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| Number | Title | Issue Date |
| 7399657 | Ball grid array packages with thermally conductive containers Ball grid array packages for semiconductor die include a thermally conductive container and a substrate that substantially enclose a semiconductor die. The die is positioned with respect to the container by thermally conductive supports formed in the container or at... | 07/15/2008 |
| 7357258 | Thin-plate supporting container The attaching-and-detaching operation of a lid unit, and the operation of taking in and out semiconductor wafers stored in a container body are facilitated. Thin-plate supporting units for supporting semiconductor wafers are provided in the container body of a thin-... | 04/15/2008 |
| 7347329 | Substrate carrier A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the f... | 03/25/2008 |
| 7325698 | Wafer container door with particulate collecting structure A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose the opening, the door chassis comprising a first wall having a perip... | 02/05/2008 |
| 7235138 | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces The present disclosure describes apparatus and methods for processing microfeature workpieces, e.g., by depositing material on a microelectronic semiconductor using atomic layer deposition. Some of these apparatus include microfeature workpiece holders that include ... | 06/26/2007 |
| 7219802 | Thin wafer insert A plastic insert (20) is configured to provide support of thin wafers (49) in wafer carriers (45) configured to provide peripheral wafer support. The invention includes the insert, the insert in combination with a wafer carrier, and the, methods... | 05/22/2007 |
| 7204887 | Wafer holding, wafer support member, wafer boat and heat treatment furnace The present invention provides a wafer holder, a wafer support member, a wafer boat and a heat treatment furnace, which are capable of sufficiently suppressing slip dislocations, without lowering productivity and at low cost, in the high temperature heat treatment o... | 04/17/2007 |
| 7201276 | Front opening substrate container with bottom plate A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venti... | 04/10/2007 |
| 7188736 | Structure for racking substrates A structure for racking substrates includes first to fourth main legs isolated from one another at intervals wider than widths of both long sides and both short sides of a substrate, first to fourth protrusions respectively protruded from the first to fourth main le... | 03/13/2007 |
| 7175026 | Memory disk shipping container with improved contaminant control A container for disks has an improved latching mechanism. The container comprises a cassette with sidewalls with slots for holding disks in an axial arrangement, two opposite end walls each have a U-shaped recess extending downwardly from the open top, a top cover w... | 02/13/2007 |
| 7077913 | Apparatus for fabricating a semiconductor device A semiconductor fabricating apparatus having a structure, which facilitates a loading and unloading operation of wafers while having a low effect by a high temperature during a heat treatment. The semiconductor fabricating apparatus includes a plurality of ring-shap... | 07/18/2006 |
| 7077912 | Semiconductor manufacturing system Provided is a semiconductor manufacturing system capable of loading a plurality of semiconductor wafers into a vertical reaction tube, and performing a thermal process. The semiconductor manufacturing system includes a first wafer loading boat, a second wafer loadin... | 07/18/2006 |
| 7059476 | Tray for electronic parts A first construction of a tray for electronic parts according to the present invention is provided with an engaging cut-out corner portion which is formed by cutting a corner portion of a table-like flat portion which is arranged diagonally with respect to a-cut-out... | 06/13/2006 |
| 7022192 | Semiconductor wafer susceptor A semiconductor wafer susceptor for batch substrate processing. The susceptor includes a central region in a primary plane and a plurality of flat annular extensions extending below the central region in a secondary plane. The primary and secondary planes are parall... | 04/04/2006 |
| 7004325 | Resin-molded package with cavity structure A package includes: a substrate having a ridged peripheral portion and a center portion defined by and lower in level than the ridged peripheral portion. A semiconductor chip is mounted on the center portion. A plurality of lead is electrically coupled to the semico... | 02/28/2006 |
| 6993809 | Wafer box with a handle device A wafer box with a handle device is provided. A wafer box includes a wafer box main body for carrying at least one wafer, a handle device having a holding portion being evenly and securely held by an operator with digits so as to transport the wafer box conveniently... | 02/07/2006 |
| 6994217 | Shipper with tooth design for improved loading A shipper for memory disks comprises a cassette having an open top and an open bottom, a top cover to cover the open top, and a bottom cover to cover the bottom. The body portion has opposing side walls and opposing end walls. The two side walls each have with a ver... | 02/07/2006 |
| 6981594 | Method and apparatus to facilitate transport of semiconductor wafers An assembly to facilitate the transport of semiconductor wafers comprises rigid first and second end plates, and a plurality of interconnected flexible pockets provided between these first and second end plates. Each of the pockets is configured to store a semicondu... | 01/03/2006 |
| 6905026 | Wafer carrying system The purpose of the present invention is to provide a wafer carrying system with a manual-opened cover. The wafer carrying system of the present invention includes a wafer cassette having an opening, a cover disposed on the wafer cassette for covering the opening of ... | 06/14/2005 |
| 6902063 | Latching mechanism for locking/unlocking the door of a wafer container A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide... | 06/07/2005 |
