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| Number | Title | Issue Date |
| 7931786 | Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces Reactors with agitators and methods for processing microfeature workpieces with such reactors. The agitators are capable of obtaining high, controlled mass-transfer rates that result in high quality surfaces and efficient wet chemical processes. The agitators genera... | 04/26/2011 |
| 7875158 | Plating apparatus A plating apparatus for use in forming a plated film in trenches, via holes, or resist openings that are defined in a surface of a semiconductor wafer, and forming bumps to be electrically connected to electrodes of a package, on a surface of a semiconductor wafer. ... | 01/25/2011 |
| 7815780 | Pool chlorinator cell ultrasonic cleaner A device for removing mineral deposits from the electrode of a pool chlorinator cell, which has a housing with liquid inlet and outlet ports and in which the electrode is submerged, has: (a) a container having an opening, with this opening being affixed proximate an... | 10/19/2010 |
| 7678246 | Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus An insulated vibration-stirring apparatus comprising: a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an installation piece to allow vibration lined with the vibration generatin... | 03/16/2010 |
| 7431810 | Apparatus for controlling flow in an electrodeposition process An electrowinning cell, having a tank with an opened upper end defined by a tank edge, electrolyte within the tank and a plurality of flat, metallic electrode plates disposed within the tank in side-by-side, spaced-apart, parallel relationship. Adjacent electrode pl... | 10/07/2008 |
| 7427338 | Flow diffuser to be used in electro-chemical plating system An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connec... | 09/23/2008 |
| 7393439 | Integrated microfeature workpiece processing tools with registration systems for paddle reactors Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positio... | 07/01/2008 |
| 7390383 | Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the ... | 06/24/2008 |
| 7390382 | Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or ... | 06/24/2008 |
| RE40218 | Electro-chemical deposition system and method of electroplating on substrates The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the invention provides uniform and void-free deposition of metal onto metal seede... | 04/08/2008 |
| 7338586 | Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus An insulated vibration-stirring apparatus comprising a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an installation piece to allow vibration linked with the vibration generatin... | 03/04/2008 |
| 7318885 | Hydrogen-oxygen gas generator and hydrogen-oxygen gas generating method using the generator A hydrogen-oxygen gas generator comprises an electrolytic bath (10A), a pair of electrodes composed of an anode member (2x) and cathode member (2y) both disposed in the bath, a power supply (34) for applying voltage between ... | 01/15/2008 |
| 7294244 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece processing station is adapted for adjusting the level of the processing... | 11/13/2007 |
| 7267749 | Workpiece processor having processing chamber with improved processing fluid flow A processing container (610) for providing a flow of a processing fluid during immersion processing of at least one surface of a microelectronic workpiece is set forth. The processing container comprises a principal fluid flow chamber (505) providing a... | 09/11/2007 |
| 7208069 | Device for etching semiconductors with a large surface area The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is ti... | 04/24/2007 |
| 7166207 | Non-mechanical method of removing material from the surface of a golf club head A highly accurate, efficient, and non-mechanical method of removing material from the surface of a golf club head using the principles of electrolysis. The process generally includes positioning at least one electrode in close proximity to a portion of a rear surfac... | 01/23/2007 |
| 7118728 | Method and apparatus for making ferrite material products and products produced thereby A method for making ferrite powder may include providing ferrite feed materials in a form of particles having different sizes and irregular shapes, and exposing the ferrite feed materials to a plasma to provide a more spherical shape to irregularly shaped particles ... | 10/10/2006 |
| 7087117 | Substrate processing apparatus and substrate processing method The present invention relates to a substrate processing apparatus useful for plating a substrate or processing a substrate by dipping a substrate in a processing liquid. A substrate processing apparatus of the present invention includes: a loading/unloading area for... | 08/08/2006 |
| 7085125 | Carbon nanotube devices and uses therefor Electrical devices which incorporate electrodes coated with carbon nanotubes. An anode is placed in conductive relationship with the coated electrode. A gas or liquid medium is placed between the electrode and anode which medium also participates in the transfer of ... | 08/01/2006 |
| 7033463 | Substrate plating method and apparatus A method and apparatus plate a substrate to form wiring by efficiently filling a fine recess formed in a semiconductor substrate with plating metal without a void or contamination. The plating of the substrate to fill a wiring recess formed in the semiconductor subs... | 04/25/2006 |
| 6991711 | Cup type plating apparatus A cup type plating apparatus in which plating is carried out by supplying plating solution to a wafer placed on an opening at a top of a plating tank while an anode and the wafer connected to a cathode provided in the plating tank are electrically connected, and the... | 01/31/2006 |
| 6955747 | Cam driven paddle assembly for a plating cell The present invention overcomes the drawbacks and limitations described above by providing a paddle assembly having a paddle that moves in a bidirectional fashion for agitating solution in a container of a plating cell. A follower is coupled to the paddle. The follo... | 10/18/2005 |
