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Class 205/209 - Heating substrate other than by contact with liquid


Subclass of Class 205 - Electrolysis: processes, compositions used therein, and methods of preparing the compositions
Definition: Subject matter wherein the substrate is heated prior to
No. of patents: 58
Last issue date: 04/15/2008


1    
NumberTitleIssue Date
7357850Electroplating apparatus with segmented anode array
An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are ...
04/15/2008
7349223Enhanced compliant probe card systems having improved planarity
Several embodiments of enhanced integrated circuit probe card and package assemblies are disclosed, which extend the mechanical compliance of both MEMS and thin-film fabricated probes, such that these types of spring probe structures can be used to test one or more ...
03/25/2008
7341634Apparatus for and method of processing substrate
A workpiece is processed uniformly, e.g., a uniform plated film is formed on a workpiece, by a processing liquid, e.g., a plating solution, which is maintained in an optimum state while minimizing the amount of the processing liquid to be used. An apparatus for proc...
03/11/2008
7294244Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece processing station is adapted for adjusting the level of the processing...
11/13/2007
7220397Modified oxygen reduced valve metal oxides
Pressed material such as anodes are described and formed from oxygen reduced oxide powders using additives, such as binders and/or lubricants. Methods to form the pressed material are also described, such as with the use of atomizing, spray drying, fluid bed process...
05/22/2007
7179736Method for fabricating planar semiconductor wafers
The present invention relates to a method of fabricating planar semiconductor wafers. The method comprises forming a dielectric layer on a semiconductor wafer surface, the semiconductor wafer surface having vias, trenches and planar regions. A barrier and seed metal...
02/20/2007
7141274Substrate processing apparatus and method
A substrate processing apparatus and method which employs the so-called batch processing method of processing a plurality of substrates simultaneously, thereby increasing the throughput, and which can carry out processing, such as electroless plating, stably and sec...
11/28/2006
7138014Electroless deposition apparatus
An apparatus and a method of depositing a catalytic layer comprising at least one metal selected from the group consisting of noble metals, semi-noble metals, alloys thereof, and combinations thereof in sub-micron features formed on a substrate. Examples of noble me...
11/21/2006
7082366Communication terminal apparatus, connection control method for the apparatus and program for the method
In the case of connecting a line for making connection between communication unit 12 mounted in a vehicle-mounted terminal 10 and center communication unit 21 of an information center 20 and acquiring information accumulated in storage un...
07/25/2006
7070687Apparatus and method of surface treatment for electrolytic and electroless plating of metals in integrated circuit manufacturing
Apparatus and method for treating a surface of a substrate for electrolytic or electroless plating of metals in integrated circuit manufacturing. In one embodiment the method includes forming a barrier layer on a substrate. A metal-seed layer is then formed on the b...
07/04/2006
7009412Massively parallel interface for electronic circuit
Several embodiments of massively parallel interface structures are disclosed, which may be used in a wide variety of permanent or temporary applications, such as for interconnecting integrated circuits (ICs) to test and burn-in equipment, for interconnecting modules...
03/07/2006
6926818Method to enhance the adhesion between dry film and seed metal
A method of forming a bump structure through the use of an electroplating solution, comprising the following steps. A substrate having an overlying conductive structure is provided. A patterned dry film resist is formed over the conductive structure. The patterned d...
08/09/2005
6811656Method for creating a material library
A method for creating a material library of surface areas having different properties in which a substrate is coated. The substrate is subjected to a combined pretreatment procedure. ...
11/02/2004
6766576Method for producing a double-sided wiring board
The method for producing a printed wiring board comprising the steps of preparing a conductive substrate, forming an insulating layer on one surface of the said substrate, forming at least one via hole in the insulating layer, thermally curing the insulating layer, ...
07/27/2004
6726829Method of manufacturing a stent
Disclosed herewithin is an apparatus for fabricating a stent which involves processing a tubular member whereby no connection points to join the edges of a flat pattern are necessary. The process includes the steps of: a) preparing the surface of a tubular member, b...
04/27/2004
6571467Method for producing a doublesided wiring board
The method for producing a printed wiring board comprising the steps of preparing a conductive substrate, forming an insulating layer on one surface of the said substrate, forming at least one via hole in the insulating layer, thermally curing the insulat...
06/03/2003
6546751Articles with selectively deposited overlay
A method of providing a decorative metal pattern on an electrically non-conductive substrate, such as a glass or plastic substrate, which includes applying a mixture of heat fusible material, such as glass or plastic, with a metal having a particle size l...
04/15/2003
6533917Method for producing aluminum support for lithographic printing plate
Disclosed are a method for producing an aluminum support for lithographic printing plates, comprising subjecting an aluminum plate in sequence to (1) a surface roughening treatment, (2) a heat treatment, (3) a treatment of dissolving from 0.01 to 5 g/m
03/18/2003
6527937Method of making a capacitor anode of a pellet of niobium oxide
Methods to at least partially reduce a niobium oxide are described wherein the process includes heat treating the niobium oxide in the presence of a getter material and in an atmosphere which permits the transfer of oxygen atoms from the niobium oxide to ...
03/04/2003
6475368Method of aqueous anodizing aluminum substrates of solid capacitors
A method of anodizing an aluminum substrate comprising heating the substrate to a first temperature of 200° C. to about 380° C.; suspending the substrate into a first electrolyte and applying a first anodizing current to the first electrolyte; rinsing t...
