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| Number | Title | Issue Date |
| 7389639 | Water recovery and purification A system for recovering and purifying water from a gas stream may include, a gas stream purification unit for purifying the gas stream, a water separation unit for separating water from the purified gas stream, and a water purification unit for purifying the water s... | 06/24/2008 |
| 7378025 | Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered ... | 05/27/2008 |
| 7320756 | Method and apparatus for treatment of feedwaters by membrane separation under acidic conditions A process for treatment of water via membrane separation equipment. A feedwater is maintained or adjusted to a pH of 4.3 or lower, and fed to a membrane separation system. In this manner, species such as TOC become more ionized, and (a) their rejection by the membra... | 01/22/2008 |
| 7305275 | Material supply system in semiconductor device manufacturing plant In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to... | 12/04/2007 |
| 7258801 | System and method for reducing deionized water consumption A system and method are provided for reducing DI water consumption by delivering the DI water at an elevated processing temperature when demanded. The DI water is passed through a heater for heating the DI water to a processing temperature in a single pass. The DI w... | 08/21/2007 |
| 7122149 | Apparatus and method for continuous depyrogenation and production of sterile water for injection A fluid processor, suitable for the production of sterile water for injection, having a processor assembly and a process control system comprising a pump, a flow splitter, flow restrictors and a pressure relief valve. In a preferred embodiment, the processor assembl... | 10/17/2006 |
| 7049615 | Portable ultraviolet water purifier A portable ultraviolet water purifier is disclosed which has an outer housing defining a water chamber with a coupling for attachment to a faucet an inlet and an outlet with an ultraviolet light source therein. ... | 05/23/2006 |
| 7018529 | System for producing ultrapure water The ultrapure water producing system produces ultrapure water with high purity and remarkably low content of metals even just after restart of operation thereof. Water sent through the pump 3 or 4 into a line 8 flows through a heat exchanger ... | 03/28/2006 |
| 6991733 | Process for removing organics from ultrapure water In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is appl... | 01/31/2006 |
| 6977047 | Method and system for the manufacture of pharmaceutical water A method is provided for manufacturing pharmaceutical water by means of distillation and sanitizing the equipment used in said manufacturing. The method comprises the removal of suspended solids from chlorine-containing water by means of a multimedia filter, followe... | 12/20/2005 |
| 6951609 | High-purity water producing apparatus A module filled with an organic porous ion exchanger is placed midway on a pipe for transporting high-purity water to be supplied to a point-of-use. As the organic porous ion exchanger is used an organic porous ion exchanger having a three-dimensional mesh structure... | 10/04/2005 |
| 6949192 | Apparatus for producing USP or WFI purified water An improved water purification system for production of USP purified water and/or USP water for injection include backwashable, chlorine tolerant microfilter or ultrafilter for initial filtration of the feed water (10). The filtrate from the filter (18... | 09/27/2005 |
| 6929748 | Apparatus and method for continuous electrodeionization A method of water purification including the steps of passing source water through at least one reverse osmosis unit to produce a product water and reject water, directing the product water from a reverse osmosis unit into the dilution stream of a continuous electro... | 08/16/2005 |
| 6884344 | Hydrogen-dissolved water production apparatus A degassing device (10), a hydrogen dissolving device (12), and a palladium catalyst column (17) are provided in that order downstream of a high-purity water production device (1), and an impurity removal device (19) is connected t... | 04/26/2005 |
| 6884356 | Low-level boron detection and measurement Methods and apparatus (50) are disclosed for accurately measuring low concentrations of boron in deionized water utilizing the chemical reaction of boric acid with a polyol by injecting very small plugs of concentrated polyol into streams of boron containing ... | 04/26/2005 |
| 6884359 | Apparatus and method for controlling resistivity of ultra pure water An apparatus for controlling the resistivity of ultra pure water, including a housing to house a gas permeable membrane, an inlet for untreated ultra pure water which communicates with an ultra pure water path, and an outlet for resistivity-controlled ultra pure wat... | 04/26/2005 |
| 6827857 | Control valve and water purification method The present invention consists of an apparatus and method for supplying purified water to a faucet or other apparatus for use from a purification loop maintaining water in constant motion. The apparatus allows the user to select and withdraw the amount of water need... | 12/07/2004 |
| 6808608 | Water purifier and method An apparatus for removing charged contaminants from a water stream. The apparatus can be figured to provide the decontaminated water stream to an analytical system. Methods of use of the same are also disclosed. ... | 10/26/2004 |
| 6776172 | Method of cleaning ultrapure water supply system A cleaning method is provided for an ultrapure water supply system having an ultrapure water production apparatus connected to a point of use of ultrapure water via a passage. In the cleaning method, a basic solution, for example, is circulated through the system to... | 08/17/2004 |
| 6733661 | Ultrapure water producing apparatus It is an object of the present invention to provide an ultrapure water producing apparatus with reduced problems resulting from impurities generated after replacement of unit apparatuses. A TOC-UV (1), a CP (2) and a UF film (3) are provi... | 05/11/2004 |
| 6719745 | Water purification pack An apparatus and methods are disclosed for purifying fluid, such as potable water, to quality levels suitable for medical application, particularly to applications involving injection of the fluid into a human body. The apparatus comprises a portable purification pa... | 04/13/2004 |
