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| Number | Title | Issue Date |
| 8118169 | Retainer and substrate storage container provided with same retainer When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupli... | 02/21/2012 |
| 8091710 | Door structure and substrate storage container A door structure that is detachably fitted into an opening portion of a container body for storing substrates includes a casing to be fitted to the opening portion of the container body, a locking mechanism provided in the casing for locking the casing by causing an... | 01/10/2012 |
| 8047379 | Wafer container with purgeable supporting module A wafer container includes a container body, formed by a pair of side walls, a top surface, and a bottom surface, on one sidewall of which is formed with an opening and on the other sidewall opposite to the opening is formed with a back wall, a supporting module bei... | 11/01/2011 |
| 7971723 | Wafer container with oval latch A wafer container including a container body having an opening formed on one sidewall and a door joining with the opening, the characteristic of the wafer container in that: A latch component disposed in a platform of the door comprising an oval cam with an arrester... | 07/05/2011 |
| 7971722 | Wafer container with restrainer A wafer container includes a container body that having a plurality of slots therein for placing a plurality of wafers; an opening is formed on a sidewall of the container body for importing or exporting the wafers; and a door having an inner surface and an outer su... | 07/05/2011 |
| 7967147 | Substrate storage container A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended fr... | 06/28/2011 |
| 7950524 | Wafer container having the purging valve A wafer container includes a container body, a door, and a purging valve, wherein the purging valve is disposed in the through hole of the container body. The purging valve includes a fixed sleeve body, a purging head, an elastic component, and a valve lid. The fixe... | 05/31/2011 |
| RE42402 | 300 mm microenvironment pod with door on side A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports... | 05/31/2011 |
| 7926663 | Substrate storage container and method of producing the same A substrate storage container that can be highly accurately positioned and produced at increased productivity, and a method of producing the substrate storage container are provided. The substrate container (10) comprises a container body (11) having a... | 04/19/2011 |
| 7900776 | Wafer container with door actuated wafer restraint A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further ... | 03/08/2011 |
| 7882957 | Storing tray and storing device An object of the present invention is to provide a storing tray and a storing device whereby an object such as an electronic component to be stored can be picked up in a preferred manner and a plurality of stored objects can be flipped and transferred at once. Anoth... | 02/08/2011 |
| 7866480 | Front opening substrate container with bottom plate A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venti... | 01/11/2011 |
| 7857140 | Semiconductor wafer storage case and semiconductor wafer storing method A semiconductor wafer storage case is disclosed that includes plural support members that are spaced at predetermined intervals with respect to each other and are each configured to come into contact with a peripheral edge region of a first face of a semiconductor w... | 12/28/2010 |
| 7726490 | Lid unit thin plate supporting container The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its compon... | 06/01/2010 |
| 7703609 | Wafer carrier positioning structure A wafer carrier positioning structure including a carrier body having a bottom face and a frame body provided in a peripheral part of the bottom face to project downwardly, for housing a wafer therein so that the wafer is parallel to the bottom face. Further, the wa... | 04/27/2010 |
| RE41231 | 300 mm microenvironment pod with door on side A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports... | 04/20/2010 |
| 7677394 | Wafer shipping container A wafer shipping container has a first housing subcontainer. A second housing subcontainer mates with the first housing subcontainer to form a housing. The first housing subcontainer is substantially the same as the second housing subcontainer. A process carrier fit... | 03/16/2010 |
| 7523830 | Wafer container with secondary wafer restraint system A wafer container providing improved wafer restraint during physical shock events. In embodiments of the invention, a secondary wafer restraint structure defining a plurality of notches is interposed between opposing wafer restraint members on the door of the contai... | 04/28/2009 |
| 7520388 | Thin plate supporting container A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting porti... | 04/21/2009 |
| 7500564 | Wafer carrying apparatus A wafer carrying apparatus or cassette is disclosed, which includes a binding or retention unit, so as to prevent wafers from being damaged by crash, inadvertent egress or exiting, and so on. The wafer carrying apparatus includes a main body provided with a pluralit... | 03/10/2009 |
| 7497333 | Thin plate supporting container A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting porti... | 03/03/2009 |
| RE40513 | Cushion system for wafer carriers In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of upright parallel cushions, each comprising an elongate base portion w... | 09/23/2008 |
| 7418982 | Substrate carrier and facility interface and apparatus including same A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed... | 09/02/2008 |
| 7410061 | Thin plate supporting container A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting porti... | 08/12/2008 |
| 7399657 | Ball grid array packages with thermally conductive containers Ball grid array packages for semiconductor die include a thermally conductive container and a substrate that substantially enclose a semiconductor die. The die is positioned with respect to the container by thermally conductive supports formed in the container or at... | 07/15/2008 |
| 7383955 | Thin plate supporting container A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting porti... | 06/10/2008 |
| 7370764 | Transport module A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portio... | 05/13/2008 |
| 7367252 | Integrated circuit package separators An integrated circuit package separator. A base having a plurality of pins extending upwardly therefrom is provided. A support is provided over the base. The support has an upper surface and a plurality of holes. The pins extend through the holes and upwardly beyond... | 05/06/2008 |
| 7367773 | Apparatus for combining or separating disk pairs simultaneously Various methods and apparatus are provided for merging and demerging pairs of disks. In one embodiment, pairs of merged disks are first separated and then transferred to separate cassettes such that all of the disks in the separate cassettes are oriented in the same... | 05/06/2008 |
| 7357257 | Thin plate supporting container A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting porti... | 04/15/2008 |
| 7357258 | Thin-plate supporting container The attaching-and-detaching operation of a lid unit, and the operation of taking in and out semiconductor wafers stored in a container body are facilitated. Thin-plate supporting units for supporting semiconductor wafers are provided in the container body of a thin-... | 04/15/2008 |
| 7347329 | Substrate carrier A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the f... | 03/25/2008 |
| 7334690 | Substrate supporting rod and substrate cassette using the same A substrate-supporting rod (4) includes a resin body (41) and a metal rod (43). The resin body (41) includes a body portion (411) being cylinder-shaped and having a first through hole (413) in a direction of the axis thereof... | 02/26/2008 |
| 7335244 | Air-purifying device for a front-opening unified pod An air-purifying device for a front-opening unified pod to purify the air in it is provided. The air in the front-opening unified pod 51 is sucked through one of its breathing holes 58a and directed into an air-purifying device (M) that includes... | 02/26/2008 |
| 7334691 | Glass substrate cassette A glass substrate cassette includes a bottom structure, a top structure, and a pair of side supports affixed to space the bottom structure and the top structure for forming an accommodation space in between. A plurality of support plates are horizontally affixed bet... | 02/26/2008 |
| 7328836 | Smart tag holder and cover housing A smart-tag housing and method for securing a dedicated data card affixed to a SMIF-pod. A molded housing package for holding a data card for communication with a two-way receiver/transmitter mounted on a workstation, the smart-tag is a small battery operated microc... | 02/12/2008 |
| 7325698 | Wafer container door with particulate collecting structure A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose the opening, the door chassis comprising a first wall having a perip... | 02/05/2008 |
| 7322098 | Method of simultaneous two-disk processing of single-sided magnetic recording disks Various methods and apparatus for simultaneously processing two single-sided hard memory disks is provided. Disks are positioned in pairs, with one surface of one disk positioned adjacent one surface of the second disk, with the disk surfaces touching or with a slig... | 01/29/2008 |
| 7316315 | Thin plate storage container and lid having at least one thin plate supporting member A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container bod... | 01/08/2008 |
| 7316325 | Substrate container A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparen... | 01/08/2008 |
