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| Number | Title | Issue Date |
| 8052860 | Electrochemical and mechanical polishing and shaping method and system A method and system are provided for the shaping and polishing of the surface of a material selected from the group consisting of electrically semi-conductive materials and conductive materials. An electrically non-conductive polishing lap incorporates a conductive ... | 11/08/2011 |
| 7998334 | Method, an apparatus, a control system and a computer program to perform an automatic removal of cathode depositions during a bipolar electrochemical machining The invention relates to a method, an apparatus and a computer program for electrochemical machining where a removal of cathode depositions is performed in a fully automated way by means of an application of optimal pulses of a suitable polarity. The method comprise... | 08/16/2011 |
| 7594987 | Method and device for electroerosive material machining of a workpiece A method and an apparatus for electroerosive material machining of a workpiece with an elongated tool electrode are described. The tool electrode is guided in an electrode guide, in which an oval void is embodied. The wire segment located in the void is exposed to a... | 09/29/2009 |
| 7575667 | Electrode for electrochemical reduction An electrode (10) is provided for electrochemical reduction of a workpiece (20) that is to be treated. The electrode (10) has a predefined contour and contains an electrically conductive material. The electrically conductive material of the pred... | 08/18/2009 |
| 7560017 | Methods and apparatus for electrically detecting characteristics of a microelectronic substrate and/or polishing medium Methods and apparatuses for detecting characteristics of a microelectronic substrate. A method in accordance with an embodiment of the invention includes positioning the microelectronic substrate proximate to and spaced apart from the first and second spaced apart e... | 07/14/2009 |
| 7377836 | Versatile wafer refining Methods of refining using a plurality of refining elements are discussed. A refining apparatus having refining elements that can be smaller than the workpiece being refined are disclosed. New refining methods, refining apparatus, and refining elements disclosed. Met... | 05/27/2008 |
| 7316067 | Forming a perforate membrane by laser drilling and a subsequent electro-polishing step A method of forming a perforate membrane (1) is disclosed for use in a liquid transport device. The membrane has at least plural nozzles (10) formed therethrough. Each of those nozzles has a throat portion (12) opening at opposite end through op... | 01/08/2008 |
| 7272529 | Dual wall turbine blade ultrasonic wall thickness measurement technique A method and apparatus is provided to analyze a dual wall structure having at least one hollow core therein and having the same unknown material sound velocities in walls and in post as well. A transducer is located in at least two different positions with respect t... | 09/18/2007 |
| 7247557 | Method and composition to minimize dishing Processes are disclosed for producing electronic interconnect devices, particularly semi-conductor wafers, with metal interconnect traces thereon wherein the surface of said device has improved planarity. Said planarity is achieved initially through the use of pulse... | 07/24/2007 |
| 7211175 | Method and apparatus for potential controlled electroplating of fine patterns on semiconductor wafers Controlled-potential electroplating provides an effective method of electroplating metals onto the surfaces of high aspect ratio recessed features of integrated circuit devices. Methods are provided to mitigate corrosion of a metal seed layer on recessed features du... | 05/01/2007 |
| 7175752 | Method and apparatus for electrochemical machining An electrochemical machining apparatus and method for machining a workpiece. The apparatus provides a pulse of electric power, which is conducted from the workpiece, to an electrolyte flowing through a gap, and then to an electrode. Material is eroded from the workp... | 02/13/2007 |
| 7112270 | Algorithm for real-time process control of electro-polishing Method and apparatus for process control of electro-processes. The method includes electro-processing a wafer by the application of two or more biases and determining an amount of charge removed as a result of each bias, separately. In one embodiment, an endpoint is... | 09/26/2006 |
| 7070686 | Dynamically variable field shaping element In an electrochemical reactor used for electrochemical treatment of a substrate, for example, for electroplating or electropolishing the substrate, one or more of the surface area of a field-shaping shield, the shield's distance between the anode and cathode, and th... | 07/04/2006 |