| 6716802 | Polishing systems, methods of polishing substrates, and methods of preparing liquids for semiconductor fabrication processes The invention encompasses polishing systems for polishing semiconductive material substrates, and encompasses methods of cleaning polishing slurry from semiconductive substrate surfaces. In one aspect, the invention includes a method of cleaning a polishing slurry f... | 04/06/2004 |
| 6679988 | Apparatus for producing USP or WFI purified water An improved water purification system for production of USP purified water and/or USP water for injection include backwashable, chlorine tolerant microfilter or ultrafilter for initial filtration of the feed water (10). The filtrate from the filter (18) i... | 01/20/2004 |
| 6663722 | Method of cleaning fluorine-containing rubber molded article for semiconductor production apparatuses and cleaned molded article To provide a novel and effective cleaning method which can give a cleaned fluorine-containing rubber molded article for semiconductor production apparatuses. The method of cleaning the fluorine-containing rubber molded article for semiconductor production... | 12/16/2003 |
| 6649065 | Bromine biocide removal A system and method are provided which removes bromine biocide used in effluent process streams without the use of chemicals or complex mechanical systems. In particular, the system and method of the present invention remove bromine biocide by photodissoc... | 11/18/2003 |
| 6648307 | Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized A method for increasing the quantity of a gas, e.g., ozone, dissolved in a liquid, e.g., ultrapure deionized water, is provided. The gas to be dissolved is introduced to the liquid under pressure and the resulting admixture delivered to the end-use statio... | 11/18/2003 |
| 6585890 | Process for producing sterile water for injection from potable water By treating potable water at a temperature of at least 230° C. (446° C.) and at a pressure at least equal to the pressure of saturated steam at said temperature, can produce pyrogen-free water using treatment times of 0.05 to 5 seconds or less. The addi... | 07/01/2003 |
| 6582385 | Hemofiltration system including ultrafiltrate purification and re-infusion system A hemofiltration system is provided in which ultrafiltrate is purified by reverse osmosis for reinfusion. Non-sterile infusate concentrate is dialyzed into the purified ultrafiltrate and combined with cleared blood which is returned to the patient. In ano... | 06/24/2003 |
| 6581375 | Apparatus and method for the recovery and purification of water from the exhaust gases of internal combustion engines A method for the recovery and purification of water from the exhaust gases of an internal combustion engine is disclosed. An apparatus for carrying out that method is also disclosed. In this method, the water is condensed out from the vehicle's exhaust (f... | 06/24/2003 |
| 6579445 | System for the production of laboratory grade ultrapure water There is disclosed a system capable of purifying water to a laboratory grade level that uses redox media, high energy catalytic activated carbon, ultraviolet radiation and high purity ion exchange media in series filtration. The system produces purified w... | 06/17/2003 |
| 6562205 | High-temperature ultrapure water production apparatus and liquid medicine preparation apparatus equipped with the production apparatus A high-temperature ultrapure water production apparatus comprises an evaporator 22 for treating pretreated water obtained by a pretreating system or primary pure water obtained by a primary pure water system 21 to prepare ultrapure water having a high tem... | 05/13/2003 |
| 6537456 | Method and apparatus for high efficiency reverse osmosis operation A process for treatment of water via membrane separation to remove hardness and non-hydroxide alkalinity by simultaneous removal in a weak acid cation exchange resin. The process includes ionization of sparingly ionizable components, such as silica, by ad... | 03/25/2003 |
| 6494223 | Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas A wet cleaning apparatus can remove trace heavy metals, colloidal matter or other impurities contained in ultra-pure water to be used as rinse water in semiconductor cleaning processes and suppress deposit of trace impurities such as heavy metals or other... | 12/17/2002 |
| 6488271 | Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized A method for increasing the quantity of a gas, e.g., ozone, dissolved in a liquid, e.g., ultrapure deionized water, are provided. The gas to be dissolved is introduced to the liquid under pressure and the resulting admixture delivered to the end-use stati... | 12/03/2002 |
| 6485649 | Method and device for the production of pure water Input water is preheated in a heat exchanger (2), pumped (4) through another heat exchanger (5) into a heating unit (6). The heating unit heats the water to a temperature of above 100° C., preferably 140-150° C., while maintaining the water in a liquid ... | 11/26/2002 |
| 6464867 | Apparatus for producing water containing dissolved ozone An apparatus for producing water containing dissolved ozone which comprises (A) a piping for supplying ultrapure water through which ultrapure water is supplied, (B) a catalytic reaction portion which is connected with the piping for supplying ultrapure w... | 10/15/2002 |
| 6461519 | Process for producing ultra-pure water, and configuration for carrying out a process of this nature A process and a configuration for producing ultra-pure water for a semiconductor manufacturing plant containing a plurality of manufacturing units. In a first purification step, untreated water undergoes preliminary purification in amounts required for th... | 10/08/2002 |
| 6447684 | Filtration and purification system for pH neutral solutions The invention pertains to a method for simultaneously removing metallic ions and particulate material from a pH neutral solution using particle-removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligands that possess the... | 09/10/2002 |
| 6420185 | Water contamination concentration apparatus and process An apparatus and methods of utilizing a semi-permeable membrane to concentrate contaminants in a portion of an Ultra Pure Water stream to levels which are detectable by an on-line analyzer. This allows the use of analyzers that would not be able to accura... | 07/16/2002 |
| 6416676 | Deionized water degasification for semiconductor fabrication In microelectronics (semiconductor) processing, pitting and voiding of aluminum and aluminum alloys by deionized (DI) water is prevented. The present method and apparatus degasifies the DI water to remove the dissolved oxygen gas. The oxygen gas concentra... | 07/09/2002 |
