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| Number | Title | Issue Date |
| 7799201 | Method of electropolishing medical implants An electropolishing apparatus and method are provided for polishing stents and other medical implants. The apparatus includes a motor that rotates a roller. The roller continuously rotates the medical implant to be electropolished. One of the advantages of the appar... | 09/21/2010 |
| 7790015 | Endpoint for electroprocessing Method for process control of electro-processes is provided. In one embodiment, the method includes processing a conductive layer formed on a wafer using a target endpoint, detecting breakthrough of the conductive layer to expose portions of an underlying layer, and... | 09/07/2010 |
| 7628905 | Algorithm for real-time process control of electro-polishing Method and apparatus for process control of electro-processes. The method includes electro-processing a wafer by the application of two or more biases and determining an amount of charge removed as a result of each bias, separately. In one embodiment, an endpoint is... | 12/08/2009 |
| 7504018 | Electrochemical method for Ecmp polishing pad conditioning A method for conditioning an Ecmp pad is provided. In one embodiment, a method for electrochemically processing a substrate includes the steps of providing an electrical bias voltage between the top surface of the pad assembly and an electrode, and electrochemically... | 03/17/2009 |
| 7497938 | Tribo-chronoamperometry as a tool for CMP application The invention provides a method of determining at least one electrochemical characteristic of a chemical-mechanical or electrochemical-mechanical polishing system comprising application of a potential between a polishing substrate and an electrode to generate a curr... | 03/03/2009 |
| 7255784 | Polishing method and electropolishing apparatus A polishing method for electropolishing a metal film formed on a wafer surface so as to fill concave portions formed on the wafer surface comprises a step of determining an electropolishing end point of the metal film on the basis of a change of a current waveform r... | 08/14/2007 |
| 7211175 | Method and apparatus for potential controlled electroplating of fine patterns on semiconductor wafers Controlled-potential electroplating provides an effective method of electroplating metals onto the surfaces of high aspect ratio recessed features of integrated circuit devices. Methods are provided to mitigate corrosion of a metal seed layer on recessed features du... | 05/01/2007 |
| 7175752 | Method and apparatus for electrochemical machining An electrochemical machining apparatus and method for machining a workpiece. The apparatus provides a pulse of electric power, which is conducted from the workpiece, to an electrolyte flowing through a gap, and then to an electrode. Material is eroded from the workp... | 02/13/2007 |
| 7156975 | Polishing method and electropolishing apparatus A polishing method for electropolishing a metal film formed on a wafer surface so as to fill concave portions formed on the wafer surface comprises a step of determining an electropolishing end point of the metal film on the basis of a change of a current waveform r... | 01/02/2007 |
| 6969817 | Apparatus and method for machining in confined spaces A machining apparatus is provided. The machining apparatus includes a discharge machining head assembly and a slide assembly supporting the head assembly. The machining apparatus also includes an electromagnet configured to support the slide assembly in a position o... | 11/29/2005 |
| 6941187 | Multiple discharge-servo curve control method and device for an electrical discharge machine A discharge-servo curve control method and device for an electrical discharge machine enables multiple discharge-servo curves to be chosen during a machining process in real-time. The control device includes a storage unit, a setting unit, a reading unit, a program ... | 09/06/2005 |
| 6808617 | Electrolytic polishing method A polishing method and polishing apparatus able to easily flatten an initial unevenness with an excellent efficiency of removal of excess copper film and suppress damage to a lower interlayer insulation film, and a plating method and plating apparatus able to deposi... | 10/26/2004 |
| 6752916 | Electrochemical planarization end point detection A method for determining an end point of a planarization process for removing metal from a surface of a substrate submerged in an electrolytic solution or slurry. A first electrode is provided which is operable to contact the surface of the substrate, such as a work... | 06/22/2004 |
| 6723223 | Electrochemical machining method with optimal machining pulse duration For an electromechanical machining of a work piece there is an optimal pulse duration for the machining pulses corresponding to the maximum copying accuracy. Such an optimal pulse duration corresponds to a certain value of the gap. By alternating the machining pulse... | 04/20/2004 |
| 6722942 | Chemical mechanical polishing with electrochemical control Various embodiments of a planarization device and methods of using the same are provided. In one aspect, a device for planarizing a surface of a semiconductor workpiece is provided that includes a table for holding a quantity of an electrically conducting solution t... | 04/20/2004 |
| 6689269 | Method for electrochemically processing material The invention relates to a method for electrochemically processing a workpiece (61) in which a pulsating or alternating electrical voltage is applied between the workpiece and a workpiece electrode (62) which are arranged at a distance from one another in... | 02/10/2004 |
| 6398942 | Electrochemical machining process for fabrication of cylindrical microprobe Disclosed is an electrochemical machining process for fabrication of cylindrical microprobes, which is effected by the tool acting as the cathode against the workpiece acting as the anode, taking advantage of a chemical reaction occurring between the work... | 06/04/2002 |
| 6398941 | Method of shaping a workpiece using an electrochemical machining tool A method of shaping a tool comprises the steps of defining a shape of an article to be formed with the tool as a plurality of first elements; defining an initial shape of the tool as a plurality of second elements; determining an electric potential of eac... | 06/04/2002 |
| 6312584 | Method and apparatus for electrochemically machining a workpiece An apparatus for electrochemically machining of a workpiece by means of an electrode has an actuator for setting a gap between the electrode and the workpiece. The apparatus further has a channel for flushing the gap with an electrolyte and a container fo... | 11/06/2001 |
| 5993636 | Method of making a needle electrode A method of making a needle electrode is such that a neck portion is formed in a thin wire made of a tungsten single crystal and the thin wire is cut at the neck portion by feeding an electric current in electrolyte.... | 11/30/1999 |