| 7053520 | Rotational actuator or motor based on carbon nanotubes A rotational actuator/motor based on rotation of a carbon nanotube is disclosed. The carbon nanotube is provided with a rotor plate attached to an outer wall, which moves relative to an inner wall of the nanotube. After deposit of a nanotube on a silicon chip substr... | 05/30/2006 |
| 6969817 | Apparatus and method for machining in confined spaces A machining apparatus is provided. The machining apparatus includes a discharge machining head assembly and a slide assembly supporting the head assembly. The machining apparatus also includes an electromagnet configured to support the slide assembly in a position o... | 11/29/2005 |
| 6968290 | Electrochemical machining tool assembly and method of monitoring electrochemical machining An electrochemical machining tool assembly includes first and second tools that are spaced apart from one another so that a workpiece can be located therebetween. The assembly also includes a first ultrasonic transducer mounted in the first tool and a second ultraso... | 11/22/2005 |
| 6938447 | Apparatus and method of correcting deformation of gas turbine blade An apparatus for correcting deformation of a gas turbine blade includes a stationary die fixed to a backside of a tip shroud of a gas turbine blade to hold a back surface thereof and a pressing die pressing a front surface of the tip shroud so as to press the tip sh... | 09/06/2005 |
| 6808617 | Electrolytic polishing method A polishing method and polishing apparatus able to easily flatten an initial unevenness with an excellent efficiency of removal of excess copper film and suppress damage to a lower interlayer insulation film, and a plating method and plating apparatus able to deposi... | 10/26/2004 |
| 6752916 | Electrochemical planarization end point detection A method for determining an end point of a planarization process for removing metal from a surface of a substrate submerged in an electrolytic solution or slurry. A first electrode is provided which is operable to contact the surface of the substrate, such as a work... | 06/22/2004 |
| 6736952 | Method and apparatus for electrochemical planarization of a workpiece An electrochemical planarization apparatus for planarizing a metallized surface on a workpiece includes a polishing pad and a platen. The platen is formed of conductive material, is disposed proximate to the polishing pad and is configured to have a negative charge ... | 05/18/2004 |
| 6723223 | Electrochemical machining method with optimal machining pulse duration For an electromechanical machining of a work piece there is an optimal pulse duration for the machining pulses corresponding to the maximum copying accuracy. Such an optimal pulse duration corresponds to a certain value of the gap. By alternating the machining pulse... | 04/20/2004 |
| 6709566 | Method for shaping a nanotube and a nanotube shaped thereby The invention relates to a method for shaping small three-dimensional articles such as nanotube exhibiting a layered structure through material removal such that the article is controllably shaped to exhibit a desired contour. Typically, material removal does not re... | 03/23/2004 |
| 6660156 | Pipe electropolishing apparatus using an electrolyte heater and cooler A temperature handling subsystem (12) for a pipe electrochemical polishing system (10) has a chiller (46) and associated heat exchanger (44) for cooling the acid electrolyte (24) circulating through a pipe (28) while a cathode (14) is drawn therethrough f... | 12/09/2003 |
| 6620307 | Method for a removal of cathode depositions by means of bipolar pulses A method for on-line removal of cathode depositions during electrochemical process. The process control unit (30) is arranged to alternate the unipolar machining voltage pulses U1 with the voltage pulses of opposite polarity U2 to the work piece (2) and t... | 09/16/2003 |
| 6589402 | Part fabricating apparatus A part fabricating apparatus has a holder for holding an object to be machined immersed in an electrolytic solution. A machining electrode subjects a surface of the object to an electrochemical reaction to electrolytically machine the surface of the objec... | 07/08/2003 |
| 6398942 | Electrochemical machining process for fabrication of cylindrical microprobe Disclosed is an electrochemical machining process for fabrication of cylindrical microprobes, which is effected by the tool acting as the cathode against the workpiece acting as the anode, taking advantage of a chemical reaction occurring between the work... | 06/04/2002 |