| 6811040 | Wafer holding apparatus A wafer holding apparatus composed of a plurality of rods joined at opposite ends by endplates. Each rod at each end is secured to the endplates by a mechanical dovetail joint. The dovetail joint secures the rods to the endplates without the need for sealing or coat... | 11/02/2004 |
| 6780251 | Substrate processing apparatus and method for fabricating semiconductor device A substrate processing apparatus includes a first holder made of silicon carbide or silicon and a second holder made of quartz. Each of the first and the second holder is of a ring shape and the second ring shaped holder is mounted on the first holder. The second ho... | 08/24/2004 |
| 6758339 | Thin wafer carrier A wafer carrier for carrying a plurality of axially aligned thin circular wafers. The wafer carrier has a framework portion formed from a pair of end members connected by a plurality of side support members. A pair of opposing sidewall assemblies is positioned betwe... | 07/06/2004 |
| 6745901 | Wafer cassette equipped with piezoelectric sensors A wafer cassette for storing and transporting wafers that is equipped with sensors such as piezoelectric sensors or capacitance sensors on the surface of the dividers for sensing the presence or absence of wafers positioned on top of the dividers is described. The s... | 06/08/2004 |
| 6669253 | Wafer boat and boat holder A wafer boat and boat handle are designed for automatic interlocking engagement and release upon manipulation by a user. The boat includes a side rail with a lip for engagement within a slot formed in the handle, and a handle cam activating contact surfac... | 12/30/2003 |
| 6551406 | Apparatus for growing thin films An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feedi... | 04/22/2003 |
| 6536608 | Single cast vertical wafer boat with a Y shaped column rack A vertical ceramic wafer boat for supporting a silicon wafer having a predetermined radius "R". The wafer boat comprises a base portion and a column rack, which extends generally vertically upwards from the base portion. The column rack includes a pair of... | 03/25/2003 |
| 6532642 | Method of making a silicon carbide rail for use in a semiconductor wafer carrier A silicon carbide rail for use as a support in an apparatus for holding semiconductor wafers is made by forming a first series of parallel slots or grooves into the front side of a graphite plate usually without piercing the back side of the plate, conver... | 03/18/2003 |
| 6382419 | Wafer container box Disclosed is a container box for storage and transportation of wafer materials or other precision substrate plates in the electronic industries as well as for automatic loading of the wafer materials on a wafer-processing machine. Several accessory parts ... | 05/07/2002 |
| 6247597 | Semiconductor wafer accommodating jig A jig for accommodating and transferring a carrier for carrying at least an article, the carrier having a first container with a first opening larger than the article, and the carrier having at least a first flange structure which extends from a periphera... | 06/19/2001 |
| 6245147 | Thermal processing jig for use in manufacturing semiconductor devices and method of manufacturing the same A thermal processing jig 1 made from quartz for use in manufacturing semiconductor devices is provided, which may effectively prevent deposition of contaminating metals on the semiconductor devices during heat treatments thereof, and a method of manufactu... | 06/12/2001 |
| 6171400 | Vertical semiconductor wafer carrier An apparatus for holding a plurality of semiconductor wafers during heat treatment of the wafers in a furnace comprises a plurality of rails extending essentially vertically between a top and bottom plate. Each rail contains a plurality of teeth arranged ... | 01/09/2001 |
| 6139983 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least o... | 10/31/2000 |
| 6099686 | Wet processing system In a wet processing system included in a semiconductor device production line, a wafer carrier has bars formed with grooves for receiving the edge portions of wafers, and a pair of support plates each having a width smaller than the diameter of the wafers... | 08/08/2000 |
| 6095335 | Wafer support device having a retrofit to provide size convertibility A size-convertible device for supporting wafers in a parallel relationship includes a removable insert that enables the device to be non-destructively switched from providing edge support for large diameter wafers to providing edge support for small diame... | 08/01/2000 |
| 6093644 | Jig for semiconductor wafers and method for producing the same The invention is aimed at reducing the influence of the pollution from impurities in the wafer to improve the wafer yield on the basis of prevention of the pollution from impurities while occurrence of slip lines in the wafer is minimized to enhance the e... | 07/25/2000 |
| 6089377 | Semiconductor wafer carrier The invention provides a boat-type semiconductor wafer carrier which prevents such a situation that, upon wet processing of semiconductor wafers, the wafers carried thereon are displaced from grooves thereof and inclined until they fall down or contact wi... | 07/18/2000 |
| 6074479 | Silicon single crystal wafer annealing method and equipment, and silicon single crystal wafer and manufacturing method related thereto This invention anneals a vertical stack of two or more groups of unseparated wafers, with approximately 10 wafers in each group. The invention makes it possible to anneal more wafers in a single annealing operation under a variety of conditions, including... | 06/13/2000 |
| 6039186 | Composite transport carrier A composite wafer carrier for holding and restraining circular semiconductor wafer disks during their transport, storage, and processing. The composite wafer carrier generally comprising an open top and bottom for insertion and removal of wafer disk, an u... | 03/21/2000 |
| 5988393 | Storage box for semiconductor wafers A storage box is provided for the safe-keeping of fabricated or semi-fabricated semiconductor wafers. This wafer storage box allows the wafers to be tightly secured in position when held in the storage box for storage or shipping without the possibility o... | 11/23/1999 |
