectively having a side supporter and a rear supporter to respectively support and supporting a side edge and a rear edge of the glass; and ... | 06/19/2007 |
| 7225934 | Cassette for receiving glass substrates Disclosed is a cassette for receiving glass substrates therein. The cassette includes lower and upper rectangular plates, support bars vertically installed between the lower and upper rectangular plates and having a plurality of first gap maintenance rings aligned l... | 06/05/2007 |
| 7219802 | Thin wafer insert A plastic insert (20) is configured to provide support of thin wafers (49) in wafer carriers (45) configured to provide peripheral wafer support. The invention includes the insert, the insert in combination with a wafer carrier, and the, methods... | 05/22/2007 |
| 7216766 | Thin plate storage container with handled supporting member A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container bod... | 05/15/2007 |
| 7210925 | Heat treatment jig for silicon semiconductor substrate A heat treatment jig for supporting silicon semiconductor substrates by contacting, being loaded onto a heat treatment boat in a vertical heat treatment furnace, comprises; the configuration of a ring or a disc structure with the wall thickness between 1.5 and 6.0 m... | 05/01/2007 |
| 7207763 | Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a reaction tube for providing a sealed process space and a dual boat and w... | 04/24/2007 |
| 7206663 | Calibration cassette pod for robot teaching and method of using A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top pane... | 04/17/2007 |
| 7201280 | Wafer boat for consolidation of porous thin layer A wafer boat for consolidation of a porous oxide layer structure is provided. The wafer boat includes at least one support plate including: a first plate for supporting a substrate with the porous oxide layer by face-to-face contact; a second plate radially extendin... | 04/10/2007 |
| 7188736 | Structure for racking substrates A structure for racking substrates includes first to fourth main legs isolated from one another at intervals wider than widths of both long sides and both short sides of a substrate, first to fourth protrusions respectively protruded from the first to fourth main le... | 03/13/2007 |
| 7180709 | Information-storage media with dissimilar outer diameter and/or inner diameter chamfer designs on two sides A single-sided magnetic hard disk 200 is provided that includes opposing first and second sides 300 and 308 having opposing first and second chamfers 408 and 412, respectively. The first chamfer 408 is dissimilar (or differe... | 02/20/2007 |