| 6398941 | Method of shaping a workpiece using an electrochemical machining tool A method of shaping a tool comprises the steps of defining a shape of an article to be formed with the tool as a plurality of first elements; defining an initial shape of the tool as a plurality of second elements; determining an electric potential of eac... | 06/04/2002 |
| 6372110 | Electrochemical processing of subjects flown through by an electrolyte The electrochemical processing of a component such as an injection nozzle, must be calibrated in order to compare the throughput of the nozzle to a standard nozzle. Both throughput rates are determine at the same high pressure which is far above 100 bar. ... | 04/16/2002 |
| 6350361 | Real time control device for electroformation, plating and deplating processes Precise control of deposition or etching of thin films on a transparent substrate is particularly useful for electroformation of nozzles and formation control. A computer based measuring system is used to measure, in real time, a test feature such as one ... | 02/26/2002 |
| 6083374 | Process for maintaining a constant concentration of substances in an electroplating bath The invention relates to a method for maintaining constant concentrations of substances contained in an electrolytic treatment bath, preferably in baths with aqueous solutions. In order to regenerate the continual depletion of chemicals, substance concent... | 07/04/2000 |
| 5942100 | Crystal etch monitor The present application describes apparatus and method for monitoring and controlling the etching of quartz crystals to a desired target frequency by means of monitoring the frequency of a monitor blank that is immersed in the etchant simultaneously with ... | 08/24/1999 |
| 5938913 | Process and device for electrolytic treatment of continuous running material Process for electrolytic treatment of continuous running material in which the material runs through an electrolytic liquid and electric potential is applied to the material. In order to guarantee freedom from differential potential in the material to be ... | 08/17/1999 |
| 5879533 | Method of electrochemical machining and bearing manufactured with said method The invention relates to electrochemical machining of metal pieces, and, in particular, rings of bearings, in a controlled way. To achieve this process, parameters, such as current, are actively controlled. This allows the raceway to be completed sooner a... | 03/09/1999 |
| 5865977 | Process for the electrochemical treatment of flow channels in metal workpieces A process for electrochemical treating flow channels of metal workpieces uses a tool extending into the workpieces and an electrolyte flow between the tool and the flow channel. Either volume flow of the electrolyte, or pressure of the electrolyte, or bot... | 02/02/1999 |
| 5672263 | Method and apparatus for electrochemically machining a workpiece According to the present invention, a method and apparatus for electrochemically machining a workpiece is provided. The method includes the steps of: (1) providing a machine head, having an electrically conductive face; (2) providing a sensor, for sensing... | 09/30/1997 |
| 5507924 | Method and apparatus for adjusting sectional area ratio of metal-covered electric wire Disclosed herein are methods of measuring, adjusting and uniformalizing a sectional area ratio of a metal-covered electric wire, a method of cleaning an electric wire, a method of manufacturing a metal-covered electric wire, an apparatus for measuring a s... | 04/16/1996 |
| 5507923 | Method and apparatus for electrolytic polishing of tubular products An apparatus is provided for electrolytically polishing the inside surface of tubular products such as rifled stock, or fiream or artillery barrels. The apparatus comprises a first and second reservoir in fluid communication through the tubular product wi... | 04/16/1996 |
| 5336379 | Photoelectro-chemical etching method and apparatus of compound semiconductor The photoelectro-chemical etching system of compound semi-conductor is disclosed. The system comprises a laser generator, a shutter to cut off laser beam, a laser beam chopper, a secondary high reflection mirror, a beam expander, a waveform generator, a c... | 08/09/1994 |
| 5143586 | Electrochemical machining process and equipment A method for electrochemical machining a work piece using an electrochemical machining device including a tool electrode opposing the workpiece across a predetermined machining gap and a device for supplying a pulse current to the machining gap via electr... | 09/01/1992 |
| 5112453 | Method and apparatus for producing etched plates for graphic printing There is provided an apparatus and a process for using same for etching a metallic object (22), suitably a plate to prepare a metallic printing plate. The object is partially covered by a resist surface (14) wherein the exposed portions (16) of said metal... | 05/12/1992 |