11/05/2002
6409932Method and apparatus for increased workpiece throughput
A method is disclosed for speeding workpiece thoughput in low pressure, high temperature semiconductor processing reactor. The method includes loading a workpiece into a chamber at atmospheric pressure, bringing the chamber down to an intermediate pressur...
06/25/2002
6379524Method for preparing composite membrane for separation of hydrogen gas
A process for manufacturing a composite membrane for separation of hydrogen gas using palladium, which employs the step of electroplating under vacuum an alloy of a palladium compound and a transition metal....
04/30/2002
6378338Method for producing magnetic disk substrates
Magnetic disk substrates are produced by subjecting glass substrates to at least steps of degreasing, etching, sensitization with tin chloride, activation and sensitivity-enhancing treatment in that order, then plating the pretreated substrates with a nic...
04/30/2002
6221437Heated workpiece holder for wet plating bath
A heated platen or chuck is employed in connection with a wet chemistry process cell, such as a plating cell for plating a flat substrate. A flow of electrolyte or other wet process solution is introduced into the cell across the surface of the substrate ...
04/24/2001
6042712Apparatus for controlling plating over a face of a substrate
According to one aspect of the invention, a plating system is provided which includes a tank for containing a plating solution, a substrate holder, and a temperature control device. The substrate holder is configured to support a substrate in position so ...
03/28/2000
5873992Method of electroplating a substrate, and products made thereby
Disclosed is an electroplating method and products made therefrom, which in one embodiment includes using a current density JO, to form a conductive metal layer having a surface roughness no greater than the surface roughness of the underlying ...
02/23/1999
5773087Coated article and method for producing same
A coated article comprising a stainless steel base having an etched surface and having on the etched surface a coated layer. The coating layer may comprise a fluororesin and can be provided: after sensitizing the stainless steel base through heating, trea...
06/30/1998
5503732Method for manufacturing a substrate having window-shaped and frame-shaped coating films on the surface thereof
A method for manufacturing a substrate useful as a color filter for LCD and having window-shaped coating films and a frame-shaped, functional coating film at the regions not occupied with the window-shaped coating films, which comprises the steps of: (a) ...
04/02/1996
5456816Nickel alloy electroplated cold-rolled steel sheet excellent in press-formability and phosphating-treatability and method for manufacturing same
A method for manufacturing a nickel alloy electroplated cold-rolled steel sheet excellent in press-formability and phosphating-treatability, which comprises the steps of: (a) cold-rolling a hot-rolled steel sheet at a reduction ratio of from 60 to 85% to ...
10/10/1995
5456818Method for preventing fretting and galling in a polygon coupling
A method of preventing galling between first and second metallic surfaces which are disposed in contacting, substantially stationary relation, one to each other, includes coating at least one of the first and second metallic surfaces with a layer of hard ...
10/10/1995
5403468Process for the manufacture of tinplate using a fused tin chloride electroplating bath
A process for the manufacture of tinplates comprising electroplating a substrate in a fused-chloride tin plating bath at a temperature of about 150° to 350° C., a current density of about 100 to 500 A/dm2 in an atmosphere of a non-oxidizing g...
04/04/1995
5334306Metallized paths on diamond surfaces
A graphite path is formed along the surface of a diamond plate, preferably a CVD diamond plate, by means of a laser or ion-implantation induced conductivity. The path advantageously can be the surface of a sidewall of a via hole drilled by the laser throu...
08/02/1994
5296260Method of manufacturing inorganic insulation
A solution of a ceramics precursor prepared from at last one or two types of metal alkoxides or metal acylates is applied onto a ceramics film having irregularity on its surface, which is formed on a conductor surface, to fill up irregular portions of the...
03/22/1994
5242569Thermocompression bonding in integrated circuit packaging
A contact member for thermocompression bonding in integrated circuit packaging has on a conductor end a uniform texture deformable layer with a hardness value in the range of that of soft gold which is approximately 90 on the Knoop scale and with a rough ...
09/07/1993
5215606Method for preparing decorative lacquered Ti-based articles
A method for preparing decorative lacquered Ti-based articles is disclosed, which method comprises the steps of: (a) heating to 900° to 1300° in vacuum a base of titanium or its alloy whose surface serves as a base material, to grow the crystal grains o...
06/01/1993
5194295Ceramic articles having heat-sealable metallic coatings and method of preparation
Nickel or cobalt diffusion is suppressed in ceramic articles having a nickel or cobalt underlayer followed by a gold overlayer, by heat-treating the article in a reducing atmosphere at a temperature of at least about 650° C. and subsequently depositing a...
03/16/1993
4966659Method for molten salt electroplating of steel
A method and apparatus for molten salt electroplating a steel member are disclosed, in which the surface of the steel member is activated by anodic treatment and the molten salt electroplating is performed on the activated surface of said steel member....
10/30/1990
4919971Self-induced repairing of conductor lines
A new method of repairing partially defective conductor lines is disclosed. The defective site comprising narrow necks or thin portions or cracks in a conductor line is heated by passing a relatively high current. Using the thermobattery principle in an e...
04/24/1990
4891106Method of forming nonmagnetic silver electrodes on quartz glass
Conductive, adherent, non-magnetic deposits are formed on quartz glass by first applying a thin gold layer to the glass, and then depositing silver over the gold. The gold is deposited directly onto a very clean quartz glass substrate from an organo-metal...
01/02/1990
4832798Method and apparatus for plating composite
A method and apparatus for improving the integrity of metal plated composites is disclosed. Plating improvements are achieved by first irradiating a nickel plated substrate, prior to application of a noble metal plating layer, to smooth any surface discon...
05/23/1989
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