| 6942765 | Submicron and nano size particle encapsulation by electrochemical process and apparatus An apparatus and method for coating or treating powdered material, particularly ultra-fine powders in the nanometer or submicron range of mean diameters, by electrolytic processes. A platen is mounted for rotation upon a fixed shaft, and a rotary flow-through electr... | 09/13/2005 |
| 6890412 | Electrodeposition apparatus and method using magnetic assistance and rotary cathode for ferrous and magnetic particles A method and apparatus for microencapsulating or electrodeposited coating of ferromagnetic and soft-magnetic sub-micron or nano sized powderized material comprising use of a rotary flow-through device assisted by an electromagnet within the electrode ring to alterna... | 05/10/2005 |
| 6875333 | Plating apparatus for wafer A plating apparatus is provided to allow the whole area of a target plating surface of a wafer to be subjected to more uniform plating treatment and moreover enables a target plating surface of a wider area to be subjected to positive and uniform plating treatment. ... | 04/05/2005 |
| 6872288 | Apparatus for controlling flow in an electrodeposition process An electrowinning cell, having a tank with an opened upper end defined by a tank edge, electrolyte within the tank and a plurality of flat, metallic electrode plates disposed within the tank in side-by-side, spaced-apart, parallel relationship. Adjacent electrode pl... | 03/29/2005 |
| 6849172 | Electrolytic process and apparatus A method of operating a cell for electrowinning of copper, the cell including a plurality of anodes and cathodes therein, the method including the steps of introducing fresh electrolyte and sparging gas to a manifold system in the cell, controlling flow of fresh ele... | 02/01/2005 |
| 6800207 | Method and apparatus for controlling water system fouling A method and apparatus for turbulently exposing water flowing through a water system to a plurality of electrodes of an ion generator and having a self-contained tank through which water flows is provided with an inlet pipe that directs water flow between the electr... | 10/05/2004 |
| 6797135 | Electroplating apparatus The present invention relates to a method of forming a conductive layer and an electroplating device, and in particular, to a method of forming a conductive layer that provides an electrically-conductive layer having both characteristics of increased adhesiveness to... | 09/28/2004 |
| 6776886 | Method for treating colored liquid and apparatus for treating colored liquid A process for treating colored liquid comprises a step of contacting a colored liquid and functional water generated by electrolysis of a water solution of an electrolyte under light irradiation, to decolorize efficiently and stably to a low chromaticity. ... | 08/17/2004 |
| 6746590 | Ultrasonically-enhanced electroplating apparatus and methods Electroplating methods and systems employing ultrasonic energy to enhance electroplating processes. The electroplating methods involve sweeping a plating surface with ultrasonic energy having an area of maximum ultrasonic energy density while simultaneously performi... | 06/08/2004 |
| 6733653 | Electrowinning cell incorporating metal ion filtration apparatus The present invention relates to an electrowinning cell adapted to recover metal ions from a solution as their corresponding elementary metals. The electrowinning cell includes a reservoir and a filter in fluid communication with the reservoir. The filter is operati... | 05/11/2004 |
| 6689216 | Plating apparatus and plating liquid removing method A plating apparatus and a plating liquid removing method removes a plating liquid remaining on a substrate-contacting portion, or portions in its vicinity, of a substrate holding member. The plating apparatus comprises a head having a rotatable housing pr... | 02/10/2004 |
| 6613202 | Tank batch electrochemical water treatment process A water treatment tank for treating waste water using an electrochemical treatment process. The electrochemical process removes both suspended and dissolved solids in the water and allows the treated water to be removed from the tank for reuse or discharg... | 09/02/2003 |
| 6610189 | Method and associated apparatus to mechanically enhance the deposition of a metal film within a feature A method and associated apparatus of electroplating an object and filling small features. The method comprises immersing the plating surface into an electrolyte solution and mechanically enhancing the concentration of metal ions in the electrolyte solutio... | 08/26/2003 |
| 6562217 | Method and device for manufacturing conductive particles A method for making conductive particles that efficiently permit a plated layer of uniform thickness to be formed over each of the particles without aggregating the particles in a plating liquid. The apparatus comprises: a disk-shaped bottom plate secured... | 05/13/2003 |
| 6547945 | Method and apparatuses for electrochemically treating an article An electrochemical cell for use in electrochemical processes, such as plating processes, has a first electrode which extends circumferentially about at least a portion of an electrode chamber. The article being treated is the second electrode and is dispo... | 04/15/2003 |
| 6547936 | Electroplating apparatus having a non-dissolvable anode An apparatus for electroplating and deplating an object out of a plating solution is disclosed. The apparatus includes a plating tank adapted to support the object and to contain a plating solution so that the object is at least partially disposed into th... | 04/15/2003 |
| 6540888 | Mineral ionizing device A mineral ionizing device (10) consisting of a container (20) filled with water and containing a solid-mineral, cylindrical first electrode (50), a second electrode (58) coaxially located within the first electrode (50), a vibration unit (100) which produ... | 04/01/2003 |
| 6482300 | Cup shaped plating apparatus with a disc shaped stirring device having an opening in the center thereof This invention provides a technique capable of solving a problem of an ununiform plating on an annular edge portion of a surface to be plated of a wafer, which ununiform plating is usually caused due to an ununiform flow of a plating apparatus, thereby en... | 11/19/2002 |