| 5322599 | Shaped-tube electrolytic machining process A process of electrolytic machining holes of uniform diameter in a conductive workpiece, particularly one having a slotted lower portion. Drilling is accomplished electrochemically by providing a conductive tube, passing an electrolytic fluid through the ... | 06/21/1994 |
| 5181997 | Apparatus and method for continuously electrolyzing aluminum products An electrolytic treatment apparatus for continuously electrolyzing an elongated product of aluminum or an aluminum alloy at a low electrolyzing voltage and reduced amount of electric power. The apparatus includes at least one electrolytic section and fron... | 01/26/1993 |
| 5173149 | Method of etching semiconductor substrate To eliminate the influence of fluctuations in etching liquid sorts, composition, density, degradation, temperature, agitation etc., a method of selectively etching a semiconductor substrate having an n-type layer and a p-type layer and immersed in an elec... | 12/22/1992 |
| 5122242 | Electrochemical machining process An electrochemical machining process for the production of integrally stiffened shell and plate structures. The process applies to such structures as isogrid, waffle, ring stiffened and stringer stiffened structures. In these structures, secondary rib sti... | 06/16/1992 |
| 5049246 | Electrolytic processing apparatus and method with time multiplexed power supply Apparatus for electrolytic processing of materials, includes an electrolytic processing bath, plural first electrodes, at least one second electrode, and a power supply for supplying time multiplexed power to the electrodes. The power supply may include a... | 09/17/1991 |
| 5028303 | Electrolytic finishing method A working electrode is positioned to form a predetermined gap between the working electrode and a surface of a work, and the electrode and the work are submerged in an electrolyte. Pulses are applied to the working electrode to machine the work. A pair of... | 07/02/1991 |
| 5004528 | Method and apparatus for electro chemical machining In the operation of an electro chemical machine, damage can occur if there is direct electrical contact between the workpiece and the machine tool. Such contact causes a rise in machining current, and to detect this, signals representing the current are f... | 04/02/1991 |
| 4956060 | Finishing method employing electro-chemical machining, and an electro-chemical finishing machine A method and apparatus for electro-chemical machining involve: supplying a pulse having a predetermined current density between an electrode and an object to be worked while they face each other with a static electrolyte therebetween; detecting the curren... | 09/11/1990 |
| 4880509 | Electrolytic finishing method and apparatus An electrode is positioned to form a predetermined gap between the electrode and a surface of a work, and the electrode and the work are submerged in an electrolyte. Pulses are applied to the electrode to machine the work. The electric energy of the pulse... | 11/14/1989 |
| 4814052 | Method for the electrochemical processing of workpieces The invention relates to an apparatus for the electrochemical processing of workpieces. The apparatus comprises a processing electrode (2) adjustable in relation to the workpiece (1) and a supply unit (3) for the electric working value supplied to the wor... | 03/21/1989 |
| 4545874 | Electro chemical machining In electrochemical machining, arcing across workpiece and forming electrode can result in both being scrapped. Efforts have been made to detect the electrical signals which develop on occurrence of the spark which normally terminates in an arc. Ordinary e... | 10/08/1985 |
| 4497699 | Method of treating foil for electrolytic capacitors A method of treating foil for use in electrolytic capacitors in which the foil moves in one direction through a treatment liquid and in which the capacitance is measured continuously by means of at least one current-carrying electrode from which alternati... | 02/05/1985 |
| 4387009 | Method of operating electrochemical machine tool Multiple hole drilling by the electro-chemical process, in which individual jets of electrolyte impinge upon a workpiece, presents problems in assessment of hole depth reached and/or of jet deflection through jet orifice blockage. The invention provides a... | 06/07/1983 |
| 4375396 | Thin wire pointing method A method is described for forming sharp tips on thin wires, in particular phosphor bronze wires of diameters such as one-thousandth inch used to contact micron size Schottky barrier diodes, which enables close control of tip shape and which avoids the use... | 03/01/1983 |
| 4343686 | Method for controlling etching of electrolytic capacitor foil In a process for etching aluminum foil to increase its actual surface area to apparent surface area for use as an electrode in an electrolytic capacitor, a wire coil is placed adjacent the foil as it exits the etch station. The coil is energized to produc... | 08/10/1982 |
| 4326180 | Microwave backdiode microcircuits and method of making After a circuit is completely configured, including the mounting of semiconducting material onto a conductive layer and the connection of a conductor lead from a dot on the semiconducting material to the circuit, the required backdiode e/i characteristic ... | 04/20/1982 |
| 4208256 | Fluid pumping control method and apparatus for machine tools A method and control system for a machining fluid pump in which the machining fluid is displaced by the pump to the machining site. The pump speed is controlled electrically, usually in response to a machining parameter or to a machining liquid parameter ... | 06/17/1980 |
| 4170528 | Method of balancing a rotatable element The disclosure illustrates a method and apparatus for precision balancing a rotatable element such as the turbine shaft assembly of a turbocharger. The turbine-shaft assembly is placed in a machine that detects the position and degree of unbalance. The ma... | 10/09/1979 |
| 4160314 | Degraining, a three step process to obtain propellant samples from case bonded motors A process for obtaining propellant samples from case bonded motors compri the use of electrolytic machining to remove two narrow bands of the case to expose the propellant liner, severing of the sample section from the rocket motor by means of a piano wi... | 07/10/1979 |
| 4134808 | Method of trimming electronic components having an integrated circuit to design specification A thin film path of medium resistivity provided by a strip of tantalum by which a design parameter of an electronic component is determined is modified by making contact with the path by an electrode having an electrolyte at its tip in passing an anodizin... | 01/16/1979 |
